Abstract: A scanning projector includes an optical filter. The optical filter exhibits a variable attenuation as a function of position. The scanning projector may scan sinusoidally in at least one dimension. The variable attenuation of the optical filter compensates for brightness variations due to sinusoidal scanning.

Abstract: The radiance of a laser diode is a function of laser diode drive current. The radiance is also a function of other factors, such as age and temperature. A laser projection device includes laser diodes to generate light in response to a commanded radiance, and also includes photodetectors to provide a measured radiance. The commanded radiance and measured radiance are compared, and drive currents for the laser diodes are adjusted to provide luminance and color balance tracking.

Abstract: An imaging system (300) configured to reduce perceived flicker in three-dimensional images is provided. The imaging system (300) can include a plurality of light sources (305,306,307), a light combiner (302), a light modulator (303) and a polarization rotator (301). The light combiner (302) combines light received from each of the light sources into a combined beam (304). A first light portion (313) in the combined beam has a first light portion polarization state that is different from a second light portion polarization state of a second light portion (314). The light modulator (303) produces images by modulating the combined beam (304) along a projection surface (316). The polarization rotator (301) selectively rotates a polarization state of the combined beam (304) in synchrony with an image refresh cycle of the imaging system. A circular polarizer (1004) can be used to transform linear polarization states to circular polarization states.

Abstract: A scanning projector includes a scanning mirror that sweep a beam in two dimensions. Source image data is interpolated vertically, and the results are stored in a frame buffer. Each row of the frame buffer holds vertically interpolated pixel data that lies on a trajectory corresponding to a horizontal sweep of the beam. Pixel data in each row is then interpolated to determine display pixel data. At least one light source is driven with the display pixel data to produce the beam that is reflected by the scanning mirror.

Abstract: Briefly, in accordance with one or more embodiments, a rotating scanning platform comprises a rotating body and two or more suspension flexures to support the rotating body at a first end of respective suspension flexures, wherein the suspension flexures have a length that is greater than a radius of the rotating body, and the suspension flexures are disposed at an offset from a center of rotation of the rotating body. The suspension flexures are fixed, respectively, to a substrate at a second end at a location that is closer to the center of rotation than to the first end of a respective suspension flexure to allow the rotating body to rotate about the center of rotation with generally linear rotation in response to a drive signal.

Abstract: A laser-based imaging system (200) is configured to reduce perceived speckle in images (201). The imaging system (200) includes one or more laser sources (207), a light modulator (204) configured to produce the images (201) with light (205) from the laser sources (207), and one or more active polarization switches (206) disposed in an optical path of the imaging system (200). The active polarization switch (206) is configured to alternate a polarization orientation of the light in synchrony with an image refresh cycle of the system. The active polarization switch can be clocked in accordance with a clocking angle to optimize speckle reduction. Additionally, one or more light preconditioners (991,992) may be used to help optimize speckle reduction.

Abstract: An integrated photonics module may include a selective fold mirror configured to pass at least a portion of emitted light toward the MEMS scanner and reflect scanned light through to a field of view. The selective fold mirror may use beam polarization to select beam passing and reflection. The integrated photonics module may include a beam rotator such as a quarter-wave plate to convert the polarization of the emitted light to a different polarization adapted for passage through the fold mirror. The integrated photonics module may include one or more light detectors.

Abstract: A detection unit of a charged particle imaging system includes a multi type detection subunit in the charged particle imaging system, with the assistance of a Wien filter (also known as an E×B charged particle analyzer). The imaging system is suitable for a low beam current, high resolution mode and a high beam current, high throughput mode. The unit can be applied to a scanning electron inspection system as well as to other systems that use a charged particle beam as an observation tool.

Abstract: A scanning projector includes a MEMS device with a scanning mirror that sweeps a light beam in two dimensions. A laser limit comparison circuit determines a metric from measured peak scan angles and measured light output. The metric is compared to a threshold and a light source is shut down when the metric exceeds the threshold.

Abstract: A beam combiner has a first coating on a first side capable of imparting a first polarization rotation, and a second coating on a second side capable of imparting a second polarization rotation. A first beam impinging on the first side passes through the first and second coatings as a first beam component. Second and third beams impinging on the second side partially reflect off the second coating as a second beam component, and partially transmit through the second coating to reflect off the first coating and exit through the second coating as a third beam component. The first, second and third beam components are disposed at selected positions and have respective selected polarizations as a combined beam spot. The positions and polarization of the beams components result in a projected image having increased allowable brightness and/or having reduced speckle.

