Abstract: A thermoelectric generator includes: a heat-receiving plate having a heat-receiving surface configured to receive radiant heat; a thermoelectric generation module provided to a surface of the heat-receiving plate opposite from the heat-receiving surface and having an area smaller than an area of the heat-receiving plate; a cooling plate provided to a surface of the thermoelectric generation module opposite from a surface where the heat-receiving plate is provided; and a temperature equalizer provided to the heat-receiving plate and configured to equalize a temperature of the heat-receiving surface.

Abstract: A thermoelectric generator includes a heat-receiving plate having a heat-receiving surface for receiving flame and high-temperature combustion gas, a thermoelectric generation module disposed at a surface of the heat-receiving plate opposite the heat-receiving surface, a cooling plate disposed at a side of the thermoelectric generation module opposite the heat-receiving plate, a cover disposed to cover the heat-receiving surface and including a heat inlet for introducing the flame and the high-temperature combustion gas and a heat outlet for discharging the temperature-reduced combustion gas introduced through the heat inlet, a heat diffuser provided on the heat-receiving surface at a position corresponding to the heat inlet and configured to diffuse the combustion gas introduced through the heat inlet along the heat-receiving surface, and a heat absorber provided on the heat-receiving surface to surround the heat diffuser and configured to absorb the heat of the high-temperature combustion gas diffused by th

Abstract: A processing liquid temperature control apparatus includes a block body with an integral structure made of a silicon carbide sintered body, the block body having a flow path through which a semiconductor processing liquid flows, and a temperature adjustment portion provided at the block body to adjust a temperature of the semiconductor processing liquid flowing through the flow path. Accordingly, it is possible to reduce the number of parts and achieve compactness and cost reduction. In addition, it is possible to enhance heat conduction between the processing liquid and the temperature adjustment portion, and improve heat exchange efficiency.

Abstract: A temperature control device for a semiconductor wafer includes a placement part having a placement surface on which a semiconductor wafer is placed and having a plurality of regions in which the placement surface is partitioned in a plan view, a temperature adjustment part configured to independently adjust a temperature of the placement part for each of the plurality of regions, a plurality of temperature detection parts provided in at least one of the plurality of regions and configured to detect a temperature of the region of which the temperature has been adjusted by the temperature adjustment part, and a control part configured to monitor detection temperatures of the plurality of temperature detection parts, to select one having a large temperature change per unit time among a plurality of monitored detection temperatures, and to control the temperature adjustment part based on the selected detection temperature.

Abstract: A thermoelectric generator transmitter includes: a hollow exterior frame having open ends; a heat-receiving plate covering one of the open ends of the exterior frame; a columnar member standing on the heat-receiving plate; a thermoelectric generation module arranged for facilitating heat transfer between the columnar member and the thermoelectric generation module; a radiator plate covering a part of the other one of the open ends of the exterior frame, the part corresponding to a location of the thermoelectric generation module; a processor drivable by electricity generated by the thermoelectric generation module and capable of outputting a detection signal detected by a sensor to an external device; and a terminal that receives the detection signal of the sensor from the external device. An inside of the exterior frame is divided into a location of the thermoelectric generation module and the processor and a location of the terminal.

Abstract: A substrate support device includes a placement part formed in a plate shape which extends in a horizontal direction and having a placement surface on which a substrate is placed, and a movable part which makes the placement surface conform to the substrate by moving according to a warpage of the substrate placed on the placement surface. The movable part includes an arm part including an expansion and contraction part which expands and contracts in the horizontal direction according to the warpage of the substrate placed on the placement surface, an arm body having a longitudinal direction in a vertical direction in a state in which the substrate is not placed on the placement surface, and an arm connection part which connects a lower end of the arm body to an outer end of the expansion and contraction part in the horizontal direction.

