Patents Assigned to Institute of Microelectronics
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Patent number: 11217493Abstract: There are provided a semiconductor device, a method of manufacturing the same, and an electronic device including the device. According to an embodiment, the semiconductor device may include a substrate; a first source/drain layer, a channel layer and a second source/drain layer stacked on the substrate in sequence, wherein the second source/drain layer comprises a first semiconductor material which is stressed; and a gate stack surrounding a periphery of the channel layer.Type: GrantFiled: April 28, 2020Date of Patent: January 4, 2022Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventor: Huilong Zhu
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Patent number: 11205750Abstract: The present disclosure provides a 1S1R memory integrated structure and a method for fabricating the same, wherein the 1S1R memory integrated structure includes: a word line metal, a resistive material layer, a selector lower electrode, a selector material layer, a selector upper electrode, an interconnection wire, and a bit line metal; wherein the selector material layer is in a shape of a groove, and the selector upper electrode is formed in the groove. According to the 1S1R memory integrated structure and its fabricating method in the present disclosure, by the change of the integrated position of the selector, the device area of the selector is much larger than the device area of the memory, which significantly reduces the requirement for the on-state current density of the selector.Type: GrantFiled: February 10, 2020Date of Patent: December 21, 2021Assignee: Institute of Microelectronics Chinese Academy of SciencesInventors: Qing Luo, Hangbing Lv, Ming Liu, Xiaoxin Xu, Cheng Lu
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Patent number: 11152516Abstract: There are provided a nanometer semiconductor device with a high-quality epitaxial layer and a method of manufacturing the same. According to an embodiment, the semiconductor device may include: a substrate; at least one nanowire spaced apart from the substrate; at least one semiconductor layer, each formed around a periphery of respective one of the at least one nanowire to at least partially surround the corresponding nanowire, wherein the semiconductor layer(s) formed around the respective nanowire(s) are separated from each other; an isolation layer formed on the substrate, exposing the at least one semiconductor layer; and a gate stack formed on the isolation layer and intersecting the at least one semiconductor layer, wherein the gate stack includes a gate dielectric layer at least partially surrounding a periphery of respective one of the at least one semiconductor layer and a gate conductor layer.Type: GrantFiled: September 27, 2019Date of Patent: October 19, 2021Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventor: Huilong Zhu
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Patent number: 11107932Abstract: There are provided a nanometer semiconductor device with a high-quality epitaxial layer and a method of manufacturing the same. According to an embodiment, the semiconductor device may include: a substrate; at least one nanowire spaced apart from the substrate; at least one semiconductor layer, each formed around a periphery of respective one of the at least one nanowire to at least partially surround the corresponding nanowire, wherein the semiconductor layer(s) formed around the respective nanowire(s) are separated from each other; an isolation layer formed on the substrate, exposing the at least one semiconductor layer; and a gate stack formed on the isolation layer and intersecting the at least one semiconductor layer, wherein the gate stack includes a gate dielectric layer at least partially surrounding a periphery of respective one of the at least one semiconductor layer and a gate conductor layer.Type: GrantFiled: September 27, 2019Date of Patent: August 31, 2021Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventor: Huilong Zhu
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Patent number: 11101321Abstract: A nonvolatile resistive switching memory comprising an insulating substrate, a lower electrode, a lower graphene barrier layer, a resistive switching functional layer, an upper graphene barrier layer, and an upper electrode, wherein the lower and/or the upper graphene barrier layer is/are capable of preventing the metal ions/atoms in the lower/upper metal electrode from diffusing into the resistive switching functional layer under an applied electric field.Type: GrantFiled: September 6, 2015Date of Patent: August 24, 2021Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Writam Banerjee, Ming Liu, Qi Liu, Hangbing Lv, Haitao Sun, Kangwei Zhang
