Patents Assigned to Electro Scientific Industries, Inc.
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Patent number: 10654141Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.Type: GrantFiled: April 30, 2018Date of Patent: May 19, 2020Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INCInventors: Guang Lu, Mehmet E. Alpay, Mike Tyler, Qian Xu, Jan Kleinert, Zhibin Lin, James D. Brookhyser, Ho Wai Lo, Kurt M. Eaton
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Patent number: 10507544Abstract: A laser processing system includes a first positioning system (1044) for imparting first relative movement of a beam axis along a beam trajectory (1062) with respect to a workpiece (1060), a processor for determining a second relative movement of the beam axis (1061) along a plurality of dither rows, a second positioning system (1042) for imparting the second relative movement, and a laser source (1046) for emitting laser beam pulses. The laser beam pulses of individually selected energies can be directed to individually selected transverse spot locations (5310) one or more times during a primary laser pass to permit three-dimensional patterning. The laser beam pulses can also be directed to the spatially identical, overlapping, or non-overlapping neighboring spot area locations on the workpiece in a temporally nonsequential order.Type: GrantFiled: February 26, 2016Date of Patent: December 17, 2019Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INCInventors: Haibin Zhang, Chuan Yang, Mark Alan Unrath, Martin Orrick
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Publication number: 20190299329Abstract: A series of laser pulse bundles or bursts are used for micromachining target structures. Each burst includes short laser pulses with temporal pulse widths that are less than approximately 1 nanosecond. A laser micromachining method includes generating a burst of laser pulses and adjusting an envelope of the burst of laser pulses for processing target locations. The method includes adjusting the burst envelope by selectively adjusting one or more first laser pulses within the burst to a first amplitude based on processing characteristics of a first feature at a target location, and selectively adjusting one or more second laser pulses within the burst to a second amplitude based on processing characteristics of a second feature at the target location. The method further includes directing the amplitude adjusted burst of laser pulses to the target location.Type: ApplicationFiled: May 1, 2019Publication date: October 3, 2019Applicant: Electro Scientific Industries, Inc.Inventor: Yunlong Sun
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Patent number: 10391585Abstract: A laser processing system for micromachining a workpiece includes a laser source to generate laser pulses for processing a feature in a workpiece, a galvanometer-driven (galvo) subsystem to impart a first relative movement of a laser beam spot position along a processing trajectory with respect to the surface of the workpiece, and an acousto-optic deflector (AOD) subsystem to effectively widen a laser beam spot along a direction perpendicular to the processing trajectory. The AOD subsystem may include a combination of AODs and electro-optic deflectors. The AOD subsystem may vary an intensity profile of laser pulses as a function of deflection position along a dither direction to selectively shape the feature in the dither direction. The shaping may be used to intersect features on the workpiece. The AOD subsystem may also provide rastering, galvo error position correction, power modulation, and/or through-the-lens viewing of and alignment to the workpiece.Type: GrantFiled: March 25, 2013Date of Patent: August 27, 2019Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INCInventors: Mark A. Unrath, William J. Jordens, James Ismail, Hisashi Matsumoto, Brian J. Lineburg
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Patent number: 10357850Abstract: The invention is method, and an apparatus for performing the method having the steps of providing a workpiece, generating a plurality of free electrons at a region of the exterior surface, and machining a portion of the workpiece adjoining the first region by directing laser energy onto the workpiece.Type: GrantFiled: September 20, 2013Date of Patent: July 23, 2019Assignee: Electro Scientific Industries, Inc.Inventors: Haibin Zhang, Glenn Simenson
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Patent number: 10328529Abstract: Employing laser scanning directions (20) that are oblique to and against a predominant gas flow direction (25) equalize the quality and waviness characteristics of orthogonal scribe lines (26) made by the laser scans. Positioning and sequence of multiple scan passes to form a feature wider than the width of a scribe line (26) can be controlled to enhance quality and waviness characteristics of the edges of the feature.Type: GrantFiled: August 10, 2016Date of Patent: June 25, 2019Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INCInventors: Daragh Finn, Robert A. Ferguson
