Patents Assigned to Institute of Microelectronics
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Patent number: 10629498Abstract: There are provided an Integrated Circuit (IC) unit, a method of manufacturing the same, and an electronic device including the IC unit. According to an embodiment, the IC unit includes a first source/drain layer, a channel layer and a second source/drain layer for a first device and a first source/drain layer, a channel layer and a second source/drain layer for a second device stacked in sequence on a substrate. In the first device, the channel layer includes a first portion and a second portion separated from each other. The first source/rain layer and the second source/drain layer each extend integrally to overlap both the first portion and the second portion of the channel layer. The IC unit further includes a first gate stack surrounding a periphery of the first portion and also a periphery of the second portion of the channel layer of the first device, and a second gate stack surrounding a periphery of the channel layer of the second device.Type: GrantFiled: October 2, 2017Date of Patent: April 21, 2020Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Huilong Zhu, Zhengyong Zhu
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Patent number: 10608177Abstract: The present disclosure discloses a self-gated RRAM cell and a manufacturing method thereof; which belong to the field of microelectronic technology. The self-gated RRAM cell comprises: a stacked structure containing multiple layers of conductive lower electrodes; a vertical trench formed by etching the stacked structure; a M8XY6 gated layer formed on an inner wall and a bottom of the vertical trench; a resistance transition layer formed on a surface of the M8XY6, gated layer; and a conductive upper electrode formed on a surface of the resistance transition layer, the vertical trench being filled with the conductive upper electrode. The present disclosure is implemented on a basis of using the self-gated RRAM as a memory cell.Type: GrantFiled: December 26, 2014Date of Patent: March 31, 2020Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Hangbing Lv, Ming Liu, Qi Liu, Shibing Long
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Publication number: 20200099373Abstract: The present disclosure provides a serial PWM signal decoding circuit based on a capacitor charge-discharge structure, comprising: a timing logic generation circuit configured to receive, at an input end of the timing logic generation circuit, a PWM differential signal, and generate a timing logic signal; and at least two capacitor charge-discharge decoding modules, each of the at least two capacitor charge-discharge decoding modules has an input end connected to an output end of the timing logic generation circuit, and is configured to perform charging and discharging based on the timing logic signal.Type: ApplicationFiled: March 20, 2017Publication date: March 26, 2020Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Zhi LI, Jianzhong ZHAO, Yumei ZHOU, Weihua XIN
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Patent number: 10600696Abstract: There are provided an Integrated Circuit (IC) unit, a method of manufacturing the same, and an electronic device including the IC unit. According to an embodiment, the IC unit includes a first source/drain layer, a channel layer and a second source/drain layer for a first device and a first source/drain layer, a channel layer and a second source/drain layer for a second device stacked in sequence on a substrate. In the first device, the channel layer includes a first portion and a second portion separated from each other. The first source/rain layer and the second source/drain layer each extend integrally to overlap both the first portion and the second portion of the channel layer. The IC unit further includes a first gate stack surrounding a periphery of the first portion and also a periphery of the second portion of the channel layer of the first device, and a second gate stack surrounding a periphery of the channel layer of the second device.Type: GrantFiled: May 23, 2019Date of Patent: March 24, 2020Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Huilong Zhu, Zhengyong Zhu
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Patent number: 10573658Abstract: A method of manufacturing three-dimensional semiconductor device includes the steps of: forming a stack structure of a plurality of a first material layers and a second material layers on a substrate in the memory cell region; etching the stack structure to form a plurality of trenches; forming channel layers in the plurality of trenches; and reducing the surface roughness and the interface state by performing annealing treatment to at least one surface of the channel layers.Type: GrantFiled: July 10, 2014Date of Patent: February 25, 2020Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventor: Zongliang Huo