Abstract: The monochromator for reducing energy spread of a primary charged particle beam in charged particle apparatus comprises a beam adjustment element, two Wien-filter type dispersion units and an energy-limit aperture. In the monochromator, a dual proportional-symmetry in deflection dispersion and fundamental trajectory along a straight optical axis is formed, which not only fundamentally avoids incurring off-axis aberrations that actually can not be compensated but also ensures the exit beam have a virtual crossover which is stigmatic, dispersion-free and inside the monochromator. The present invention also provides two ways to build a monochromator into a SEM, in which one is to locate a monochromator between the electron source and the condenser, and another is to locate a monochromator between the beam-limit aperture and the objective. The former provides an additional energy-angle depending filtering, and obtains a smaller effective energy spread.

Abstract: Method and machine utilizes the real-time recipe to perform weak point inspection on a series of wafers during the fabrication of integrated circuits. Each real-time recipe essentially corresponds to a practical fabrication history of a wafer to be examined and/or the examination results of at least one examined wafer of same “lot”. Therefore, different wafers can be examined by using different recipes where each recipe corresponds to a specific condition of a wafer to be examined, even these wafers are received by a machine for examining at the same time.

Abstract: An electromagnetic compound objective lens is provided for charged particle device, especially as an objective lens of low-voltage scanning electron microscope (LVSEM), which comprises a magnetic immersion lens and an electrostatic immersion lens. The magnetic immersion lens orients its gap between an inner pole piece and an outer pole piece to specimen's surface, and uses a magnetic specimen stage. The electrostatic immersion lens comprises three or four electrodes which apply suitable retarding field to a primary beam of the charged particle device for reducing its landing energy on specimen surface and further eliminating imaging aberrations.

Abstract: An electron gun comprises an electron emitter, an electrode surrounding the electron emitter, an extraction electrode, and a double condenser lens assembly, the double condenser lens assembly comprising a magnetic immersion pre-condenser lens and a condenser lens. In combination with a probe forming objective lens, the electron gun apparatus can provide an electron beam of independently adjustable probe size and probe current, as is desirable in electron beam applications. The electron emitter is immersed in the magnetic field generated by a magnetic type pre-condenser lens. When activated, the pre-condenser lens collimates the beam effectively to increase its angular intensity while at the same time enlarging the virtual source as compared with non-immersion case, due to geometric magnification and aberrations of its lens action. The pre-condenser lens is followed by a condenser lens.

Abstract: An imaging system (200) is configured to reduce perceived speckle (106) in images (201) by introducing angular diversity into consecutively projected images. The imaging system (200) includes one or more laser sources (203) that are configured to produce one or more light beams (215). A light modulator (204) scans these light beams (215) to produce images. A light translation element (206) introduces the angular diversity by physically altering a light reception location (208) on the light modulator (204) between refresh sweeps. To preserve image stability, image data (220) in a memory (218) can be correspondingly shifted.

Abstract: A display system includes a substrate guided relay and a scanning projector. The scanning projector exhibits a brightness variation on a resonant scanning axis, and the substrate guided relay exhibits a brightness variation along a length of an output coupler. The scanning projector includes a brightness compensation circuit to compensate for both the brightness variation caused by the resonant scanning and the brightness variation along the length of the output coupler.

Abstract: A scanning projector includes a scanning mirror that sweep a beam in two dimensions. The beam is created by multiple laser light sources, at least two of which create light at substantially the same wavelength. The two light sources at the same wavelength may be driven at different times, or may be driven simultaneously (equally or unequally).

Abstract: The present invention relates to a charged particle system for reticle or semiconductor wafer defects inspection and review, and more particularly, relates to an E-beam inspection tool for reticle or semiconductor wafer defects inspection and review without gravitational AMC settling. The charged particle system is an upside down electron beam inspection system with an electron beam aimed upward. The face down design may prevent AMC from gravitational settling on the inspected face of the specimen during inspection, thereafter having a cleaner result compared with conventional face-up inspection system.

Abstract: A scanning projector includes a scanning mirror that sweep a beam in two dimensions. Tangential distortion in a fast-scan dimension is compensated by incorporating a tangent function when determining the light beam location and interpolating pixel data. Tangential distortion in a slow-scan dimension is compensated by driving the scanning mirror nonlinearly in the slow scan dimension such that the light beam sweeps across the display surface at a constant rate.

Abstract: An optical deflector includes multiple voltage-dependent refractive boundaries. Light passes through the refractive boundaries and accumulates a deflection angle. An electrode placed to apply a voltage to the boundaries may be non-uniform to modulate a wavefront as it passes. A scanning laser projector includes the optical deflector to modulate laser light.