Patents Assigned to JEOL Ltd.
  • Patent number: 11393606
    Abstract: There is provided a radiation transmissive window having high radiation transmissivity. The radiation transmissive window includes: an outer frame having an opening; a radiation transmissive film closing off the opening; and a grid member that partitions the opening into a plurality of small opening portions. The grid member has a first portion, a second portion at a smaller distance to the center of the opening than the first portion, and a third portion at a smaller distance to the center of the opening than the second portion. The first portion is greater in width than the second portion. The second portion is greater in width than the third portion.
    Type: Grant
    Filed: March 24, 2021
    Date of Patent: July 19, 2022
    Assignee: JEOL Ltd.
    Inventor: Hirofumi Nakano
  • Patent number: 11391682
    Abstract: An Auger electron microscope includes a processing unit, and the processing unit performs processing of: acquiring an actually measured Auger spectrum obtained by measuring a test specimen containing an analysis target element; acquiring a plurality of first standard Auger spectra obtained by measuring a plurality of standard specimens each containing the same analysis target element but in different chemical states; calculating, based on a test specimen measurement condition that is a measurement condition when the test specimen has been measured and a standard specimen measurement condition that is a measurement condition when the standard specimens have been measured, a plurality of second standard Auger spectra under the test specimen measurement condition from the plurality of first standard Auger spectra; and performing curve fitting calculation of the actually measured Auger spectrum by using the plurality of calculated second standard Auger spectra.
    Type: Grant
    Filed: February 17, 2021
    Date of Patent: July 19, 2022
    Assignee: JEOL Ltd.
    Inventors: Kenichi Tsutsumi, Tatsuya Uchida
  • Patent number: 11387090
    Abstract: A constructed unit is fixed to a base by means of a plurality of support posts while being spaced from the base. The constructed unit includes an orthogonal acceleration unit. An incidence regulator unit is fixed to the base by a pair of support posts while being spaced from the base and the constructed unit. The incidence regulator unit includes, among others, a pair of blades that define a slit, and heaters for heating the pair of blades.
    Type: Grant
    Filed: January 20, 2021
    Date of Patent: July 12, 2022
    Assignee: JEOL Ltd.
    Inventors: Yoshihiko Miwa, Yasunori Nishimura, Keiko Kaneda, Shintarou Yamada, Yuta Nakaoka
  • Patent number: 11366129
    Abstract: An automatic analyzer includes a plurality of storage container holding units, a dispensing container holding unit, a plurality of dispensing devices, a dispensing abnormality detector, and a drive control unit. The plurality of dispensing devices each include a dispensing probe. The dispensing abnormality detector is provided in each dispensing device. The drive control unit is configured to control driving of each dispensing device based on a detection result of the dispensing abnormality detector. If a dispensing device in which an abnormality is detected is a first dispensing device, the drive control unit is configured to cause a dispensing process of a cycle in which the abnormality is detected to be performed again. If the dispensing device in which the abnormality is detected is not the first dispensing device, the drive control unit is configured to end the dispensing process of the cycle and start the next cycle.
    Type: Grant
    Filed: May 13, 2019
    Date of Patent: June 21, 2022
    Assignee: JEOL Ltd.
    Inventors: Makoto Asakura, Chikashi Nakai
  • Patent number: 11353414
    Abstract: An analysis device includes a spectroscopic element that diffracts a signal generated by a specimen, a detector that detects the signal diffracted by the spectroscopic element, and a spectrum generation unit that generates a spectrum of the signal based on a detection result by the detector, the detector including detection regions arranged in a plurality of rows and a plurality of columns, a divergent direction of the signal incident on the detector being neither parallel nor perpendicular to a column direction of the detector, and the spectrum generation unit performing: processing for acquiring a plurality of row spectra by generating a row spectrum for each of the plurality of rows based on detection signals relating to the detection regions arranged in a row direction; and processing for generating a spectrum of the signal based on the plurality of row spectra.
    Type: Grant
    Filed: March 5, 2020
    Date of Patent: June 7, 2022
    Assignee: JEOL Ltd.
    Inventor: Takanori Murano
  • Patent number: 11342158
    Abstract: There is provided a charged particle beam system capable of determining the type of each cartridge precisely. An electron microscope that embodies the charged particle beam system includes a discriminator for determining the type of each cartridge based on the range or distance measured by a laser range finder. Plural cartridges are received in a magazine. The laser range finder measures the range to a selected one of the plural cartridges which is placed in a measurement position. A first cartridge of a first type included in the plural cartridges has a first measurement surface at a first distance to the laser range finder when placed in the measurement position. A second cartridge of a second type has a second measurement surface at a second range to the laser range finder when placed in the measurement position.
    Type: Grant
    Filed: April 6, 2021
    Date of Patent: May 24, 2022
    Assignee: JEOL Ltd.
    Inventors: Izuru Chiyo, Naoki Fujimoto, Tomoyuki Naganuma
  • Patent number: 11322331
    Abstract: An imaging device images a sample holder held by a sample stage. At a front side (target side) of the imaging device, a light emitter device array and a mask array are provided. A plurality of light beams are generated by the light emitter device array. A plurality of center parts of the plurality of light beams are masked by the mask array. A plurality of shadows produced thereby are covered by a plurality of peripheral parts of the plurality of light beams.