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Patent number: 10307862Abstract: A series of laser pulse bundles or bursts are used for micromachining target structures. Each burst includes short laser pulses with temporal pulse widths that are less than approximately 1 nanosecond. A laser micromachining method includes generating a burst of laser pulses and adjusting an envelope of the burst of laser pulses for processing target locations. The method includes adjusting the burst envelope by selectively adjusting one or more first laser pulses within the burst to a first amplitude based on processing characteristics of a first feature at a target location, and selectively adjusting one or more second laser pulses within the burst to a second amplitude based on processing characteristics of a second feature at the target location. The method further includes directing the amplitude adjusted burst of laser pulses to the target location.Type: GrantFiled: March 27, 2009Date of Patent: June 4, 2019Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INCInventor: Yunlong Sun
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Patent number: 10213871Abstract: The invention is a method and an apparatus for marking an article and the article thus marked. It includes providing the article. Generating a plurality of groups of laser pulses. At least one of the plurality of groups is generated by modulating a beam of laser pulses to form a plurality of beamlets. Each, of the plurality of beamlets, include at least one laser pulse. It also includes directing the plurality of groups of laser pulses onto the article such that laser pulses within the at least one of the plurality of groups impinge upon the article at spot areas that do not overlap one another, wherein laser pulses within the plurality of groups are configured to produce a visible mark on the article.Type: GrantFiled: October 21, 2013Date of Patent: February 26, 2019Assignee: Electro Scientific Industries, Inc.Inventors: Jan Kleinert, Robert Reichenbach, Mark Unrath, Hisashi Matsumoto, Jefferey Howerton, Mehmet E. Alpay, Andy Moore
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Patent number: 10118252Abstract: Systems and methods for laser processing continuously moving sheet material include one or more laser processing heads configured to illuminate the moving sheet material with one or more laser beams. The sheet material may include, for example, an optical film continuously moving from a first roller to a second roller during a laser process. In one embodiment, a vacuum chuck is configured to removably affix a first portion of the moving sheet material thereto. The vacuum chuck controls a velocity of the moving sheet material as the first portion is processed by the one or more laser beams. In one embodiment, a conveyor includes a plurality of vacuum chucks configured to successively affix to different portions of the sheet material during laser processing.Type: GrantFiled: May 8, 2015Date of Patent: November 6, 2018Assignee: Electro Scientific Industries, Inc.Inventors: Yasu Osako, Mark Unrath, Mark Kosmowski
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Patent number: 10112263Abstract: The invention is a method and apparatus for laser marking a stainless steel specimen with commercially desirable marks. The method includes providing a laser processing system having a laser, and laser optics and a controller with pre-determined laser pulse parameters, selecting the pre-determined laser pulse parameters associated with the desired mark, and directing the laser marking system to produce laser pulses having laser pulse parameters associated with the desired marks including temporal pulse widths greater than about 1 and less than about 1000 picoseconds.Type: GrantFiled: January 31, 2013Date of Patent: October 30, 2018Assignee: Electro Scientific Industries, Inc.Inventors: Robert Reichenbach, Jeffrey Howerton, Jeffrey Albelo
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Patent number: 9981357Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.Type: GrantFiled: June 21, 2016Date of Patent: May 29, 2018Assignee: Electro Scientific Industries, Inc.Inventors: Guang Lu, Mehmet E. Alpay, Mike Tyler, Qian Xu, Jan Kleinert, Zhibin Lin, James D. Brookhyser, Ho Wai Lo, Kurt M. Eaton
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Patent number: 9983562Abstract: Alignment features (60) associated with a support fixture (36) provide side scan data and top scan data reference points. Side scan displacement sensors (112) obtain side scan data of workpiece edge segments (23), and one or more cameras (130) obtain top scan data to provide a machining reference for the side scan data. The side scan data can be transformed into a top-view coordinate system usable by the laser machining system (140).Type: GrantFiled: December 8, 2015Date of Patent: May 29, 2018Assignee: Electro Scientific Industries, Inc.Inventors: Joseph Matthew Hasty, Alexander Anatolievich Myachin, Mark Theodore Kosmowski
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Patent number: 9931713Abstract: Laser systems and methods improve the processing velocity of the routs or other features to avoid exceeding the laser system's dynamic limits. A laser processing system divides laser processing commands corresponding to a plurality of features to be processed on or in the workpiece into process segments. Laser processing parameters and beam trajectories are simulated to determine a maximum processing velocity for each of the process segments. The laser processing system selects one or more of the maximum processing velocities for processing the plurality of features on or within the workpiece. A slowest processing velocity of the maximum processing velocities may be used to process each of the plurality of features. Alternatively, each continuous rout sequence may be processed using a different processing velocity. In other embodiments, each process segment is processed using its corresponding maximum processing velocity.Type: GrantFiled: March 14, 2014Date of Patent: April 3, 2018Assignee: Electro Scientific Industries, Inc.Inventor: Mark A. Unrath
