Patents Assigned to JEOL Ltd.
  • Patent number: 11574795
    Abstract: A UI image includes a reference image, which includes a background image and a schematic image. The background image corresponds to a cross section of a specimen having a multilayer structure. The schematic image includes a figure indicating an electron penetration depth, a figure indicating a characteristic X-ray generation depth, and a figure indicating a back-scattered electron generation depth. These figures are displayed in an overlapping manner or in parallel to each other.
    Type: Grant
    Filed: July 20, 2021
    Date of Patent: February 7, 2023
    Assignee: JEOL Ltd.
    Inventor: Kazutaka Watakabe
  • Patent number: 11562886
    Abstract: An ion milling apparatus has: a sample holder including a shield member for shielding the sample except for a portion to be milled; and a sample locking member cooperating with the shield member such that the sample is sandwiched and held therebetween. The shield member has an edge portion that determines a milling position on or in the sample. The sample locking member is disposed downstream of the edge portion in the direction of irradiation by the ion beam and has a support portion cooperating with the edge portion to support the milled portion therebetween. The support portion has a first surface making contact with the sample and a second surface making a given angle to the first surface. The given angle is equal to or less than 90°.
    Type: Grant
    Filed: August 12, 2021
    Date of Patent: January 24, 2023
    Assignee: JEOL Ltd.
    Inventors: Shogo Kataoka, Tatsuro Mino, Koji Todoroki
  • Patent number: 11557458
    Abstract: A reference image is generated based on an illumination condition and element information of a specimen. The reference image includes a figure indicating a characteristic X-ray generation range, a numerical value indicating a characteristic X-ray generation depth, or the like. The reference image changes with a change of an accelerating voltage, a tilt angle, or an element forming the specimen. The reference image may include a figure indicating a landing electron scattering range, a figure indicating a back-scattered electron generation range, or the like.
    Type: Grant
    Filed: July 20, 2021
    Date of Patent: January 17, 2023
    Assignee: JEOL Ltd.
    Inventors: Kazutaka Watakabe, Hirofumi Kuwahara, Takenori Miyahara, Takahide Sakata, Felix Timischl
  • Patent number: 11550010
    Abstract: A spectrum y includes a waveform-of-interest component and a baseline component serving as a wide-band component. An optimum solution of a signal model x is determined according to a first condition to fit a corresponding portion SIFx of a baseline model Fx with respect to a representative portion yI of the baseline component, and a second condition to minimize an Lp norm (wherein p?1) of the signal model x. An estimated baseline component determined from the optimum solution of the signal model x is subtracted from the spectrum y.
    Type: Grant
    Filed: January 4, 2019
    Date of Patent: January 10, 2023
    Assignee: JEOL Ltd.
    Inventor: Tomoki Nakao
  • Patent number: 11549896
    Abstract: An X-ray fluorescence measurement apparatus has a sample tank, and a measurement unit that has an X-ray generator and an X-ray fluorescence detector. A film mechanism takes out a used film from a partitioning position between the sample tank and the measurement unit in a slide direction which intersects a direction of arrangement of the sample tank and the measurement unit, and feeds an unused film portion to the partitioning position in the slide direction. The film portions may alternatively be exchanged using cassettes.
    Type: Grant
    Filed: July 14, 2020
    Date of Patent: January 10, 2023
    Assignee: JEOL Ltd.
    Inventor: Genki Kinugasa
  • Patent number: 11545337
    Abstract: A scanning transmission electron microscope that scans a specimen with an electron probe to acquire an image. The scanning transmission electron microscope includes: an optical system which includes a condenser lens and an objective lens; an imaging device which is arranged on a back focal plane or a plane conjugate to the back focal plane of the objective lens and which is capable of photographing a Ronchigram; and a control unit which performs adjustment of the optical system. The control unit is configured or programed to: acquire an image of a change in a Ronchigram that is attributable to a change in a relative positional relationship between the specimen and the electron probe; and determine a center of the Ronchigram based on the image of the change in the Ronchigram.
    Type: Grant
    Filed: April 21, 2021
    Date of Patent: January 3, 2023
    Assignee: JEOL Ltd.
    Inventor: Ryusuke Sagawa
  • Patent number: 11536736
    Abstract: An automatic analyzer includes an input reception unit that receives an operation to specify a search condition for sample information, an operation to execute search of the sample information, and an operation to specify whether only pieces of the sample information of samples under measurement among all samples are set as search targets; and a display control unit that, when the operation to execute search of the sample information is performed in a state in which only pieces of the sample information of samples under measurement are specified to be search targets, sets only pieces of the sample information of samples under measurement among the sample information of all samples as search targets based on the progress information, extracts pieces of the sample information of samples matching with a specified search condition, and causes the extracted pieces of the sample information to be displayed in a list form.
    Type: Grant
    Filed: March 23, 2020
    Date of Patent: December 27, 2022
    Assignee: JEOL Ltd.
