Patents Assigned to Carl Zeiss
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Patent number: 11947265Abstract: An optical diffraction component has a periodic grating structure profile. The diffraction structure levels are arranged so that a wavelength range around two different target wavelengths diffracted by the grating structure profile has radiation components with three different phases that interfere destructively with one another. Diffraction structure levels predefine a topography of a grating period of the grating structure profile that is repeated regularly along a period running direction. These include a neutral diffraction structure level, a positive diffraction structure level raised relative thereto, and a negative diffraction structure level lowered relative thereto. The neutral diffraction structure level has an extent along the period running direction which is less than 50% of the extent of the grating period. A difference between the two target wavelengths is less than 50%.Type: GrantFiled: February 17, 2022Date of Patent: April 2, 2024Assignee: Carl Zeiss SMT GmbHInventor: Heiko Feldmann
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Patent number: 11947185Abstract: The invention relates to an autofocusing method for an imaging device (for semiconductor lithography) comprising an imaging optical unit, an object to be measured and an autofocusing device having a reflective illumination, comprising the following method steps: a) defining at least three basis measurement points M(xj, yj) on a surface of the object, b) determining the deviation Az(M)j of a nominal position of the surface of the object from the focal plane of the autofocusing device at the defined basis measurement points M(xj, yj), c) storing the deviations Az(M)j from at least three basis measurement points M(xj, yj), d) using the stored deviation Az(M)j for determining a deviation Az(P)k at an arbitrary point P(xk, Yk) of the surface, and e) using the deviation Az(P)k for focusing onto the point P(xk, Yk).Type: GrantFiled: November 8, 2021Date of Patent: April 2, 2024Assignee: Carl Zeiss SMT GmbHInventor: Dirk Seidel
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Patent number: 11940609Abstract: The present invention concerns an image conversion module (09) that comprises an optical interface (10) for establishing an optical path (07). The image conversion module (09) further comprises a beam splitting element (13) on the optical path (07). The beam splitting element (13) is configured for splitting a beam entering the optical interface (10, 11) on the optical path (07) into a first optical subpath (14) and a second optical subpath (16). The image conversion module (09) further comprises a microelectromechanical optical system (17) that is configured for enhancing a depth of field on the first optical subpath (14) that is directed to a first optoelectronic submodule (21). The image conversion module (09) further comprises a second optoelectronic submodule (24) having an electronic sensor (26) on the second optical subpath (16). The second optoelectronic submodule (24) is configured for acquiring additional data on the sample (02).Type: GrantFiled: October 30, 2020Date of Patent: March 26, 2024Assignees: CARL ZEISS MICROSCOPY GMBH, SD OPTICS, INC., STEREO DISPLAY, INCInventors: Alexander Gaiduk, Jin Young Sohn, Gyoungil Cho, Cheong Soo Seo
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Patent number: 11937986Abstract: A method for acquiring annotated data with the aid of surgical microscopy systems comprises obtaining desired criteria which are intended to be satisfied by desired data to be annotated, and storing the set of desired criteria in a plurality of surgical microscopy systems. In each surgical microscopy system, images are then recorded and current criteria which correspond to the recorded images are determined. The current criteria are compared with the desired criteria. If the desired criteria sufficiently correspond to the current criteria, a confirmation is requested from a user as to whether said user would like to annotate data. If the user provides the confirmation, annotations for images are received from the user and stored together with the images.Type: GrantFiled: April 27, 2021Date of Patent: March 26, 2024Assignee: Carl Zeiss Meditec AGInventor: Stefan Saur
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Patent number: 11938696Abstract: A method for manufacturing a coated lens by applying at least one single electromagnetic pulse to convert a coating precursor material into at least one coating. The electromagnetic pulse is delivered to the coating precursor material applied on a surface of an uncoated or precoated optical lens substrate. The at least one single electromagnetic pulse is applied from an electromagnetic source such as a flash lamp, a halogen lamp, a directed plasma arc, a laser, a microwave generator, an induction heater, an electron beam, a stroboscope, or a mercury lamp.Type: GrantFiled: December 22, 2022Date of Patent: March 26, 2024Assignee: Carl Zeiss Vision International GmbHInventors: Waiz Karim, Andreu Llobera Adan, Emad Flear Aziz, Norbert Hugenberg
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Patent number: 11940270Abstract: A coordinate measuring machine for measuring coordinates or properties of a workpiece includes an extended stylus. The extended stylus includes an extension element and a connection element. The extension element includes a carrier portion mounted at the connection element so as to be rotatable about an axis of rotation. The extension element includes, on a side remote from the connection element, a shaft portion that is aligned so as to deviate from the axis of rotation. The coordinate measuring machine includes a measurement head to which the extended stylus is attached. The measurement head is configured to measure deflections of the stylus resulting from contacts of the extended stylus to the workpiece.Type: GrantFiled: March 23, 2021Date of Patent: March 26, 2024Assignee: Carl Zeiss Industrielle Messtechnik GmbHInventors: Otto Ruck, David Höcherl