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Patent number: 9828278Abstract: Methods and apparatus for separating substrates are disclosed, as are articles formed from the separated substrates. A method of separating a substrate having first and second surfaces includes directing a beam of laser light to pass through the first surface and, thereafter, to pass through the second surface. The beam of laser light has a beam waist located at a surface of the substrate or outside the substrate. Relative motion between the beam of laser light and the substrate is caused to scan a spot on a surface of the substrate to be scanned along a guide path. Portions of the substrate illuminated within the spot absorb light within the beam of laser light so that the substrate can be separated along the guide path.Type: GrantFiled: December 2, 2013Date of Patent: November 28, 2017Assignee: Electro Scientific Industries, Inc.Inventors: Haibin Zhang, Qian Xu
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Patent number: 9828277Abstract: Methods and apparatus for separating substrates are disclosed, as are articles formed from the separated substrates. A method of separating a substrate having first and second surfaces includes directing a beam of laser light to pass through the first surface and, thereafter, to pass through the second surface. The beam of laser light has a beam waist located at a surface of the substrate or outside the substrate. Relative motion between the beam of laser light and the substrate is caused to scan a spot on a surface of the substrate to be scanned along a guide path. Portions of the substrate illuminated within the spot absorb light within the beam of laser light so that the substrate can be separated along the guide path.Type: GrantFiled: February 27, 2013Date of Patent: November 28, 2017Assignee: Electro Scientific Industries, Inc.Inventors: Haibin Zhang, Qian Xu
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Patent number: 9823101Abstract: A method for the rapid optical inspection of stents is described wherein a stent is mounted on a mandrel with optical properties suitable for machine vision inspection of the stent is conveyed to a first inspection station containing a camera and illumination light source. A driving member securely contacts the mandrel and the stent is rotated in view of the inspection camera. The stent is then transferred to a second location for further operations. A unique identification tag is associated with each mandrel and tracks the location of the stent through the inspection process.Type: GrantFiled: June 11, 2013Date of Patent: November 21, 2017Assignee: Electro Scientific Industries, Inc.Inventors: Daniel Freifeld, John Roberts, John B. Burnett, George Linscott
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Publication number: 20170305780Abstract: Methods and apparatus for separating substrates are disclosed, as are articles formed from the separated substrates. A method of separating a substrate having first and second surfaces includes directing a beam of laser light to pass through the first surface and, thereafter, to pass through the second surface. The beam of laser light has a beam waist located at a surface of the substrate or outside the substrate. Relative motion between the beam of laser light and the substrate is caused to scan a spot on a surface of the substrate to be scanned along a guide path. Portions of the substrate illuminated within the spot absorb light within the beam of laser light so that the substrate can be separated along the guide path.Type: ApplicationFiled: December 2, 2013Publication date: October 26, 2017Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.Inventors: Haibin ZHANG, Qian XU
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Patent number: 9776277Abstract: An apparatus includes a splitter configured to split a laser beam into a plurality of beamlets, a phase modulator array optically coupled to the splitter and operative to produce phase differences between the beamlets, phase modulation electronics operably coupled to the phase modulator and configured to control an operation of the phase modulator array, a multicore photonic crystal fiber amplifier, the multicore photonic crystal fiber amplifier configured to amplify the beamlets output by the phase modulator array, thereby producing an amplified laser beam at an output thereof, and a waveguide optically coupled between an output of the phase modulator array and an input of the multicore photonic crystal fiber amplifier.Type: GrantFiled: March 14, 2014Date of Patent: October 3, 2017Assignee: Electro Scientific Industries, Inc.Inventor: Jan Kleinert
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Patent number: D868854Type: GrantFiled: October 11, 2018Date of Patent: December 3, 2019Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INCInventors: Jeremy Willey, Corie Neufeld, Brandon Bilyeu
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Patent number: D873782Type: GrantFiled: May 17, 2016Date of Patent: January 28, 2020Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INCInventor: Douglas J. Garcia