Patents Assigned to Institute of Microelectronics
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Patent number: 11482279Abstract: A Static Random Access Memory (SRAM) cell that may include a first pull-up transistor, a second pull-up transistor, a first pull-down transistor, a second pull-down transistor, a first pass-gate transistor and a second pass-gate transistor provided at two levels on a substrate. The respective transistors may be vertical transistors. The first pull-up transistor and the second pull-up transistor may be provided at a first level, and the first pull-down transistor, the second pull-down transistor, the first pass-gate transistor and the second pass-gate transistor may be provided at a second level different from the first level. A region where the first pull-up transistor and the second pull-up transistor are located and a region where the first pull-down transistor, the second pull-down transistor, the first pass-gate transistor and the second pass-gate transistor are located may at least partially overlap in a vertical direction with respect to an upper surface of the substrate.Type: GrantFiled: October 31, 2019Date of Patent: October 25, 2022Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventor: Huilong Zhu
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Publication number: 20220337252Abstract: The present disclosure relates to a logic operation circuit for computation in memory, which comprises an equivalent circuit input terminal, a reference circuit input terminal, a reset input terminal and an output terminal; wherein the equivalent circuit input terminal is configured to input the equivalent voltage of a memory computing array, the reset input terminal is configured to input a reset voltage, and the reference circuit input terminal is configured to input a reference voltage; the logic operation circuit for computation in memory outputs different output voltages according to the difference between the equivalent voltage and the reference voltage, and the output voltage is output through the output terminal; the logic operation circuit of the present disclosure has a simple structure, reduced complexity and effectively saved resources.Type: ApplicationFiled: November 24, 2021Publication date: October 20, 2022Applicant: Nanjing Institute of Intelligent Technology, Institute of Microelectronics of the Chinese Academy ofInventors: Delong SHANG, Yeye ZHANG, Qingyang ZENG, Shushan QIAO, Yumei ZHOU
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Publication number: 20220328275Abstract: The present disclosure discloses a power device including at least one vacuum packaged unit structure. The unit structure comprises a silicon substrate (100) and an emitter (200), a light modulator (300) and a collector (400) formed on the silicon substrate (100). On the one hand, the unified silicon-based process is compatible with the existing commercial process, so that it is easy for integration, simple for manufacture, and low in cost; on the other hand, the light modulator (300) is introduced and formed on the silicon substrate by a silicon-based process, which enhances field emission efficiency of the emitter (200), offsets the inconsistency of distances between the tips of the emitters (200) and the collector (400) caused by unevenness of the emitters, and increases the process redundancy of the cold cathode emitter.Type: ApplicationFiled: January 20, 2021Publication date: October 13, 2022Applicant: INSTITUTE OF MICROELECTRONICS OF THE CHINESE ACADEMY OF SCIENCESInventors: Fazhan ZHAO, Jianhui BU, Jiajun LUO
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Publication number: 20220320424Abstract: The disclosure discloses a selector and a preparation method thereof. The selector includes: a substrate 1; an alternating layer 2 provided on the substrate 1, the alternating layer 2 being alternately formed by a bottom electrode layer 21 and an insulating layer 22; the alternating layer 2 is provided with a U-shaped groove; a selective layer 3 and a dielectric layer 4 being sequentially deposited in a direction from an inner wall of the U-shaped groove to a center of the U-shaped groove; and a top electrode layer 5 is filled in a concave space defined by the dielectric layer 4. The selector and the preparation method according to one or more embodiments of the disclosure can address the technical problem of high leakage current of the selector in existing technology and provide a selector with low leakage current.Type: ApplicationFiled: December 14, 2020Publication date: October 6, 2022Applicant: INSTITUTE OF MICROELECTRONICS OF THE CHINESE ACADEMY OF SCIENCESInventors: Qing LUO, Yaxin DING, Hangbing LV, Ming LIU
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Publication number: 20220310146Abstract: The disclosure provides a spintronic device, a SOT-MRAM storage cell, a storage array and a in-memory computing circuit. The spintronic device includes a ferroelectric/ferromagnetic heterostructure, a magnetic tunnel junction, and a heavy metal layer between the ferroelectric/ferromagnetic heterostructure and the magnetic tunnel junction; the ferroelectric/ferromagnetic heterostructure includes a multiferroic material layer and a ferromagnetic layer arranged in a stacked manner, and the magnetic tunnel junction includes a free layer, an insulating layer and a reference layer arranged in a stacked manner, and the heavy metal layer is disposed between the ferromagnetic layer and the free layer. According to one or more embodiments of the disclosure, the spintronic device, the SOT-MRAM storage cell, the storage array and the in-memory computing circuit can realize deterministic magnetization inversion under the condition of no applied field assistance.Type: ApplicationFiled: August 7, 2020Publication date: September 29, 2022Applicant: INSTITUTE OF MICROELECTRONICS OF THE CHINESE ACADEMY OF SCIENCESInventors: Guozhong XING, Huai LIN, Cheng LU, Qi LIU, Hangbing LV, Ling LI, Ming LIU
