Patent number: 9052589
Abstract: A polymer comprises the polymerized product of unsaturated monomers comprising an acid-deprotectable monomer, a base-soluble monomer, a lactone-containing monomer, a photoacid-generating monomer, or a combination comprising at least one of the foregoing monomers, with a chain transfer agent of Formula (I); wherein in Formula (I), Z is a y valent C1-20 organic group, L is a heteroatom or a single bond, A1 and A2 are each independently ester containing or non-ester containing and are fluorinated or non-fluorinated, and are independently C1-40 alkylene, C3-40 cycloalkylene, C6-40 arylene, or C7-40 aralkylene, and A1 contains a nitrile, ester, or aryl substituent group alpha to the point of attachment with sulfur, X1 is a single bond, —O—, —S—, —C(?O)—O—, —O—C(?O)—, —O—C(?O)—O—, —C(?O)—NR—, —NR—C(?O)—, —NR—C(?O)—NR—, —S(?O)2—O—, —O—S(?O)2—O—, —NR—S(?O)2—, or —S(?O)2—NR, wherein R is H, C1-10 alkyl, C3-10 cycloalkyl or C6-10 aryl, Y? is an anionic group, G+ is a metallic or non-metallic cation, and y is an int
Type:
Grant
Filed:
August 28, 2013
Date of Patent:
June 9, 2015
Assignee:
DOW GLOBAL TECHNOLOGIES LLC
Inventors:
John W. Kramer, Daniel J. Arriola