Abstract: An inspecting device inspects an inspecting target that is a semiconductor device or a photo device. The inspecting device includes: a stage for holding an inspecting target; a femtosecond laser for emitting pulsed light; a galvano mirror for obliquely irradiating the inspecting target with the pulsed light, while changing an optical path of the pulsed light, to scan the inspecting target with the pulsed light; and a detection part for detecting an electromagnetic wave emitted non-coaxially with the pulsed light from the inspecting target in accordance with the illumination with the pulsed light.

Abstract: The substrate treatment method is for treating a substrate with a chemical liquid in a treatment chamber. The method includes a higher temperature chemical liquid supplying step, and a rinse liquid supplying step after the higher temperature chemical liquid supplying step. The rinse liquid supplying step includes: a peripheral edge portion treating step of supplying the rinse liquid selectively onto a center portion of the front surface of the substrate so that a chemical liquid treatment is inhibited on the center portion while being allowed to proceed on a peripheral edge portion of the front surface of the substrate; and an entire surface rinsing step of spreading the rinse liquid over the entire front surface of the substrate to replace the chemical liquid with the rinse liquid on the entire front surface of the substrate after the peripheral edge portion treating step.

Abstract: A substrate processing apparatus has a cup part for receiving processing liquid which is applied from a processing liquid applying part and is splashed from a substrate, and the cup part is formed of electrical insulation material. Hydrophilic treatment is performed on an outer annular surface of the cup part and water is held on the outer annular surface of the cup part while processing the substrate. With this structure, charged potential of the cup part generated in splashing of pure water can be suppressed by the water held on the outer annular surface, without greatly increasing the manufacturing cost of the substrate processing apparatus by forming the cup part with special conductive material. As a result, it is possible to prevent electric discharge from occurring on the substrate due to induction charging of the substrate, in application of the processing liquid onto the substrate.

Abstract: A semiconductor wafer with (100) plane orientation has two orthogonal cleavage directions. A notch is provided so as to indicate one of these directions. During irradiation with a flash, the semiconductor wafer warps about one of two radii at an angle of 45 degrees with respect to the cleavage directions such that the upper surface thereof becomes convex, and the opposite ends of the other radii become the lowest position. Eight support pins in total are provided in upright position on the upper surface of a holding plate of a susceptor while being spaced at intervals of 45 degrees along the same circumference. The semiconductor wafer is placed on the susceptor such that any of the support pins supports a radius at an angle of 45 degrees with respect to a cleavage direction.

Abstract: In an inkjet printer, a first sparsely arranged portion of a first ejection head entirely overlaps in a movement direction with a second densely arranged portion of a second ejection head. A plurality of outlets of the first sparsely arranged portion include use outlets, and among a plurality of outlets of the second densely arranged portion, those that overlap in the movement direction with use outlets of the first sparsely arranged portion are non-use outlets. In an overlapping range of the first ejection head and the second ejection head, outlets of both of the ejection heads are used in recording an image onto a base material. Consequently, it is possible to prevent or suppress a reduction in print quality such as changes in density or the occurrence of voids due to displacement of the mounting positions of ejection heads in the overlapping range.

Abstract: A substrate processing apparatus includes a phosphoric acid supply device for supplying phosphoric acid aqueous solution onto the upper surface of a substrate held on a spin chuck, a heater for emitting heat toward a portion of the upper surface of the substrate with the phosphoric acid aqueous solution being held on the substrate, a heater moving device for moving the heater to move a position heated by the heater within the upper surface of the substrate, a water nozzle for discharging water therethrough toward a portion of the upper surface of the substrate with the phosphoric acid aqueous solution being held on the substrate and a water nozzle moving device for moving the water nozzle to move the water landing position within the upper surface of the substrate.

Abstract: The transport device includes a plurality of transporting sections to transport a printing medium; a divided accelerating interval setting section to set a transportation speed in a divided accelerating interval corresponding to a time generated by dividing a time where the transportation speed of the printing medium changes from 0 to a given value in accordance with an acceleration rate; a divided decelerating interval setting section to set a transportation speed in a divided decelerating interval corresponding to a time generated by dividing a time where the transportation speed of the printing medium changes from the given value to 0 in accordance with an decelerating rate; including a basic shaft transporting section configured to be driven at the transportation speed set for every divided accelerating interval or for every divided decelerating interval for transporting the printing medium; and a controller for controlling the foregoing sections.

Abstract: A substrate processing apparatus includes a spin chuck for holding a substrate horizontally, a phosphoric acid supply device for supplying phosphoric acid aqueous solution onto the upper surface of the substrate held on the spin chuck to form a liquid film of phosphoric acid aqueous solution covering the entire upper surface of the substrate, a heating device for heating the substrate with the liquid film of phosphoric acid aqueous solution held thereon and a pure water supply device for supplying pure water onto the liquid film of phosphoric acid aqueous solution.

Abstract: A print data processing apparatus 4 includes a page data creating apparatus 1 and a rasterization processing apparatus 2. The page data creating apparatus 1 includes, as functional elements thereof, a common object defining unit 11, an allocating condition setting unit 12, a correction information embedding unit 13, and a page data generating unit 14. The rasterization processing apparatus 2 includes, as functional elements thereof, an analyzing unit 20 having a correction information searching unit 21 and a resolution acquiring unit 22, a correcting unit 23, and a raster data generating unit 25.