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Publication number: 20200058704Abstract: A transition metal oxide based selector, a method for preparing the same and resistive random access memory are provided. The method comprises: S1, forming a tungsten plug on a transistor; S2, using the tungsten plug to function as a lower electrode, and preparing a transition metal layer on the tungsten plug; S3, oxidizing the transition metal layer to convert the transition metal layer into a transition metal oxide layer; and S4, depositing an upper electrode on the transition metal oxide, patterning the upper electrode and the transition metal oxide. The selector of the present disclosure may provide a high current density and has a good uniformity. The formed 1S1R structure may effectively eliminate crosstalk phenomenon in a resistive random access memory array, and effectively increase the storage density without increasing the storage unit area, thereby increasing device integration.Type: ApplicationFiled: February 22, 2017Publication date: February 20, 2020Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Hangbing LV, Qing LUO, Xiaoxin XU, Shibing LONG, Qi LIU, Ming LIU
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Patent number: 10504916Abstract: A three-dimensional memory device and method of manufacturing the same, an isolation structure is embedded between the common source region and the substrate thereunder, which can inhibit the undesired diffusion of impurities during the implantation of the common source region, avoiding operation failure due to excessive diffusion of impurities. In programming and reading states of the three-dimensional memory device, electrons flow from the common source region to bit line; while in erase states, holes are injected from the substrate. Due to the isolation structure, the three-dimensional memory device achieves spatial separation of electrons from holes required for programming/erasing, improving the erasing efficiency and the integration as well.Type: GrantFiled: November 23, 2015Date of Patent: December 10, 2019Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Zongliang Huo, Tianchun Ye
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Patent number: 10483279Abstract: A method of manufacturing a semiconductor device, comprising the steps of: forming a gate dielectric layer and a first amorphous channel layer on a substrate; thinning the first amorphous channel layer; etching the first amorphous channel layer and the gate dielectric layer until the substrate is exposed; forming a second amorphous channel layer on the first amorphous channel layer and the substrate; annealing such that the first amorphous channel layer and the second amorphous channel layer are converted into a polycrystalline channel layer; and thinning the polycrystalline channel layer. According to the method of manufacturing semiconductor device of the present invention, the grain size of the polycrystalline thin film is increased by depositing a thick amorphous film and then annealing and thinning it.Type: GrantFiled: November 23, 2015Date of Patent: November 19, 2019Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventor: Tianchun Ye
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Patent number: 10475935Abstract: There are provided a nanometer semiconductor device with a high-quality epitaxial layer and a method of manufacturing the same. According to an embodiment, the semiconductor device may include: a substrate; at least one nanowire spaced apart from the substrate; at least one semiconductor layer, each formed around a periphery of respective one of the at least one nanowire to at least partially surround the corresponding nanowire, wherein the semiconductor layer(s) formed around the respective nanowire(s) are separated from each other; an isolation layer formed on the substrate, exposing the at least one semiconductor layer; and a gate stack formed on the isolation layer and intersecting the at least one semiconductor layer, wherein the gate stack includes a gate dielectric layer at least partially surrounding a periphery of respective one of the at least one semiconductor layer and a gate conductor layer.Type: GrantFiled: December 7, 2016Date of Patent: November 12, 2019Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventor: Huilong Zhu
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Patent number: 10475807Abstract: A method for manufacturing three-dimensional memory, comprising the steps of: forming a stack structure composed of a plurality of first material layers and a plurality of second material layers on a substrate; etching the stack structure to expose the substrate, forming a plurality of first vertical openings; forming a filling layer in each of the first openings; etching the stack structure around each of the first openings to expose the substrate, forming a plurality of second vertical openings; forming a vertical channel layer and a drain in each of the second openings; removing the filling layer by selective etching, re-exposing the first openings; partially or completely removing the second material layers by lateral etching, leaving a plurality of recesses; forming a plurality of gate stack structure in the recesses; forming a plurality of common sources on and/or in the substrate at the bottom of each of the first openings.Type: GrantFiled: September 25, 2014Date of Patent: November 12, 2019Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Zongliang Huo, Ming Liu, Lei Jin
