Abstract: An apparatus for the inward and outward transfer of a workpiece, particularly of a disk-shaped substrate in a vacuum chamber having a coating system comprising a cathode station. A conveyor means designed as a rotary table is situated inside the vacuum chamber. The rotary table accepts substrate holders which are designed as turned parts. A supporting plate is provided in the region of the inward transfer station. It supports the substrate holder and prevents a sagging thereof. The supporting plate also presses the substrate holder against the inside wall of the vacuum chamber; i.e. against a seal situated in the inside wall. As a result thereof, an air-tight separation of the inward transfer chamber from the vacuum chamber and from the atmosphere is achieved. A considerable reduction in the moved masses of the rotating component parts is achieved by a skillful designing and arrangement of the component parts.

Abstract: A cathode sputtering apparatus provided with a quick disconnect mechanism for rapid replacement of a target. The quick disconnect mechanism preferably includes a rotatable sleeve that upon appropriate rotation exerts a clamping force on the target. The clamping force preferably is created by balls caused to cam radially outward from a central axis.

Abstract: In a process for coating substrates 1, 35, for example aluminum ceramic plates 1 or polyimide films 35 with copper by means of a device including a direct current source 10 which is connected to a sputtering cathode 5, 30, 31 disposed in a process chamber 15, 15a, 32 which can be evacuated and this cathode electrically interacts with a copper target 3, 33, 34 which can be sputtered and the sputtered particles are deposited on the substrate 1, 35 whereby the argon gas can be introduced into the process chamber 15, 15a, 32 which can be evacuated, an oxygen inlet 20, 39 is provided in addition to the argon inlet 21, 40, whereby the supply of oxygen can be controlled via a valve 19, 43 inserted in the feed line 23, 39 and the amount of oxygen can be metered such that during a first process phase a copper oxide layer which functions as a bonding agent forms on the substrate 1, 35 and after adjusting the argon atmosphere in the process chamber 15, 15a, 32 pure copper is deposited as an electrically conductive layer

Abstract: Method for machining flat, circular disk-shaped recording media, for example, audio, video or ROM compact disks, for the purpose of improving their surface quality and their dimensional stability, employs a lathe having a driven lathe spindle (7), a vacuum chuck (8) for holding the recording medium or substrate (15, 15'. . . ) to be machined, and a carriage (9) for holding and guiding the cuting tool (5) magazine (14) hold the machined and unmachined substrates, there being further provided a robot (10) held on the base (2) or bed (4) of the lathe and having a gripper arm (11) with gripping tongs (12) movable in several planes which transport the substrates from one magazine (14) to the vacuum chuck (8) or from the vacuum chuck to the other magazine, the stacking axes (L) of the two magazines extending at an angle to the horizontal plane (E), and the magazines being maintained within the range of action of the gripper arm (11) with gripping tongs (12).

Abstract: The invention refers to a multiple connection of rotation vacuum pumps having a common housing and drive motor. The vacuum pumps arranged in two rows. Each one of the vacuum pumps has a pump gear, and these gears, together with a drive gear, are arranged such that they form a single row with their teeth drivingly intermeshed. Preferably only inner parts of the pump are located in the housing.

Abstract: Planetary gear system including one set of gearwheels 11, in particular for devices for coating substrates 3, 3', . . . in a high-vacuum coating chamber where a drive shaft 9 supported and guided in a stationary bearing 1A is provided with a radially extending carrier plate 10 for planets and where the main axis of the stationary sun gear 8 coincides with the rotating axis of the drive shaft 9 and engages the set of gearwheels, wherein the bearing cage, which includes a top plate 27 and a bottom plate 28, via an axis 23 extending parallel to the rotating axis, engages an opening 16, the latter being provided in an area which is located radially inside the carrier plate 10 and wherein the drive shaft 26 of the set of gearwheels 11 is supported and guided in a slot 17 which is in area radially on the outside of the carrier plate 10 and emerges out of the carrier plate 10 parallel tot he rotating axis.

