Patents Assigned to Dainippon Screen Mfg. Co., Ltd.
  • Publication number: 20150255315
    Abstract: A rinsing liquid adheres to a substrate subjected to a cleaning process. The rinsing liquid on the substrate is first replaced with IPA liquid. While the substrate covered with the IPA liquid is held in a dryer chamber, liquid carbon dioxide is supplied to the surface of the substrate. Liquid nitrogen is supplied to cool down the interior of the dryer chamber. This solidifies the liquid carbon dioxide on the substrate into solid carbon dioxide. Thereafter, the pressure in the dryer chamber is returned to atmospheric pressure, and gaseous nitrogen is supplied into the dryer chamber. Thus, the temperature in the dryer chamber increases. The solid carbon dioxide on the surface of the substrate is sublimated, and is hence removed from the substrate. All of the steps are performed while carbon dioxide is not in a supercritical state but in a non-supercritical state.
    Type: Application
    Filed: May 20, 2015
    Publication date: September 10, 2015
    Applicant: DAINIPPON SCREEN MFG. CO., LTD.
    Inventors: Katsuhiko MIYA, Hiroaki KITAGAWA
  • Publication number: 20150174924
    Abstract: In an inkjet printing apparatus, heaters are enclosed with a heater casing, achieving accumulation of heated air and efficient performance of heating. A blowing fan blows air to the heaters. The heater casing includes a blowing port configured to narrow and blow warm air heated with the heaters to a transportation path outside the heater casing in a direction along the transportation path. The warm air narrowed at the blowing port obtains an increased air velocity thereof. In addition, uniform air-quantity distribution and uniform heat-quantity are obtainable. Moreover, the heaters face the transportation path. Consequently, the heaters are provided closer to the transportation path than a conventional external heater. This suppresses heat loss.
    Type: Application
    Filed: January 18, 2013
    Publication date: June 25, 2015
    Applicant: DAINIPPON SCREEN MFG. CO., LTD.
    Inventors: Hiroyuki Fuchioka, Takeshi Katayama, Akira Taiji, Mitsuru Tanemoto
  • Patent number: 9007651
    Abstract: In the generation of a threshold matrix for Nx speed writing, first and second areas are set, the first area being a cluster of a plurality of first partial areas substantially evenly distributed in a matrix space, and the second area being an area of the matrix space excluding the first area. Next, at least two writing elements in each of the first partial areas are allocated occurrence numbers and changed into determined elements. Then, at least one writing element in the second area is allocated an occurrence number and changed into a determined element. Thereafter, the other writing elements are allocated occurrence numbers and changed into determined elements. In accordance with the occurrence numbers, the threshold value of each writing element is determined to obtain a threshold matrix for Nx speed writing. This results in a reduction in the graininess of an image in a highlight area.
    Type: Grant
    Filed: June 24, 2014
    Date of Patent: April 14, 2015
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Hiroshi Asai, Ikuhiko Takahama
  • Publication number: 20150091963
    Abstract: A printing apparatus performing printing to a print medium includes a printer having at least two line heads with a plurality of recording modules; a scanner configured to scan an image printed with the printer to obtain a scanned image; a correcting-chart printing unit configured to print first and second correcting charts in first and second line head printing areas, respectively; a scanned image collecting unit configured to collect first and second scanned images; a correction-data calculating device configured to calculate correction data by determining a reference head difference from the first scanned image, determining an individual head difference from the second scanned image, summing up the reference head difference and the individual head difference to obtain a total, the reference head difference and the total being regarded as the correction data for the first and second line heads, respectively; and an adjusting device configured to adjust a timing
    Type: Application
    Filed: May 21, 2014
    Publication date: April 2, 2015
    Applicant: DAINIPPON SCREEN MFG. CO., LTD.
    Inventors: Kazuki YAMANAKA, Seiya NOMURA
  • Patent number: 8992746
    Abstract: An apparatus for anodizing substrates immersed in an electrolyte solution. A substrate holder mounted in a storage tank includes a first support unit having first support elements for supporting, in a liquid-tight condition, only lower circumferential portions of the substrates, and a second support unit attachable to and detachable from the first support unit and having second support elements for supporting, in a liquid-tight condition, remaining circumferential portions of the substrates. A drive mechanism separates the first support unit and the second support unit when loading and unloading the substrates, and for connecting the first support unit and the second support unit after the substrates are placed in the substrate holder.