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Patent number: 10468312Abstract: There are provided an Integrated Circuit (IC) unit, a method of manufacturing the same, and an electronic device including the IC unit. According to an embodiment, the IC unit includes a first source/drain layer, a channel layer and a second source/drain layer for a first device and a first source/drain layer, a channel layer and a second source/drain layer for a second device stacked in sequence on a substrate. In the first device, the channel layer includes a first portion and a second portion separated from each other. The first source/rain layer and the second source/drain layer each extend integrally to overlap both the first portion and the second portion of the channel layer. The IC unit further includes a first gate stack surrounding a periphery of the first portion and also a periphery of the second portion of the channel layer of the first device, and a second gate stack surrounding a periphery of the channel layer of the second device.Type: GrantFiled: October 2, 2017Date of Patent: November 5, 2019Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Huilong Zhu, Zhengyong Zhu
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Patent number: 10418549Abstract: A method for evaluating the thermal effects of 3D RRAM arrays and reducing thermal crosstalk, including the following steps: Step 1: calculating the temperature distribution in the array through 3D Fourier heat conduction equation; Step 2, selecting a heat transfer mode; Step 3, selecting an appropriate array structure; Step 4, analyzing the effect of position of programming device in the array on the temperature; Step 5, analyzing the thermal crosstalk effect in the array; Step 6, evaluating thermal effects and thermal crosstalk; Step 7, changing the array structure or modify operating parameters based on the evaluation results to reduce the thermal crosstalk.Type: GrantFiled: August 12, 2016Date of Patent: September 17, 2019Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Nianduan Lu, Pengxiao Sun, Ling Li, Ming Liu, Qi Liu, Hangbing Lv, Shibing Long
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Patent number: 10373968Abstract: A 3-D semiconductor device comprising a plurality of memory cells and a plurality of selection transistors, each of said plurality of memory cells comprises: a channel layer, distributed along a direction perpendicular to the substrate surface; a plurality of inter-layer insulating layers and a plurality of gate stack structures, alternately laminating along the sidewall of the channel layer; a plurality of floating gates, located between the plurality of inter-layer insulating layers and the sidewall of the channel layer; a plurality of drains, located at the top of the channel layer; and a plurality of sources, located in the said substrate between two adjacent memory cells of the said plurality of memory cells.Type: GrantFiled: July 10, 2014Date of Patent: August 6, 2019Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventor: Zongliang Huo
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Publication number: 20190235858Abstract: An apparatus and a method for configuring or updating a programmable logic device are provided. The apparatus includes a control module and a storage module connected to the control module. The control module includes: a JTAG interface for connecting the control module to a JTAG host, and a configuration interface compatible with a to-be-configured programmable logic device. The control module is configured to: after receiving a first control instruction including configuration information via the JTAG interface, store the configuration information into the storage module; and after receiving a configuration instruction, read the configuration information to configure the to-be-configured programmable logic device. A configuration clock used in a process that the control module configures the to-be-configured programmable logic device is generated from the to-be-configured programmable logic device, the control module or an external clock source.Type: ApplicationFiled: April 21, 2017Publication date: August 1, 2019Applicant: INSTITUTE OF MICROELECTRONICS ,CHINESE ACADEMY OF SCIENCESInventors: Yuanlu XIE, Kun ZHANG, Haitao SUN, Jing LIU, Jinshun BI, Ming LIU
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Publication number: 20190229182Abstract: The present disclosure relates to the field of semiconductor Integrated Circuit (IC) manufacture, and provides an InGaAs-based double-gate PMOS Field Effect Transistor (FET). The FET includes a bottom gate electrode, a bottom gate dielectric layer, a bottom gate interface control layer, an InGaAs channel layer, an upper interface control layer, a highly doped P-type GaAs layer, an ohmic contact layer, source/drain metal electrodes, a top gate dielectric layer and a top gate electrode. The source/drain metal electrodes are located on opposite sides of the ohmic contact layer. A gate trench structure is etched to an upper surface of the interface control layer between the source and drain metal electrodes. The top gate dielectric layer uniformly covers an inner surface of the gate trench structure, and the top gate electrode is provided on the top gate dielectric layer.Type: ApplicationFiled: December 28, 2016Publication date: July 25, 2019Applicant: Institute of Microelectronics, Chinese Academy of SciencesInventors: Shengkai Wang, Honggang Liu, Bing Sun, Hudong Chang
