Patents Assigned to J.A. Woollam Co. Inc.
  • Spectrophotometer, ellipsometer, polarimeter and the like systems
    Patent number: 7327456
    Abstract: Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.
    Type: Grant
    Filed: June 6, 2005
    Date of Patent: February 5, 2008
    Assignee: J.A. Woollam Co., Inc.
    Inventors: John A. Woollam, Steven E. Green, Ping He, Blaine D. Johs, Craig M. Herzinger, Galen L. Pfeiffer, Brian D. Guenther, Martin M. Liphardt, Gerald T. Cooney
  • Aspects of producing, directing, conditioning, impinging and detecting spectroscopic electromagnetic radiation from small spots on samples
    Patent number: 7317529
    Abstract: Systems and methods for providing and enhancing electromagnetic radiation beam radial energy homogeneity and intensity vs. wavelength content, for reliably directing electromagnetic radiation emitted by a source thereof in a common direction, for achromatically reducing spot size on a sample (eg. liquid cavity containing lenses and low aberration 1:1 imaging systems modified to perform as spatial filters), and for directing different wavelengths into different detectors, in ellipsometer, polarizer or the like systems.
    Type: Grant
    Filed: August 27, 2004
    Date of Patent: January 8, 2008
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Ping He, Blaine D. Johs, Galen L. Pfeiffer, James D. Welch, John A. Woollam
  • Combined spatial filter and relay systems
    Patent number: 7317530
    Abstract: Low aberration relay systems modified to perform as spatial filters in reflectometer, spectrophotometer, ellipsometer, polarimeter and the like systems.
    Type: Grant
    Filed: March 22, 2005
    Date of Patent: January 8, 2008
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Ping He
  • Method of reducing the effect of noise in determining the value of a dependent variable
    Patent number: 7307724
    Abstract: A method of reducing the effect of systematic and/or random noise during determination of dependent variable values, (eg. pseudo “n” and “k” and/or ellipsometric PSI and DELTA or mathematical equivalent vs. wavelength or angle of incidence), involving selecting a mathematical function and an independent variable subset range combination so that a square error best fit with total summed square error over the independent variable subset range being minimized, zero or within an acceptable range near zero, are achieved.
    Type: Grant
    Filed: March 5, 2004
    Date of Patent: December 11, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Blaine D. Johs
  • System for sequentially providing aberation corrected electromagnetic radiation to a spot on a sample at multiple angles of incidence
    Patent number: 7304792
    Abstract: A system for sequentially providing electromagnetic radiation to a spot on a sample at different angles of incidence, and after reflection therefrom into a detector. The system includes a plurality of spherical mirrors, and a refractive element for correcting aberration.
    Type: Grant
    Filed: April 5, 2006
    Date of Patent: December 4, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, John A. Woollam
  • Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence
    Patent number: 7304737
    Abstract: Spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition while at least one continuously rotating or step-wise rotatable compensator imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation, including a system of mirrors and refractive elements for correcting aberation while directing a beam of electromagnetic radiation to a spot on a sample at a multiple different angles-of-incidence.
    Type: Grant
    Filed: August 3, 2006
    Date of Patent: December 4, 2007
    Assignee: J.A. Woollam Co., Inc
    Inventors: Martin M. Liphardt, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He, John A. Woollam
  • Control of uncertain angle of incidence of beam from Arc lamp
    Patent number: 7301631
    Abstract: A system for stabilizing the angle of incidence a beam of electromagnetic radiation from a vertically oriented Arc lamp onto a horizontally oriented sample surface.
    Type: Grant
    Filed: March 21, 2005
    Date of Patent: November 27, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Ping He, Galen L. Pfeiffer, Steven E. Green, Christopher A. Goeden, Martin M. Liphardt
  • Use of ellipsometry and surface plasmon resonance in monitoring thin film deposition or removal from a substrate surface
    Patent number: 7283234
    Abstract: Improved methodology for monitoring deposition or removal of material to or from a process and/or wittness substrate which demonstrates a negative e1 at some wavelength. The method involves detection of changes in P-polarized electromagnetism ellipsometric DELTA at SPR Resonance Angle-of-Incidence (AOI) to monitor deposition of and/or removal of minute amounts of materials onto, or from, said process and/or witness substrate. The methodology can optionally monitor ellipsometric PSI, and involves simultaneously or sequentially applying non-P-polarized electromagnetism at the same angle of incidence, or electromagnetic radiation of any polarization at a different angle-of-incidence and wavelength to the process or wittness substrate and application of conventional ellipsometric analysis.
    Type: Grant
    Filed: December 16, 2004
    Date of Patent: October 16, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: John A. Woollam, Blaine D. Johs, Thomas E. Tiwald, Martin M. Liphardt, James D. Welch
  • Accurate determination of refractive indices of solid, fluid and liquid materials
    Patent number: 7280194
    Abstract: Systems and methodology for determining not only precise and repeatable results, but accurate values of the refractive index of solids, fluids and liquids.
