Patents Assigned to Institute of Microelectronics
  • Patent number: 11810986
    Abstract: A method for integrating a surface-electrode ion trap and a silicon optoelectronic device, and an integrated structure. A silicon structure and a grating are formed on a wafer. A first dielectric layer, a second dielectric layer, a third dielectric layer, and a fourth dielectric layer are sequentially deposited above the wafer. An epitaxy opening is provided in the first dielectric layer to form single-photon avalanche detectors. First contacts vias connecting the detectors, and through silicon vias reaching a back surface of the wafer, are provided in the second dielectric layer and the third dielectric layer, respectively. Electrodes, the second contact vias and the third contact vias are provided in the fourth dielectric layer. The first contact vias are connected to a first electrode via the second contact vias, and the through silicon vias are connected to the first electrode and a second electrode via the third contact vias.
    Type: Grant
    Filed: December 14, 2020
    Date of Patent: November 7, 2023
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Yan Yang, Zhihua Li, Wenwu Wang
  • Publication number: 20230325337
    Abstract: Provided are a data transmission device and a data transmission method, which are applied to a field of an information technology. The data transmission device includes: a signal conversion module (30) and a signal transmission module (20), wherein the signal conversion module (30) is configured to convert, at a data transmitting end, an electrical signal containing a data information into a magnon signal containing the data information; the signal transmission module (20) is configured to transmit the magnon signal containing the data information to a data receiving end; and the signal conversion module (30) is further configured to convert, at the data receiving end, the magnon signal containing the data information into the electrical signal containing the data information. The data transmission method includes transmitting the data by using the magnon signal, and no voltage or current is required in a process of transmitting the data.
    Type: Application
    Filed: August 28, 2020
    Publication date: October 12, 2023
    Applicant: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Chong Bi, Ming Liu
  • Patent number: 11764310
    Abstract: A vertical storage device, a method of manufacturing the same, and an electronic apparatus including the storage device are provided. The storage device includes: a first source/drain layer located at a first height with respect to a substrate and a second source/drain layer located at a second height different from the first height; a channel layer connecting the first source/drain layer and the second source/drain layer; and a gate stack including a storage function layer, the storage function layer extending on a sidewall of the channel layer and extending in-plane from the sidewall of the channel layer onto a sidewall of the first source/drain layer and a sidewall of the second source/drain layer.
    Type: Grant
    Filed: March 7, 2022
    Date of Patent: September 19, 2023
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Publication number: 20230276637
    Abstract: Provided are a spin orbit torque magnetic random access memory cell, a memory array and a memory, wherein the spin orbit torque magnetic random access memory cell includes: a magnetic tunnel and a selector; the selector is a two-dimensional material based selector; the magnetic tunnel junction is arranged above or below the selector; the magnetic tunnel junction includes an antiferromagnetic layer and a free layer; the free layer is adjacent to the antiferromagnetic layer; when the selector is turned on, the memory cell is conducted, a current generates a spin current which is injected into the free layer, and a magnetization direction of the free layer is switched by the exchange bias effect between the free layer and the antiferromagnetic layer.
    Type: Application
    Filed: June 24, 2020
    Publication date: August 31, 2023
    Applicant: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Guozhong Xing, Huai Lin, Ming Liu
  • Publication number: 20230253316
    Abstract: A metallization stack is provided. The metallization stack may include at least one interconnection line layer and at least one via hole layer arranged alternately on a substrate. At least one pair of adjacent interconnection line layer and via hole layer in the metallization stack includes an interconnection line in the interconnection line layer; and a via hole in the via hole layer. The via hole layer is arranged closer to the substrate than the interconnection line layer, and at least part of the interconnection line extends longitudinally in a first direction, and a sidewall of the at least part of the interconnection line in the first direction is substantially coplanar with at least upper portion of a corresponding sidewall of the via hole under the at least part of the interconnection line.