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Patent number: 11940378Abstract: A spectrometer system comprises a housing provided with a window, an illumination source, a spectrometer and a standard for internal recalibration being disposed in said housing. Specific absorption bands of a filling gas present in the housing are identified in a reference spectrum, which was recorded using the standard, wherein a wavelength characterizing the relevant identified specific absorption band is measured in each case such that measured values are obtained for the wavelengths of the absorption bands. A test spectrum is recorded by the spectrometer using the standard. The specific absorption bands of the filling gas are identified in the test spectrum, wherein a wavelength characterizing the relevant identified specific absorption band is measured in each case such that measured values are obtained for the wavelengths of the specific absorption bands.Type: GrantFiled: December 18, 2019Date of Patent: March 26, 2024Assignee: CARL ZEISS SPECTROSCOPY GMBHInventors: Felix Kerstan, Juergen Gobel
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Patent number: 11940596Abstract: A spectacle lens has on at least one surface thereof at least two coatings modified to exhibit an antibacterial effect and/or an antiviral effect. A method of making such a spectacle lens includes dispersing at least one biocidal component in a solvent and/or dissolving at least one biocidal component in a solvent, the dispersed at least one biocidal component and the dissolved at least one biocidal component being different from each other.Type: GrantFiled: January 23, 2023Date of Patent: March 26, 2024Assignees: Carl Zeiss Vision International GmbH, Carl Zeiss Vision (China) Ltd.Inventors: Emad Flear Aziz, Liu Ouyang, Marc Wawerla, Haiming You
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Publication number: 20240095876Abstract: A system/method/device for registering two OCT data sets defines multiple image pairs of corresponding 2D representations of one or more corresponding sub-volumes in the two OCT data sets. Matching landmarks in the multiple image pairs are identified, as a group, and a set of transformation parameters are defined based on matching landmarks from all of the image pairs. The two OCT data sets may then be registered based on the set of transformation parameters.Type: ApplicationFiled: December 1, 2021Publication date: March 21, 2024Applicants: Carl Zeiss Meditec, Inc., Carl Zeiss Meditec AGInventor: Homayoun Bagherinia
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Publication number: 20240094519Abstract: An immersion liquid, especially for microscopy, contains one or more acetals of tricyclodecane alcohols as its main constituent, wherein a tricyclodecane alcohol is a compound of which the structure has the base skeleton of tricyclo[5.2.1.02,6]decane and at least one OH group, and wherein all OH groups of the tricyclodecane alcohol have been acetalized in the acetal. Also described are 3(4),8(9)-bis(tetrahydropyran-2-yloxymethyl)tricyclo[5.2.1.02,6]decane or 8-tetrahydropyran-2-yloxymethyltricyclo[5.2.1.02,6]decane and the preparation thereof, and the use of acetals of tricyclodecane alcohols as the main constituent of an immersion liquid. A process for preparing an acetal of a tricyclodecane alcohol involves reacting a tricyclodecane alcohol with an acetalizing agent in the presence of an acid.Type: ApplicationFiled: August 28, 2023Publication date: March 21, 2024Applicant: Carl Zeiss Jena GmbHInventors: Matthias KRIEG, Jakob Benedikt Jäger
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Patent number: 11935228Abstract: A method for acquiring a 3D image of a sample structure includes acquiring a first raw 2D set of 2D images of a sample structure at a limited number of raw sample planes; calculating a 3D image of the sample structure represented by a 3D volumetric image data set; and extracting a measurement parameter from the 3D volumetric image data set. A further number of interleaving 2D image acquisitions are recorded at a further number of interleaved sample planes which do not coincide with previous acquisition sample planes. The steps “calculating,” “extracting” and “assigning” are repeated for the further interleaving 2D set until convergence or a maximum number of 2D image acquisitions is recorded. A projection system used for such method comprises a projection light source, a rotatable sample structure holder and a spatially resolving detector. Such method can also be used to acquire virtual tomographic images of a sample.Type: GrantFiled: October 26, 2021Date of Patent: March 19, 2024Assignees: Carl Zeiss SMT GmbH, Carl Zeiss X-ray Microscopy Inc.Inventors: Ramani Pichumani, Christoph Hilmar Graf vom Hagen, Jens Timo Neumann, Johannes Ruoff, Thomas Matthew Gregorich
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Patent number: 11933956Abstract: An illumination apparatus for illuminating a sample plane and a sample that is optionally arranged therein along an illumination beam path includes: a first light source (for outputting light of at least one first wavelength (?photo), a second light source for outputting light of at least one second wavelength (?exc), and a diffraction grating in the illumination beam path between the first and second light sources and the sample plane. Light of the first wavelength (?photo) is not diffracted by the diffraction grating, and light of the second wavelength (?exc) is diffracted due to the effect of the diffraction grating. The illumination apparatus can be used in a microscope.Type: GrantFiled: December 3, 2020Date of Patent: March 19, 2024Assignee: CARL ZEISS MICROSCOPY GMBHInventors: Jörg Siebenmorgen, Ralf Netz
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Patent number: 11933597Abstract: A system for optical measurement of an object includes a radiation generating device, a capturing device, and an evaluation device. The radiation generating device is configured to emit electromagnetic radiation onto the object. The capturing device includes an image sensor. The capturing device is configured to capture a measurement image as a result of an exposure of the image sensor with radiation returned from the object. The capturing device is configured to vary a focus setting (D) during the exposure. The evaluation device is configured to determine coordinates of at least one location on the object based on the captured measurement image.Type: GrantFiled: January 29, 2021Date of Patent: March 19, 2024Assignee: Carl Zeiss Industrielle Messtechnik GmbHInventor: Aksel Goehnermeier