    Type: Grant
    Filed: December 2, 2011
    Date of Patent: March 31, 2015
    Assignees: Dainippon Screen Mfg. Co., Ltd., Solexel, Inc.
    Inventors: Yasuyoshi Miyaji, Noriyuki Hayashi, Takamitsu Inahara, Takao Yonehara, Karl-Josef Kramer, Subramanian Tamilmani
  • Publication number: 20150086102
    Abstract: A culture quality evaluation method comprises: a first step of culturing a pluripotent stem cell under a predetermined culture condition and creating a sample; a second step of imaging a proliferated cell colony in the sample and accordingly capturing an original image; a third step of dividing the original image into smaller images of a predetermined size and calculating standard deviations of pixel values of pixels of the smaller images; and a fourth step of judging whether the sample is an acceptable sample based upon a ratio of a number of the smaller images whose values of the standard deviations are within a predetermined range to a total number of the smaller images.
    Type: Application
    Filed: May 13, 2014
    Publication date: March 26, 2015
    Applicant: DAINIPPON SCREEN MFG. CO., LTD.
    Inventors: Hiroki FUJIMOTO, Sanzo MORIWAKI
  • Patent number: 8987123
    Abstract: After the completion of the transport of a semiconductor wafer into a chamber, the flow rate of nitrogen gas supplied into the chamber is decreased. In this state, a preheating treatment and flash irradiation are performed. The flow rate of nitrogen gas supplied into the chamber is increased when the temperature of the front surface of the semiconductor wafer is decreased to become equal to the temperature of the back surface thereof after reaching its maximum temperature by the irradiation of the substrate with a flash of light. Thereafter, the supply flow rate of nitrogen gas is maintained at a constant value until the semiconductor wafer is transported out of the chamber. This achieves the reduction in particles deposited on the semiconductor wafer while suppressing adverse effects resulting from the nonuniform in-plane temperature distribution of the semiconductor wafer.
    Type: Grant
    Filed: March 8, 2013
    Date of Patent: March 24, 2015
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Takahiro Yamada, Kenichi Yokouchi
  • Patent number: 8974022
    Abstract: In an inkjet printer, an ejecting part for K color is previously selected as an ejecting part for outputting three values used for formation of a large dot, formation of a medium dot, and non-ejection (step S12). In the course of image recording (steps S13, S14, and S15), three values are output regarding K color, and four values used for formation of a large dot, formation of a medium dot, formation of a small dot, and non-ejection are output regarding C, M, and Y colors. Thus, even if the quality of a dot in K color is reduced at the time of outputting four values, a high-quality dot can be formed regarding K color, so that the quality of a recorded image can be improved in a case where line drawing or a character or the like is recorded.
    Type: Grant
    Filed: September 15, 2012
    Date of Patent: March 10, 2015
    Assignees: Dainippon Screen Mfg. Co., Ltd., Seiko Epson Corporation
    Inventor: Kiyoomi Mitsuki
  • Patent number: 8974019
    Abstract: A liquid supply apparatus includes a reservoir for storing a liquid therein, a supply path for supplying the liquid from the reservoir to a liquid consuming apparatus, a pump for feeding the liquid from the reservoir to the supply path, and a controller for outputting a driving signal to the pump to control the supply of the liquid. The controller acquires a target feed volume of the liquid from the pump to gradually change a feed volume of the liquid from the pump from a current feed volume to the target feed volume, based on a request signal from the liquid consuming apparatus serving as a destination to which the liquid is supplied. This suppresses an abrupt change in pressure in the liquid consuming apparatus serving as the destination to which the liquid is supplied.
    Type: Grant
    Filed: March 24, 2014
    Date of Patent: March 10, 2015
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Takashi Sakamoto, Satoshi Yasuda, Masahiko Kakuda, Takanori Tsuji
  • Patent number: 8970907
    Abstract: When a differential page image is created by comparing a target inspection page image and an inspection page image, differential page image attribute information which is an inspection result is created by acquiring attribute information of an image region of the target inspection page image and an image region of the inspection page image corresponding to the differential page image, from target inspection page image data and inspection page image data.
