Patents Assigned to Orbotech, Ltd.
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Patent number: 11159712Abstract: A range differentiator useful for auto-focusing, the range differentiator including an image generator providing an image of a scene at various physical depths, a depth differentiator distinguishing portions of the image at depths below a predetermined threshold, irrespective of a shape of the portions, and providing a depth differentiated image and a focus distance ascertainer ascertaining a focus distance based on the depth differentiated image.Type: GrantFiled: February 22, 2019Date of Patent: October 26, 2021Assignee: Orbotech Ltd.Inventors: Shai Wiseman, Yigal Katzir, Ofir Shnit, Ilia Lutsker, Chay Goldenberg
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Patent number: 11113803Abstract: Apparatus for inspection includes an imaging assembly, including a plurality of cameras, which are mounted in different, respective locations in the imaging assembly and are configured to capture respective images of a sample. A motion assembly is configured to move at least one of the imaging assembly and the sample so as to cause the imaging assembly to scan the sample with a scan accuracy that is limited by a predetermined position tolerance. An image processor is coupled to receive and process the images captured by the cameras so as to locate a defect in the sample with a position accuracy that is finer than the position tolerance.Type: GrantFiled: January 11, 2009Date of Patent: September 7, 2021Assignee: Orbotech Ltd.Inventors: Ofer Saphier, Israel Shappira, Yaakov Davidi
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Patent number: 10688692Abstract: A method for fabrication includes providing a substrate having an upper surface with pattern of one or more recesses formed therein. A laser beam is directed to impinge on a donor film so as to eject droplets of a fluid from the donor film by laser-induced forward transfer (LIFT) into the one or more recesses. The fluid hardens within the one or more recesses to form a solid piece having a shape defined by the one or more recesses. The substrate is removed from the solid piece. In some embodiments, the recesses are coated with a thin-film layer before ejecting the droplets into the recesses, such that the thin-film layer remains as an outer surface of the solid piece after removing the substrate.Type: GrantFiled: November 1, 2016Date of Patent: June 23, 2020Assignee: ORBOTECH LTD.Inventors: Michael Zenou, Zvi Kotler
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Patent number: 10633758Abstract: A method for 3D printing includes printing a first metallic material on a substrate as a support structure (48). A second metallic material, which is less anodic than the first metallic material, is printed on the substrate as a target structure (46), in contact with the support structure. The support structure is chemically removed from the target structure by applying a galvanic effect to selectively corrode the first metallic material.Type: GrantFiled: January 14, 2016Date of Patent: April 28, 2020Assignee: ORBOTECH LTD.Inventors: Zvi Kotler, Michael Zenou
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Patent number: 10629442Abstract: A method for material deposition includes providing a transparent donor substrate (56, 60) having opposing first and second surfaces and multiple donor films (62, 64) including different, respective materials on the second surface. The donor substrate is positioned in proximity to an acceptor substrate (41), with the second surface facing toward the acceptor substrate. Pulses of laser radiation are directed to pass through the first surface of the donor substrate and impinge on the donor films so as to induce ejection of molten droplets containing a bulk mixture of the different materials from the donor films onto the acceptor substrate.Type: GrantFiled: October 7, 2014Date of Patent: April 21, 2020Assignee: Orbotech Ltd.Inventors: Michael Zenou, Zvi Kotler
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Patent number: 10622244Abstract: A method for manufacturing includes coating a substrate (22) with a matrix (28) containing a material to be patterned on the substrate. A pattern is fixed in the matrix by directing a pulsed energy beam to impinge on a locus of the pattern so as to cause adhesion of the material to the substrate along the pattern without fully sintering the material in the pattern. The matrix remaining on the substrate outside the fixed pattern is removed, and after removing the matrix, the material in the pattern is sintered.Type: GrantFiled: April 5, 2015Date of Patent: April 14, 2020Assignee: ORBOTECH LTD.Inventors: Michael Zenou, Zvi Kotler, Jonathan Ankri, Abraham Rotnemer, Oleg Ermak
