Abstract: A ceramic heater includes: a ceramic plate having a wafer placement surface on its upper surface; a plurality of zones in the wafer placement surface; a zone heater embedded in the ceramic plate for each of the plurality of zones; a single temperature detector passage in the ceramic plate; and a single temperature detector (multi TC) in the temperature detector passage. The temperature detector passage extends from the inlet in a lower surface of the ceramic plate through each of the plurality of zones. The multi TC has a plurality of temperature detecting portions. The temperature detecting portions are positioned at measurement positions corresponding to the plurality of zones.

Abstract: A joined body includes: a first plate; a second plate of a same type as or a different type from a type of the first plate; an amorphous layer existing at a joint interface between the first plate and the second plate; a first plate alteration layer existing on a side of the first plate in contact with the amorphous layer; and a second plate alteration layer existing on a side of the second plate in contact with the amorphous layer.

Abstract: A method for producing a ceramic honeycomb structure, the honeycomb structure includes: an outer peripheral wall; and partition walls disposed on an inner side of the outer peripheral wall, the partition walls defining a plurality of cells, each of the cells extending from one end face to the other end face to form a flow path, wherein the honeycomb structure includes at least one slit provided on a cross section perpendicular to an axial direction of the honeycomb structure, wherein the method includes the steps of: preparing a honeycomb structure element before forming the slit; and forming the slit by arranging a wire so as to pass from one end face to the other end face in the cell and then cutting the partition walls while moving the honeycomb structure element and/or the wire.

Abstract: A thermocouple guide includes a first tube portion of a straight shape, and a second tube portion connected to the first tube portion and including a curved section that is formed to turn an extension direction from the first tube portion. An outer diameter of at least a tip-side part of the curved section, the tip-side part extending from a tip end of the curved section through a predetermined length, is smaller than an outer diameter of the first tube portion.

Abstract: A member for a semiconductor manufacturing apparatus includes a ceramic disc incorporating an electrode and a ceramic cylindrical shaft supporting the disc. The disc and the shaft are integrally formed and mutually have no bonding interface. The disc has a surface with which the shaft is integrated. The surface has a region inside the shaft and a region outside the shaft. The region inside the shaft is recessed by one step with respect to the region outside the shaft and has an electrode exposure hole through which the electrode is exposed.

Abstract: A member for semiconductor manufacturing apparatus includes a ceramic plate in which an electrode is embedded; a power feeder receiving hole extending from a lower surface of the ceramic plate to a position close to the electrode; a power feeder inserted in the power feeder receiving hole; a recess extending from a bottom surface of the power feeder receiving hole to the electrode or an electrode lead-out portion attached to the electrode, the recess having an opening diameter smaller than a diameter of the power feeder receiving hole and greater than or equal to a diameter of the power feeder; a first brazing material layer filling the recess; and a second brazing material layer bonding an entire end surface of the power feeder to the first brazing material layer and not extending to a boundary between the bottom surface and a side surface of the power feeder receiving hole.

Abstract: A wafer placement table includes a ceramic substrate having a wafer placement surface on an upper surface thereof and containing an electrode therein; a conductive substrate disposed adjacent to a lower surface of the ceramic substrate, serving also as a plasma generating electrode, and having the same diameter as the ceramic substrate; a support substrate disposed adjacent to a lower surface of the conductive substrate, having a greater diameter than the conductive substrate, and electrically insulated from the conductive substrate; and a mounting flange constituting a part of the support substrate and radially extending out of the conductive substrate.

Abstract: Provided is a layered double hydroxide (LDH) separator including a porous substrate made of a polymeric material, and LDH with which pores of the porous substrate are plugged. The LDH separator has a plurality of remaining flattened pores, longitudinal directions of the pores being non-parallel to a thickness direction of the LDH separator.

Abstract: A wafer placement table includes a ceramic base including an electrode, a cooling base including a coolant flow path formed therein, a bonding layer bonding the ceramic base and the cooling base, a stepped hole penetrating the bonding layer and the cooling base and including an upper hole portion with a small diameter, a lower hole portion with a large diameter, and a hole stepped portion between the upper hole portion and the lower hole portion, the upper hole portion passing through a region in which the coolant flow path is formed, a stepped insulating pipe inserted through the stepped hole and including an upper pipe portion with a small diameter, a lower pipe portion with a large diameter, and a pipe stepped portion between the upper pipe portion and the lower pipe portion; and a connection terminal bonded to the electrode and inserted through the stepped insulating pipe.

Abstract: A wafer placement table includes a first ceramic substrate having a wafer placement surface on an upper surface; a second ceramic substrate disposed on a lower surface side of the first ceramic substrate; a metal bonding layer that bonds a lower surface of the first ceramic substrate and an upper surface of the second ceramic substrate; a connection member including an upper base and a lower base, the connection member being embedded in the second ceramic substrate with the upper base in contact with the metal bonding layer; and a power supply terminal electrically connected to the lower base of the connection member, wherein the connection member has a portion in which an area of cross section when the connection member is cut by a plane parallel to the upper base increases from a side of the upper base to a side of the lower base.

Abstract: A separation membrane module includes a tubular housing, a columnar membrane structure housed in the housing, an annular first flange surrounding a first end portion of the membrane structure, and a first bonding material interposed between the first flange and the first end portion. The housing has a first facing surface and an inner circumferential surface, the first facing surface facing an end surface of the first flange, and the inner circumferential surface facing an outer circumferential surface of the first flange. A coefficient of thermal expansion of the first bonding material is smaller than a coefficient of thermal expansion of the first flange. A coefficient of thermal expansion of the membrane structure is smaller than the coefficient of thermal expansion of the first flange.

