Patents Assigned to Leybold Aktiengesellschaft
  • Patent number: 5202131
    Abstract: An apparatus for making metal powders has a supply tank (2) for the molten starting material, at least one exchangeable pouring funnel (11, 13), at least one atomizing nozzle (12, 14) and at least one fall shaft (7) disposed thereunder for the solidification of the metal powder product. A chamber (1) enveloping the supply tank and the pouring funnel is disposed on the fall shaft (7). To be able more easily to change the pouring funnel or funnels, the chamber (1) has in the area of the pouring funnel a closable lateral opening (15), at which a lock chamber (16) for the introduction of the at least one pouring funnel (11, 13) is placed. A car (24) is held on tracks (18, 19) and can be driven into the chamber (1) and fully retracted into the lock chamber (16), and on its bottom is fastened a number of atomizing nozzles (12, 14) corresponding to the number of the pouring funnels (11, 13). The pouring funnels (11, 13) can be set downwardly onto the cars.
    Type: Grant
    Filed: December 20, 1991
    Date of Patent: April 13, 1993
    Assignee: Leybold Aktiengesellschaft
    Inventors: Leo Emiljanow, Franz Hohne, Wolfgang Schwarz
  • Patent number: 5197531
    Abstract: The invention relates to a method of manufacturing directionally solidified and/or monocrystalline castings including at least one sensor for sensing temperatures in metal or allow melts contained in a mold, including a thermoelement 41 equipped with a heat resistant coating, this thermoelement being introduced into the melt. Subsequently, the position of the interface between liquidus and solidus is determined from the measured temperatures by means of interpolation, and the withdrawal speed of the casting is controlled such that during the withdrawal of the casting, the interface is always located in a desired area of the insulation 10 which slightly above the cooling head 14. For this purpose, it is advantageous that the temperature of the heating for heating up the mold be stored as a parameter in a computer over the distance covered by the mold and/or the respective position of the mold in the vacuum furnace.
    Type: Grant
    Filed: April 15, 1992
    Date of Patent: March 30, 1993
    Assignee: Leybold Aktiengesellschaft
    Inventors: Franz Hugo, Harald Bittenbrunn
  • Patent number: 5198032
    Abstract: The invention relates to a tape vapor coating apparatus for the production of film webs 50 coated in a vacuum, with a coating chamber for the accommodation and advancement of a film web 50 as well as an evaporation source 19 provided in the housing and having at least one evaporating cell 21, at least one recess 15 being provided in the evaporating cell 21 to accommodate the substance that is to be evaporated. In the recess 15 of the evaporating cell 21 for the accommodation of the substance to be evaporated there is provided an additional, groove-like recess 14.
    Type: Grant
    Filed: October 3, 1991
    Date of Patent: March 30, 1993
    Assignee: Leybold Aktiengesellschaft
    Inventors: Siegfried Kleyer, Jochen Heinz
  • Patent number: 5196105
    Abstract: The present invention provides a system for coating substrates which are arranged within a vacuum chamber on a substrate holder which is situated at least partially in a coating range on whose both sides magnetron cathodes with magnet systems of permanent magnets with outside poles and inside poles are disposed, wherein the polarity of the magnet systems of the magnetron cathodes is such that poles of opposed polarity are opposite one another on both sides of the coating range; and on opposite sides of the coating range at least one magnet coil is disposed, and the oppositely situated magnet coils being connectable to a power source in such a manner that the fields of the magnet coils together make up a closed magnetic field, and that the polarity of the outside poles of the permanent magnet systems and of the magnet coils is the same.
    Type: Grant
    Filed: March 6, 1991
    Date of Patent: March 23, 1993
    Assignee: Leybold Aktiengesellschaft
    Inventors: Albert Feuerstein, Dieter Hofmann, Hans Schussler
  • Patent number: 5192894
    Abstract: The invention relates to a circuit configuration for the suppression of arcs in a plasma wherein to the plasma path (5, 7, 8) a voltage (11) is applied. The instantaneous value of the voltage of the plasma path (5, 7, 8) is compared with a mean value of the voltage which has been determined over a given period of time. If the difference between the instantaneous value and mean value exceeds a given amount, the plasma path (5, 7, 8) is isolated from the voltage (11).