    Type: Application
    Filed: April 14, 2023
    Publication date: August 10, 2023
    Applicant: Institute Of Microelectronics, Chinese Academy Of Sciences
    Inventor: Huilong Zhu
  • Publication number: 20230187560
    Abstract: A semiconductor device having a zigzag structure, a method of manufacturing the semiconductor device, and an electronic including the semiconductor device. The semiconductor device may include a semiconductor layer (1031) extending in zigzag in a vertical direction with respect to a substrate (1001). The semiconductor layer (1031) includes one or more first portions disposed in sequence and spaced apart from each other in the vertical direction and second portions respectively disposed on and connected to opposite ends of each first portion. A second portion at one end of each first portion extends from the one end in a direction of leaving the substrate, and a second portion at the other end of the each first portion extends from the other end in a direction of approaching the substrate. First portions adjacent in the vertical direction are connected to each other by the same second portion.
    Type: Application
    Filed: March 11, 2021
    Publication date: June 15, 2023
    Applicant: Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Patent number: 11641787
    Abstract: The present disclosure provides a self-rectifying resistive memory, including: a lower electrode; a resistive material layer formed on the lower electrode and used as a storage medium; a barrier layer formed on the resistive material layer and using a semiconductor material or an insulating material; and an upper electrode formed on the barrier layer to achieve Schottky contact with the material of the barrier layer; wherein, the Schottky contact between the upper electrode and the material of the barrier layer is used to realize self-rectification of the self-rectifying resistive memory. Thus, no additional gate transistor or diode is required as the gate unit. In addition, because the device has self-rectifying characteristics, it is capable of suppressing read crosstalk in the cross-array.
    Type: Grant
    Filed: March 28, 2018
    Date of Patent: May 2, 2023
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Qing Luo, Hangbing Lv, Ming Liu
  • Patent number: 11594608
    Abstract: A gate-all-around nanowire device and a method for forming the gate-all-around nanowire device. A first fin and a dielectric layer on the first fin are formed on a substrate. The first fin includes the at least one first epitaxial layer and the at least one second epitaxial layer that are alternately stacked. The dielectric layer exposes a channel region of the first fin. A doping concentration at a lateral surface of the channel region and a doping concentration at a central region of the channel region are different from each other in the at least one second epitaxial layer. After the at least one first epitaxial layer is removed from the channel region, the at least one second epitaxial layer in the channel region serves as at least one nanowire. A gate surrounding the at least one nanowire is formed.
    Type: Grant
    Filed: September 5, 2019
    Date of Patent: February 28, 2023
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huaxiang Yin, Jiaxin Yao, Qingzhu Zhang, Zhaohao Zhang, Tianchun Ye
  • Patent number: 11569388
    Abstract: A multi-gate FinFET including a negative capacitor connected to one of its gates, a method of manufacturing the same, and an electronic device comprising the same are disclosed. In one aspect, the FinFET includes a fin extending in a first direction on a substrate, a first gate extending in a second direction crossing the first direction on the substrate on a first side of the fin to intersect the fin, a second gate opposite to the first gate and extending in the second direction on the substrate on a second side of the fin opposite to the first side to intersect the fin, a metallization stack provided on the substrate and above the fin and the first and second gates, and a negative capacitor formed in the metallization stack and connected to the second gate.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: January 31, 2023
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huilong Zhu, Zhengyong Zhu
  • Publication number: 20230005836
    Abstract: A metallization stack and a method of manufacturing the same, and an electronic device including the metallization stack are provided. The metallization stack may include at least one interconnection line layer and at least one via hole layer arranged alternately on a substrate. At least one pair of adjacent interconnection line layer and via hole layer in the metallization stack includes: an interconnection line in the interconnection line layer, and a via hole in the via hole layer. The interconnection line layer is closer to the substrate than the via hole layer. A peripheral sidewall of a via hole on at least part of the interconnection line does not exceed a peripheral sidewall of the at least part of the interconnection line.