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Patent number: 11447876Abstract: An embodiment of the present disclosure provides an etching method, having the following steps: forming a modified layer having a thickness of one or several atom layers on a selected region of a surface of a semiconductor material layer by using a modifier; and removing the modified layer. When a semiconductor is processed, this method achieves precise control over the etching thickness and improves the etching rate at the same time.Type: GrantFiled: September 21, 2018Date of Patent: September 20, 2022Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Huilong Zhu, Xiaogen Yin, Chen Li, Anyan Du, Yongkui Zhang
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Patent number: 11430385Abstract: A pixel compensation circuit including a first transistor, a second transistor, a third transistor, a fourth transistor, a fifth transistor, a sixth transistor, a first capacitor, a second capacitor, and an organic light-emitting diode, each of the first transistor to the sixth transistor including a drain, a source and a gate.Type: GrantFiled: August 2, 2018Date of Patent: August 30, 2022Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Di Geng, Yue Su, Ling Li, Nianduan Lu, Ming Liu
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Patent number: 11424323Abstract: A semiconductor device with a C-shaped active area and an electronic apparatus including the same is disclosed. The semiconductor device may include a first device and a second device opposite to each other on a substrate, each of which includes: a channel portion extending vertically on the substrate; source/drain portions located at the upper and lower ends of the channel portion and along the channel portion, the source/drain portions and the channel portion constitute a C-shaped structure; and a gate stack overlapping the channel portion on an inner sidewall of C-shaped structure, the gate stack has a portion surrounded by the C-shaped structure. The openings of the C-shaped structures of the two devices are opposite to each other. At least a portion of the gate stack of the first device close to the channel portion and that of the second device close to the channel portion are substantially coplanar.Type: GrantFiled: December 4, 2020Date of Patent: August 23, 2022Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventor: Huilong Zhu
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Publication number: 20220261621Abstract: Disclosed are an artificial sensory nervous circuit and a manufacturing method thereof. The artificial sensory nervous circuit includes a sensor (S), a first memristor (RS), and a neuron circuit, where the first memristor (RS) has a unidirectional resistance characteristic. The sensor (S) is configured to sensing an external signal and generating an excitation signal according to the external signal. The first memristor (RS) is configured to generating a response signal according to the excitation signal. The neuron circuit is configured to perform charging and discharging according to the response signal so as to output a pulse signal. With the artificial sensory nervous circuit and the manufacturing method thereof, sensitivity and habituation characteristics of biological perception are realized by using a simple circuit.Type: ApplicationFiled: November 13, 2019Publication date: August 18, 2022Applicant: INSTITUTE OF MICROELECTRONICS OF THE CHINESE ACADEMY OF SCIENCESInventors: Qi LIU, Zuheng WU, Tuo SHI, Ming LIU, Hangbing LV, Xumeng ZHANG, Wei WANG
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Publication number: 20220262818Abstract: A storage unit, a method of manufacturing the storage unit, and a three-dimensional memory. The storage unit includes: a first conductivity-type substrate; a channel layer stacked on the first conductivity-type substrate in a first direction; a second conductivity-type conduction layer including a first part and a second part that are connected, the first part being located between the first conductivity-type substrate and the channel layer, and the second part being formed in a via hole passing through the channel layer; a channel passage layer penetrating the channel layer and the first part in a negative direction of the first direction, and extending into an interior of the first conductivity-type substrate; and an insulating layer located in the channel layer and surrounding a periphery of the channel passage layer. The first conductivity-type substrate and the second conductivity-type conduction layer provide carriers required for reading and erasing operations, respectively.Type: ApplicationFiled: July 29, 2019Publication date: August 18, 2022Applicant: Institute of Microelectronics, Chinese Academy of SciencesInventors: Gang Zhang, Zongliang Huo
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Publication number: 20220253684Abstract: Disclosed is an afferent neuron circuit, which includes: a resistance Rc and a volatile threshold switching device TS, wherein the volatile threshold switching device TS is provided with a parasitic capacitor Cparasitic; a first end of the resistance Rc serves as a signal input terminal, and a second end of the resistance Rc serves as a signal output terminal; and a first end of the volatile threshold switching device TS is connected to the signal output terminal, and a second end of the volatile threshold switching device TS is grounded. The afferent neuron circuit provided in the content of the present disclosure has a simple structure and good scalability and is suitable for large-scale integration.Type: ApplicationFiled: November 29, 2019Publication date: August 11, 2022Applicant: INSTITUTE OF MICROELECTRONICS OF THE CHINESE ACADEMY OF SCIENCESInventors: Qi LIU, Xumeng ZHANG, Ming LIU, Hangbing LV, Zuheng WU
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Publication number: 20220244872Abstract: The present disclosure discloses a storage method, a data processing method, a device and an apparatus based on a non-volatile memory, the method comprising: acquiring a weight value that needs to be stored in the non-volatile memory; determining a conductivity value corresponding to the weight value according to a first conversion method if the non-volatile memory is a high-resistance storage device; determining a conductivity value corresponding to the weight value according to a second conversion method which is different from the first conversion method if the non-volatile memory is a low-resistance memory device; and setting the non-volatile memory according to the conductivity value to store the weight value.Type: ApplicationFiled: April 22, 2021Publication date: August 4, 2022Applicant: INSTITUTE OF MICROELECTRONICS OF THE CHINESE ACADEMY OF SCIENCESInventors: Feng ZHANG, Qiang HUO, Zhisheng CHEN, Qirui REN