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Patent number: 11081484Abstract: There are provided an Integrated Circuit (IC) unit, a method of manufacturing the same, and an electronic device including the IC unit. According to an embodiment, the IC unit includes a first source/drain layer, a channel layer and a second source/drain layer for a first device and a first source/drain layer, a channel layer and a second source/drain layer for a second device stacked in sequence on a substrate. In the first device, the channel layer includes a first portion and a second portion separated from each other. The first source/rain layer and the second source/drain layer each extend integrally to overlap both the first portion and the second portion of the channel layer. The IC unit further includes a first gate stack surrounding a periphery of the first portion and also a periphery of the second portion of the channel layer of the first device, and a second gate stack surrounding a periphery of the channel layer of the second device.Type: GrantFiled: March 5, 2020Date of Patent: August 3, 2021Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Huilong Zhu, Zhengyong Zhu
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Patent number: 11069808Abstract: A negative capacitance field effect transistor (NCFET) and a manufacturing method thereof. The NCFET includes: a substrate structure, including a MOS region; a gate insulating dielectric structure, covering the MOS region; and a metal gate stack layer, covering the gate insulating dielectric structure. The gate insulating dielectric structure includes an interface oxide layer, a HfO2 layer, a doping material layer, and a ferroelectric material layer, which are sequentially stacked along a direction away from the substrate structure. A ferroelectric material in the ferroelectric material layer is HfxA1-xO2, A represents a doping element, and 0.1?x?0.9. A material forming the doping material layer is AyOz or A, and a ratio of y/z is equal to 1/2, 2/3, 2/5 or 1/1. Ferroelectric characteristics, material stability, and material reliability of the NCFET are improved by increasing domain polarity of the ferroelectric material.Type: GrantFiled: December 19, 2019Date of Patent: July 20, 2021Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Huaxiang Yin, Qingzhu Zhang, Zhaohao Zhang, Tianchun Ye
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Patent number: 11024708Abstract: A semiconductor device, including: a silicon substrate; multiple fin structures, formed on the silicon substrate, where each extends along a first direction; a shallow trench insulator, located among the multiple fin structures; a gate stack, intersecting with the multiple fin structures and extending along a second direction, where first spacers are formed on two sidewalls in the first direction of the gate stack; source-or-drain regions, formed on the multiple fin structures, and located at two sides of the gate stack along the first direction; and a channel region, including a portion of the multiple fin structures located between the first spacers. and notch structures. A notch structure recessed inward is located between each of the multiple fin structures and the silicon substrate. The notch structure includes an isolator that isolates each of the multiple fin structures from the silicon substrate.Type: GrantFiled: March 20, 2020Date of Patent: June 1, 2021Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Yongliang Li, Xiaohong Cheng, Qingzhu Zhang, Huaxiang Yin, Wenwu Wang
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Patent number: 10991877Abstract: A multi-state memory and a method for manufacturing the same. A magnetoresistive tunnel junction is disposed on a spin-orbit coupling layer, and thermal annealing is performed after dopant ions are injected from a side of the magnetoresistive tunnel junction. The concentration of dopant ions in the magnetoresistive tunnel junction has a gradient variation along the direction that is perpendicular to the direction of the current and within the plane in which the spin-orbit coupling layer is located. Symmetry along the direction perpendicular to the direction of the current is broken. In a case a current flows into the spin-orbit coupling layer, resistance are outputted in multiple states in linearity with the current. The multi-state storage is achieved. It can meet a requirement on hardware of neural network synapses, and is applicable to calculation in a neural network.Type: GrantFiled: September 4, 2019Date of Patent: April 27, 2021Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Meiyin Yang, Jun Luo, Sumei Wang, Jing Xu, Yanru Li, Junfeng Li, Yan Cui, Wenwu Wang, Tianchun Ye
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Patent number: 10964529Abstract: The present disclosure provides a method for cleaning a lanthanum gallium silicate wafer which comprises the following steps: at a step of 1, a cleaning solution constituted of phosphorous acid, hydrogen peroxide and deionized water is utilized to clean the lanthanum gallium silicate wafer with a megahertz sound wave; at a step of 2, the cleaned lanthanum gallium silicate wafer is rinsed and dried by spinning; at a step of 3, a cleaning solution constituted of ammonia, hydrogen peroxide and deionized water is utilized to clean the lanthanum gallium silicate wafer with the megahertz sound wave; at a step of 4, the cleaned lanthanum gallium silicate wafer is rinsed and dried by spinning; and at a step of 5, the rinsed and dried wafer is placed in an oven to be baked.Type: GrantFiled: April 17, 2014Date of Patent: March 30, 2021Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Dongmei Li, Lei Zhou, Shengfa Liang, Xiaojing Li, Hao Zhang, Changqing Xie, Ming Liu