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Patent number: 11935721Abstract: A system includes a multi-beam particle microscope for imaging a 3D sample layer by layer, and a computer system with a multi-tier architecture is disclosed. The multi-tier architecture can allow for an optimized image processing by gradually reducing the amount of parallel processing speed when data exchange between different processing systems and/or of data originating from different detection channels takes place. A method images a 3D sample layer by layer. A computer program product includes a program code for carrying out the method.Type: GrantFiled: July 13, 2021Date of Patent: March 19, 2024Assignee: Carl Zeiss MultiSEM GmbHInventors: Dirk Zeidler, Nico Kaemmer, Christian Crueger
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Patent number: 11935723Abstract: A method prepares a microsample from a volume sample using multiple particle beams. The method includes providing a volume sample in the microscope system, wherein the interior of the volume sample has a sample region of interest, and producing a macrolamella comprising the sample region of interest by removing sample material of the volume sample using one of the particle beams. The method also includes orienting the macrolamella relative to one of the particle beams, and removing sample material of the macrolamella via a beam so that the region of interest is exposed.Type: GrantFiled: November 9, 2021Date of Patent: March 19, 2024Assignee: Carl Zeiss Microscopy GmbHInventors: Fabian Perez Willard, Tobias Volkenandt
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Publication number: 20240086364Abstract: The application relates to a computer-implemented method for providing data to a client. The method comprises monitoring read access operations on a file by the client. The file is provided as a network data stream by a network node. The client is configured to receive files only via a searchable file-based data stream. The method further comprises transmitting a network data stream containing the file to the client, the network data stream not being searchable, and translating the network data stream into a searchable file-based data stream on the basis of the read access operations.Type: ApplicationFiled: August 25, 2023Publication date: March 14, 2024Applicant: Carl Zeiss Microscopy GmbHInventor: Christian Andritzky
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Publication number: 20240081638Abstract: An OCT system is constructed on a micro optical bench or semiconductor optical bench. The present OCT system may use free space optics and avoid the use of fiber optics.Type: ApplicationFiled: January 31, 2022Publication date: March 14, 2024Applicants: Carl Zeiss Meditec, Inc., Carl Zeiss Meditec AGInventors: Matt Everett, Tilman Schmoll
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Patent number: 11928851Abstract: A method for determining the reflectance behavior of a surface of an object includes: providing a plurality of images of the object which differ in terms of a recording direction and/or in terms of an illumination direction during the recording; creating data sets with entries which each describe a reflectance value derived from the images and an assigned recording direction and an assigned illumination direction, with each data set being assigned to a point on the surface of the object; and determining missing entries in the data sets on the basis of entries of already created data sets.Type: GrantFiled: August 8, 2023Date of Patent: March 12, 2024Assignee: Carl Zeiss Vision International GmbHInventor: Tobias Noell
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Patent number: 11927500Abstract: Methods for characterizing the surface shapes of optical elements include the following steps: carrying out, in an interferometric test arrangement, at least a first interferogram measurement on the optical element by superimposing a test wave, which has been generated by diffraction of electromagnetic radiation on a diffractive element and has been reflected at the optical element, carrying out at least one additional interferogram measurement on in each case one calibrating mirror for determining calibration corrections, and determining the deviation from the target shape of the optical element based on the first interferogram measurement carried out on the optical element and the determined calibration corrections. At least two interferogram measurements are carried out for the at least one calibrating mirror, which differ from one another with regard to the polarization state of the electromagnetic radiation.Type: GrantFiled: April 14, 2022Date of Patent: March 12, 2024Assignee: CARL ZEISS SMT GMBHInventors: Steffen Siegler, Johannes Ruoff, Alexander Wolf, Michael Carl, Toralf Gruner, Thomas Schicketanz
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Patent number: 11926557Abstract: A method for manufacturing a spectacle lens having a lens substrate and at least one coating is disclosed. The method includes providing a lens substrate having an uncoated or precoated front surface and an uncoated or precoated back surface, applying at least one coating to at least one of the surfaces of the lens substrate, the surface of the at least one coating being modifiable when contacted with at least one medium able to modify the surface of the at least one coating, contacting the surface of the at least one coating, partially or completely, with the at least one medium, considering the individual peripheral refraction, obtaining the spectacle lens having the lens substrate and the at least one coating, the surface of the at least one coating being modified according to the individual peripheral refraction.Type: GrantFiled: April 21, 2023Date of Patent: March 12, 2024Assignee: Carl Zeiss Vision International GmbHInventors: Michel-René Christmann, Andreu Llobera Adan, Gerhard Kelch