    Type: Grant
    Filed: December 13, 1991
    Date of Patent: March 9, 1993
    Assignee: Leybold Aktiengesellschaft
    Inventor: Gotz Teschner
  • Patent number: 5183997
    Abstract: Heating apparatus which emits optical radiation having a visible content and an infrared content, for cooking foods by means of at least one radiation source (2) directed at a cook site for accommodating foods to be cooked or a container for foods to be cooked. Between the radiation source (2) and the cook site (4) there is a filter (7) having a support body (8) made of a material that is substantially permeable for all of the radiation. The support body (8) is provided with an interference layer system which reflects the visible content of the radiation at least predominantly to the radiation source and passes the infrared content of the radiation at least predominantly to the cook site.
    Type: Grant
    Filed: September 18, 1991
    Date of Patent: February 2, 1993
    Assignee: Leybold Aktiengesellschaft
    Inventor: Hans-Georg Lotz
  • Patent number: 5182001
    Abstract: In a process for coating substrates by means of cathode sputtering, a magnetron cathode is used which has an annularly closed target 9. The sputter surface 9a of this target has an inner edge 9c and an outer edge 9d. The corresponding system of permanent magnets 7 has a first pole 7c which is disposed inside the inner edge and a second pole 7d disposed outside the outer edge. The characteristics of the poles geometrically resemble those of the target edges. This results in the generation of a circumferentially closed magnetic tunnel over the sputter surface. The flux lines thereof which are important to the enclosure of the plasma, are only slightly curved. In order to achieve a good material efficiency at high sputter rates and yet a high plasma density at the substrates, the spatial course of the magnetic flux lines is selectively distorted in such a way that the area of maximum target erosion, in absence of additional magnetic fields, is shifted to the vicinity of the outer edge 9d of the target 9.
    Type: Grant
    Filed: September 5, 1991
    Date of Patent: January 26, 1993
    Assignee: Leybold Aktiengesellschaft
    Inventors: Wolf E. Fritsche, Michael Lubbehusen, Reiner Kukla, Siegfried BeiBwenger
  • Patent number: 5182003
    Abstract: A stationary magnetron sputtering cathode for vacuum coating systems for substrates 17 passing in front of the cathode 10 on a circular path K and disposed on a substrate holder 4 has a circular disk-like yoke plate 15, and a first group or row of magnets 14b, 14b'. . . , essentially forming a closed circular ring, is provided in the marginal zone of the yoke plate 15 and a second group or row of magnets 14a, 14a'. . . , forming a random but essentially symmetric configuration, is provided in the center of the yoke plate 15. The segment of the magnetic tunnel located in the half (III+IV) of the yoke plate 15 which faces away from the rotating shaft 5 of the substrate holder 4 has a greater total length than the tunnel segment provided on the half (I+II) of yoke plate 15 facing toward the rotating shaft 5.
    Type: Grant
    Filed: February 28, 1991
    Date of Patent: January 26, 1993
    Assignee: Leybold Aktiengesellschaft
    Inventors: Wolfram Maass, Ulrich Patz
  • Patent number: 5180562
    Abstract: Apparatus includes a crucible, a cover with an opening over the crucible, a pulling element for pulling monocrystal from melt in the crucible, and first and second heating elements. The first element is a substantially flat radiaent heat source below the crucible and the second element is a pot shaped, comprising a flat heat source above the melt and a cylindrical heat source about the crucible. A ring having holes therethrough is inserted in the crucible to quiet the melt, a filler funnel emptying material to be molten outside of the ring while the monocrystal is pulled from inside the ring.
    Type: Grant
    Filed: May 30, 1989
    Date of Patent: January 19, 1993
    Assignee: Leybold Aktiengesellschaft
    Inventors: Dieter Drechsel, Karl Jericho
  • Patent number: 5179622
    Abstract: A series evaporator for vacuum vapor-deposition apparatus has several evaporators 5 with individual power control, heated by passing through a current, supported on column-like, electrical supply lines 3, 4 wherein the column-like supply lines 3, 4 are held by an electrically conductive support body 6 extending over the entire length of the series evaporator, and the supply lines 3 of the one polarity are connected to the support body 6 in an electrically conductive manner whereas the supply lines 4 of the other polarity pass through the support body 6 in an insulated manner and connected to conducting wires 7 disposed in an insulated manner.