Abstract: In a device for the quick change of a shaft, e.g., the shaft of a coil in web coating apparatus, the shaft of the coil is equipped at the ends with ball bearings which, after the change, are fixed in a bearing holder. To be able to perform the change simply, the seat of the bearing is multipartite. The two upper halves of the bearing holder are shaped so that the bearing automatically opens and closes when the shaft is changed. The lock-up of the bearing holder is signaled electrically at the switchboard.

Abstract: The invention relates to an arrangement for the production of a plasma as well as for applying charged and uncharged particles onto a substrate. Two areal electrodes connected to a voltage source are provided between which a plasma volume excited by high-frequency energy is ignited. The areal ratio of the two electrodes is variable in order to influence the energy of the ions impinging on a substrate. Furthermore, supplying of process gas distributed over the entire substrate area is possible.

Abstract: The invention relates to a device for the detection with measuring techniques of the temperature course of a metal or metal alloy melt in a container (39) which is influenceable by a heating device (22 to 24) and a cooling device (33). The temperature course is herein detected via a thermal camera (49) which is directed toward the region of the solidification front (48) of the melt. The data supplied by the thermal camera (49) are used for the purpose of determining the thermal gradient along on a coordinate of the container (39) and to control the heating device (22 to 24) according to the thermal gradient. Moreover, the data supplied by the thermal camera (49) are used for the determination of the solidification velocity of the melt to regulate the cooling device (33) in accordance with this solidification velocity.

Abstract: In a device for transporting substrates in vacuum coating systems with several stations, comprising several substrate holders 16 of plate-like configurations which can e moved across the stations along a prescribed path of transportation in a vertical position and which interact with rails 13, 14 being provided in the area of their foot part 15 below the substrates 22, 23 to be mounted to the substrate holders 16, the foot part 15 of the substrate holder 16 has a pair of rails 13, 14 spaced parallel apart and disposed in a vertical plane. The smaller sides thereof, which face one another, have longitudinal grooves 13a, 14 which correspond with rollers 7, 8 or sliding pads being disposed stationary on the bottom part of the device and being provided in rows corresponding to the course of the grooves and in planes that are on top of each other and spaced vertically apart.

Abstract: In a method for the production of sheets of mineral glass with high transmission in the visible spectral range and with low solar energy transmission, a coating is sputtered onto the sheet in a coating chamber by cathode sputtering with a target of an alloy of 65% tin and 35% nickel in an atmosphere with an oxygen content. The sheet and coating are then heated at 640.degree. C. and then bent in the heated state, thus producing an especially stable and electrically conductive combination.

Abstract: The invention concerns an on-off switch (1) for high-frequency currents. This switch (1) comprises a housing (2) made of an electrically non-conducting plastic and sealed at both its upper and its lower sides by electrically conducting contact parts (3,4). A metal bellows (14) is present in the housing (2) and is connected at one end to one of the contact parts, (4) and at its other end to a contact head (25). Using compressed air, the contact head (25) can be moved to make contact with the other contact part (3) or be removed away from it.

Abstract: An apparatus for reactively coating a substrate 1 with an electrically insulative material comprising an ac power supply connected to the cathodes 5, 5a which are disposed in an evacuable coating chamber 15, 15a. These cathodes interact electrically with the targets 3, 3a, and 3b, 3c to be to be sputtered. The apparatus has three electrodes 6, 5, 5a which are electrically separate from one another and from the sputtering chamber 26. Two electrodes are configured as magnetron cathodes 5, 5a wherein one of the cathode bases 11, 11a and the material of the targets 3, 3a, and 3b, 3c are electrically separate, and the third electrode functions as an anode 6 during the plasma discharge. For this purpose, a power supply source 10 for alternating current is connected to each of the two cathodes 5, 5a which, during a period of alternating current, function as a negative electrode and as a positive electrode. The power supply source 10 has a floating output with three terminals 12, 13, 14.