    Inventor: Takeichirou Nakajima
  • Patent number: 11536675
    Abstract: There is provided an analytical method capable of generating a high resolution spectrum of X-rays with an intended energy. The analytical method is for use in an analytical apparatus having a diffraction grating for spectrally dispersing X-rays emanating from a sample, an image sensor for detecting the spectrally dispersed X-rays, and an incident angle control mechanism for controlling the incident angle of X-rays impinging on the diffraction grating. The image sensor has a plurality of photosensitive elements arranged in the direction of energy dispersion. The analytical method starts with specifying an energy of X-rays to be acquired. The incident angle is adjusted based on the specified energy to bring the focal plane of the diffraction grating into positional coincidence with those one or ones of the photosensitive elements which detect X-rays having the specified energy.
    Type: Grant
    Filed: March 24, 2021
    Date of Patent: December 27, 2022
    Assignee: JEOL Ltd.
    Inventor: Takanori Murano
  • Patent number: 11529686
    Abstract: A three-dimensional powder bed fusion additive manufacturing (PBF-AM) apparatus includes a movement mechanism, a stage, a plurality of support columns, a base plate, and a shielding member. The base plate is supported by the plurality of support columns, and a powder material for forming a product is laminated on the base plate. The shielding member surrounds the plurality of support columns between the stage and the base plate.
    Type: Grant
    Filed: February 9, 2021
    Date of Patent: December 20, 2022
    Assignee: JEOL Ltd.
    Inventors: Shinichi Kitamura, Nari Tsutagawa
  • Patent number: 11521823
    Abstract: A sample attachment device includes a mount, a mounted depression, and a pressure release depression. Liquid and air bubbles can pass the pressure release depression. The mounted depression is on the mount. A cartridge is mounted on the mounted depression. The pressure release depression is in the mounted depression. The pressure release depression is vertically under the cartridge when the cartridge is mounted on the mounted depression.
    Type: Grant
    Filed: September 25, 2020
    Date of Patent: December 6, 2022
    Assignee: JEOL Ltd.
    Inventors: Takahisa Kawamura, Hideaki Kimura
  • Patent number: 11513105
    Abstract: A composition of a focused portion corresponding to a portion of a molecular ion is estimated as a partial composition based on a mass of the focused portion. An initial composition search range is modified based on the partial composition. A composition of the molecular ion is estimated as an overall composition based on a mass of the molecular ion under a modified composition search range. A way of modifying the composition search range may include a method for modifying a lower limit to a range of the number of atoms and a method for adding a new range of the number of atoms associated with a new chemical element.
    Type: Grant
    Filed: June 5, 2020
    Date of Patent: November 29, 2022
    Assignee: JEOL Ltd.
    Inventors: Ayumi Kubo, Masaaki Ubukata
  • Patent number: 11508550
    Abstract: There is provided an image processing method capable of generating an image representative of a magnetic field distribution. The method starts with acquiring phase images providing visualization of electromagnetic fields respectively in a plurality of columns. Then, each of the electromagnetic fields in the columns within the phase images is separated into magnetic field and electric field components. An image representative of a magnetic field distribution is created based on the separated magnetic field components. The step of separating each electromagnetic field includes separating the electromagnetic field in a first one of the columns into magnetic field and electric field components based on the electromagnetic field in a second one of the columns, the latter electromagnetic field having an electric field component oriented in the same direction as that in the first column.
    Type: Grant
    Filed: July 19, 2021
    Date of Patent: November 22, 2022
    Assignee: JEOL Ltd.
    Inventor: Yuji Kohno
  • Patent number: 11506644
    Abstract: A first mass spectrum including a fragment ion peak is generated under application of a first ionization method. A second mass spectrum including a molecular ion peak is generated under application of a second ionization method. These mass spectra are synthesized to generate a synthesized mass spectrum. On the synthesized mass spectrum, difference information, such as a mass difference and difference composition, is calculated between the molecular ion peak and the fragment ion peak.
    Type: Grant
    Filed: January 14, 2020
    Date of Patent: November 22, 2022
    Assignee: JEOL Ltd.
    Inventors: Ayumi Kubo, Masaaki Ubukata
  • Patent number: 11499927
    Abstract: An analysis method using an X-ray fluorescence analyzer is provided in which an X-ray spectrum is acquired by detecting a secondary X-ray emitted from a specimen when the specimen is irradiated with a primary X-ray. The analysis method includes: acquiring a first X-ray spectrum obtained, with a take-off angle of the secondary X-ray being set as a first take-off angle; acquiring a second X-ray spectrum obtained, with a take-off angle of the secondary X-ray being set as a second take-off angle that is different from the first take-off angle; and obtaining information on an element in a depth direction of a specimen based on the first X-ray spectrum and the second X-ray spectrum.
