Patents Assigned to J.A. Woollam Co. Inc.
  • Combined use of oscillating means and ellipsometry to determine uncorrelated effective thickness and optical constants of material deposited from a fluid
    Patent number: 7209234
    Abstract: A combined ellipsometer and oscillator system applied to a chamber for containing fluid, and method of decorrelated determination of thickness and optical constants of depostable materials present in a fluid. In use the ellipsometer determines the product of thickness and optical constant, and the oscillator system changes frequency of oscillation proportional to the thickness of material deposited upon a surface of an element therein.
    Type: Grant
    Filed: April 14, 2006
    Date of Patent: April 24, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: John A. Woollam, James D. Welch
  • Ellipsometric investigation of thin films
    Patent number: 7193709
    Abstract: Use of differences in spectroscopic spectra resulting from multiple sample investigation, or sequential investigation of the same sample in evaluation of sample characterizing parameters such as ultra-thin film thickness.
    Type: Grant
    Filed: January 27, 2004
    Date of Patent: March 20, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Thomas E. Tiwald
  • Time efficient method for investigating sample systems with spectroscopic electromagnetic radiation
    Patent number: 7193708
    Abstract: Time efficient methodology for investigating a sample system using electromagnetic wavelengths which are not absorbed by oxygen and/or water vapor during evacuation or purging of a substantially enclosed space in which is present the sample system, followed by using wavelengths which are absorbed by oxygen and/or water vapor after the evacuation or purging is sufficiently completed.
    Type: Grant
    Filed: October 12, 2003
    Date of Patent: March 20, 2007
    Assignee: J.A. Woollam Co., Inc
    Inventor: Craig M. Herzinger
  • Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses
    Patent number: 7193710
    Abstract: Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition, and at least one continuously rotating or step-wise rotatable compensator which transmits an electromagnetic beam therethrough and imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation; and at least one multiple element lens which also transmits the electromagnetic beam therethrough.
    Type: Grant
    Filed: April 22, 2004
    Date of Patent: March 20, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Martin M. Liphardt, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He, John A. Woollam
  • Method of determining bulk refractive indicies of liquids from thin films thereof
    Patent number: 7187443
    Abstract: Disclosed is a method for determination of bulk refractive indicies of flowable liquids utilizing thin films thereof on a roughened surface of a rigid or semi-rigid object.
    Type: Grant
    Filed: April 14, 2004
    Date of Patent: March 6, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Ronald A. Synowicki, Thomas E. Tiwald
  • Dielectric function of thin metal films determined by combined transmission spectroscopic ellipsometry and intensity measurements
    Patent number: 7167241
    Abstract: Determination of thin metal film dielectric function and layer thicknesses using simultaneous transmission spectroscopic ellipsometric (SE) and transmission intensity (T) measurements obtained in-situ to break correlation between thickness and optical constants of very thin absorbing films, preferably using only A.C. Components of ellipsometric and intensity characterizing electromagnetic radiation which transmits through said substrate and enters a detector.
    Type: Grant
    Filed: July 4, 2004
    Date of Patent: January 23, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Gregory K. Pribil
  • Spectroscopic ellipsometer and polarimeter systems
    Patent number: 7158231
    Abstract: A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system being present in an environmental control chamber.
    Type: Grant
    Filed: November 1, 2003
    Date of Patent: January 2, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: John A. Woollam, Blaine D. Johs, Craig M. Herzinger, Ping He, Martin M. Liphardt, Galen L. Pfeiffer
  • Methodology for providing good data at all wavelengths over a spectroscopic range
    Patent number: 7151605
    Abstract: Disclosed is methodology for obtaining data of improved precision, including detection and replacement of data determined to be suspect to provide good data over a spectroscopic range of wavelengths.
    Type: Grant
    Filed: December 11, 2004
    Date of Patent: December 19, 2006
    Assignee: J.A. Woollam Co., Inc
    Inventors: Craig M. Herzinger, Steven E. Green, Ronald A. Synowicki, James D. Welch
  • System and method for setting and compensating errors in AOI and POI of a beam of EM radiation
    Patent number: 7136172
    Abstract: System and methodology for setting, and compensating detected errors between intended and realized Angle-of-Incidence (AOI) and Plane-Of-Incidence (POI) settings in ellipsometer and the like systems during analysis of sample characterizing data.
    Type: Grant
    Filed: June 2, 2004
    Date of Patent: November 14, 2006
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Christopher A. Goeden, Galen L. Pfeiffer, Martin M. Liphardt
  • Alignment of ellipsometer beam to sample surface
    Patent number: 7136162
    Abstract: Disclosed is a system and method of aligning, preferably by an automated procedure, a beam of electromagnetic radiation provided by a source thereof so that it approaches a sample at a specific location upon its surface, at a known angle, then reflects therefrom and enters a data detector.
    Type: Grant
    Filed: October 12, 2003
    Date of Patent: November 14, 2006
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Craig M. Herzinger, Brian D. Guenther, Steven E. Green, Galen L. Pfeiffer, Ping He
  • Method of applying parametric oscillators to model dielectric functions
    Patent number: 7110912
    Abstract: Methodology for segmentally modeling Real and Imaginary Parts of Optical Constants or Dielectric Functions using Kroneig-Kramer (K-K) Consistant Oscillators with substantially definite start and end points.
