Abstract: A thermoelectric power module capable of suppressing diffusion of not only a material of a solder layer but also a material of a solder joint layer into a thermoelectric element, or suppressing oxidation of the thermoelectric element. The thermoelectric power module includes in sequence: a thermoelectric element consisting essentially of a thermoelectric material containing at least two kinds of elements of bismuss (Bi), tellurium (Te), antimony (Sb), and selenium (Se) as principal components; a first diffusion prevention layer consisting essentially of at least one of molybdenum (Mo) and tungsten (W); a second diffusion prevention layer consisting essentially of at least one of cobalt (Co), titanium (Ti), and an alloy or compound containing them as principal components; and a solder joint layer consisting essentially of at least one of nickel (Ni), tin (Sn), and an alloy or compound containing them as principal components.

Abstract: A thermoelectric power module which can be manufactured without spoiling solderability or joining strength when a thermoelectric element and an electrode are joined to each other by using solder, and in which electric resistance does not largely increase in long time use.

Abstract: A thermoelectric power module capable of suppressing increase of heat-leakage between a heat exchanger at a higher temperature part and another heat exchanger at a lower temperature part while effectively preventing oxidation of a thermoelectric element, an electrode, and a joint layer for joining the thermoelectric element to the electrode, and preventing a short circuit due to extraneous materials, dew condensation, and so on.

Abstract: A thermoelectric power generation device includes: a thermoelectric power generation unit; and a transporter capable of moving the thermoelectric power generation unit. A thermoelectric power generation device including a thermoelectric power generation unit that converts heat energy which varies in release state into electric energy to recover the energy can thus be provided in a steel material manufacturing line in which a heat source flows.

Abstract: A thermoelectric power generation unit is installed to face a steel material, and installed depending on an output of the thermoelectric power generation unit. A thermoelectric power generation device including a thermoelectric power generation unit that converts heat energy which varies in release state into electric energy to recover the energy can thus be provided in a continuous casting line or slab continuous casting line in which a heat source flows.

Abstract: A thermoelectric module includes a thermoelectric element and an electrode. The thermoelectric element has a rectangular end face. The electrode includes a first joint portion joined to a center portion of the end face; and a second joint portion joined to one end and a third joint portion joined to the other end. Each of the second joint portion and the third joint portion is disposed at a distance from each of four corners of the end face. A joint length in the second direction orthogonal to the first direction between the first joint portion and the end face is longer than each of a joint length in the second direction between the second joint portion and the end face, and a joint length in the second direction between the third joint portion and the end face.

Abstract: A temperature controller that performs a temperature control on a plurality of temperature adjusters including a reference temperature adjuster to adjust a temperature of a semiconductor wafer includes a setpoint setting section that: sets a temperature detected by a master temperature detector as a control setpoint for a reference one of the temperature adjusters of a master loop, until a temporary setpoint below an actual control setpoint preset as a desired temperature of the semiconductor wafer is reached; and sets the actual control setpoint as the control setpoint for the master loop after the temporary setpoint is reached.

Abstract: A fluid heating device for heating chemicals mainly containing sulfuric acid, which is capable of suppressing reduction of heating efficiency even if a fluid mainly containing sulfuric acid is heated, includes a translucent inner tube composed of quartz or the like, a lamp heater disposed in the inner tube, a translucent outer tube disposed outside the inner tube, which is composed of quartz or the like, translucent side plates disposed on both sides of the outer tube, which include quartz or the like, and an amorphous carbon pipe disposed between the outer tube and the inner tube, which functions as a light-absorbing material, wherein the amorphous carbon pipe is disposed so as to be brought into contact with chemicals passing through a space between the outer tube and the inner tube.

Abstract: A thermoelectric generator includes: a heat-receiving plate being adapted to receive heat; a cooling plate being maintained at a low temperature as compared with the heat-receiving plate; a thermoelectric module being interposed between the heat-receiving plate and the cooling plate; a terminal block at which a lead wire from the thermoelectric module is connected to an external power line, the terminal block being located on the cooling plate; and a metal cover being fixed on the cooling plate to cover the terminal block.

Abstract: A thermoelectric generator includes: a heat-receiving plate being adapted to receive heat; a cooling plate being maintained at a low temperature as compared with the heat-receiving plate; a thermoelectric module being interposed between the heat-receiving plate and the cooling plate; a first O-ring being interposed between the heat-receiving plate and the cooling plate to surround an outside of the thermoelectric module; a bolt with which the heat-receiving plate and the cooling plate are connected to each other at an outside of the first O-ring; and an elastic coil spring being provided as an assisting member on the bolt to bias the heat-receiving plate and the cooling plate in a mutually approaching direction.

Abstract: A thermoelectric module includes a thermoelectric element and an electrode. The thermoelectric element has a rectangular end face. The electrode includes a first joint portion joined to a center portion of the end face; and a second joint portion joined to one end and a third joint portion joined to the other end. Each of the second joint portion and the third joint portion is disposed at a distance from each of four corners of the end face. A joint length in the second direction orthogonal to the first direction between the first joint portion and the end face is longer than each of a joint length in the second direction between the second joint portion and the end face, and a joint length in the second direction between the third joint portion and the end face.