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Patent number: 10910278Abstract: A semiconductor device, a method of manufacturing the same and an electronic device including the semiconductor device are provided. According to embodiments, the semiconductor device may include a substrate, a first source/drain layer, a channel layer and a second source/drain layer stacked in sequence on the substrate, and a gate stack surrounding a periphery of the channel layer. The channel layer includes a channel region close to its peripheral surface and a body region disposed on an inner side of the channel region.Type: GrantFiled: September 29, 2017Date of Patent: February 2, 2021Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventor: Huilong Zhu
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Patent number: 10797178Abstract: There are provided a multi-gate FinFET including a negative capacitor connected to one of its gates, a method of manufacturing the same, and an electronic device comprising the same. The FinFET may include a fin extending in a first direction on a substrate, a first gate extending in a second direction crossing the first direction on the substrate on a first side of the fin to intersect the fin, a second gate opposite to the first gate and extending in the second direction on the substrate on a second side of the fin opposite to the first side to intersect the fin, a metallization stack provided on the substrate and above the fin and the first and second gates, and a negative capacitor formed in the metallization stack and connected to the second gate.Type: GrantFiled: August 3, 2018Date of Patent: October 6, 2020Assignee: Institute of Microelectronics Chinese Academy of SciencesInventors: Huilong Zhu, Zhengyong Zhu
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Patent number: 10756256Abstract: A magnetoresistive random access memory and a method for manufacturing the same are provided, with which a stress layer covers a part of the protective layer along a direction of a current in the spin-orbit coupling layer, so that a stress is generated on the part of the magnetic layer locally due to the stress layer, thus a lateral asymmetric structure is formed in a direction perpendicular to the current source. In a case that a current is supplied to the spin-orbit coupling layer, the spin-orbit coupling effect in the magnetic layer is asymmetric due to the stress on the part of the magnetic layer, thereby realizing a deterministic switching of the magnetic moment under the function of the stress.Type: GrantFiled: May 14, 2019Date of Patent: August 25, 2020Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Meiyin Yang, Jun Luo, Tengzhi Yang, Jing Xu
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Patent number: 10714398Abstract: There are provided a semiconductor device, a method of manufacturing the same, and an electronic device including the device. According to an embodiment, the semiconductor device may include a substrate; a first source/drain layer, a channel layer and a second source/drain layer stacked on the substrate in sequence, wherein the second source/drain layer comprises a first semiconductor material which is stressed; and a gate stack surrounding a periphery of the channel layer.Type: GrantFiled: September 28, 2017Date of Patent: July 14, 2020Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventor: Huilong Zhu
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Patent number: 10700124Abstract: A spin-orbit torque magnetoresistive random access memory, and a method for manufacturing a spin-orbit torque magnetoresistive random access memory are provided. The spin-orbit torque magnetoresistive random access memory includes a spin-orbit coupling layer and a magnetoresistive tunnel junction located on the spin-orbit coupling layer. The magnetoresistive tunnel junction includes a first magnetic layer, a tunneling layer, and a second magnetic layer that are sequentially stacked from bottom to top, and each of the first magnetic layer and the second magnetic layer has perpendicular anisotropy. In a direction of a current in the spin-orbit coupling layer, defects are generated in a part of the magnetoresistive tunnel junction by an ion implantation process.Type: GrantFiled: May 14, 2019Date of Patent: June 30, 2020Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Meiyin Yang, Jun Luo, Tengzhi Yang, Jing Xu