Abstract: A thermoelectric power generation module includes two substrates, a thermoelectric conversion element, a sealing portion sealing peripheral edges of upper and lower surfaces, a first solder between the upper surface and the sealing portion, and a second solder between the lower surface and the sealing portion. At least one of outer and inner edges of the first solder or the sealing portion is deviated from the first solder or the sealing portion. At least one of outer and inner edges of the second solder or the sealing portion is deviated from the second solder or the sealing portion. At least one of the outer and inner edges of the first solder has a fillet shape between the upper surface and the sealing portion. At least one of the outer and inner edges of the second solder has a fillet shape between the lower surface and the sealing portion.

Abstract: A fluid heating device includes: a tank to store a fluid; a pump to deliver the fluid stored in the tank; a heater to heat the delivered fluid to a predetermined temperature; a return pipe to return the heated fluid to the tank; a fluid supply valve to supply an unheated fluid into the tank; a fluid discharge valve to discharge the heated fluid from the tank; a temperature sensor to detect a temperature of the heated fluid; and a temperature controller to control an opening degree of each of the fluid supply valve and the fluid discharge valve to control the temperature of the fluid stored in the tank. The temperature controller includes: a discharge opening-degree controller-to control the opening degree of the fluid discharge valve; and a supply opening-degree controller to control the opening degree of the fluid supply valve.

Abstract: A thermoelectric module of the invention includes: first and second thermoelectric elements; a first electrode having a plate-shaped body whose first surface is bonded to a first end surface of the first thermoelectric element and a first end surface of the second thermoelectric element; a second electrode bonded to a second end surface of the first thermoelectric element; and a third electrode bonded to a second end surface of the thermoelectric element. The first electrode includes: a first cutout formed at a first side in a width direction; and a second cutout formed at a second side in the width direction. In the width direction, at least one of the first cutout or the second cutout is present in a section between the first side and the second side of the first electrode.

Abstract: A substrate processing apparatus includes a chamber which has a processing room in which a substrate is processed, a cover which is provided in the processing room and is provided between the substrate and the chamber, and a heater which is provided only on the cover among the chamber and the cover and heats the cover.

Abstract: A detection device that is capable of being attached to a through hole includes a main body portion, a detection portion, a cover portion, an insulation portion, and an oscillation portion. The main body portion has an insertion portion and a head portion. The detection portion is arranged in the insertion portion and detects the state of a fluid. The cover portion is arranged so as to form a gap with the head portion. The insulating portion has a lateral wall having a cylindrical shape. An oscillation portion is accommodated inside the insulation portion, and performs a wireless output of a detection result of the detection portion by using the head portion, the cover portion and the gap as a slot antenna.

Abstract: A thermoelectric generator includes a heat-receiving plate including a heat-receiving surface, a first heat conductor disposed on a surface of the heat-receiving plate opposite the heat-receiving surface and configured to transfer heat received by the heat-receiving plate, a thermoelectric generation module disposed on a surface of the heat conductor opposite the heat-receiving plate, a second heat conductor disposed on a surface of the thermoelectric generation module opposite the first heat conductor, and a cooling plate disposed on the thermoelectric generation module opposite the heat conductor, at least a part of an outer periphery of the first heat conductor being located inside a region corresponding to a pair of a P-type thermoelectric element and an N-type thermoelectric element disposed to an outer periphery of the thermoelectric generation module.

Abstract: A heating device includes: a baseplate; a faceplate provided above the baseplate, the faceplate including a film heater configured to heat a wafer mounted on an upper surface of the faceplate; a sleeve provided between the baseplate and the faceplate, the sleeve including a sleeve body having a vertical through-hole; and a support bolt penetrating the through-hole in the sleeve to support the faceplate on the baseplate, in which a distance from a central axis of the through-hole in the sleeve to a flat surface of an outer portion of the sleeve is less than a distance from the central axis of the through-hole to a locking surface of an inner portion of the sleeve.

Abstract: A thermoelectric power generation apparatus includes: a higher-temperature side heat conductor; a lower-temperature side heat conductor disposed at a distance from the higher-temperature side heat conductor; a thermoelectric power generation module including a higher-temperature side electrode that is in thermal contact with the higher-temperature side heat conductor, and a lower-temperature side electrode that is in thermal contact with the lower-temperature side heat conductor; a heat insulating member disposed between the higher-temperature side heat conductor and the lower-temperature side heat conductor, the heat insulating member accommodating the thermoelectric power generation module; and an integrating member provided separately from the heat insulating member. The higher-temperature side heat conductor and the lower-temperature side heat conductor are integrated with each other by the integrating member with the heat insulating member interposed therebetween.