    Type: Grant
    Filed: May 20, 2004
    Date of Patent: September 19, 2006
    Assignee: J.A. Woollam Co., INC
    Inventor: Thomas E. Tiwald
  • Ellipsometer or polarimeter and the like system with beam chromatic shifting and directing means
    Patent number: 7099006
    Abstract: An electromagnetic beam chromatic shifting and directing means for use in reflectively directing a spectroscopic beam of electromagnetic radiation while de-emphasizing visual wavelength intensity and simultaneously emphasizing both IR and UV wavelength intensities, applied in ellipsometer or polarimeter and the like systems.
    Type: Grant
    Filed: July 7, 2003
    Date of Patent: August 29, 2006
    Assignee: J.A. Woollam Co., INC
    Inventors: Blaine D. Johs, Galen L. Pfeiffer, Jeffrey S. Hale, Christopher A. Goeden
  • Sample orientation system and method
    Patent number: 7084978
    Abstract: Disclosed are systems and methodology for orienting the vertical position, and tilt, of samples, as applied in ellipsometer and the like systems.
    Type: Grant
    Filed: July 8, 2005
    Date of Patent: August 1, 2006
    Assignee: J.A. Woollam Co., Inc.
    Inventor: Martin M. Liphardt
  • Discrete polarization state spectroscopic ellipsometer system and method of use
    Patent number: 7075650
    Abstract: A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The prefered spectroscopic ellipsometer system has no parts which move during data collection, and it provides a progressive plurality of sequentially discrete, rather than continuously varying, polarization states.
    Type: Grant
    Filed: July 7, 2003
    Date of Patent: July 11, 2006
    Assignee: J.A. Woollam Co. Inc.
    Inventors: Blaine D. Johs, Martin M. Liphardt, Ping He, Jeffrey S. Hale
  • System for and method of investigating the exact same point on a sample substrate with at least two wavelengths
    Patent number: 7057717
    Abstract: Disclosed are system for and method of analyzing the substantially the exact same point on a sample system with at least two wavelengths, or at least two ranges of wavelengths for which the focal lengths do not vary more than within an acceptable amount.
    Type: Grant
    Filed: April 30, 2003
    Date of Patent: June 6, 2006
    Assignee: J.A. Woollam Co., INC
    Inventors: Martin M. Liphardt, Blaine D. Johs, Craig M. Herzinger, Ping He, Christopher A. Goeden, John A. Woollam, James D. Welch
  • Combined use of oscillating means and ellipsometry to determine uncorrelated effective thickness and optical constants of accumulated material
    Patent number: 7030982
    Abstract: A combined ellipsometer and oscillator system and method of decorrelated determination of thickness and optical constants of deposted materials. In use the ellipsometer determines the product of thickness and optical constant, and the oscillator system changes frequency of oscillation proportional to the thickness of material deposited upon a surface of an element therein.
    Type: Grant
    Filed: December 25, 2003
    Date of Patent: April 18, 2006
    Assignee: J.A. Woollam Co., Inc.
    Inventors: John A. Woollam, James D. Welch
  • Tracking temperature change in birefringent materials
    Patent number: 7025501
    Abstract: A method for tracking change in Temperature of Uniaxial or Biaxial Anisotropic Samples utilizing polarized electromagnetic radiation.
    Type: Grant
    Filed: June 17, 2004
    Date of Patent: April 11, 2006
    Assignee: J. A. Woollam Co., INC
    Inventors: Blaine D. Johs, Miroslav Micovic
  • Spectrophotometer, ellipsometer, polarimeter and the like systems
    Patent number: 6982792
    Abstract: Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.
    Type: Grant
    Filed: February 28, 2003
    Date of Patent: January 3, 2006
    Assignee: J.A. Woollam Co. INC
    Inventors: John A. Woollam, Steven E. Green, Ping He, Blaine D. Johs, Craig M. Herzinger, Galen L. Pfeiffer, Brian D. Guenther, Martin M. Liphardt
  • Monochromator system and applications thereof
    Patent number: 6982789
    Abstract: A monochromator system applicable in spectrophotometer, polarimeter and ellipsometer systems which operate over a large range of wavelengths, including a stage which enables position adjustment of the location of a source of electromagnetic radiation in lateral (X), longitudinal (Y) and vertical (Z) directions, from a common location outside an enclosure, and including multiple detector systems mounted in a manner which allows easily, sequentially, via mechanical motion, placing a first and then a second thereof so as to receive a beam of electromagnetic radiation.
    Type: Grant
    Filed: August 8, 2003
    Date of Patent: January 3, 2006
    Assignee: J.A. Woollam Co. Inc.
    Inventor: Duane E. Meyer
  • Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters
    Patent number: 6940595
    Abstract: Disclosed is application of oblique angle of incidence, reflection and/or transmission mode spectroscopic ellipsometry PSI and/or DELTA, (including combinations thereof and/or mathematical equivalents), vs. wavelength data to monitor and/or control fabrication of multiple layer high/low refractive index band-pass, band-reject and varied attenuation vs. wavelength filters, either alone or in combination with transmissive non-ellipsometric electromagnetic beam turning point vs. layer data obtained at an essentially normal angle of incidence.
    Type: Grant
    Filed: July 15, 2002
    Date of Patent: September 6, 2005
    Assignee: J.A. Woollam Co. Inc.
    Inventors: Blaine D. Johs, Jeffrey S. Hale, John A. Woollam, Craig M. Herzinger