    Type: Grant
    Filed: May 13, 2014
    Date of Patent: March 3, 2015
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Hiroyuki Segawa, Koji Matsuo
  • Patent number: 8967770
    Abstract: In a head (21) of an inkjet printer, a plurality of outlet rows are arranged in a scanning direction, the plurality of outlet rows each having a plurality of outlets arranged in a direction intersecting the scanning direction. The plurality of outlets are each capable of forming dots of a plurality of sizes on printing paper upon receiving different driving signals from an ejection control part (44). In the inkjet printer, under control of the ejection control part (44), some of the outlet rows form dots of only one size out of the plurality of sizes, and the other outlet rows form dots of only another size. In this way, causing the plurality of outlets in each outlet row to form dots of only one size makes it possible to reduce the occurrence of satellite droplets or the like and improve print quality.
    Type: Grant
    Filed: September 15, 2012
    Date of Patent: March 3, 2015
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventor: Masayuki Nakano
  • Patent number: 8963050
    Abstract: A semiconductor wafer having a surface with a thin film formed thereon is transported into a chamber and held by a holder. After an atmosphere provided in the chamber is replaced, flashes of light are directed from flash lamps in a light irradiation part toward the semiconductor wafer to perform a baking process on the thin film. The irradiation of the semiconductor wafer with light from halogen lamps in the light irradiation part also starts at the same time as the irradiation thereof with the flashes of light. The flashes of light emitted for an extremely short period of time and having a high intensity allow the surface temperature of the thin film to rise momentarily. This prevents the occurrence of abnormal grain growth resulting from prolonged baking in the film.
    Type: Grant
    Filed: October 13, 2011
    Date of Patent: February 24, 2015
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Shinichi Kato, Hiroki Kiyama
  • Publication number: 20150029256
    Abstract: Provided is an inkjet printing apparatus configured to perform printing by discharging ink droplets onto a print medium. The apparatus includes a printing head having a plurality of inkjet heads and configured to perform printing by discharging the ink droplets from the plurality of inkjet heads onto the print medium; a chart printing device configured to print a step-shift correcting chart with the printing head; a reading device configured to read the step-shift correcting chart printed on the print medium; a print medium-processed portion detecting device configured to detect a processed portion of the print medium; an uninfluenced step-shift correcting-chart generating device configured to generate an uninfluenced step-shift correcting chart; and a shift-amount calculating device configured to calculate a shift amount for correcting the step shift in accordance with the uninfluenced step-shift correcting chart.
    Type: Application
    Filed: May 21, 2014
    Publication date: January 29, 2015
    Applicant: DAINIPPON SCREEN MFG. CO., LTD.
    Inventors: Kazuki YAMANAKA, Seiya NOMURA
  • Patent number: 8941824
    Abstract: A semiconductor inspection apparatus (100) is an apparatus for inspecting a semiconductor device. The semiconductor inspection apparatus (100) includes a pulsed laser light source (14) for emitting pulsed laser light (2) toward a substrate (1) with a semiconductor device formed thereon, an electromagnetic wave pulse application part (18) for applying a reverses-biasing electromagnetic wave pulse (4) for applying a reverse bias to an application position (10) which receives the pulsed laser light (2), and a detection part (17) for detecting an electromagnetic wave pulse (3) emitted from the application position (10) in response to the application of the pulsed laser light (2).
    Type: Grant
    Filed: September 15, 2012
    Date of Patent: January 27, 2015
    Assignees: Dainippon Screen Mfg. Co., Ltd., Osaka University
    Inventors: Hidetoshi Nakanishi, Masayoshi Tonouchi
  • Patent number: 8920522
    Abstract: A negative-electrode active material layer having an uneven pattern is formed on a surface of a copper foil as a negative-electrode current collector by applying an application liquid by a nozzle-scan coating method. Subsequently, an application liquid containing a polymer electrolyte material is applied by a spin coating method, thereby forming a solid electrolyte layer in conformity with the uneven pattern. Subsequently, an application liquid is applied by a doctor blade method, thereby forming a positive-electrode active material layer whose lower surface conforms to the unevenness and whose upper surface is substantially flat. A thin and high-performance all-solid-state battery can be produced by laminating an aluminum foil as a positive-electrode current collector before the application liquid is cured.
    Type: Grant
    Filed: September 22, 2010
    Date of Patent: December 30, 2014
    Assignee: Dainippon Screen MFG. Co., Ltd.