Abstract: An optical sensor is provided, in which members forming an optical path can be reliably supported without blocking the optical path extending from a light source to a light receiver. An optical sensor includes a light source configured to emit light, and a light receiver configured to receive the light emitted from the light source. An optical path extending from the light source to the light receiver extends through an oil infiltrating space into which oil infiltrates. The optical sensor further includes: a substrate on which the light source is mounted; a substrate on which the light receiver is mounted; a fixing member including an accommodation space in which the substrates are accommodated; and a sealing resin contained in the accommodation space and sealing the substrate.

Abstract: A circulating cooling/heating device configured to cool and heat a circulating fluid supplied to a chamber in plasma-etching equipment includes: a heat exchanger configured to perform heat exchange between the circulating fluid and a cooling water; a heater configured to heat the circulating fluid; a pump configured to circulate the circulating fluid between the circulating cooling/heating device and the chamber; a cooling water circulation block through which the cooling water passes; and a pressure sensor serving as a pressure detecting unit configured to detect a pressure of the cooled or heated circulating fluid, the pressure sensor being attached to the cooling water circulation block.

Abstract: A thermoelectric generator includes: a heat-receiving plate configured to receive heat; a cooling plate configured to be kept at a lower temperature than a temperature of the heat-receiving plate; and a thermoelectric generation module interposed between the heat-receiving plate and the cooling plate, in which the thermoelectric generation module includes: an opposed surface that is opposed to the cooling plate; a plurality of thermoelectric elements; a terminal configured to electrically conduct to the thermoelectric elements; and a lead member bonded to the terminal, in which the lead member penetrates the opposed surface and extends to the cooling plate.

Abstract: A temperature control device includes: a circulating cooling/heating unit cooling and heating a circulating fluid and circulating the circulating fluid relative to a chamber; a controller adjusting a temperature of the circulating fluid to adjust the temperature of the chamber to a temperature setpoint, and a housing for housing the circulating cooling/heating unit and the controller, the housing defining therein a circulation chamber in which the circulating cooling/heating unit is disposed and a control chamber in which the controller is disposed. These chambers are on the same level. A reservoir for storing the circulating fluid, a pump for circulating the circulating fluid, a heat exchanger for cooling the circulating fluid, and a heater for heating the circulating fluid are disposed in the circulation chamber. An inverter for controlling a drive of the pump and an SSR for switching ON/OFF of the heater are disposed in the control chamber.

Abstract: A thermoelectric generation module has a cooling surface formed on one of a front side and a rear side and a heating surface formed on the other thereof. The thermoelectric generation module includes: a plurality of thermoelectric elements; a pair of flexible boards holding the thermoelectric elements therebetween and respectively defining the cooling surface and the heating surface; a plurality of interelement electrodes respectively provided on opposed surfaces of the flexible boards and configured to electrically connect the thermoelectric elements to each other; a lead wire configured to be electrically connected to an interelement electrode to which a terminal element located at an end of an electrical arrangement is connected; and a reinforcing pattern interposed between the flexible boards and being closer to the drawn-out lead wire with respect to the terminal element.

Abstract: A manipulated variable calculator having a plurality of control loops and configured to calculate manipulated variables to be respectively given to a plurality of temperature adjusters includes: a reference model output generator configured to generate a reference model that is a response output until reaching a temperature setpoint when, in the plurality of control loops, a manipulated variable of a control loop having the slowest response speed is defined as 100%; a simulator configured to sequentially search for a switching time to determine a manipulated variable pattern; a reference model configured to generate a reference model output based on the searched switching time; and a control switching unit configured to switch to a feed-back control using an error between the reference model outlet and the temperature setpoint when the reference model outlet reaches a predetermined time or a predetermined temperature after the reference model outlet starts.