Patents Assigned to Nanotechnologies, Inc.
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Patent number: 7494575Abstract: A method of manufacturing a split probe tip on a cantilever comprises providing a cantilever having a surface on which is formed a probe that projects outwardly from the surface at one end of the cantilever, irradiating and scanning a tip of the probe with a focused particle beam directed in a direction that is inclined relative to the surface of the cantilever to obtain an image of the probe tip, and determining the center of the probe tip from the image of the probe tip. Then a first channel is formed in the probe tip at the center thereof by irradiating and scanning the center of the probe tip with a focused particle beam to form a split probe tip having two spaced-apart probe tip parts.Type: GrantFiled: April 13, 2004Date of Patent: February 24, 2009Assignee: SII NanoTechnology Inc.Inventors: Shoji Sadayama, Yoshiharu Shirakawabe, Kazutaka Takahashi
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Patent number: 7495215Abstract: The present invention provides a probe for a scanning magnetic force microscope having a resolution sufficient to allow observation of a magnetic storage medium with 1200 kFCI or higher recording densities, a method for producing the probe, and a method for forming a ferromagnetic alloy film on a carbon nanotube. In the context of the present invention, the probe for a scanning magnetic force microscope comprises a carbon nanotube whose surface is at least in part coated with a ferromagnetic alloy film consisting of any one of a Co—Fe alloy and a Co—Ni alloy, wherein the arithmetic mean roughness (Ra 10 ?m) of the surface of the ferromagnetic alloy film is controlled to 1.15 nm or less. A method for producing such probes for a scanning magnetic force microscope and a method for forming such a ferromagnetic alloy film on a carbon nanotube, so as to achieve such mean surface roughness by controlling the growth rate of the ferromagnetic alloy film within the range of 1.0 to 2.5 nm/min, is also disclosed.Type: GrantFiled: December 28, 2005Date of Patent: February 24, 2009Assignees: National Institute of Advanced Industrial Science and Technology, SII Nanotechnology Inc.Inventors: Hiroyuki Akinaga, Yasuyuki Semba, Hiroshi Yokoyama, Masatoshi Yasutake, Hiromi Kuramochi
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Patent number: 7488961Abstract: A computer sets a process area based on an image obtained by observing a mask, and determines the positions of representative points that form a contour of the process area for each pixel with sub-pixel accuracy that is better than a pixel, the position of each of the representative points being able to be set to either the center position of the pixel or a position displaced therefrom. Furthermore, for the pixels within the process area, the computer sets the center positions of the pixels as the representative points and corrects the positions of the representative points of the pixels within the process area on a sub-pixel basis such that nonuniformity between the representative points is reduced.Type: GrantFiled: October 25, 2006Date of Patent: February 10, 2009Assignee: SII NanoTechnology Inc.Inventors: Masashi Muramatsu, Tomokazu Kozakai, Ryoji Hagiwara
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Patent number: 7485880Abstract: After a scan area for observing or processing a mask is set, a computer of the charged particle beam apparatus determines a plurality of scan lines in the scan area by the following steps of: setting a scan line along the outer circumference of the scan area; determining a scan line inside and along the thus set scan line; determining a scan line inside and along the thus determined scan line; and repeating the step of determining a scan line. After the scan lines are determined, the computer controls a scanning circuit to apply an ion beam to the scan lines while thinning out scan lines and/or pixels.Type: GrantFiled: October 25, 2006Date of Patent: February 3, 2009Assignee: SII NanoTechnology Inc.Inventors: Tomokazu Kozakai, Masashi Muramatsu, Ryoji Hagiwara
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Patent number: 7476418Abstract: In a method for fabricating a nanometer-scale structure by arranging nanotubes in a predetermined direction at a predetermined position, the method for fabricating a nanometer-scale structure comprises a first step of planarizing a substrate by etching a predetermined part by irradiating a focused energy beam to the sample, a second step of decomposing and depositing an organic gas into a columnar structure with an objective of determining the position and direction, and a third step of attaching and fixing the nanotube by using the thus deposited columnar structure as a standard of position and direction.Type: GrantFiled: September 27, 2004Date of Patent: January 13, 2009Assignee: SII NanoTechnology Inc.Inventors: Masatoshi Yasutake, Takashi Kaito, Yoshiharu Shirakawabe, Itaru Kitajima
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Publication number: 20090005561Abstract: NLO chromophores of the form of Formula (I) and the acceptable salts, solvates and hydrates thereof, wherein Z, X1-4, ?1-2, D and A have the definitions provided herein.Type: ApplicationFiled: October 26, 2005Publication date: January 1, 2009Applicant: Third-Order Nanotechnologies, Inc.Inventors: Frederick J. Goetz, Frederick J. Goetz, Jr.
