Abstract: A temperature control device includes: a top plate that supports a substrate; a base plate connected to the top plate so as to form an internal space with the top plate; a thermoelectric module plate arranged in the internal space; a heat exchange plate that is arranged in the internal space and exchanges heat with the thermoelectric module plate; a first coupling member that couples the top plate and the base plate via the thermoelectric module plate and the heat exchange plate and is fixed to each of the top plate and the base plate; and a second coupling member that couples the top plate and the base plate via the thermoelectric module plate and the heat exchange plate, is fixed to the top plate, and is movable relative to the base plate.

Abstract: A thermoelectric generation module includes a first substrate and a second substrate, a plurality of first electrodes and second electrodes that are arranged on the first substrate and the second substrate, a thermoelectric conversion element arranged between the first electrode and the second electrode, and a terminal pin connected to the second electrode. The second substrate includes an insulator layer made of an electrical insulating material, a through-hole that penetrates the insulator layer for insertion of the terminal pin, and an annular metal layer arranged at a peripheral portion of the through-hole. A space between the terminal pin and the through-hole is sealed by solder.

Abstract: An analysis device includes a vibration sensor that detects vibration of a machine, a calculation unit that calculates an average value of detection data of the vibration sensor in each predetermined cycle interval, converts a plurality of data points included in each interval to one data point indicating the average value to reduce calculation points, and performs vibration analysis with the reduced calculation points, and a wireless communication device that transmits processed data output from the vibration analysis performed by the calculation unit.

Abstract: An analysis device includes a vibration sensor that detects vibration of a machine, a calculation unit that defines a peak value on the basis of a standard deviation of detection data of the vibration sensor, and a wireless communication device that transmits processed data output from calculation performed by the calculation unit.

Abstract: A thermoelectric module includesa plurality of electrodes (high temperature side electrodes and low temperature side electrodes, thermoelectric conversion elements (p-type element and n-type element) arranged between the two electrodes, and a bonding layer disposed between the electrodes and the thermoelectric conversion elements. The bonding layer includes copper-containing particles, copper balls each having a particle diameter of 30 ?m or more, an intermetallic compound of copper and tin, and a fired resin.

Abstract: A wafer temperature control device includes a temperature control sheet; and a top plate. The temperature control sheet includes a plurality of temperature control portions. The plurality of temperature control portions are divided from each other via a division region in the same plane. The plurality of temperature control portions are each independently controllable in temperature. The top plate includes a plate body stacked on the temperature control sheet. A surface of the plate body serves as a placement surface for a semiconductor wafer, the surface being opposite the temperature control sheet. The top plate includes a heat insulating portion. The heat insulating portion is disposed at a position corresponding to the division region in the plate body, when viewed in a stacking direction of the temperature control sheet and the top plate. The heat insulating portion has a thermal conductivity lower than a thermal conductivity of the plate body.

Abstract: A temperature regulation device includes: a first temperature regulation unit that regulates a temperature of a liquid; and a second temperature regulation unit that regulates a temperature of the liquid supplied from the first temperature regulation unit. The first temperature regulation unit includes: a first flow path module having a first flow path of the liquid; and a base module that regulates a temperature of the liquid of the first flow path. The second temperature regulation unit includes: a second flow path module having a second flow path in which the liquid from the first flow path flows; and a Peltier module that regulates a temperature of the liquid of the second flow path. The base module regulates a temperature of the Peltier module.

Abstract: An electrode connection structure includes a first electrode unit that includes first electrodes formed concentrically, and a second electrode unit that includes a second electrode formed into a needle shape axially movable forward and rearward and is electrically connectable to the first electrode unit, and in the electrode connection structure, the second electrode unit includes a plurality of the second electrodes that is arranged in a circumferential direction and arranged at different radial positions, and the plurality of the second electrodes is electrically connected to the first electrodes arranged at different radial positions, respectively.

Abstract: To control the temperature of a fluid with high accuracy, a temperature control system is equipped with: a circulation channel including a temperature control target and a tank containing a fluid adjusted to a specified temperature range including a target temperature of the temperature control target; and a first temperature controller that is arranged between the tank and the temperature control target in the circulation channel and that adjusts the temperature of the fluid to be supplied to the temperature control target.

Abstract: A thermoelectric power generation device includes: a high-temperature plate having an upper face; a low-temperature plate having a lower face; a thermoelectric module disposed between the upper face and the lower face; a sealing portion disposed between the upper and lower faces, the sealing portion sealing the thermoelectric module at a circumferential portion of the upper face and a circumferential portion of the lower face; a first positioning portion disposed at the circumferential portion of the upper face; and a second positioning portion disposed at the circumferential portion of the lower face. The first positioning portion positions the sealing portion at the circumferential portion of the upper face, and the second positioning portion positions the sealing portion at the circumferential portion of the lower face.