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Patent number: 10312439Abstract: A nonvolatile resistive switching memory includes an inert metal electrode, a resistive switching functional layer, and an easily oxidizable metal electrode. A graphene intercalation layer with nanopores, interposed between the easily oxidizable metal electrode and the resistive switching functional layer, is capable of controlling the metal ions, which are formed by the oxidation of the easily oxidizable metal electrode during the programming of the device, and only enter into the resistive switching functional layer through the position of the nanopores. Further, the graphene intercalation layer with nanopores is capable of blocking the diffusion of the metal ions, making the metal ions, which are formed after the oxidation of the easily oxidizable metal electrode, enter into the resistive switching functional layer only through the position of the nanopores during the programming of the device, thereby controlling the growing position of conductive filament.Type: GrantFiled: May 14, 2015Date of Patent: June 4, 2019Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Qi Liu, Ming Liu, Haltao Sun, Hangbing Lv, Shibing Long, Writam Banerjee, Kangwei Zhang
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Patent number: 10312345Abstract: The present disclosure provides a method for manufacturing a transistor having a gate with a variable work function, comprising: providing a semiconductor substrate; forming a dummy gate stack on the semiconductor substrate and performing ion implantation on an exposed area of the semiconductor substrate at both sides of the dummy gate stack to form source/drain regions; removing the dummy gate and annealing the source/drain regions; providing an atomic layer deposition reaction device; introducing a precursor source reactant into the atomic layer deposition reaction device; and controlling an environmental factor for the atomic layer deposition device to grow a work function metal layer. The present disclosure also provides a transistor having a gate with a variable work function. The present disclosure may adjust a variable work function, and may use the same material system to obtain an adjustable threshold voltage within an adjustable range.Type: GrantFiled: January 15, 2018Date of Patent: June 4, 2019Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Jinjuan Xiang, Xiaolei Wang, Hong Yang, Shi Liu, Junfeng Li, Wenwu Wang, Chao Zhao
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Patent number: 10305035Abstract: The present invention discloses a preparation method of a Cu-based resistive random access memory, and a memory. The preparation method includes: forming a copper wire in a groove through a Damascus copper interconnection process, wherein the copper wire includes a lower copper electrode for growing a storage medium, and the copper wire is arranged above a first capping layer; forming a second capping layer above the copper wire; forming a hole at a position corresponding to the lower copper electrode on the second capping layer, wherein the pore is used for exposing the lower copper electrode; performing composition and a chemical combination treatment on the lower copper electrode to generate a compound barrier layer, wherein the compound barrier layer is a compound formed by the chemical combination of elements Cu, Si and N, or a compound formed by the chemical combination of elements Cu, Ge and N; and depositing a solid electrolyte material and an upper electrode on the compound barrier layer.Type: GrantFiled: April 22, 2016Date of Patent: May 28, 2019Assignee: THE INSTITUTE OF MICROELECTRONICS OF CHINESE ACADEMY OF SCIENCESInventors: Hangbing Lv, Ming Liu, Qi Liu, Shibing Long
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Patent number: 10297748Abstract: There is provided a three-terminal atomic switching device and a method of manufacturing the same, which belongs to the field of microelectronics manufacturing and memory technology. The three-terminal atomic switching device includes: a stack structure including a source terminal and a drain terminal; a vertical trench formed by etching the stack structure; an M8XY6 channel layer formed on an inner wall and a bottom of the vertical trench; and a control terminal formed on a surface of the M8XY6 channel layer, wherein the control terminal fills the vertical trench. The source terminal resistance and the drain terminal resistance are controlled by the control terminal.Type: GrantFiled: December 26, 2014Date of Patent: May 21, 2019Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Hangbing Lv, Ming Liu, Qi Liu, Shibing Long
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Patent number: 10276366Abstract: A method for manufacturing a low interface state device includes performing a remote plasma surface process on a III-Nitride layer on a substrate; transferring the processed substrate to a deposition cavity via an oxygen-free transferring system; and depositing on the processed substrate in the deposition cavity. The deposition may be low pressure chemical vapor deposition (LPCVD). The interface state between a surface dielectric and III-Nitride material may be significantly decreased by integrating a low impairment remote plasma surface process and LPCVD.Type: GrantFiled: August 7, 2015Date of Patent: April 30, 2019Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Xinyu Liu, Sen Huang, Xinhua Wang, Ke Wei, Wenwu Wang, Junfeng Li, Chao Zhao