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Patent number: 7459699Abstract: A laser mark which will be the positioning mark for a secondary charged particle image in the charged particle beam apparatus is applied by moving the sample processing/observation area in the charged particle beam apparatus so as to come into the view field while performing an observation by an infrared microscope, and by a using a laser optical system disposed coaxially with an optical observation system, the mark made at the periphery of the processing/observation object area. Next, by a superposition of an infrared transmission image and a CAD data, the processing/observation object area and the laser mark are registered onto the CAD data. And, by a correlation of the registered data read from the charged particle beam apparatus and the secondary charged particle image, it is possible to accurately and easily determine the processing position.Type: GrantFiled: November 23, 2005Date of Patent: December 2, 2008Assignee: SII NanoTechnology Inc.Inventors: Masahiro Kiyohara, Makoto Sato, Tatsuya Asahata
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Patent number: 7455449Abstract: There is provided a differential scanning calorimeter possessing an accommodation chamber accommodating a sample to be measured and a reference material, a heater heating the accommodation chamber, a differential heat flow detector outputting a temperature difference between the sample to be measured and the reference material as a heat flow difference signal, a cooling block cooling-controlled to a predetermined temperature, a heat resistor which mechanically connects the cooling block and the accommodation chamber and forms a heat flow path between both, a first fixation means which fixes the heat resistor to the cooling block by pressing the former while being biased by a constant elastic force, and a second fixation means which fixes the accommodation chamber to the heat resistor by pressing the former while being biased by a constant elastic force.Type: GrantFiled: January 24, 2007Date of Patent: November 25, 2008Assignee: SII NanoTechnology Inc.Inventor: Shinya Nishimura
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Patent number: 7442925Abstract: The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using a scanning probe which works a sample by performing the relative scanning of a probe supported on a cantilever on the sample at a predetermined scanning speed. The working method can work the object to be worked while forcibly and relatively vibrating the probe in the direction orthogonal to or parallel to a working surface of the sample at low frequency of 100 to 1000 Hz.Type: GrantFiled: March 4, 2006Date of Patent: October 28, 2008Assignee: SII Nanotechnology Inc.Inventors: Masatoshi Yasutake, Takuya Nakaue, Kazutoshi Watanabe, Osamu Takaoka, Atsushi Uemoto, Naoya Watanabe, Yoshiteru Shikakura
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Patent number: 7441445Abstract: To measure surface information and physical information of a sample with high accuracy by promoting linearity in Z direction by nullifying cross talk in XY directions as less as possible, there is provided a surface information measuring apparatus including a probe having a stylus, a Z actuator fixed with the probe for being elongated and contracted in Z direction orthogonal to a sample surface B when applied with a voltage, an applicator for applying the voltage to the Z actuator, and a controller for controlling to operate the applicator, in which the Z actuator includes a piezoelectric member capable of being elongated and contracted in Z direction and a plurality of divided electrodes provided to be respectively electrically independent from each other in a state of being divided by at least 3 or more in a peripheral direction at an inner peripheral face or an outer peripheral face of the piezoelectric member for applying voltages to elongate and contract the piezoelectric member within ranges of contactType: GrantFiled: September 20, 2005Date of Patent: October 28, 2008Assignee: SII Nanotechnology Inc.Inventor: Hiroyoshi Yamamoto
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Patent number: 7442942Abstract: To include a focused ion beam apparatus fabricating a sliced specimen by processing a specimen as well as observing the sliced specimen, a scanning electron microscope observing the slice specimen, a gas-ion beam irradiation apparatus performing finishing processing by irradiating a gas-ion beam onto a surface of the sliced specimen, a specimen stage on which the sliced specimen is fixed and having at least one or more rotation axis, a specimen posture recognition means recognizing positional relation of the sliced specimen with respect to the specimen stage and a specimen stage control means controlling the specimen stage based on a specimen posture recognized by the posture recognition means and an installation angle of the gas-ion beam irradiation apparatus in order to allow an incident angle of the gas-ion beam with respect to the obverse or the reverse of the sliced specimen to be a desired value.Type: GrantFiled: August 24, 2006Date of Patent: October 28, 2008Assignee: SII Nanotechnology Inc.Inventors: Haruo Takahashi, Toshiaki Fujii, Yutaka Ikku, Kouji Iwasaki, Yo Yamamoto
