Abstract: A method and a device for tracking eye movements that ensure a reliable tracking of eye movements with simple operation. To this end, irradiation ensues through the pupil from outside the eye. Light emitted from the pupil is used to determine the position of the eye.

Abstract: A diaphragm device with which individual wavelengths or ranges of wavelengths in the path of a beam of spectrally dispersed light can be suppressed. Such a diaphragm device comprises at least one array of diaphragms, wherein the individual diaphragms of the array are arranged in a definite relation to each other and may be coupled in the path of the beam and each diaphragm of the array in the coupled state is arranged in a given relation to an individual wavelength or a range of wavelengths.

Abstract: A tube attachment for microscopes which facilitates visual microscope work particularly over extended periods and which can be used universally for different types of microscopes and, at the same time, can be produced economically using simple manufacturing techniques, it is suggested that a tube attachment is constructed as a holder which can be adjusted with respect to height and, optionally, with respect to angle and can be fastened directly to a binocular tube of a microscope. The holder includes two carriers which are displaceable axially relative to one another and which have a forehead rest and a chin support or one carrier with the forehead rest for a user, and devices are provided at the carriers for clamping the adjusting movements of the carriers.

Abstract: An optical system for arranging between a light source and a field diaphragm in an illumination beam path of a microscope comprises n imaging optical elements with focal lengths fi and Abbe numbers ?i (i=1, . . . , n). The following relationship is met for the optical system: ? i = 1 n ? h i f i · v i ? 0.07 , where hi is one half of the bundle diameter of a bundle of light rays proceeding from a point of the light source at the entrance to the imaging optical element i.

Abstract: There is provided a method for determining residual errors, compromising the following steps: in a first step, a test plate comprising a first pattern is used, and in a second step, a test plate comprising a second pattern which is reflected and/or rotated with respect to the first step is used.

Abstract: In a method for controlling an operation of a coordinate measuring device, at least one operational parameter is determined. One value of the operational parameter is allocated to a plurality of components. A sequence for determining the operational parameter is provided for the majority of the components. The method for determining the operational parameter in the predetermined sequence for each component is now described. It starts with the component that is first in the sequence: i) if the value of the operational parameter is allocated to the component, the value is adopted as a value of the operational parameter that is available for the operation, ii) if no value of the operational parameter is allocated to the components, one available value of the operational parameter that was available until then still remains available, iii) if another component is provided in the sequence, the method is carried out with the component.

Abstract: The disclosure provides projection objectives which may be used in a microlithographic projection exposure apparatus to expose a radiation-sensitive substrate arranged in the region of an image surface of the projection objective with at least one image of a pattern of a mask arranged in the region of an object surface of the projection objective. The disclosure also provides projection exposure apparatus which include such projection objectives, as well as related components and methods.

Abstract: Method and arrangement for changing the spectral composition and/or intensity of illumination light and/or specimen light in an adjustable manner, wherein a spatial separation into radiation components of different polarization is carried out with a first polarizing device, a spectral, spatial splitting of at least one radiation component is carried out with first dispersion device, the polarization state of at least one part of the spectrally spatially split radiation component is changed, and a spatial separation and/or combination of radiation components of different polarization are/is carried out by a second polarizing device, wherein a spatial combination of radiation components which are changed and not changed with respect to their polarization state is advantageously carried out by a second dispersion device.

Abstract: This invention relates to a method and a device for the complete correction of sight defects in the human eye. Combinations of measuring, and processing methods are described which when applied as disclosed in the invention, make it possible to fully correct sight defects in the human eye. Measuring methods are used which can precisely scan the surface of the cornea and also register other imaging defects in the light path up to the retina. Computer-aided of said measuring results determined when combined with calculation of ideally corrected ocular lenses (for example after cataract operations) or ideally corrected surfaces of the cornea opens up the possibility of manufacturing a patient-specific lens and/or achieving ideal correction of the cornea using preferably a topography-supported spot-scanning-excimer laser system.

Abstract: A device for determining a measureable variable on a measurement object has a baseplate mounted on a plurality of machine feet. A measuring head is arranged on a frame structure. The frame structure can be moved on the baseplate. A workpiece table can be placed over the baseplate in order to support the measurement object. The machine feet may project upward from the baseplate in order to hold the workpiece table with a reduced deformation of the baseplate regardless of the workpiece weight.

Abstract: The present high positioning reproducible mirror-actuator interface disclosed herein overcomes the deficiencies associated with conventional interface systems and offer a number of advantages that are disclosed herein. Generally, the mirror mounts provide a reliable and robust interface between the mirrors and actuators, that serve to move and position the mirrors, as wells as providing an interface between the mirrors and gravity compensator pins. The mirror mount is characterized as having a body that has an outer peripheral wall that includes a plurality of flexible elements around the perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane. The body is open at the first end to allow flexing of the flexible elements. The flexible elements providing a direct coupling interface between the mirror mount and the mirror.