    Type: Grant
    Filed: March 24, 2021
    Date of Patent: November 15, 2022
    Assignee: JEOL Ltd.
    Inventor: Genki Kinugasa
  • Patent number: 11495431
    Abstract: A transmission electron microscope includes a control unit for: acquiring an image of an objective aperture; obtaining a position of the objective aperture; obtaining an amount of deviation between an object position and the position of the objective aperture, based on the position of the objective aperture; and operating an aperture moving mechanism, based on the amount of deviation of the position of the objective aperture. The position of the objective aperture is obtained by: binarizing the image of the objective aperture by using a set threshold; obtaining an area of an aperture hole of the objective aperture from the binarized image; determining whether the area is within a predetermined range; changing the threshold when a determination is made that the area is outside the predetermined range; and obtaining a position of the objective aperture when a determination is made that the area is within the predetermined range.
    Type: Grant
    Filed: July 14, 2021
    Date of Patent: November 8, 2022
    Assignee: JEOL Ltd.
    Inventor: Hitoshi Sakurai
  • Patent number: 11495432
    Abstract: In a charged particle beam device, a control unit performs processing for: operating a deflector based on movement information to move a visual field of a deflector from a first visual field to a second visual field; capturing the sample image with the second visual field to obtain a reference image; operating the deflector to move the visual field from the second visual field to the first visual field; operating the sample stage based on the movement information to move the visual field from the first visual field to a third visual field; capturing the sample image with the third visual field to obtain a comparison image; calculating a positional deviation amount between the reference image and the comparison image; determining whether the positional deviation amount is equal to or less than a designated positional deviation amount; and operating the sample stage based on the positional deviation amount.
    Type: Grant
    Filed: July 21, 2021
    Date of Patent: November 8, 2022
    Assignee: JEOL Ltd.
    Inventors: Daichi Maekawa, Hitoshi Sakurai
  • Patent number: 11486886
    Abstract: An automatic analyzer includes: a diluted sample holding unit configured to hold dilution containers into which a diluted sample is dispensed; a reaction container holding unit configured to hold reaction containers; a dispensing device configured to dispense the diluted sample from the dilution containers to the reaction containers; a measuring unit configured to perform optical measurement of the diluted sample reacted with reagents corresponding to test items in the reaction containers; a storage unit configured to store information on the diluted sample associated with each of the dilution containers; and a dispensing control unit. The dispensing control unit extracts a dilution container for collecting the diluted sample for retest by searching for the information on the diluted sample stored in the storage unit, and causes the dispensing device to perform a retest dispensing process.
    Type: Grant
    Filed: June 17, 2019
    Date of Patent: November 1, 2022
    Assignee: JEOL Ltd.
    Inventor: Toru Ogawa
  • Patent number: 11474084
    Abstract: In a mass spectrometry apparatus, an electric field is applied to an injected specimen to ionize the specimen, and mass spectrometry of the specimen is performed. In an emitter which ionizes the specimen, a flashing process to increase a temperature of the emitter is repeatedly performed at a short-time interval during an injection period of the specimen. A flashing current controller controls a flashing current value to be applied to the emitter to increase, in a long term, a flashing temperature which the emitter reaches in the flashing process.
    Type: Grant
    Filed: November 20, 2019
    Date of Patent: October 18, 2022
    Assignee: JEOL Ltd.
    Inventor: Masaaki Ubukata
  • Patent number: 11467106
    Abstract: An X-ray analyzer includes: a specimen stage; a spectrometer having a spectroscopic element and an X-ray detector; a temperature measuring unit including at least one of a first temperature sensor for measuring a temperature of the specimen stage and a second temperature sensor for measuring a temperature of the spectrometer; a storage unit which stores calibration data of the spectrometer, and a previous measurement result by the temperature measuring unit at the time of execution of the calibration of the spectrometer; and a notifying unit which acquires a measurement result by the temperature measuring unit, calculates a temperature variation amount of the acquired measurement result with respect to the previous measurement result stored in the storage unit, and notifies that calibration is needed, based on the temperature variation amount.
    Type: Grant
    Filed: May 28, 2020
    Date of Patent: October 11, 2022
    Assignee: JEOL Ltd.
    Inventors: Kazunori Tsukamoto, Masahiro Asai, Shigeru Honda
  • Patent number: 11462384
    Abstract: A method of acquiring a dark-field image for a scanning transmission electron microscope is provided. The scanning transmission electron microscope includes a dark-field detector having an annular detection region which is capable of detecting electrons scattered at a specimen in a predetermined angular range, an objective lens, and an imaging lens group disposed at a stage following the objective lens. The method includes reducing an influence of a geometrical aberration on the electrons scattered in the predetermined angular range by shifting a focus of the imaging lens group from a diffraction plane of the objective lens.
    Type: Grant
    Filed: September 11, 2020
    Date of Patent: October 4, 2022
    Assignee: JEOL Ltd.
    Inventor: Yuji Kohno