Abstract: Provided is a lithium secondary battery including a positive electrode layer composed of a cobalt-containing lithium complex oxide sintered body, a negative electrode layer composed of a titanium-containing sintered body, a ceramic separator interposed between the positive electrode layer and the negative electrode layer and containing MgO, an electrolytic solution with which the positive electrode layer, the negative electrode layer, and the ceramic separator are impregnated, and an exterior body including a closed space, the closed space accommodating the positive electrode layer, the negative electrode layer, the ceramic separator, and the electrolytic solution, wherein the positive electrode layer, the ceramic separator, and the negative electrode layer are bonded together, and the interface between the negative electrode layer and the ceramic separator has a larger roughness than the interface between the positive electrode layer and the ceramic separator.

Abstract: Provided is a SiC composite substrate including a biaxially-oriented SiC layer in which SiC is oriented in both a c-axis direction and an a-axis direction, and a SiC polycrystalline layer provided on one surface of the biaxially-oriented SiC layer. A joint interface of the biaxially-oriented SiC layer and the SiC polycrystalline layer has an uneven shape, which has an amount of unevenness of 1 to 200 ?m.

Abstract: A zeolite membrane complex includes a porous support and a zeolite membrane formed on the support. Water molecules are adsorbed in the zeolite membrane. A decreasing rate of water content in the zeolite membrane from 250° C. to 500° C. is 0.1% or more.

Abstract: A system performs either inference using a first model or inference using a second model and a third model according to accuracy of at least one model of the first to third models and, upon the inference, generates or updates recipe properties data that is data indicating an association between a manufacturing method recipe for a material and a material property/properties. The first model is a model to which a manufacturing method recipe dataset indicating a manufacturing method recipe is input and from which a material properties dataset indicating a material property/properties is output. The second model is a model to which a material characteristics dataset indicating a material characteristic(s) is input and from which a material properties dataset is output. The third model is a model to which a manufacturing method recipe dataset is input and from which a material characteristics dataset is output.

Abstract: A vehicle air conditioning system includes: an air conditioning device; a power source; an inflow pipe for allowing air from a vehicle interior or a vehicle exterior to flow into the air conditioning device; a first outflow pipe for returning the air that has passed through the air conditioning device to the vehicle interior; a second outflow pipe for discharging the air that has passed through the air conditioning device to the vehicle exterior; a differential pressure valve being capable of switching the flow of the air to the first outflow pipe or the second outflow pipe; a first ventilator for controlling the differential pressure valve to switch the flow of the air to the first outflow pipe; and a second ventilator for controlling the differential pressure valve to switch the flow of the air to the second outflow pipe.

Abstract: A vehicle air conditioning system includes: a dehumidifying device; a power source; an inflow pipe for allowing air from a vehicle interior or a vehicle exterior to flow into the dehumidifying device; a first outflow pipe for returning the air that has been dehumidified by the dehumidifying device to the vehicle interior; a second outflow pipe through which the air containing moisture released by a regeneration process of the dehumidifying device is circulated; and a switching valve provided at a branch portion between the first outflow pipe and the second outflow pipe, the switching valve being capable of switching the flow of the air to the first outflow pipe or the second outflow pipe. A separator capable of separating moisture contained in the air by centrifugation is provided in the second outflow pipe. The second outflow pipe merges with the first outflow pipe on a downstream side of the separator.

Abstract: A powder feeding device configured to fill a saggar with powder by compressing the powder thereinto may include: a pressing plate configured to compress the powder in the saggar; and a pressing mechanism configured to press the pressing plate toward the powder in the saggar. The pressing plate may include a compression plate including a pressing surface that compresses the powder by contacting the powder; and a plurality of slit plates disposed on the pressing surface and extending downward from the pressing surface. The slit plates may be arranged radially as the powder feeding device with the saggar placed therein is viewed from above. When the saggar is placed in the powder feeding device, distances between the slit plates and a sidewall of the saggar may be substantially equal and the distances between the slit plates and the sidewall of the saggar may be 30 mm or less.

Abstract: A vehicle air conditioning system includes: a dehumidifying device; a power source; an inflow pipe for allowing air from a vehicle interior or a vehicle exterior to flow into the dehumidifying device; a first outflow pipe for returning the air that has been dehumidified by the dehumidifying device to the vehicle interior; a second outflow pipe through which the air containing moisture released by a regeneration process of the dehumidifying device is circulated; and a switching valve provided at a branch portion between the first outflow pipe and the second outflow pipe, the switching valve being capable of switching the flow of the air to the first outflow pipe or the second outflow pipe. A mist separator including a filter for removing the moisture is provided in the second outflow pipe. The second outflow pipe merges with the first outflow pipe on a downstream side of the mist separator.

Abstract: A heat treatment system may include: a first supply device; a first heat treatment furnace; a first recovery device; a second supply device; a second heat treatment furnace; and a second recovery device. The first heat treatment furnace may include: a heat treatment unit; and a first conveyor configured to convey the saggar in a first direction. The second heat treatment furnace may include: a heat treatment unit; and a second conveyor configured to convey the saggar in a second direction opposite to the first direction. Each of the first and second heat treatment furnaces may further include a substitution unit configured to isolate the heat treatment unit from outside of an exit. The substitution unit may include doors constituted of a heat insulating material, and disposed between the heat treatment unit and the substitution unit and between the substitution unit and the exit.