Abstract: A surgical microscope (100) for ophthalmology includes a measuring unit (110) for determining at least one characteristic value of a patient eye (104). The measuring unit (110) is connected to a computer unit (120) which calculates a model of the patient eye (104) based on the determined characteristic variables. The surgical microscope also includes a display device for displaying the calculated model of the patient eye (104) or characteristic variables that are derived from the calculated model.

Abstract: A lighting device (40) is described for an observation device (10), in particular for an ophthalmologic operating microscope, as well as such an observation device (10). The lighting device (40) has a light source (41) as well as a number of optical components, which are provided between light source (41) and an objective element (11). The optical components are designed according to the invention in such a way that the imaging of the lighting pupil (43) and the observation pupils is produced on the fundus of the eye (30). In this way, an exactly defined interaction of the lighting beam path (56) with an observation beam path is made possible, whereby practical requirements can be fulfilled relative to the homogeneity of the red reflex with simultaneous sufficiently good contrasting.

Abstract: A catadioptric projection objective for projecting a pattern arranged in the object plane of the projection objective into the image plane of the projection objective, having: a first objective part for projecting an object field lying in the object plane into a first real intermediate image; a second objective part for generating a second real intermediate image with the radiation coming from the first objective part; a third objective part for generating a third real intermediate image with the radiation coming from the second objective part; and a fourth objective part for projecting the third real intermediate image into the image plane.

Abstract: The present invention is directed to an ophthalmologic measurement method which can depict three-dimensional structures of the interfaces of an eye by short-coherence interferometry based on reference points. For this purpose, the pupil is illuminated at a plurality of points by a short-coherence illumination source. The measurement beam reflected at these points by the interfaces and surfaces of the eye is superimposed with a reference beam. The measurement data which are generated in this way are spectrally split by a diffraction grating, imaged on a two-dimensional detector array and conveyed to a control unit which determines a three-dimensional structure of all intraocular interfaces and surfaces of the eye. In the suggested Fourier domain OCT method, the depiction of three-dimensional structures is preferably carried out by spline surfaces or polygon surfaces.

Abstract: The invention features a system for microlithography that includes a mercury light source configured to emit radiation at multiple mercury emission lines, a projection objective positioned to receive radiation emitted by the mercury light source, and a stage configured to position a wafer relative to the projection objective. During operation, the projection objective directs radiation from the light source to the wafer, where the radiation at the wafer includes energy from more than one of the emission lines. Optical lens systems for use in said projection objective comprise four lens groups, each having two lenses comprising silica, the first and second lens groups on one hand and the third and fourth lens groups on the other hand are positioned symmetrically with respect to a plane perpendicular to the optical axis of said lens system.

Abstract: Apparatus for focusing a charged particle beam onto a surface, including a charged particle beam generator which is adapted to project the charged particle beam onto a location on the surface, thereby causing charges to be emitted from the location. The apparatus further includes an imaging detector which is adapted to receive the charges so as to form an image of the location, and an aberrating element which is positioned before the imaging detector and which is adapted to produce an aberration in the image. A processor is adapted to receive the image and to adjust at least one of the charged particle beam generator and a position of the surface in response to the aberration.

Abstract: Two problems arise when measuring length at the eye by short-coherence interferometry. First, the measurement focus and coherence window usually do not coincide. Second, the scanning process along the eye axis is time-consumin g. Both result in poor signal quality and inaccurate measurements. The present application is directed to a short-coherence interferometer in which a right-angle mirror and focusing optics jointly carry out a periodic back-and-forth movement in such a way that the measurement beam focus which is generated by the focusing optics and imaged on the eye by relay optics is moved synchronously with the coherence window from the cornea along the optic axis of the eye to the fovea centralis. Further, different path lengths are generated in the measurement beam path and reference beam path by means of a plurality of reflectors, so that the scanning process is limited to distances which are smaller than the optical length of the eye.

Abstract: A projection objective of a projection exposure apparatus for microlithography serves for imaging an object arranged in an object plane onto a light-sensitive wafer in an image plane. The projection objective has a plurality of optical elements which have at least one reflective element and at least one refractive element. The plurality of optical elements lie, in the light propagation direction of the useful light, downstream of the reflective element on a common straight optical axis. The at least one reflective element has a substrate having at least one opening through which light beams can pass. The at least one reflective element is at least partly made from a material which suppresses stray light impinging on the reflective element rearward.

Abstract: A planning device generating control data for a treatment apparatus for cornea transplantation using a laser device to separate a corneal volume by at least one cut surface in the cornea and to separate a transplant, from a surrounding transplantation material by at least one cut surface wherein the planning device includes an interface supplying measurement data relating to parameters of the cornea. A computer defines a corneal cut surface which confines the corneal volume to be removed, and determines a transplant cut surface by using the transplantation material data and depending on the defined corneal cut surface. The transplant cut surface confines the transplant, and the computer generates one control data for each cut surface to control the laser, wherein the respective cut surfaces can be produced by the laser to isolate the corneal volume and the transplant and to make them removable.