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Patent number: 10644020Abstract: A three-dimensional semiconductor device includes: A peripheral circuit, distributed on a substrate; a plurality of memory cells above the peripheral circuit, each of which includes: a common source region, between the memory cell and the peripheral circuit; a channel layer, distributed in a direction perpendicular to the surface of the substrate; at least one substrate contact layer, extending horizontally from the central portion of the channel layer parallel to the surface of the substrate, each comprising at least one substrate contact region; a plurality of insulating layers, located on sidewalls of the channel layer; a plurality of control gates, sandwiched between adjacent insulating layers; a gate dielectric layer, located between the channel layer and the control gates; a drain region, located at top of the channel layer; a substrate contact lead-out line, electrically connected to the substrate contact regions; and a bit line wiring, electrically connected to the drain region of each memory cell andType: GrantFiled: November 23, 2015Date of Patent: May 5, 2020Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Zongliang Huo, Tianchun Ye
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Patent number: 10644103Abstract: Provided are a semiconductor device having a charged punch-through stopper (PTS) layer to reduce punch-through and a method of manufacturing the same. In an embodiment, the semiconductor device may include a fin structure formed on a substrate; an isolation layer formed on the substrate, wherein a portion of the fin structure above the isolation layer acts as a fin of the semiconductor device; a charged PTS layer formed on side walls of a portion of the fin structure beneath the fin; and a gate stack formed on the isolation layer and intersecting the fin. The semiconductor device may be an n-type device or a p-type device. For the n-type device, the PTS layer may have net negative charges, and for the p-type device, the PTS layer may have net positive charges.Type: GrantFiled: October 18, 2016Date of Patent: May 5, 2020Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Huilong Zhu, Xing Wei
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Patent number: 10644100Abstract: The present disclosure relates to the field of semiconductor Integrated Circuit (IC) manufacture, and provides an InGaAs-based double-gate PMOS Field Effect Transistor (FET). The FET includes a bottom gate electrode, a bottom gate dielectric layer, a bottom gate interface control layer, an InGaAs channel layer, an upper interface control layer, a highly doped P-type GaAs layer, an ohmic contact layer, source/drain metal electrodes, a top gate dielectric layer and a top gate electrode. The source/drain metal electrodes are located on opposite sides of the ohmic contact layer. A gate trench structure is etched to an upper surface of the interface control layer between the source and drain metal electrodes. The top gate dielectric layer uniformly covers an inner surface of the gate trench structure, and the top gate electrode is provided on the top gate dielectric layer.Type: GrantFiled: December 28, 2016Date of Patent: May 5, 2020Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Shengkai Wang, Honggang Liu, Bing Sun, Hudong Chang
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Patent number: 10643905Abstract: There are provided an Integrated Circuit (IC) unit, a method of manufacturing the same, and an electronic device including the IC unit. According to an embodiment, the IC unit includes a first source/drain layer, a channel layer and a second source/drain layer for a first device and a first source/drain layer, a channel layer and a second source/drain layer for a second device stacked in sequence on a substrate. In the first device, the channel layer includes a first portion and a second portion separated from each other. The first source/rain layer and the second source/drain layer each extend integrally to overlap both the first portion and the second portion of the channel layer. The IC unit further includes a first gate stack surrounding a periphery of the first portion and also a periphery of the second portion of the channel layer of the first device, and a second gate stack surrounding a periphery of the channel layer of the second device.Type: GrantFiled: May 23, 2019Date of Patent: May 5, 2020Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Huilong Zhu, Zhengyong Zhu
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Patent number: 10636699Abstract: A method of manufacturing three-dimensional semiconductor device, comprising the steps of: a) forming a device unit on a substrate, the said device includes a plurality of stack structures composed of the first material layer and the second material layer stacked along a direction perpendicular to the substrate surface; b) forming a contact lead-out region around the said device unit, the contact lead-out region comprises a plurality of sub-partitions, each of the sub-partitions respectively exposes a different second material layer; c) forming a photoresist on said substrate, covering said plurality of sub-partitions, exposing a portion of said second material layer; d) using the photoresist as a mask, simultaneously etching the portion of the second material layer exposed by said plurality of sub-partitions, until another second material layer beneath said second material layer is exposed; e) slimming the size of the photoresist to expose a portion of said another second material layer; f) repeating said stType: GrantFiled: July 10, 2014Date of Patent: April 28, 2020Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventor: Zongliang Huo