    Type: Grant
    Filed: August 29, 1991
    Date of Patent: January 12, 1993
    Assignee: Leybold Aktiengesellschaft
    Inventor: Siegfried Kleyer
  • Patent number: 5178522
    Abstract: A two-stage rotary vane vacuum pump includes a pre-vacuum stage having a pre-vacuum pumping chamber and an outlet valve; a main oil sump; and a first oil conduit having a first opening communicating with the main oil sump and a second opening communicating with the pre-vacuum pumping chamber. The first opening is located at a level below an operational oil level in the main oil sump. There is further provided an intermediate oil sump situated at a level above the outlet valve and being arranged for receiving oil from the pre-vacuum pumping chamber; and a second oil conduit leading from the intermediate oil sump to components of the vacuum pump to be supplied with oil. All such components are situated at a level below the intermediate oil sump.
    Type: Grant
    Filed: May 23, 1991
    Date of Patent: January 12, 1993
    Assignee: Leybold Aktiengesellschaft
    Inventors: Thomas Abelen, Lutz Arndt, Winfried Kaiser, Peter Muller, Dieter Vorberg
  • Patent number: 5173640
    Abstract: The invention relates to an apparatus for the production of a regular microwave field over a comparatively great area. This apparatus has a cavity resonator into which microwaves are put. Electromagnetic energy is coupled by special couplers, inductively or capacitively, out of the standing waves forming in the cavity resonator into a chamber in which preferably a plasma is contained.
    Type: Grant
    Filed: November 15, 1991
    Date of Patent: December 22, 1992
    Assignee: Leybold Aktiengesellschaft
    Inventors: Michael Geisler, Michael Jung, Bernhard Kessler
  • Patent number: 5170291
    Abstract: A coating for applying to a front side of a substrate, which side is facing an observer, comprises a four-layer system which is optically effective and has a high anti-reflective effect. A first layer of this system is applied onto the front side of the substrate and is, preferably, a highly-refracting TiO.sub.2 layer, the second layer is applied to the first layer and is a low-refracting Al.sub.2 O.sub.3 layer, a third layer of the system is applied to the second layer and is, preferably, a high-refracting TiO.sub.2, while the fourth layer applied to the third layer is, preferably, a low-refracting SiO.sub.2 layer. The layers can be formed by either a pyrolytic method, a plasma-supported chemical vapor deposition method, a sputtering method or a chemical vapor deposition method. Preferably, they are formed by a DC-reactive sputtering method with a magnetron.
    Type: Grant
    Filed: June 18, 1991
    Date of Patent: December 8, 1992
    Assignee: Leybold Aktiengesellschaft
    Inventors: Joachim Szczyrbowski, Klaus Hartig, Wolfgang Lohwasser
  • Patent number: 5169509
    Abstract: A pair of magnetron cathodes in an evacuable coating chamber are each connected to an ungrounded output of an A.C. power supply. The discharge voltage of at least one of the cathodes is measured and the flow of reactive gas into the chamber is controlled so that the measured voltage is identical to a desired voltage.
    Type: Grant
    Filed: May 9, 1991
    Date of Patent: December 8, 1992
    Assignee: Leybold Aktiengesellschaft
    Inventors: Rudolf Latz, Michael Schanz, Michael Scherer, Joachim Szczyrbowski
  • Patent number: 5167789
    Abstract: In an apparatus for coating a substrate (1) with electrically conductive materials (2), comprising a direct-current and/or an alternating-current source (10 and 38, respectively), which is connected to an electrode disposed in an evacuable coating chamber (15, 15a, 15b) electrically connected with a target (3, 32) which is sputtered and whose sputtered particles deposit themselves on the substrate (1), a process gas can be put into the coating chamber (15, 15a, 15b), toroidal magnetic fields pass through the target and their lines of force issue from the surface of the target (3) at the magnet poles, the target (3) has a substantially elongated, flat, oval shape and is furthermore surrounded by a dark-space shield (34) whose circumferential edge facing the substrate (1) slightly overreaches the front surface of the cathode tub (4), while the magnet system held on a yoke (6) and disposed in the cathode tub (4) is formed of a middle series of narrow magnets (8) extending in the direction of the length of the ta
    Type: Grant
    Filed: May 9, 1991
    Date of Patent: December 1, 1992
    Assignee: Leybold Aktiengesellschaft
    Inventor: Rudolf Latz
  • Patent number: 5165872
    Abstract: A friction pump includes a generally cylindrical first housing part, a generally cylindrical second housing part projecting axially into the inner space of the first housing part; a bearing mounted in the second housing part coaxially therewith; and a pump rotor supported for rotation in the bearing. The pump rotor has a cylindrical shell surrounding the second housing part. The pump further has a drive motor mounted in the second housing part for driving the pump rotor; and a helical channel defined between the inner face of the first housing part and the outer face of the pump rotor for pumping gases upon rotation of the pump rotor. The second housing part, the bearing, the pump rotor and the drive motor form a single structural unit that can be axially removed from the first housing part after releasing a coupler between the two housing parts.