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Patent number: 7427744Abstract: A leaf spring 4 constituting an elastic member one end of which is fixed to a foundation 6, and other end of which is brought into contact with a laminating type piezoelectric element 2 or a driven member 5 is constituted such that a thickness is thinned from a side of the foundation 6 to a side of the laminating type piezoelectric element 2 to make a moment of inertia smaller on a side of a portion of other end held by the laminating type piezoelectric element 2 than a portion on one end side fixed to the foundation 6. Further, a strain gage sensor 8 is attached to a side face 4a of the leaf spring 4 constituting one face of one end of the leaf spring 4 proximate to the laminating type piezoelectric element 2 orthogonal to a direction of elongating and contracting the laminating type piezoelectric element 2 constituting a side of the driven member 5.Type: GrantFiled: July 10, 2007Date of Patent: September 23, 2008Assignee: SII NanoTechnology Inc.Inventor: Masafumi Watanabe
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Patent number: 7428293Abstract: There is provided a fluorescent X-ray analysis apparatus in which a detection lower limit has been improved by reducing an X-ray generating subsidiarily and detected. The fluorescent X-ray analysis apparatus is one which possesses an X-ray source irradiating a primary X-ray, and a detector in which a collimator having a through-hole in its center part has been placed in a front face, and in which, by the detector, there is detected a primary fluorescent X-ray which generates from a sample by irradiating the primary X-ray to a sample, and passes through the through-hole of the collimator.Type: GrantFiled: March 28, 2007Date of Patent: September 23, 2008Assignee: SII Nanotechnology Inc.Inventors: Takayuki Fukai, Yoshiki Matoba
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Patent number: 7423266Abstract: In a sample height regulating method, an area including the observation point on the sample is scan-irradiated with a first charged particle beam to obtain a first secondary electron image including the observation point. An area including the observation point on the sample is then scan-irradiated with a second charged particle beam to obtain a second secondary electron image including the observation point. Thereafter, based on magnifications of the first secondary electron image and the second secondary electron image and a distance between the observation point in the first secondary electron image and the observation point in the second secondary electron image, a height of the sample required for focusing the first charged particle beam and the second charged particle beam on the observation point is calculated. A sample stage supporting the sample is then displaced so as to position the sample at the calculated sample height.Type: GrantFiled: February 23, 2006Date of Patent: September 9, 2008Assignee: SII Nanotechnology Inc.Inventors: Junichi Tashiro, Yutaka Ikku, Makoto Sato
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Patent number: 7424093Abstract: To provide a fluorescent X-ray analysis apparatus, whereby a peak-back ratio is improved by effectively exciting a focused element and a detection limit of the focused element is improved by decreasing a scattered X-ray to be a background. A sample housing has one or more wall surfaces made of a material through which an X-ray transmits and an X-ray source is arranged so that a primary X-ray is irradiated on the wall surface. In addition, the sample housing is arranged so that a wall surface different from a wall surface on which the primary X-ray is irradiated is opposed to an X-ray detector incident window. Further, the primary X-ray from the X-ray source is arranged so as to be able to irradiate the wall surface of the sample housing to which the X-ray detector incident window is opposed. The sample housing has a shape extending in response to extension of a viewing filed that a detection element in the X-ray detector is seen from the X-ray detector incident window.Type: GrantFiled: May 24, 2007Date of Patent: September 9, 2008Assignee: SII NanoTechnology Inc.Inventors: Takayuki Fukai, Yoshiki Matoba, Masanori Takahashi
