Abstract: Disclosed are system and method for characterizing a system consisting of a fluid sample on a two sided stage, utilizing data obtained by applying, from both sides thereof, beams of electromagnetic radiation to a fluid coated surface in a containing cell volume. The beams can have the same or different wavelength content and/or polarization state, and can be applied at the same or different magnitude angles-of-incidence, and a third typically unpolarized beam can be applied at a normal angle-of-incidence.

Abstract: Disclosed is the application of spatial filters and beam energy homogenizing systems in ellipsometer and the like systems prior to a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary intensity profile, so that electromagnetic beam intensity is caused to quickly decay to zero, rather than, for instance, demonstrate an irregular profile as a function of radius.

Abstract: Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system, and to regression based methodology for evaluating and compensating the effects of the presence of electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.

Abstract: Disclosed are spectrophotometer systems and methodology for obtaining data of improved precision therefrom, including replacement of data determined to be suspect based on comparison of multiple baselines.

Abstract: Disclosed is a spectroscopic Ellipsometer having pseudo-achromatic compensator(s) having fast axes which vary with wavelength and which provide, a range of retardations, (that is, maximum retardance minus minimum retardance), of less than 90 degrees over a range of wavelengths, said range of retardations being bounded by a minimum of preferably at least 30 degrees, to a maximum of less than 135 degrees. Calibration is achieved by a Mathematical Regression based technique involving, where desirable, Parameterization of Calibration Parameters. Various Dimensional Data Set(s) obtained with the Spectroscopic Ellipsometer configured in a Sample, present” or in a Straight-through” configuration, are variously normalized to D.C., A.C. or combination D.C. and A.C. components. Sample analysis using a detector provided intensity signal simultaneously comprising 2&ohgr; and 4&ohgr; signals simultaneously, and use of un-normalized A.C. and/or D.C. signals in reflectance monitoring are also disclosed.

Abstract: Disclosed are multi-element lenses which demonstrate reduced achromatic focal length and reduced electromagentic beam spot size dispersal effects in ellipsometer and polarimeter systems. Also disclosed is methodology for evaluating parameters in parameterized equations which enables calculating retardance entered to, or between, orthogonal components in a beam of electromagnetic radiation which is caused to pass through input and/or output optical elements and interact with a material system, by each of the input and output optical elements, substantially uncorrelated with retardation entered by the material system.

Abstract: A method of evaluating mathematical model parameters which describe directions and magnitudes of real and imaginary components of orthogonally related Kramers-Kroenig consistent dielectric functions or complex refractive indicies in an optically thick material system which presents with an optical axis oriented either in-plane or out-of-plane, with respect to an alignment surface of the optically thick material system. The method is particularly applicable to investigation of optically thick material systems which are uniaxial or biaxial using IR range wavelengths.

Abstract: Disclosed is an odd bounce image rotating system with a sequence of an odd number of reflecting elements, such that a polarized electromagnetic beam caused to enter, reflectively interacts with the odd number of reflecting elements and exits along an essentially non-deviated, non-displaced locus, but with an azimuthally rotated polarization state. Application to, and methodology of application to set azimuthal angles of polarization in spectroscopic ellipsometer, polarimeter and the like systems is also disclosed.

Abstract: Disclosed is methodology for determination of parameters which characterize parameters such as thickness, color or quality of films deposited onto objects of arbitrary shapes, utilizing spectroscopic ellipsometry applied to standard shaped objects.

Abstract: Disclosed is a method for determination of bulk refractive indicies of fluids utilizing thin films thereof on a roughened surface of a two sided rigid or semi-rigid object.

Abstract: Disclosed are systems for, and methods of controlling radial energy density profiles in, and/or cross-section dimensioning of electromagnetic beams in polarimeters, ellipsometers, reflectometers and spectrophotometers.

Abstract: Disclosed are ellipsometer and polarimeter systems which have multi-element input and output lenses that demonstrate essentially the same focal length at each wavelength in a spectroscopic range of wavelengths.

Abstract: Disclosed are spectrophotometer, polarimeter, and ellipsometer systems which have multiple easily, sequentially, positionable detector systems therein mounted to allow easy positioning thereof, to for instance, allow sequential monitoring of ellipsometric and spectrophotometric signals, without removal of any detector system from the spectrophotometer, polarimeter, or ellipsometer system. Also disclosed are methods of use wherein-different detectors in a positionable multiple detector containing system are utilized during different electromagnetic beam detection steps.

Abstract: Disclosed is a rotating compensator sample system investigation system which includes a source of a beam of electromagnetic radiation, a polarizer, a stage for supporting a sample system, a beam splitting analyzer, and at least two detector systems which are positioned each to intercept a different of the at least two electromagnetic beams which emerge from the beam splitting analyzer. Also disclosed is a regression based approach to calibration which simultaneously extracts a sample system PSI and DELTA.

Abstract: Disclosed is the application of spatial filter(s) in rotating compensator ellipsometer systems prior to or after a sample system. The purpose is, for instance, to eliminate a radially outer annulus of a generally arbitrary Profile beam that presents with low intensity level irregular content, so that electromagnetic beam intensity is caused to quickly decay to zero as a function of radius.

Abstract: Disclosed is spectroscopic ellipsometer system mediated methodology for quantifying thickness and impurity profile defining parameters in mathematical models of impurity profile containing thin membranes having two substantially parallel surfaces which are separated by a thickness, wherein the spectroscopic ellipsometer system operates in near-IR and IR wavelength ranges.

Abstract: Disclosed is a method of evaluating sample system anisotropic refractive indices, and orientations thereof with respect to an alignment surface, in multiple dimensions. The preferred method involves a sequence of steps which allows overcoming mathematical model parameter correlation during mathematical regression parameter evaluation, even though individually, steps of the present invention method wherein anisotropic refractive indices, or differences therebetween, are evaluated, require that only a relatively simple one dimensional data set be acquired.

Abstract: A Spectroscopic Rotating Compensator Material System Investigation System including a Dual Waveplate Pseudo-Achromatic Compensator System, and a Photo-Array for simultaneously detecting a Multiplicity of Wavelengths, is disclosed. The Spectroscopic Rotating Compensator Material System Investigation System is calibrated by a Mathematical Regression based technique involving, where desirable, Parameterization of Calibration Parameters. Calibration is possible utilizing various dimensional Data Set(s) obtained with the Spectroscopic Rotating Compensator Material System Investigation System in a “Material System present” or in a Straight-through” configuration, said data sets being variously normalized to D.C., A.C. or combination D.C. and A.C. components thereof.

Abstract: Disclosed is a source of polychromatic electromagnetic radiation which, utilizing a beam combiner system, combines beams of polychromatic electromagnetic radiation from a plurality of sources to provide a relatively broad and flattened intensity characteristic vs. wavelength output spectrum, and its application in material system investigation systems, such as ellipsometers, spectrophotometers and polarimeters which comprise a polychromatic source of electromagnetic radiation.

Abstract: Disclosed is an electromagnetic beam polarizer system which provides a sequential combination of a Brewster Angle and other than Brewster Angle polarizer system in combination with reflective mirrors, which elements are arranged in any functional order. The electromagnetic beam polarizer system is more compact than multiple Brewster angle polarizer systems, and demonstrates a high extinction coefficient between electromagnetic radiation beam orthogonal components in use.