    Type: Grant
    Filed: July 19, 1990
    Date of Patent: November 24, 1992
    Assignee: Leybold Aktiengesellschaft
    Inventors: Frank Fleischmann, Hans-Peter Kabelitz, Hans Kriechel, Martin Muhlhoff
  • Patent number: 5164063
    Abstract: In a sputtering cathode arrangement according to the magnetron principle for the coating of a flat circular substrate, with a circular ring-shaped target and an outer mask and inner mask disposed between the target and the substrate, a magnet system with a yoke plate being disposed in back of the target for the production of the magnetron effect, the inner mask is fastened to a mask holder which is brought through the center of the target, the magnet system with the yoke plate (8) being disposed for rotation about an axis of rotation (M) going through the center of the target, and consisting of at least two magnet arrangements (9,9', . . . ; 10,10', . . .
    Type: Grant
    Filed: October 23, 1991
    Date of Patent: November 17, 1992
    Assignee: Leybold Aktiengesellschaft
    Inventors: Guenter Braeuer, Eberhard Schultheiss
  • Patent number: 5155908
    Abstract: The invention relates to a method of making a pump ring for a two-stage vacuum pump (1) with a one-piece rotor system (14) having three sections (14a, b, c), whose end sections (14a and 14c form the two pumping stages and whose middle section (14b) forms an intermediate bearing, the diameters of the bearing section (14band of the rotor section (14a) forming the forepumping stage being equal. To reduce the tolerances that occur it is proposed that two bores be made in a single set-up from one end of a substantially cylindrical workpiece, the one forming the anchor contact (51) of the forepumping stage as well as the bearing bore (12) and the other forming the anchor contact (52) of the high-vacuum stage, and that before or after these bores aremade, additional bores (11, 13) are made in order to form the pump chambers (21, 17).
    Type: Grant
    Filed: April 26, 1991
    Date of Patent: October 20, 1992
    Assignee: Leybold Aktiengesellschaft
    Inventors: Lutz Arndt, Winfried Kaiser, Peter Muller
  • Patent number: 5156202
    Abstract: A permanent mold for mold-casting reactive metals and metal alloys (FIG. 1) includes a multiple of radially disposed, plate-like segments 3, 3', 3", . . . which enclose the workpiece 12 and are preferably made of cooled metallic material and which form together the permanent mold including a top inlet opening 14 and a bottom opening 15 for withdrawing the working piece; in order to close the withdrawal opening 15, a closing plate 9 is provided which is composed of a multiple of ring segments 13, 13', 13", . . . and the permanent mold 5 is enclosed by a magnetic coil 6 so as to generate an electromagnetic field.
    Type: Grant
    Filed: September 4, 1991
    Date of Patent: October 20, 1992
    Assignee: Leybold Aktiengesellschaft
    Inventors: Georg Sick, Otto W. Stenzel
  • Patent number: 5152684
    Abstract: A dual rotor Roots type vacuum pump has an improved rotor profile contour resulting in high area efficiency, high volumetric efficiency, reduced backstreaming and simplified economical manufacturing which yields a compact, cost effective pump.
    Type: Grant
    Filed: August 27, 1991
    Date of Patent: October 6, 1992
    Assignee: Leybold Aktiengesellschaft
    Inventor: Ralf Steffens