    Type: Grant
    Filed: November 30, 2004
    Date of Patent: October 9, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Craig M. Herzinger, Steven E. Green, Gregory K. Pribil
  • Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems
    Patent number: 7274450
    Abstract: A sample sequestering system which allows access to a subspace in a chamber encompassed generally enclosed space, for use in entering and removing a sample when the subspace is opened to atmosphere. Sufficient purge gas is flowed from within the generally enclosed space into the subspace discourage atmospheric contaminates from entering into the subspace. Contained within the generally enclosed space is a spectrophotometer, ellipsometer or polarimeter or the like system which operates at wavelengths, (eg. UV), which are adversely affected, (eg. absorbed), by typical atmospheric contents.
    Type: Grant
    Filed: May 28, 2004
    Date of Patent: September 25, 2007
    Assignee: J.A. Woollam Co., Inc
    Inventors: Steven E. Green, Ping He, Galen L. Pfeiffer, Brian D. Guenther, Gerald T. Cooney, John A. Woollam, Martin M. Liphardt, Blaine D. Johs, Craig M. Herzinger
  • General virtual interface algorithm for in-situ spectroscopic ellipsometric data analysis
    Patent number: 7268876
    Abstract: A method of characterizing the outermost material on an article manufactured by deposition or removal of material from its surface, which requires no prior knowledge of the composition of the article.
    Type: Grant
    Filed: November 17, 2003
    Date of Patent: September 11, 2007
    Assignee: J.A. Woollam Co., Inc
    Inventor: Blaine D. Johs
  • Horizontal attenuated total reflection system
    Patent number: 7265839
    Abstract: Horizontally oriented attenuated total reflection (HATR) system applied in spectroscopic ellipsometer or polarimeter systems, and methodology of use.
    Type: Grant
    Filed: March 30, 2006
    Date of Patent: September 4, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventor: Thomas E. Tiwald
  • Method of calibrating effects of multi-AOI-system for easy changing angles-of-incidence in ellipsometers and the like
    Patent number: 7265838
    Abstract: Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system involving regression based methodology for evaluating and compensating the effects of the presence electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.
    Type: Grant
    Filed: August 24, 2004
    Date of Patent: September 4, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Ping He, Martin M. Liphardt, Christopher A. Goeden, John A. Woollam, James D. Welch
  • System for implementing variable retarder capability in ellipsometer, polarimeter or the like systems
    Patent number: 7265835
    Abstract: A system for implementing Berek-type variable retarder plate tipping capability in two orthogonal directions via tipping about a single axis, in combination with a means for rotating the orientation of the axis, having application in ellipsometer and polarimeter and the like systems.
    Type: Grant
    Filed: March 14, 2006
    Date of Patent: September 4, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Craig M. Herzinger, Galen L. Pfeiffer
  • Ellipsometer or polarimeter and the like system with multiple detector element detector in environmental control chamber including secure sample access
    Patent number: 7253900
    Abstract: A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of wavelengths and a detector with multiple detector elements for simultaneous monitoring of a number of wavelengths in an environmental control chamber which optionally provides for secured sample entry, and methodology of use.
    Type: Grant
    Filed: October 9, 2004
    Date of Patent: August 7, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: John A. Woollam, Gregory K. Pribil, Martin M. Liphardt, James D. Welch
  • Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter
    Patent number: 7245376
    Abstract: Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.
    Type: Grant
    Filed: November 22, 2005
    Date of Patent: July 17, 2007
    Assignee: J. A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He, John A. Woollam
  • Method of analysis of multiple layer samples
    Patent number: 7239391
    Abstract: Spectroscopic ellipsometer system(s) mediated methodology for quantifying layer defining parameters in mathematical models of samples which contain a plurality of layers of different materials, at least some of which are absorbing of electromagentic radiation, wherein an acquired data set is not sufficient to allow definite one for one parameter evaluation, and wherein a global fit procedure can be applied to obtain good parameter starting values for use in a parameter evaluating regression procedure.
    Type: Grant
    Filed: April 2, 2005
    Date of Patent: July 3, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Ronald A. Synowicki, Craig M. Herzinger
  • Sample orientation system and method
    Patent number: 7230699
    Abstract: Disclosed is a system comprising a stage with “X”, “Y” and “Z” translation and “X”, “Y” and optionally “Z” axes rotation capability, in combination with interrogation and monitoring means which act in functional combination to orient the surface of a sample so as to set an intended oblique approach of an electromagnetic beam with respect to a sample surface at a monitored location thereon.
    Type: Grant
    Filed: September 2, 2003
    Date of Patent: June 12, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Ping He
  • Control of beam spot size in ellipsometer and the like systems
    Patent number: 7215423
    Abstract: System and methodology for controlling a beam spot size where it impinges onto a sample, and/or discriminant selection and analysis of data from detector elements in a two dimensional detector array which correspond to identified regions on a sample.
    Type: Grant
    Filed: October 10, 2004
    Date of Patent: May 8, 2007
    Assignee: J.A. Woollam Co., Inc
    Inventors: Martin M. Liphardt, Blaine D. Johs, John A. Woollam, James D. Welch
  • Broadband ellipsometer or polarimeter system including at least one multiple element lens
    Patent number: 7215424
    Abstract: Quasi-achromatic multi-element lens(es) which are precisely mounted with respect to one another in a tubular mounting fixture, and the application thereof in focusing, (and optionally re-colliminating), a spectroscopic electromagnetic beam into a very small, chromatically relatively undispersed, area spot on a material system.
    Type: Grant
    Filed: April 12, 2005
    Date of Patent: May 8, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He, John A. Woollam