Abstract: A series evaporator for vacuum vapor-deposition apparatus has several evaporators 5 with individual power control, heated by passing through a current, supported on column-like, electrical supply lines 3, 4 wherein the column-like supply lines 3, 4 are held by an electrically conductive support body 6 extending over the entire length of the series evaporator. The supply lines 3 of the one polarity are connected to the support body 6 in an electrically conductive manner whereas the supply lines 4 of the other polarity are passed through the support body 6 in an insulated manner and connected to conducting wires 7 disposed in an insulated manner. Spring elements 8 apply pressure to the supply lines 4 traversing the support body 6 with play a, b, the action of these spring elements being exerted approximately parallel to the longitudinal extension of the evaporator and pressing the top portions 9 of the supply lines 4 against the front surfaces 10 of the evaporator 5 which they face.

Abstract: A melting and casting furnace (1) for the production of directionally solidified or monocrystalline structures includes a housing (2) having a heating apparatus (3), and a cooling ring (4) disposed thereunder, as well as a cooling table (5) for the placement of a mold (6). Numerous radiation shields (8) in a heating zone in the housing, at a distance apart from one another and steer the heat rays onto a small area (A) in order to prevent direct radiation onto the metal already solidified or solidifying. In this manner the temperature gradient between the solidified and the molten can be kept great.

Abstract: A method and apparatus for delivering oil into a pump chamber of a high-vacuum stage of a multi-stage pump. The method includes the steps of sensing a first pressure at an intake region of the high-vacuum stage of the pump, and sensing a second pressure at a discharge region of the high-vacuum stage of the pump. Oil is delivered to the high-vacuum stage of the pump in response to a pressure difference between the first and second pressures. Increased quantities of oil are delivered to the high-vacuum stage of the pump when the pressure difference exceeds a predetermined value. A gas ballast may also be delivered to the high-vacuum stage of the pump when the pressure difference exceeds this predetermined value. The apparatus may include a diaphragm valve including a diaphragm mounted between subchambers that are respectively in fluid communication with the intake and discharge regions of the high-vacuum stage of the pump.

Abstract: A vacuum pump has a pump housing, magnetic bearings mounted in the housing, a rotary assembly including a pump rotor disposed in the housing and supported for rotation by the magnetic bearings and two spaced emergency bearings supporting the pump rotor when it deviates by a predetermined extent from a desired position. The rotary assembly has a center of gravity which is situated between the emergency bearings and which is spaced approximately equally therefrom.

Abstract: A refrigerator-operated apparatus having a housing adapted to accept components to be cooled. The housing is connected to a refrigerator housing via a connecting pipe, and the refrigerator includes a refrigerator generator extending through the housing and the connecting pipe, and encompassing at least one refrigerator stage that carries the components to be cooled. The apparatus further includes a damping mechanism for inhibiting vibrations generated by the refrigerator from being transmitted to the housing. The damping mechanism includes a separation space dividing the refrigerator housing into first and second connecting sections, and an elastic connecting ring connecting the first section to the second section. In one embodiment, the connecting ring extends across the separation space and is surrounded by a cover tube. In a second embodiment, the connecting ring is secured directly to one of the connecting sections, and is secured to the other connecting section via an adaptor pipe.

Abstract: A radiation chopper has a chopper disk 9 which is driven by an electromotor 8 and disposed between a front and a rear part of the housing 2, 3 placed on top of each other wherein the rear part 3 of the housing has a multi-armed yoke 5 and the front part 2 of the housing has a support for at least one cell and at least one aperture 17, 18 permitting the radiation to pass from the chopper chamber 10 to the cell and at least one support 38, 39 disposed at the rear part 3 of the housing for mounting the radiation source. At each of its two ends, the motor 8 for driving the chopper disk 9 has one bearing collar 13, 15 of which the one in the rear can be inserted into a borehole 14 provided in the multi-armed yoke 5 which in turn is connected to supports 4, 4', . . . that are configured as one piece with the rear part 3 of the housing and the front bearing collar 15 engages a borehole 16 which is provided at the bottom of the supports 4, 4', . . . in the rear part 3 of the housing.

Abstract: The invention relates to an apparatus for producing a plasma and treating substrates therein. The plasma produced by means of microwaves serves to coat a substrate which is situated in a chamber (5) having metal walls (6,7,12,13). The microwaves are repeatedly reflected at the metal walls (6,7,12,13), so that the chamber (5) has numerous microwave modes. By means of permanent magnets, which are placed either inside the chamber (5) or outside the chamber (5) in the vicinity of the substrate that is to be coated, it is possible to produce within this chamber (5) an electron-cyclotron resonance which permits a locally controlled ignition of the plasma.

Abstract: A gas friction pump has an inlet arranged to be coupled to a vessel to be evacuated; an outlet and an outlet-side pumping stage formed of a helical gas pumping channel. The pump further has a scavenging gas inlet circumferentially surrounding the helical gas pumping channel for exposing the channel to a scavenging gas.

Abstract: The invention relates to a device for recognizing the impact site (29, 37) of a charge carrier beam on a target. This device has two position-sensitive detectors (22, 23) above the target which have a given distance from each other and from the target and on which via imaging systems (24, 25) the impact site (29, 37) of the charge carrier beam is imaged by means of X-rays. The output signals of these detectors (22, 23) are placed on a special evaluation device which determines all three spatial coordinates of the impact site (29, 37) of the charge carrier beam.