    Type: Grant
    Filed: March 10, 2020
    Date of Patent: May 3, 2022
    Assignee: JEOL Ltd.
    Inventors: Yuta Murakami, Yoshikazu Nemoto
  • Patent number: 11315753
    Abstract: A charged particle beam device includes: a charged particle beam source; an analyzer that analyzes and detects particles including secondary electrons and backscattered charged particles that are emitted from a specimen by irradiating the specimen with a primary charged particle beam emitted from the charged particle beam source; a bias voltage applying unit that applies a bias voltage to the specimen; and an analysis unit that extracts a signal component of the secondary electrons based on a first spectrum obtained by detecting the particles with the analyzer in a state where a first bias voltage is applied to the specimen, and a second spectrum obtained by detecting the particles with the analyzer in a state where a second bias voltage different from the first bias voltage is applied to the specimen.
    Type: Grant
    Filed: September 11, 2020
    Date of Patent: April 26, 2022
    Assignee: JEOL Ltd.
    Inventors: Kenichi Tsutsumi, Tatsuya Uchida
  • Patent number: 11315781
    Abstract: A sampling period of an A/D converter is set in accordance with an ion pulse ejection operation of a collision cell of an accumulation type. Start timing of the sampling period is changed in accordance with a selected m/z of a second mass analysis unit. In addition, end timing of the sampling period may be changed in accordance with the selected m/z of the second mass analysis unit. In place of the sampling period, a data cut-out period may be changed.
    Type: Grant
    Filed: December 3, 2020
    Date of Patent: April 26, 2022
    Assignee: JEOL Ltd.
    Inventors: Masatoshi Fujii, Junkei Kou
  • Patent number: 11309161
    Abstract: A charged particle apparatus includes: a specimen chamber which is maintained at vacuum and in which a specimen is disposed; a preliminary exhaust chamber that is connected to the specimen chamber via a vacuum gate valve; an exhaust device that exhausts the preliminary exhaust chamber; charged particle beam source an optical system; a detector; a transporting device that transports the specimen from the preliminary exhaust chamber to the specimen chamber; and a control unit. The control unit performs: adjustment processing in which at least one of the optical system and the detector is adjusted in a state where the specimen is housed in the preliminary exhaust chamber; and transporting processing which is performed after the adjustment processing and in which the vacuum gate valve is opened and the transporting device transports the specimen to the specimen chamber.
    Type: Grant
    Filed: January 22, 2021
    Date of Patent: April 19, 2022
    Assignee: JEOL Ltd.
    Inventor: Kazuya Yamazaki
  • Patent number: 11302509
    Abstract: An electron gun includes an emitter, an electron gun electrode, and a short-circuiting mechanism for setting the emitter and the electron gun electrode at the same potential. The short-circuiting mechanism includes a first switch member provided with a first switch electrode that is connected to the emitter and a second switch electrode that is connected to the electron gun electrode, a second switch member provided with a third switch electrode, and a drive unit that operates at least one of the first switch member and the second switch member to switch between a state in which the first switch electrode and the second switch electrode are in contact with the third switch electrode and a state in which the first switch electrode and the second switch electrode are separated from the third switch electrode. The short-circuiting mechanism has the same potential as a predetermined voltage.
    Type: Grant
    Filed: September 6, 2018
    Date of Patent: April 12, 2022
    Assignee: JEOL Ltd.
    Inventors: Akihiro Ikeda, Norikazu Arima
  • Patent number: 11260427
    Abstract: A vacuum apparatus equipped with an automatic transport mechanism for transporting a specimen and a sensor for detecting a state of the vacuum apparatus includes: a determining unit which determines whether a recoverable error has occurred based on a signal from the sensor; and a display control unit which causes, when it is determined that a recoverable error has occurred, a display unit to display a procedure of a recovery operation in a wizard format. The display control unit determines whether the recovery operation has been performed according to the procedure displayed on the display unit based on a signal from the sensor, and causes the display unit to display a next procedure of the recovery operation when it is determined that the recovery operation has been performed according to the procedure.
    Type: Grant
    Filed: August 7, 2019
    Date of Patent: March 1, 2022
    Assignee: JEOL Ltd.
    Inventor: Kazunori Tsukamoto
  • Patent number: 11251016
    Abstract: A method of controlling a transmission electron microscope includes: causing a first magnetic field lens to generate a first magnetic field and causing a second magnetic field lens to generate a second magnetic field; causing the magnetic field applying unit to generate a magnetic field of a direction along an optical axis on a specimen mounting surface; and changing excitations of the first excitation coil and the second excitation coil to correct a deviation of a focal length of an objective lens due to the magnetic field generated by the magnetic field applying unit.
    Type: Grant
    Filed: March 24, 2020
    Date of Patent: February 15, 2022
    Assignee: JEOL Ltd.