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Publication number: 20080199700Abstract: Methods of producing stabilized composite nanoparticles comprising a nanoparticle and a multiple polyelectrolyte stabilizing moiety layer, a method of producing a multilayer stabilized composite nanoparticle, and such nanoparticles.Type: ApplicationFiled: May 7, 2008Publication date: August 21, 2008Applicant: Northern Nanotechnologies, Inc.Inventors: Darren Anderson, Jane B. Goh, Jose Amado Dinglasan
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Patent number: 7406846Abstract: An electronic lock incorporating one or more shape memory metal wire segment as its electromechanical transducer. An electronic control circuit injects electrical current into the shape memory metal wire, causing it to heat up and contract. A gate is positioned by the action of the shape memory metal wire(s) to either allow or block the movement of a locking bolt that affect locking or unlocking. Millions of operational cycles are achieved by limiting the stretching of the shape memory metal wire at low temperature to small percentages of its total length. The design lends itself to miniaturization, with commensurate reduction in power consumption, that is useful to the evolution of future electronic locks.Type: GrantFiled: May 11, 2005Date of Patent: August 5, 2008Assignee: Nanotechnology, Inc.Inventor: John Wun-Sing Chu
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Patent number: 7404313Abstract: A scanning probe microscope has a self-detection type probe structure including a cantilever having an electrically conductive probe at a distal end thereof, a supporting part, and a piezoresistance element whose resistance value changes depending on the deflection of the cantilever. A detector applies a predetermined voltage to the piezoresistance element and detects the value of the current passing through the piezoresistance element to detect deflection of the cantilever. A sample table mounts a sample such that a surface of the sample confronts a tip of the probe, and a moving mechanism relatively moves the sample table and the probe tip in X, Y and Z directions. A controller controls the moving mechanism to maintain a fixed distance between the probe tip and the sample surface and measures the surface shape of the sample on the basis of the detection result of the detector.Type: GrantFiled: March 14, 2006Date of Patent: July 29, 2008Assignee: SII NanoTechnology Inc.Inventor: Kazutoshi Watanabe
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Patent number: 7398678Abstract: A scanning microscope probe in which a palladium covering film is formed on the surface of the protruding portion of a cantilever, and the base end portion of a nanotube is disposed in contact with the palladium covering film with the tip end portion of the nanotube protruding to the outside, thus allowing the tip end to be used as a probe needle end for detecting signals. A coating film is formed to cover all or part of the surface of this base end portion, and the nanotube is thus firmly fastened to the cantilever. Since the base end portion adheres tightly to the palladium covering film, both of them are electrically continuous. This palladium covering film allows, as an electrode film, the application of a voltage to the nanotube or the passage of an electric current through the nanotube, showing also good adhesion to the nanotube and cantilever.Type: GrantFiled: June 6, 2005Date of Patent: July 15, 2008Assignees: Daiken Chemical Co., Ltd., SII Nanotechnology, Inc.Inventors: Yoshikazu Nakayama, Takashi Okawa, Shigenobu Yamanaka, Akio Harada, Masatoshi Yasutake, Yoshiharu Shirakawabe
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Publication number: 20080166560Abstract: The present invention provides a probe for a scanning magnetic force microscope having a resolution sufficient to allow observation of a magnetic storage medium with 1200 kFCI or higher recording densities, a method for producing the probe, and a method for forming a ferromagnetic alloy film on a carbon nanotube. In the context of the present invention, the probe for a scanning magnetic force microscope comprises a carbon nanotube whose surface is at least in part coated with a ferromagnetic alloy film consisting of any one of a Co—Fe alloy and a Co—Ni alloy, wherein the arithmetic mean roughness (Ra 10 ?m) of the surface of the ferromagnetic alloy film is controlled to 1.15 nm or less. A method for producing such probes for a scanning magnetic force microscope and a method for forming such a ferromagnetic alloy film on a carbon nanotube, so as to achieve such mean surface roughness by controlling the growth rate of the ferromagnetic alloy film within the range of 1.0 to 2.5 nm/min, is also disclosed.Type: ApplicationFiled: December 28, 2005Publication date: July 10, 2008Applicants: National Institute of Advanced Industrial Science and Technology, SII NanoTechnology Inc.Inventors: Hiroyuki Akinaga, Yasuyuki Semba, Hiroshi Yokoyama, Masatoshi Yasutake, Hiromi Kuramochi