Abstract: The invention is directed to a method for the operation of a twin shaft vacuum pump (1) having two rotors (4, 5; 6, 7; 8, 9) that rotate synchronously and in non-contacting fashion in a pump chamber, each being provided with a respective projection (38) and a recess (39), the one of said rotors controlling an admission opening (32, 35) and the other controlling a discharge opening (33, 37, 42); the invention is also directed to a twin shaft vacuum pump suitable for the implementation of the method; in order to be able to admit flushing gas into a twin shaft vacuum of this species during operation as well, it is proposed that flushing gas be admitted into the respectively diminishing pump volume via an orifice (45) that is controlled such by the rotor at the discharge side that the respective pump volume is closed both toward the admission opening (35) as well as toward the discharge opening (42) at the moment the flushing gas is supplied.

Abstract: The invention relates to a cooling device for circuit configurations in which high electrical energies are converted and specifically for electrical matching circuits with which the impedance of a plasma path is matched to a high frequency generator. Herein one or several coils are provided with a water cooling system in such a way that the cooling water is completely separated from the electromagnetic fields through metallic material. These coils consist of two tubes slid one into the other, wherein the cooling water is fed and drawn through the internal tube and between the two tubes so that it is completely within the field-free region.

Abstract: The invention relates to a device (20) for a unipolarly operated component (9) capable of storing energy. This device (20) can be applied, for example, in an asymmetrical half bridge circuit (1). It compensates the dc magnetic flux which originates due to the unipolar operation and, hence permits making relatively small in size the component (9) capable of storing energy. Using a current converter (25, 32) with suitable winding ratio as an automatic and load-dependent compensation device, moreover, permits very flexible adaptation to load changes. Such adaptation is, in particular, required when very high pulsating current occurs on the primary side with simultaneous secondary no-load operation.

Abstract: A twin-shaft vacuum pump including a rotor pair mounted for rotation in a pump chamber. The rotor pair together with the chamber wall define a suction side and delivery side of the pump chamber. In order to prevent solid particles suspended in pump fluid from settling in the chamber, the invention provides a flushing gas outlet orifice disposed on the delivery side of the pump chamber and adapted to be connected to a source of flushing gas. The solid particles can thus be held in suspension and conveyed from the pump with the assistance of flushing gas supplied through the orifice.

Abstract: A bevel angle drive having an input shaft with a plurality of first gears disposed at intervals thereon and a plurality of output shafts driven through second gears by the first gears and disposed radially to the input shaft. Each of the first gears has a hollow shaft. The output shafts with the second gears in the form of bevel gears are mounted each in a drive casing in which the particular first gear is journaled. The input shaft is brought in a longitudinally displaceable manner through each hollow shaft of all first gears and is joined for co-rotation to the letter by means of a driver.

Abstract: An oil supply device has a reservoir adapted to contain oil having a predetermined oil level; a drive shaft extending into the reservoir; a disc affixed to the shaft and being arranged to be submerged at least partially in the oil contained in the reservoir; and a trough affixed to the disc for rotation therewith as a unit. The trough extends arcuately and is radially inwardly open as viewed relative to the disc. Further, the trough is arranged to be submerged at least partially in the oil contained in the reservoir. There is also provided an oil conduit having a stationarily supported terminal portion accommodated in the reservoir and projecting into the trough. The oil conduit is provided with an open end situated in the trough and oriented opposite an operational rotary direction of the disc, whereby oil is driven into the terminal portion through the open end from the trough upon rotation of the drive shaft to supply oil under pressure in the oil conduit.

Abstract: The invention relates to a rotatable high-current connector 1A, 1B for establishing an electric power supply to movable consumers in closed chambers. The high-current connector includes several rotatable, coaxial pipes 2, 3, 55, 46 for the conduit of a current and a cooling agent. The pipes concerned 2, 3, 55, 46 are at one end provided with flanges 9, 13, 14, 11. Two stationary counter flanges 19, 20 which are insulated with respect to one another are disposed coaxially to these two flanges 9, 13. The electric connection is established via two bundles of strands 17, 18.

Abstract: Annealing and quenching method and apparatus for the implementation of the method. An annealing and quenching method for materials or parts referred to as a charge that is finish-annealed in a vacuum annealing plant and that then proceeds into a sluice chamber fashioned a full-pipe. An intermediate deposit of the charge occurs in this sluice chamber. After the intermediate deposit, a first sluice valve that is located between the chamber for the annealing furnace and the sluice chamber is closed. A second sluice valve that is located between the sluice chamber and a quenching container is subsequently opened. Movable brackets for the intermediate deposit of the charge are retracted, so that the charge falls through the second sluice valve into a quenching medium in the quenching container.

Abstract: The invention refers to a multiple connection of rotation vacuum pumps having a common housing and drive motor. The vacuum pumps arranged in two rows. Each one of the vacuum pumps has a pump gear, and these gears, together with a drive gear, are arranged such that they form a single row with their teeth drivingly intermeshed. Preferably only inner parts of the pump are located in the housing.

Abstract: A double-shaft vacuum pump with pistons (3,4) rotating without contact in the pump chamber (8) and with synchronization gears (16, 17) located in a side chamber (15). In order to dispense with an oil supply in the side chamber the teeth of the synchronization gears (16, 17) are shaped in such a way that contact between the tooth flanks (26) is limited to the immediate vicinity of the pitch circle (29). If any lubrication is needed, it can be supplied by bearing grease suitable for vacuum applications. The side chamber cover (27) is preferably shaped as a "figure-8" to conform to the peripheries of the synchronization gears (16, 17), and a cooling system for the gears may be provided.

Abstract: The invention concerns an electrical reversing switch, which is especially suited for switching of high-frequency electrodes. This switch has an over mounted pneumatic cylinder, which moves on pistons arranged on both sides, and thus produces electric contacts.