    Inventor: Yuji Kohno
  • Patent number: 11251013
    Abstract: There is provided a deflector that produces only a weak resulting combined hexapole field. The deflector (100) has first to sixth coils (11-16). The first to third coils (11-13) are equal in direction of energization. The fourth to sixth coils (14-16) are equal in direction of energization. The first coil (11) and fourth coil (14) are opposite in direction of energization. The first, third, fourth, and sixth coils (11, 13, 14, 16) are equal in electromotive force. The second coil (12) is equal in electromotive force to the fifth coil (15) and twice the electromotive force of the first coil (11).
    Type: Grant
    Filed: January 28, 2020
    Date of Patent: February 15, 2022
    Assignee: JEOL Ltd.
    Inventor: Yuji Kohno
  • Patent number: 11231346
    Abstract: A lower-side structure forms a specimen chamber in which a specimen base is provided. An upper-side structure forms a nozzle chamber above the specimen chamber. The specimen chamber and the nozzle chamber are separated by a gate valve. In the nozzle chamber, at least a tip opening of a nozzle that ejects a specimen is present. A control device maintains a relationship of gas pressures such that a gas pressure in the specimen chamber is higher than a gas pressure in the nozzle chamber when the lower-side structure and the upper-side structure are in communication with each other.
    Type: Grant
    Filed: January 17, 2018
    Date of Patent: January 25, 2022
    Assignees: JEOL Ltd., National Institute of Advanced Industrial Science
    Inventors: Satoru Akai, Ayumi Morioka, Nobuo Handa, Akira Kurokawa, Kazuhiro Kumagai
  • Patent number: 11222764
    Abstract: A charged particle beam device includes: a charged particle source; an optical system which acts on a charged particle beam emitted from the charged particle source; a control unit which controls the optical system; and a storage unit which stores previous setting values of the optical system. The optical system includes a first optical element and a second optical element for controlling a state of the charged particle beam to be incident on the first optical element. The control unit obtains an initial value of a setting value of the second optical element based on previous setting values of the second optical element; and changes a state of the charged particle beam by changing the setting value of the second optical element from the obtained initial value and obtains the setting value of the second optical element based on the change in the state of the charged particle beam.
    Type: Grant
    Filed: March 23, 2020
    Date of Patent: January 11, 2022
    Assignee: JEOL Ltd.
    Inventors: Kazuya Yamazaki, Yuko Shimizu, Hirofumi Iijima, Takuma Fukumura, Naoki Hosogi, Tomohiro Nakamichi
  • Patent number: 11222241
    Abstract: An image conversion unit includes a selector and a plurality of image converters. Each image converter is formed from an estimator of machine learning type, and estimates, based on an image acquired under a first observation condition and as a reference image, an image which is presumed to be acquired under a second observation condition. When a particular reference image is selected from among a plurality of reference images displayed on a display, a second observation condition corresponding to the selected reference image is set in an observation mechanism as a next observation condition.
    Type: Grant
    Filed: May 17, 2019
    Date of Patent: January 11, 2022
    Assignee: JEOL Ltd.
    Inventor: Fuminori Uematsu
  • Patent number: 11217422
    Abstract: First shape data representing a three-dimensional shape of a sample unit including a sample is generated based on a result of three-dimensional shape measurement of the sample. Second shape data representing a three-dimensional shape of a structure which exists in a sample chamber is generated. Movement of the sample unit is controlled based on the first shape data and the second shape data such that collision of the sample unit with the structure does not occur.
    Type: Grant
    Filed: January 29, 2020
    Date of Patent: January 4, 2022
    Assignee: JEOL Ltd.
    Inventors: Yoshikazu Nemoto, Yuta Murakami, Takakuni Maeda, Akira Abe, Masatsugu Kawamoto, Hiroki Mezaki
  • Patent number: 11211150
    Abstract: A preprocessor extracts a plurality of spectra to be processed, from an overall mass spectrum. A simulated spectrum generator having a learned model generates a simulated spectrum having a peak discriminating action, from each mass spectrum. A postprocessor generates a combined simulated spectrum based on the plurality of simulated spectra. A peak filter executes peak discrimination on a peak list using the combined simulated spectrum.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: December 28, 2021
    Assignee: JEOL Ltd.
    Inventors: Fuminori Uematsu, Takaya Satoh, Masahiko Takei
  • Patent number: 11205558
    Abstract: A sample exchange device includes a first transport mechanism that includes a grip portion that grips a sample holding member and transports a sample holding member to a sample exchange chamber, a cooling unit that cools the sample exchange chamber, fiber sensors that detect whether or not the grip portion of the first transport mechanism grips the sample holding member in the sample exchange chamber, and a control unit. The control unit turns on the fiber sensors when the grip portion of the first transport mechanism enters the sample exchange chamber and turns off the fiber sensors after it is detected whether or not the grip portion of the first transport mechanism grips the sample holding member.
    Type: Grant
    Filed: February 25, 2020
    Date of Patent: December 21, 2021
    Assignee: JEOL Ltd.
    Inventors: Naoki Fujimoto, Kimitaka Hiyama