Abstract: The present invention provides a lens substrate stacking position calculating apparatus capable of calculating a stacking position at which the number of lens sets whose optical axis deviation falls within an allowable range is maximized, when a plurality of wafer lens arrays are bonded together even if the position of each lens formed on a wafer substrate is deviated between wafer lens arrays to be stacked. The lens substrate stacking position calculating apparatus calculates the positional relationship of two or more transparent substrates to be stacked when the two or more transparent substrates on which a plurality of lenses are two-dimensionally arranged are stacked to form a plurality of lens sets each including two or more lenses. A position of each lens is specified in advance in a common coordinate system.

Abstract: A workpiece inspection and defect detection system includes a light source, a lens that inputs image light arising from a surface of a workpiece, and a camera that receives imaging light transmitted along an imaging optical path. The system utilizes images of workpieces acquired with the camera as training images to train a defect detection portion to detect defect images that include workpieces with defects. Anomaly detector classification characteristics are determined based on features of the training images. Run mode images of workpieces are acquired with the camera, and based on determined features from the images, the anomaly detector classification characteristics are utilized to determine if the images of the workpieces are classified as anomalous. In addition, the defect detection portion determines if images are defect images that include workpieces with defects and for which additional operations may be performed (e.g., metrology operations for measuring dimensions of the defects, etc.

Abstract: A measurement apparatus including a laser apparatus that outputs a frequency-modulated laser beam with a plurality of modes of a main lobe, branch that splits the frequency-modulated laser beam into a reference light, a measurement light, and a monitor light, beat signal generator that generates a beat signal by mixing the reference light and a reflected light that is reflected by radiating the measurement light onto an object to be measured, extraction circuitry that extracts a signal component including a plurality of self-beat signals based on the main lobe from the monitor light, identification circuitry that identifies a cavity frequency of the optical cavity on the basis of the signal component, and calculation circuitry that calculates a difference between propagation distances between the reference light and the measurement light on the basis of the cavity frequency and the beat signal.

Abstract: An electromagnetic induction type encoder includes a detection head and a scale. The detection head has a first transceiver coil to generate magnetic flux with respect to a first track and a second transceiver coil to generate magnetic flux with respect to a second track. The scale has a first plurality of periodical elements with respect to the first track and a second plurality of periodical elements with respect to the second track. The detection head has a receiver coil that continuously extends from the first track to the second track, is electromagnetically coupled with the magnetic flux generated by the first plurality of periodical elements and the magnetic flux generated by the second plurality of periodical elements, and detects a phase of the magnetic flux generated by the first plurality of periodical elements and a phase of the magnetic flux generated by the second plurality of periodical elements.

Abstract: A rotary encoder that is capable of securing a sufficient synthesis tolerance while achieving miniaturization is provided. The rotary encoder 1 includes a rotor 3, a stator 4, and a calculating unit 5 for calculating the rotation angle. The rotor 3 has a first rotor pattern 31 with a plurality of unit patterns 310 arranged along the measurement direction around the rotating shaft 2, and a second rotor pattern 32 with fewer unit patterns 320 than the plurality of unit patterns 310 in the first rotor pattern 310 arranged along the measurement direction. The number of the plurality of unit patterns 310 of the first rotor pattern 31 and the number of the plurality of unit patterns 320 of the second rotor pattern 32 are provided such that the maximum common divisor therebetween is two or more. The calculating unit calculates the rotation angle of the rotor 3 based on the detection signals from the first rotor pattern 31 and the second rotor pattern 32.

Abstract: A chromatic point sensor (CPS) optical pen provides a signal usable to measure a distance to a surface, and includes an axial chromatic aberration portion arranged to receive source radiation from an aperture, output it toward the surface as a focused measurement beam having axial chromatic dispersion, receive reflected radiation from the surface and focus it proximate to the aperture. The axial chromatic aberration portion includes a first axially dispersive focusing element that receives the source radiation and focuses it at a first focal region, a second axially dispersive focusing element that receives the radiation from the first focal region and focuses it at a second focal region, and a third axially dispersive focusing element that receives the radiation from the second focal region and outputs the measurement beam. Lengths between the first, second and third axially dispersive focusing elements are adjustable (i.e., resulting in an adjustable range).

Abstract: A laser apparatus, a measurement apparatus, and a measurement method are provided in which the laser apparatus outputs a frequency-modulated laser beam with a plurality of modes and includes: an optical cavity that has a gain medium for amplifying a light to be input, and an optical SSB modulator for shifting a frequency of the light amplified by the gain medium: and a control part that controls the optical SSB modulator to shift a frequency of a light to be input to the optical SSB modulator.

Abstract: An image detection device includes an image detection optical system including a liquid resonant lens; an image detector configured to detect an image corresponding to a detection phase of a drive signal through the image detection optical system; a range determination unit configured to determine a first half or a second half of a cycle of the drive signal as a designated allowable range of the detection phase based on whether a phase delay shown by a variation waveform of a focus position is positive or negative; a detection phase setting unit configured to set the detection phase in the designated allowable range; and a detection control unit configured to control an image-detection timing by the image detector to a timing offset from the detection phase by an angle corresponding to the phase delay.

