Abstract: This invention provides a design to process a large range of detection beam current at low noise with a single detector. With such a design, the detection system can generate up to 1010 gain and maximum signal output at more than mini Ampere (mA) level.

Abstract: Briefly, in accordance with one or more embodiments, a scanned beam display may utilize one or more post-scan optics while at least partially maintaining an infinite focus, or nearly infinite focus, property of the display. The display may comprise a light source to generate a light beam, a scanning platform to generate a raster scan from the light beam projected as a projected image, one or more post-scan optics to at least partially adjust the projected image, and one or more collimating optics to focus the light beam from the light source, the one or more collimating optics having a selected focal length to at least partially provide infinite, or nearly infinite focus, of the projected image at or beyond a selected distance.

Abstract: Briefly, in accordance with one or more embodiments, a dichroic optic having a first side and a second side opposite to the first side, wherein the second side has an optical filter, wherein each of a light beam having a first wavelength, a second wavelength and a third wavelength enter, exit or reflect from the dichroic optic only from at least one of the first or second sides, wherein prior to incidence on the dichroic optic each of the light beams having the first, second and third wavelengths are non-collinear with each other, wherein the light beam having the first wavelength and the light beam having the second wavelength are substantially collinear within the dichroic optic, wherein the optical filter has a response capable of transmitting at least one of the light beam having the first wavelength and the light beam having the second wavelength, while reflecting the light beam having the third wavelength, and wherein the light beam having the first wavelength, the second wavelength, and the third wavel

Abstract: Briefly, in accordance with one or more embodiments, beam position diversity or beam offset diversity in pupil space performs the complement to angular diversity by maintaining angular content of a beam while changing its position and/or polarization properties in pupil space over time.

Abstract: Briefly, in accordance with one or more embodiments, to implement a meta-display in a head or body worn display system, a display having a first field of view is stored in a memory, and a portion of the first field of view is displayed in a second field of view wherein the first field of view is larger than the second field of view. A position of a user's body is detected with a body sensor and a position of the user's head is detected with a head sensor. The portion of the first field of view displayed in the second field of view is based on a position of the user's head with respect to the user's body.

Abstract: Briefly, in accordance with one more embodiments, a substrate guided relay comprises a slab guide having an absorbing edge at a first end of the slab guide. An input coupler is disposed on a surface of the slab guide at an angle with respect to a first edge of the slab guide. An output coupler is disposed on the surface at a second end of the slab guide. Light rays that enter the slab guide toward the first end are absorbed by the absorbing edge, and light rays that enter the slab guide toward the output coupler exit the slab guide via the output coupler. The absorbing edge on the first edge of the slab guide allows the input coupler to be placed on the slab guide without regard to alignment of the input coupler with the first end of the slab guide.

Abstract: An image generation apparatus provides correction for color offsets. Color offsets may be caused by misalignments in laser diodes or optics assemblies in a laser projector. The offsets may be measured during or after manufacture of the laser projector. An image buffer is responsive to the offset data to translate each color plane separately. The image buffer may include separately addressable portions for each color. Further, variable delay elements on the output of the image buffer may provide color offset correction. Interpolation provides further offset correction.

Abstract: Briefly, in accordance with one more embodiments, a substrate guided relay for a photonics module includes a slab guide having a first end and a second end, and a first surface and a second surface. An input coupler disposed at the first end of the slab guide at an interface between the input coupler and the slab guide receives an input beam and feeds the input beam into the slab guide which generates multiple copies of the input beam. An output coupler disposed on the first surface of the slab guide causes the multiple copies of the input beam to exit the slab guide via the output coupler as an output. A homogenizer disposed on the second surface of the slab guide reflects at least some of the multiple copies of the input beam to increase uniformity of the output.

Abstract: The radiance of a laser is a function of drive current. The radiance is also a function of other factors, such as age and temperature. A laser projection device adjusts laser drive parameters using a gradient descent operation. The device parameters may be adjusted iteratively and periodically. The period may be shorter or longer than a scan line in a video image.

Abstract: A method of inspecting an EUV reticle is proposed, which uses an electron beam (EB) with low density and high energy to scan the surface of an EUV reticle for inspecting the EUV reticle. A step of conditioning surface charge is followed by a step of inspecting surface of the EUV reticle. The step of conditioning surface can neutralize the surface charge and the step of inspecting can obtain an image of the EUV reticle. The present invention uses a scanning electron microscope (SEM) to provide a primary electron beam for conditioning the surface charge and a focused primary electron beam for scanning the surface.

Abstract: A microelectromechanical system (MEMS) includes a conductor with improved reliability. The conductor flexes with a moving member in the MEMS device, and the improved reliability is achieved through material selections that provides increased fatigue resistance, reduced crack propagation, and/or mechanisms for improved live at a given strain level. The conductor may include a single material, or may include layers of different materials.

Abstract: Briefly, in accordance with one or more embodiments, a scanner for a scanned beam display may comprise a scanning platform having a mirror disposed thereon to reflect a beam of light impinging on the mirror, a drive coil disposed on the scanning platform to scan the reflected beam of light in response to a drive current applied to the drive coil. The drive coil has coil winding segments having a narrower width in one or more regions of the drive coil, and has coil winding segments having a greater width in one or more other regions of the drive coil to provide a the drive coil with a reduced electrical resistance.

Abstract: An apparatus for increasing electric conductivity to a wafer substrate when exposures to electron beam irradiation is disclosed. More specifically, a more free mechanical contact between a wafer and electric contact pins (within an electrostatic chuck) is provided to significantly reduce the scratch and damage on the wafer backside.

Abstract: A magnetically actuated system includes a conductor and a magnetic field apparatus to generate a magnetic field. The magnetic field apparatus includes magnets and magnetically permeable materials to focus the magnetic field in areas of the conductor that produce a drive torque when the conductor carries a current.

Abstract: This invention provides a design to process a large range of detection beam current at low noise with a single detector. With such a design, the detection system can generate up to 1010 gain and maximum signal output at more than mini Ampere (mA) level. A condenser lens is configured to increase bandwidth of the detector that scan speed can be enhanced.

Abstract: An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens.

Abstract: An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens.

Abstract: The present invention discloses a structure and a method for determining a defect in integrated circuit manufacturing process. Test keys are designed for the structure to be the interlaced arrays of grounded and floating conductive cylinders, and the microscopic image can be predicted to be an interlaced pattern of bright voltage contrast (BVC) and dark voltage contrast (DVC) signals for a charged particle beam imaging system. The system can detect the defects by comparing patterns of the detected VC signals and the predicted VC signals.

Abstract: A scanning projector includes a mirror that scans in two dimensions, at least one of which is sinusoidal. A position sensor provides a position signal that represents an angular displacement of the mirror. The position signal is amplified by an amplifier with time variant characteristics. A beam position determination component compensates for the time variant characteristics of the amplifier.

Abstract: A method for forming a memory cell transistor is disclosed which includes providing a substrate, forming a trench structure in the substrate, depositing a conductive substance on the surface of the substrate to form a conductive member inside the trench structure, forming one or more dielectric layers on the surface of the substrate, forming one or more first conductive layers on top of the dielectric layers, and etching the first conductive layers and the dielectric layers to form a hole structure extending through the first conductive and the dielectric layers, reaching to the substrate surface. One or more second conductive layers may be formed on top of the first conductive layers, with the second conductive layer material filling the hole structure.