    Type: Application
    Filed: November 6, 2020
    Publication date: January 5, 2023
    Applicant: Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Publication number: 20220416023
    Abstract: Disclosed are a semiconductor apparatus, a manufacturing method therefor, and an electronic equipment comprising the semiconductor apparatus. According to the embodiments, the semiconductor apparatus includes a first device and a second device on a substrate that are opposite each other. The first device and the second device each include a channel portion, source/drain portions on both sides of the channel portion that are connected to the channel portion, and a gate stack overlapping the channel portion. The channel portion includes a first portion extending in a vertical direction relative to the substrate and a second portion extending from the first portion in a transverse direction relative to the substrate. The second portion of the channel portion of the first device and the second portion of the channel portion of the second device extend toward or away from each other.
    Type: Application
    Filed: November 26, 2020
    Publication date: December 29, 2022
    Applicant: Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Publication number: 20220393034
    Abstract: A semiconductor device and a method of manufacturing the same, and an electronic apparatus including the semiconductor device are provided. The semiconductor device includes: an active region, on a substrate, extending substantially in a vertical direction; a gate stack formed around at least a part of a periphery of the active region, the active region including a channel region opposite to the gate stack, and a first source/drain region and a second source/drain region, and the gate stack including a gate dielectric layer, a work function tuning layer and a gate electrode material layer, and the work function tuning layer being between the gate electrode material layer and the channel region; and a first low-k dielectric layer extending from a first end of the work function tuning layer to surround a first corner of an end portion, on a side facing the channel region, of the gate electrode material layer.
    Type: Application
    Filed: June 6, 2022
    Publication date: December 8, 2022
    Applicants: Beijing Superstring Academy of Memory Technology, Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Patent number: 11508809
    Abstract: The present disclosure discloses a semiconductor device and a preparation method thereof. The semiconductor device includes: an N+ substrate, a plurality of openings opening toward a back surface formed in the N+ substrate; an N? epitaxial layer formed on the N+ substrate, the N? epitaxial layer including: an active area epitaxial layer including a plurality of P++ area rings and a plurality of groove structures, wherein single groove structure is formed on single P++ area ring; a terminal area epitaxial layer including an N+ field stop ring and a plurality of P+ guard rings; a Schottky contact formed on the active area epitaxial layer, a passivation layer formed on the terminal area epitaxial layer, and ohmic contacts formed on the back surface of the N+ substrate and in the plurality of openings.
    Type: Grant
    Filed: September 12, 2018
    Date of Patent: November 22, 2022
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Yidan Tang, Xinyu Liu, Yun Bai, Shengxu Dong, Chengyue Yang
  • Publication number: 20220337252
    Abstract: The present disclosure relates to a logic operation circuit for computation in memory, which comprises an equivalent circuit input terminal, a reference circuit input terminal, a reset input terminal and an output terminal; wherein the equivalent circuit input terminal is configured to input the equivalent voltage of a memory computing array, the reset input terminal is configured to input a reset voltage, and the reference circuit input terminal is configured to input a reference voltage; the logic operation circuit for computation in memory outputs different output voltages according to the difference between the equivalent voltage and the reference voltage, and the output voltage is output through the output terminal; the logic operation circuit of the present disclosure has a simple structure, reduced complexity and effectively saved resources.
    Type: Application
    Filed: November 24, 2021
    Publication date: October 20, 2022
    Applicant: Nanjing Institute of Intelligent Technology, Institute of Microelectronics of the Chinese Academy of
    Inventors: Delong SHANG, Yeye ZHANG, Qingyang ZENG, Shushan QIAO, Yumei ZHOU
  • Patent number: 11447876
    Abstract: An embodiment of the present disclosure provides an etching method, having the following steps: forming a modified layer having a thickness of one or several atom layers on a selected region of a surface of a semiconductor material layer by using a modifier; and removing the modified layer. When a semiconductor is processed, this method achieves precise control over the etching thickness and improves the etching rate at the same time.