Abstract: A one-dimensional measurement device includes a display; a display controller that, based on first input information, displays on the display a rough arrangement and measurement order of each of a plurality of measurable elements of a measurable object and, based on second input information, displays on the display the arrangement and measurement order of each of the plurality of measurable elements where the entire arrangement is rotated in a predetermined direction by a predetermined angle while maintaining a positional relationship of each of the measurable elements; and an input that receives input of the first input information and the second input information.

Abstract: A laser interference device includes: a measurement mirror being movable in an X direction; a reference mirror disposed at a position different from a position of the measurement mirror in a Y direction; a beam splitter having a splitting surface that divides a laser beam into a measurement light and a reference light; a first light guide configured to guide the measurement light incident from the beam splitter and emit the measurement light toward the measurement mirror; and a second light guide configured to guide the reference light incident from the beam splitter and emit the reference light toward the reference mirror, in which a first distribution path formed by the first light guide and a second distribution path formed by the second light guide are mutually equal in a mechanical path length and an optical path length.

Abstract: A spatial accuracy correction apparatus performs a spatial accuracy correction of a positioner displacing a displacer to a predetermined set of spatial coordinates using a measurable length value measured by an interferometer and a measurable value of the set of spatial coordinates of the displacement body that is measured by the positioner. The measured length value and the measured value for each measurement point are acquired by displacing the displacement body to a plurality of measurement points in order, one or more repeated measurements are conducted for at least one of the plurality of measurement points being measured after conducting measurement of the measured length value and the measured value for each of the plurality of measurement points, and the plurality of points are measured again when a repeat error of the measured length value is equal to or greater than a threshold value.

Abstract: A method that corrects an error in positioning in a positioning mechanism by using a measurable length value measured by a laser interferometer and a measured value for spatial coordinates measured by the positioning mechanism. The method includes a measurement step in which a retroreflector affixed to a displacer is displaced to a plurality of measurement points, and the measured length value and the measured value at each of the measurement points is acquired; and a parameter calculation step in which a correction parameter is calculated based on the measured value, the measured length value, and the coordinates of a rotation center of the tracking-type laser interferometer. A first correction constant is applied to the measured length value for each measurement line, and a second correction constant different from the first correction constant is applied to the coordinates of the rotation center of the interferometer for each measurement line.

Abstract: An inspection method, correction method, and inspection device that include measuring a first spatial position where laser light is emitted at a first region and measuring a first strike position where the inspection device is struck by the laser light in the first region, the measurements being performed by emitting the laser light at the first region of the inspection device; measuring a second spatial position where the laser light is emitted at a second region and measuring a second strike position where the inspection device is struck by the laser light in the second region, the measurements being performed by emitting the laser light at the second region of the inspection device; and comparing measurement results for the first spatial position and the second spatial position with measurement results for the first strike position and the second strike position.

Abstract: A three-dimensional geometry measurement apparatus includes: a relationship identification part that identifies a combination of a first imaging pixel and a second imaging pixel corresponding to the same projection coordinate; a determination part that determines, whether or not at least one of the first imaging pixel or the second imaging pixel is a defective pixel on the basis of a distance between a projection pixel of the projection image; and a geometry measurement part that measures a geometry of an object to be measured using the first imaging pixel or the second imaging pixel corresponding to the combination, for which the first imaging pixel and the second imaging pixel that are determined to be not the defective pixel.

Abstract: A measurement system includes: measurement target information database that stores measurement point information, including measurement conditions and guidance information for each measurement point, associated with the type of the measurement target; a measuring instrument that performs measurements on the measurement target; an image capturing unit that captures an image of a subject; a display unit; a measurement target identification unit that identifies the type of the measurement target based on the image captured by the image capturing unit; a measurement target information obtaining unit for obtaining the measurement point information corresponding to the type of the measurement target identified by the measurement target identification unit from the measurement target information database; and a setting unit that displays the guidance information included in the measurement point information obtained by the measurement target information obtaining unit on the display unit and sets the measurement con

Abstract: A laser interference device includes a measurement laser that outputs a laser beam, a beam splitter that divides the laser beam into a measurement laser beam and a frequency monitor laser beam, a reference laser that outputs a reference laser beam, a frequency detector that detects a beat frequency resulting from interference between the reference laser beam and the frequency monitor laser beam, a wavelength calculator that calculates a wavelength of the frequency monitor laser beam (a wavelength measurement value) on the basis of the beat frequency, a light detector that detects an interference light of the measurement light and the reference light of the measurement laser beam and outputs a light detection signal, and a displacement calculator that calculates a displacement of the measurement mirror by performing an arithmetic process based on the wavelength measurement value and the light detection signal.