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Patent number: 11404568Abstract: A semiconductor device, including: a substrate; a first source/drain layer, a channel layer, and a second source/drain layer sequentially stacked on the substrate and adjacent to each other, and a gate stack formed around an outer circumference of the channel layer; wherein at least one interface structure is formed in at least one of the first source/drain layer and the second source/drain layer, the conduction band energy levels at both sides of the interface structure are different and/or the valence band energy levels are different.Type: GrantFiled: November 30, 2018Date of Patent: August 2, 2022Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Huilong Zhu, Zhenhua Wu
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Patent number: 11380689Abstract: A semiconductor memory device, a method of manufacturing the same, and an electronic device including the semiconductor memory device are disclosed.Type: GrantFiled: September 21, 2018Date of Patent: July 5, 2022Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventor: Huilong Zhu
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Publication number: 20220208258Abstract: A Static Random Access Memory (SRAM) cell that may include a first pull-up transistor, a second pull-up transistor, a first pull-down transistor, a second pull-down transistor, a first pass-gate transistor and a second pass-gate transistor provided at two levels on a substrate. The respective transistors may be vertical transistors. The first pull-up transistor and the second pull-up transistor may be provided at a first level, and the first pull-down transistor, the second pull-down transistor, the first pass-gate transistor and the second pass-gate transistor may be provided at a second level different from the first level. A region where the first pull-up transistor and the second pull-up transistor are located and a region where the first pull-down transistor, the second pull-down transistor, the first pass-gate transistor and the second pass-gate transistor are located may at least partially overlap in a vertical direction with respect to an upper surface of the substrate.Type: ApplicationFiled: October 31, 2019Publication date: June 30, 2022Applicant: INSTITUTE OF MICROELECTRONICS CHINESE ACADEMY OF SCIENCESInventor: Huilong ZHU
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Patent number: 11373948Abstract: An interconnection structure and a method of manufacturing the same, and an electronic device including the interconnection structure are provided.Type: GrantFiled: April 13, 2018Date of Patent: June 28, 2022Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventor: Huilong Zhu
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Patent number: 11366946Abstract: The present disclosure provides a method and an apparatus for obtaining surface potential.Type: GrantFiled: August 9, 2018Date of Patent: June 21, 2022Assignee: THE INSTITUTE OF MICROELECTRONICS OF CHINESE ACADEMY OF SCIENCESInventors: Nianduan Lu, Ling Li, Ming Liu
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Patent number: 11361799Abstract: A semiconductor memory device including a substrate; an array of memory cells arranged in rows and columns on the substrate, each memory cell comprising a vertical pillar-shaped active region having upper and lower source/drain regions and a channel region, and a gate stack formed around the channel region; a plurality of bit lines on the substrate, each bit line located below a column of memory cells and electrically connected to the lower source/drain regions of the memory cells; and a plurality of word lines on the substrate, each word line extending in a row direction and connected to gate conductors of the memory cells in a row of memory cells, each word line comprising first portions extending along peripheries of the memory cells and second portions extending between the first portions, the first portions of the word line extending in a conformal manner with sidewalls of the upper source/drain regions.Type: GrantFiled: September 21, 2018Date of Patent: June 14, 2022Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventor: Huilong Zhu
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Patent number: 11329149Abstract: There are provided a vertical semiconductor device, a method of manufacturing the same, and an electronic device including the same.Type: GrantFiled: October 31, 2018Date of Patent: May 10, 2022Assignee: Institute of Microelectronics, The Chinese Academy of SciencesInventor: Huilong Zhu
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Patent number: 11309432Abstract: There are provided a nanometer semiconductor device with a high-quality epitaxial layer and a method of manufacturing the same. According to an embodiment, the semiconductor device may include: a substrate; at least one nanowire spaced apart from the substrate; at least one semiconductor layer, each formed around a periphery of respective one of the at least one nanowire to at least partially surround the corresponding nanowire, wherein the semiconductor layer(s) formed around the respective nanowire(s) are separated from each other; an isolation layer formed on the substrate, exposing the at least one semiconductor layer; and a gate stack formed on the isolation layer and intersecting the at least one semiconductor layer, wherein the gate stack includes a gate dielectric layer at least partially surrounding a periphery of respective one of the at least one semiconductor layer and a gate conductor layer.Type: GrantFiled: September 27, 2019Date of Patent: April 19, 2022Assignee: Institute of Microelectronics, Chinese /Academy of SciencesInventor: Huilong Zhu