Abstract: A temperature control device includes a smoother including a smoothing channel through which fluid from a first inlet flows, and a first outlet from which the fluid flowed through the smoothing channel flows out, the smoother making a temperature fluctuation amount of the fluid in the first outlet smaller than that in the first inlet, a thermoregulator including a second inlet into which the fluid from the first outlet flows, a thermoregulating channel through which the fluid from the second inlet flows, a thermoregulating unit regulating a temperature of the fluid flowing through the thermoregulating channel, and a second outlet from which the fluid flowed through the thermoregulating channel flows out, calculating a temperature regulation amount of the thermoregulating unit, based on temperature of the fluid in the smoothing channel, and calculating the temperature regulation amount, based on temperature of the fluid at a position downstream of the second outlet.

Abstract: A method for manufacturing a thermoelectric conversion element includes forming a thermoelectric film containing a thermoelectric material on a surface of a substrate, pressing the thermoelectric film with a mold to form a pattern of the thermoelectric film on the surface of the substrate, and heating the pattern of the thermoelectric film formed on the surface of the substrate to generate the thermoelectric conversion element.

Abstract: A thermoelectric power generation module mounting substrate includes: a printed substrate having a heat transfer through-hole penetrating a first surface and a second surface opposite to the first surface, and being in contact with a housing on the second surface; and a thermoelectric power generation module mounted on the printed substrate in contact with the first surface.

Abstract: A detection device includes a vibration sensor configured to detect vibration of a machine, a calculation unit configured to perform FFT analysis on detection data of the vibration sensor, divide a specific frequency range into a plurality of frequency ranges, and calculate a partial overall value for each of the plurality of frequency ranges, and a wireless communication device configured to transmit the partial overall value.

Abstract: A thermoelectric generator includes: a heat-receiving plate having a heat-receiving surface configured to receive radiant heat; a thermoelectric generation module provided to a surface of the heat-receiving plate opposite from the heat-receiving surface and having an area smaller than an area of the heat-receiving plate; a cooling plate provided to a surface of the thermoelectric generation module opposite from a surface where the heat-receiving plate is provided; and a temperature equalizer provided to the heat-receiving plate and configured to equalize a temperature of the heat-receiving surface.

Abstract: A thermoelectric generator includes a heat-receiving plate having a heat-receiving surface for receiving flame and high-temperature combustion gas, a thermoelectric generation module disposed at a surface of the heat-receiving plate opposite the heat-receiving surface, a cooling plate disposed at a side of the thermoelectric generation module opposite the heat-receiving plate, a cover disposed to cover the heat-receiving surface and including a heat inlet for introducing the flame and the high-temperature combustion gas and a heat outlet for discharging the temperature-reduced combustion gas introduced through the heat inlet, a heat diffuser provided on the heat-receiving surface at a position corresponding to the heat inlet and configured to diffuse the combustion gas introduced through the heat inlet along the heat-receiving surface, and a heat absorber provided on the heat-receiving surface to surround the heat diffuser and configured to absorb the heat of the high-temperature combustion gas diffused by th

Abstract: A processing liquid temperature control apparatus includes a block body with an integral structure made of a silicon carbide sintered body, the block body having a flow path through which a semiconductor processing liquid flows, and a temperature adjustment portion provided at the block body to adjust a temperature of the semiconductor processing liquid flowing through the flow path. Accordingly, it is possible to reduce the number of parts and achieve compactness and cost reduction. In addition, it is possible to enhance heat conduction between the processing liquid and the temperature adjustment portion, and improve heat exchange efficiency.

Abstract: A temperature control device for a semiconductor wafer includes a placement part having a placement surface on which a semiconductor wafer is placed and having a plurality of regions in which the placement surface is partitioned in a plan view, a temperature adjustment part configured to independently adjust a temperature of the placement part for each of the plurality of regions, a plurality of temperature detection parts provided in at least one of the plurality of regions and configured to detect a temperature of the region of which the temperature has been adjusted by the temperature adjustment part, and a control part configured to monitor detection temperatures of the plurality of temperature detection parts, to select one having a large temperature change per unit time among a plurality of monitored detection temperatures, and to control the temperature adjustment part based on the selected detection temperature.

Abstract: A thermoelectric generator transmitter includes: a hollow exterior frame having open ends; a heat-receiving plate covering one of the open ends of the exterior frame; a columnar member standing on the heat-receiving plate; a thermoelectric generation module arranged for facilitating heat transfer between the columnar member and the thermoelectric generation module; a radiator plate covering a part of the other one of the open ends of the exterior frame, the part corresponding to a location of the thermoelectric generation module; a processor drivable by electricity generated by the thermoelectric generation module and capable of outputting a detection signal detected by a sensor to an external device; and a terminal that receives the detection signal of the sensor from the external device. An inside of the exterior frame is divided into a location of the thermoelectric generation module and the processor and a location of the terminal.

Abstract: A substrate support device includes a placement part formed in a plate shape which extends in a horizontal direction and having a placement surface on which a substrate is placed, and a movable part which makes the placement surface conform to the substrate by moving according to a warpage of the substrate placed on the placement surface. The movable part includes an arm part including an expansion and contraction part which expands and contracts in the horizontal direction according to the warpage of the substrate placed on the placement surface, an arm body having a longitudinal direction in a vertical direction in a state in which the substrate is not placed on the placement surface, and an arm connection part which connects a lower end of the arm body to an outer end of the expansion and contraction part in the horizontal direction.