Abstract: When a temperature of a semiconductor wafer is controlled to be a target temperature by raising the temperature of the semiconductor wafer, switching is performed so that a high-temperature circulating liquid at a temperature higher than the target temperature in a high-temperature tank is supplied into an inside-stage flow channel, and respective thermoelectric elements in a plurality of zones in a stage are controlled; and then, the temperature of the semiconductor wafer matches the target temperature and a desired in-plane temperature distribution of the semiconductor wafer is provided.

Abstract: A temperature control device includes an estimator that estimates the outlet temperature of fluid at an outlet of heating tanks to which no outlet temperature sensor is provided. The temperature control device includes a control unit. For a heating tank to which an outlet temperature sensor is provided, the control unit determines a manipulated variable on the basis of the outlet temperature which has been measured and an individual target temperature. For a heating tank to which no outlet temperature sensor is provided, the control unit determines a manipulated variable on the basis of the estimated temperature estimated by the estimator and an individual target temperature. The control unit controls the outlet temperature of the heating tanks on the basis of the manipulated variables.

Abstract: A fluid temperature adjusting device includes: a heater configured to heat a fluid passing through a fluid passageway; a peltier module including a plurality of peltier elements, the peltier module being configured to heat or cool the fluid passing through the fluid passageway; and a controller configured to divide a total thermal energy for keeping the fluid at a target temperature into a thermal energy to be supplied from the heater and a thermal energy to be supplied from the peltier module to give the total thermal energy from both the heater and the peltier module to the fluid.

Abstract: A fluid temperature adjusting device includes: a heater configured to heat a fluid passing through a fluid passageway; a peltier module including a plurality of peltier elements, the peltier module configured to heat or cool the fluid passing through the fluid passageway; and a controller configured to supply thermal energy from both the heater and the peltier module to the fluid and switch magnitudes of an operation amount of the heater and an operation amount of the peltier module when heating the fluid so that the fluid is kept at a target temperature.

Abstract: A temperature control device includes: a top plate; a heat exchanger plate; a thermoelectric module including a temperature-control-side electrode disposed near the top plate, a heat-exchanger-side electrode disposed near the heat exchanger plate and a thermoelectric element of which one side is connected with the temperature-control-side electrode and the other side is connected with the heat-exchanger-side electrode; and a polyimide film provided on the thermoelectric module near the top plate. The thermoelectric module is spaced apart from and surrounded by a seal wall having a ceramic outer circumference and disposed between the polyimide film and the heat exchanger plate. An adhesion sheet or an adhesive is interposed between the seal wall and the polyimide film.

Abstract: A fluid temperature control device, which is particularly suitably applied to the temperature control of a processing liquid in a semiconductor device manufacturing process, capable of performing quickly and precisely the temperature control of a temperature-controlled fluid, and the device can also be made as small as possible. This fluid temperature control device includes a body block having flow passage grooves formed therein; heat transfer plates which are disposed on surfaces of the body block to form flow passages where a temperature-controlled fluid flows; heaters which heat the temperature-controlled fluid flowing through the flow passages via at least one of the heat transfer plates; and thermoelectric modules which heat and cool the temperature-controlled fluid flowing through the flow passages via at least one of the heat transfer plates.

Abstract: A sensor-fitted substrate allowing a sensor-fitted wafer for measuring the temperature or strain to be produced inexpensively, moreover, allowing measurements of the temperature or strain to be carried out with satisfactory accuracy, and a method for producing such a sensor-fitted substrate. An undercoat film is formed on the surface of a substrate, the film being configured, compared to when no undercoat film is formed, to allow the strength of close contact of a dispersed nano-particle ink with the substrate to be increased, the diffusion of the dispersed nano-particle ink into the substrate to be suppressed, and the growth of metal crystal particles contained in the dispersed nano-particle ink to be suppressed. A wiring pattern of the sensor is traced on the surface of the undercoat film of the substrate surface by using the dispersed nano-particle ink, and the dispersed nano-particle ink is baked and metalized.

Abstract: A temperature adjustment apparatus suppresses decline in temperature adjustment performance by avoiding even partial impairment of the function of a thermoelectric module in respective zones, which is accomplished due to the presence of terminals. A terminal is provided via an electrode extension section on a heat exchange plate side electrode of the thermoelectric module of inner zones apart from an outermost zone, of four zones. The electrode extension section is disposed at a position which is sandwiched between adjacent thermoelectric elements and over which a temperature adjustment side electrode spans. The terminals are disposed outside the thermoelectric module in the outermost zone.

Abstract: A temperature controller includes: a closed first circulation circuit having a fluid cooler; a closed second circulation circuit having a halogen lamp heater as a fluid heater and feeding a thermal fluid heated by the halogen lamp heater to a vacuum chamber as an object to be temperature-controlled; a feed path that feeds the thermal fluid from the first circulation circuit to the second circulation circuit; and a discharge path that discharges the thermal fluid from the second circulation circuit and returns the thermal fluid to the first circulation circuit. A flow-rate control valve that adjusts and controls a feed flow-rate of the thermal fluid from the first circulation circuit is provided in the feed path. A pressure control valve that compensates a pressure of the thermal fluid at a predetermined pressure level or less is provided in the discharge path.