Abstract: In a device for coating a substrate 1 made of polymethylmethacrylate with aluminum by means of a direct current source 10 which is connected to an electrode 5 disposed in an evacuable coating chamber 15a and electrically connected to a target 3 to be sputtered and the sputtered particles are deposited on a substrate 1 and wherein a process gas is introduced into the coating chamber (15, 15a), helium has is introduced as a process gas in order to improve adhesiveness and service life 2.

Abstract: Cathode sputtering apparatus with a high sputtering rate, including a cathode having a cathode base 1 and a target 6 disposed parallel thereto and being provided with a channel 5 in the cathode base which is passed through by a cooling agent 12. With respect to the target 6, 10 to be cooled, this channel 5 is bounded by a thin wall 2 configured as a membrane. The wall 2 has large contact surfaces exhibiting a good heat transfer to the target surface. The contact surface between the target 6 and the wall 2 is coated with a material, e.g. a graphite layer, which has a low sputtering rate in order to delay a sputtering through as long as possible.

Abstract: Monomers containing silicon and oxygen which are liquid at room temperature and have a low vapor pressure are fed in a liquid state via a mass flow regulator to an evaporator provided with a body having capillary action where the liquid is evaporated by radiant heat. Evaporated monomer is fed to the reaction zone of a vacuum chamber where thin coatings are applied on substrates by chemical vapor deposition.

Abstract: A vacuum pump includes a rotor and at least one bearing that is supplied with a lubricant and that is situated, during operation, in a negative-pressure environment. In order to extend the useful life of the bearing, it is proposed that the bearing is formed from a ceramic material.

Abstract: A lifting and turning unit for a melting or casting plant. The lifting and turning unit for a deposit stand, preferably a table, for ingot molds of a vacuum melting and casting plant is provided. The unit consists of a tubular, vertically arranged lifter column that is axially movable with a hydraulic piston-cylinder unit and that has its upper end carrying the ingot mold table. A guide system composed of guide columns and of a yoke is provided. The guide columns serve for guiding the lifter column and for protecting the lifter column against twisting. The drive for the rotation of the rotatable ingot mold table is connected to the lifter column away from the harsh chamber environment. The unit provides an extremely low maintenance lifting and turing device wherein the longitudinal movements and the rotary movements can be executed separately from one another and thus allow for an exact positioning of the table.

Abstract: In a process for coating substrates by means of cathode sputtering, a magnetron cathode is used which has an annularly closed target 9. The sputter surface 9a of this target has an inner edge 9c and an outer edge 9d. The corresponding permanent magnets 7 has a first pole 7c which is disposed inside the inner edge and a second pole 7d disposed outside the outer edge. The characteristics of the poles geometrically resemble those of the target edges. This results in the generation of a circumferentially closed magnetic tunnel over the sputter surface. The flux lines thereof which are important to the enclosure of the plasma, are only slightly curved. In order to achieve a good material efficiency at high sputter rates and yet a high plasma density at the substrates, the spatial course of the magnetic flux lines is selectively distorted in such a way that the area of maximum target erosion, in absence of additional magnetic fields, is shifted to the vicinity of the outer edge 9d of the target 9.

Abstract: In a process for coating a plastic substrate 1 made of polymethylmethacrylate with metal using a direct current source 10 connected to an electrode disposed in an evacuable coating chamber 15, 15a and electrically connected to a target 3 to be sputtered, the adhesiveness and the service life of the layer are improved. In a first coating step, an argon plasma is maintained in the coating chamber 15, 15a for an extremely short period of time preferably until the so generated sputtering process passes from the oxidic to the metallic process. In a second coating step, helium is introduced in the coating chamber 15, 15a and a helium plasma is ignited. In a third coating step, argon is introduced into the coating chamber 15, 15a and an argon plasma is ignited and this argon plasma process is maintained until a desired thickness is reached.