    Inventors: Takeshi Matsuda, Masakazu Sanada, Kenta Hiramatsu
  • Publication number: 20140368887
    Abstract: When a differential page image is created by comparing a target inspection page image and an inspection page image, differential page image attribute information which is an inspection result is created by acquiring attribute information of an image region of the target inspection page image and an image region of the inspection page image corresponding to the differential page image, from target inspection page image data and inspection page image data.
    Type: Application
    Filed: May 13, 2014
    Publication date: December 18, 2014
    Applicant: DAINIPPON SCREEN MFG. CO., LTD.
    Inventors: Hiroyuki SEGAWA, Koji MATSUO
  • Patent number: 8901460
    Abstract: After flash irradiation on a semiconductor wafer is started and then the temperatures of front and back surfaces of the semiconductor wafer become equal to each other, the temperature of the back surface of the semiconductor wafer, which has a known emissivity, is measured with a radiation thermometer. The emissivity of the front surface of the semiconductor wafer is calculated based on the intensity of radiated light from a black body having an equal temperature to the temperature of the back surface thereof, and the intensity of radiated light actually radiated from the front surface of the semiconductor wafer. Then, the temperature of the front surface of the semiconductor wafer heated by the flash irradiation is calculated based on the calculated emissivity and the intensity of the radiated light from the front surface of the semiconductor wafer that has been measured after the flash irradiation is started.
    Type: Grant
    Filed: May 10, 2012
    Date of Patent: December 2, 2014
    Assignee: Dainippon Screen Mfg. Co., Ltd
    Inventors: Kazuyuki Hashimoto, Tatsufumi Kusuda
  • Patent number: 8893647
    Abstract: A tip section of a discharge nozzle 31 is shaped like a wedge, and projections 310 which further protrude are formed at the tip of the wedge. Lower surfaces 310b of the projections 310 define a substrate-facing-surface which is brought into proximity to the substrate, and discharge outlet bearing surfaces 310c, which gradually retract back from the substrate W, are formed as if to rise from the edges of the lower surfaces 310b. At adjacent positions within the discharge outlet bearing surface 310c which are adjacent to the substrate-facing-surface 310b, discharge outlets 311 for discharging an application liquid are opened. Areas around the discharge outlets 311 and a wall around a fluid feeding path 312 are integrated with each other.
    Type: Grant
    Filed: June 22, 2012
    Date of Patent: November 25, 2014
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Masanobu Iwashima, Masakazu Sanada, Hiroyuki Ueno
  • Publication number: 20140338824
    Abstract: An electrolyte membrane with a backsheet is sent out from an electrolyte membrane unwinding roller, and is separated with its second side sucked on a suction roller by a first press roller. While the electrolyte membrane from which the backsheet has been separated is transported with the electrolyte membrane sucked and supported on the suction roller, an electrode ink is applied to a first side of the electrolyte membrane to form an electrode ink layer, which is dried by blowing hot air thereto to form a catalyst layer. Thereafter, in a state in which the outer surface of a second press roller disposed close to the suction roller is in contact with and supported on the first side of the electrolyte membrane, a support film is pressed against the second side of the electrolyte membrane by a third press roller and attached thereto to manufacture a catalyst-coated membrane.
    Type: Application
    Filed: May 19, 2014
    Publication date: November 20, 2014
    Applicant: DAINIPPON SCREEN MFG. CO., LTD.
    Inventor: Yoshinori TAKAGI
  • Patent number: 8891098
    Abstract: Page-group data indicating many pages is analyzed to acquire the degree of reuse of page components as an analysis result. A set of page data pieces in the page-group data is acquired as a data block, the number of the pieces corresponding to a unit page number that is the number of pages to be processed collectively as a single task when a conversion processor in a system actually converts the page-group data into drawing data. A predetermined conversion processor converts the data block into drawing data to acquire a conversion processing time. A predicted value of a conversion processing time required for the conversion processor in the system to actually convert the page-group data is accurately obtained using the conversion processing time of the data block. An operator is notified of the analysis result and the predicted value and can easily ascertain the appropriateness of the page-group data.
    Type: Grant
    Filed: September 25, 2013
    Date of Patent: November 18, 2014
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Hiroyuki Segawa, Kohei Ueda