Abstract: In a substrate processing apparatus, an outer edge portion of a substrate in a horizontal state is supported from below by an annular substrate supporting part, and a lower surface facing part having a facing surface facing a lower surface of the substrate is provided inside the substrate supporting part. A gas ejection nozzle for ejecting heated gas toward the lower surface is provided in the lower surface facing part, and the substrate is heated by the heated gas when an upper surface of the rotating substrate is processed with a processing liquid ejected from an upper nozzle. Further, a lower nozzle is provided in the lower surface facing part, to thereby perform a processing on the lower surface with a processing liquid. Since the gas ejection nozzle protrudes from the facing surface, a flow of the processing liquid into the gas ejection nozzle can be suppressed during the processing.

Abstract: First flash irradiation from flash lamps is performed on an upper surface of a semiconductor wafer supported on a temperature equalizing ring of a holder to cause the semiconductor wafer to jump up from the temperature equalizing ring into midair. While the semiconductor wafer is in midair above the temperature equalizing ring, second flash irradiation from the flash lamps is performed on the upper surface of the semiconductor wafer to increase the temperature of the upper surface of the semiconductor wafer to a treatment temperature. Cracking in the semiconductor wafer is prevented because the second flash irradiation is performed while the semiconductor wafer is in midair and subject to no restraints.

Abstract: A nozzle N which moves in a scan direction Ds along a surface Wf of a substrate W discharges an application liquid which contains a photo-curing material, and a light emitter E moving as if to follow the nozzle N irradiates light (UV light for instance) upon the application liquid. Arriving at an application end position, the nozzle N stops discharging the application liquid and retracts in a direction away from the substrate surface Wf. Meanwhile, the light emitter E keeps moving in the scan direction Ds, thereby irradiating even the terminating end of the application liquid with the light without fail.

Abstract: The transfer position teaching apparatus is provided with a teaching substrate having a shape identical to a semiconductor wafer to be processed by substrate processing apparatuses and having an electrically conductive coating thereon. The transfer position teaching apparatus is also provided with a base member having insulator coating thereon and on the base member, entrance contact members, Y-direction contact members, X-direction contact member are vertically arranged.

Abstract: The following processes are performed to improve the accuracy of the process of estimating the volume of a cell clump from an image including the cell clump. First, the image including the cell clump is acquired, and the optical density of the cell clump in the image is measured. Cross-section information about the cell clump is acquired by observation using a confocal microscope or by physical cutting. Based on the cross-section information, the vertical height of the cell clump is determined. Thereafter, data representing a relationship between the aforementioned optical density and the height is acquired. This improves the accuracy of the process of converting the optical density into the height to thereby achieve the accurate estimation of the volume of the cell clump.

Abstract: In an image inspection apparatus, a first accumulation part acquires a reference accumulated value distribution by accumulating values of pixels in a reference image arranged in an image recording direction. A second accumulation part acquires an inspection accumulated value distribution by accumulating values of pixels in the inspection image arranged in the image recording direction. A sensitivity correction part performs sensitivity correction wherein a plurality of accumulated values other than a local peak in the inspection accumulated value distribution are corrected so as to relatively approach a plurality of corresponding accumulated values in the reference accumulated value distribution, based on a ratio between the inspection accumulated value distribution from which the local peak has been removed and the reference accumulated value distribution.

Abstract: An inkjet printer includes an image-forming part, forming an auxiliary layer on a base material by ejecting droplets of auxiliary ink and forming an image on the auxiliary layer by ejecting droplets of image-forming ink, the auxiliary ink changing a dot formation state of droplets of the image-forming ink. In a storage part, a reference table that associates each of a plurality of types of base materials with a proper dot area rate to be used when forming the auxiliary layer is stored. In a dot-area-rate determination part, a dot area rate to be used when forming the auxiliary layer on a target base material is determined as an auxiliary ink dot area rate by referencing the reference table using the type of the target base material. This enables the inkjet printer to form a highly precise image on various base materials.

Abstract: In a detaching apparatus, a detachment starter bends one end part of a first plate-like body into a cylindrical or prismatic surface in a direction opposite to a second plate-like body, thereby forming a single and straight boundary line between an adhering region and a detached region. A separator increases a distance between a first holder holding the first plate-like body and a second holder holding the second plate-like body to separate the first and second plate-like bodies.

Abstract: A pattern forming apparatus comprises: a first holder which holds a blanket carrying a pattern forming material on one surface in a horizontal posture with a carrying surface for the pattern forming material faced up; a second holder which holds a plate for patterning the pattern forming material or a substrate, to which a pattern is transferred, as a processing object such that the processing object is proximate to and facing the carrying surface of the blanket held on the first holder; and a push-up unit which partially pushes up an effective area in a central part of the blanket from a lower surface side of the blanket to bring the effective area into contact with the processing object held on the second holder and moves along the lower surface of the blanket to change a push-up position of the blanket.

Abstract: A print data processing apparatus 2 which can perform a highly reliable digital print inspection at increased speed for variable printing includes an image processor 20 as a functional construction. This image processor 20 has an attribute information acquiring unit 21 for acquiring attribute information including arrangement information of objects constituting each page of the manuscript data, an extracting unit 22 for extracting at least one page per reuse part object from among pages including reuse part objects, a reference data creating unit 23 for creating reference data expressing an image state of the manuscript data, an RIP processing unit 24 for performing RIP processing of the manuscript data, an area specifying unit 25 for specifying areas of image data to be compared in the print inspecting process, and an image comparing unit 28 for comparing, by applying a compare algorithm, images in the areas specified by the area specifying unit 25.

Abstract: A color inkjet printing apparatus in which an image capturing part captures an image of a page identifier printed on each page of a printing medium, and an inspection part compares a page identification result acquired from an output of the image capturing part with page identification information included in print data. The page identifier includes single-color parts that are each printed with only one of a plurality of colors used in the printing apparatus. Thus, a printing defect can be quickly detected during inspection of the first page in which the printing defect has occurred, irrespective of the ink color in which the printing defect has occurred.