    Type: Grant
    Filed: September 21, 2018
    Date of Patent: September 20, 2022
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huilong Zhu, Xiaogen Yin, Chen Li, Anyan Du, Yongkui Zhang
  • Publication number: 20220262818
    Abstract: A storage unit, a method of manufacturing the storage unit, and a three-dimensional memory. The storage unit includes: a first conductivity-type substrate; a channel layer stacked on the first conductivity-type substrate in a first direction; a second conductivity-type conduction layer including a first part and a second part that are connected, the first part being located between the first conductivity-type substrate and the channel layer, and the second part being formed in a via hole passing through the channel layer; a channel passage layer penetrating the channel layer and the first part in a negative direction of the first direction, and extending into an interior of the first conductivity-type substrate; and an insulating layer located in the channel layer and surrounding a periphery of the channel passage layer. The first conductivity-type substrate and the second conductivity-type conduction layer provide carriers required for reading and erasing operations, respectively.
    Type: Application
    Filed: July 29, 2019
    Publication date: August 18, 2022
    Applicant: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Gang Zhang, Zongliang Huo
  • Patent number: 11329149
    Abstract: There are provided a vertical semiconductor device, a method of manufacturing the same, and an electronic device including the same.
    Type: Grant
    Filed: October 31, 2018
    Date of Patent: May 10, 2022
    Assignee: Institute of Microelectronics, The Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Patent number: 11309432
    Abstract: There are provided a nanometer semiconductor device with a high-quality epitaxial layer and a method of manufacturing the same. According to an embodiment, the semiconductor device may include: a substrate; at least one nanowire spaced apart from the substrate; at least one semiconductor layer, each formed around a periphery of respective one of the at least one nanowire to at least partially surround the corresponding nanowire, wherein the semiconductor layer(s) formed around the respective nanowire(s) are separated from each other; an isolation layer formed on the substrate, exposing the at least one semiconductor layer; and a gate stack formed on the isolation layer and intersecting the at least one semiconductor layer, wherein the gate stack includes a gate dielectric layer at least partially surrounding a periphery of respective one of the at least one semiconductor layer and a gate conductor layer.
    Type: Grant
    Filed: September 27, 2019
    Date of Patent: April 19, 2022
    Assignee: Institute of Microelectronics, Chinese /Academy of Sciences
    Inventor: Huilong Zhu
  • Patent number: 11257933
    Abstract: A method for manufacturing a semiconductor device is provided. A first substrate and at least one second substrate are provided. A single crystal lamination structure is formed on the first substrate. The single crystal lamination structure includes at least one hetero-material layer and at least one channel material layer that are alternately laminated, each of the at least one hetero-material layer is bonded to an adjacent one of the at least one channel material layer at a side away from the first substrate, and each of the at least one channel material layer is formed from one of the at least one second substrate. At least one layer of nanowire or nanosheet is formed from the single crystal lamination structure. A gate dielectric layer and a gate which surround each of the at least one layer of nanowire or nanosheet is formed. A semiconductor device is also provided.
    Type: Grant
    Filed: September 23, 2020
    Date of Patent: February 22, 2022
    Assignee: Institute of Microelectronics, Chinese Academy
    Inventors: Huaxiang Yin, Qingzhu Zhang, Renren Xu
  • Patent number: 11245035
    Abstract: A multi-gate FinFET including a negative capacitor connected to one of its gates, a method of manufacturing the same, and an electronic device comprising the same are disclosed. In one aspect, the FinFET includes a fin extending in a first direction on a substrate, a first gate extending in a second direction crossing the first direction on the substrate on a first side of the fin to intersect the fin, a second gate opposite to the first gate and extending in the second direction on the substrate on a second side of the fin opposite to the first side to intersect the fin, a metallization stack provided on the substrate and above the fin and the first and second gates, and a negative capacitor formed in the metallization stack and connected to the second gate.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: February 8, 2022
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huilong Zhu, Zhengyong Zhu