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Publication number: 20200093001Abstract: A method of producing a conductive path on a substrate including depositing on the substrate a layer of material having a thickness in the range of 0.1 to 5 microns, including metal particles having a diameter in the range of 10 to 100 nanometers, employing a patterning laser beam to selectably sinter regions of the layer of material, thereby causing the metal particles to together define a conductor at sintered regions and employing an ablating laser beam, below a threshold at which the sintered regions would be ablated, to ablate portions of the layer of material other than at the sintered regions.Type: ApplicationFiled: November 20, 2019Publication date: March 19, 2020Applicant: Orbotech Ltd.Inventors: Zvi Kotler, Michael Zenou
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Patent number: 10537027Abstract: A method of producing a conductive path on a substrate including depositing on the substrate a layer of material having a thickness in the range of 0.1 to 5 microns, including metal particles having a diameter in the range of 10 to 100 nanometers, employing a patterning laser beam to selectably sinter regions of the layer of material, thereby causing the metal particles to together define a conductor at sintered regions and employing an ablating laser beam, below a threshold at which the sintered regions would be ablated, to ablate portions of the layer of material other than at the sintered regions.Type: GrantFiled: August 2, 2013Date of Patent: January 14, 2020Assignee: Orbotech Ltd.Inventors: Zvi Kotler, Michael Zenou
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Publication number: 20190369459Abstract: Optical apparatus includes an acousto-optic medium and an array of multiple piezoelectric transducers attached to the acousto-optic medium. A drive circuit is coupled to apply to the piezoelectric transducers respective drive signals including at least first and second frequency components at different, respective first and second frequencies and with different, respective phase offsets for the first and second frequency components at each of the multiple piezoelectric transducers.Type: ApplicationFiled: August 19, 2019Publication date: December 5, 2019Applicant: Orbotech Ltd.Inventors: Itay Peled, Zvi Kotler, Ronald Kaminsky
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Patent number: 10471538Abstract: An apparatus for material deposition on an acceptor surface includes a transparent donor substrate having opposing first and second surfaces, and a donor film on the second surface. The apparatus additionally includes an optical assembly, which is configured to direct a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film at a location on the second surface so as to induce ejection of droplets of molten material from the donor film at an angle that is not normal to the second surface at the location onto the acceptor surface.Type: GrantFiled: June 7, 2016Date of Patent: November 12, 2019Assignee: ORBOTECH LTD.Inventors: Michael Zenou, Zvi Kotler
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Patent number: 10451953Abstract: Optical apparatus includes an acousto-optic medium and an array of multiple piezoelectric transducers attached to the acousto-optic medium. A drive circuit is coupled to apply to the piezoelectric transducers respective drive signals including at least first and second frequency components at different, respective first and second frequencies and with different, respective phase offsets for the first and second frequency components at each of the multiple piezoelectric transducers.Type: GrantFiled: November 5, 2015Date of Patent: October 22, 2019Assignee: Orbotech Ltd.Inventors: Itay Peled, Zvi Kotler, Ronald Kaminsky
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Patent number: 10455137Abstract: A distance measuring system is provided for auto focusing a camera of an inspection system for inspecting a planar surface that is patterned. The system includes a pattern generator, an image sensor, an optical element(s) and a processor. The pattern generator projects a spatially random pattern toward the planar surface at an oblique angle. The optical element(s) forms the image of the reflected pattern on the image sensor and the image sensor captures an image of the spatially random pattern reflected off the planar surface. The processor processes the image of the spatially random pattern and provides auto-focus information.Type: GrantFiled: July 28, 2014Date of Patent: October 22, 2019Assignee: Orbotech Ltd.Inventors: Ofer Saphier, Doron Malka, David Fisch
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Patent number: 10429742Abstract: A method of manufacture of objects including receiving a CAD file containing electrical circuit design data for direct writing on a surface, the CAD file including CAD data for a multiplicity of objects to be produced on the surface, automatically configuring a direct write machine to direct write direct writing data based on the CAD data on the surface in plural scans, each having a scan width less than a width of the surface, including arranging the direct writing data for the multiplicity of objects to be written in a side by side manner in each of the plural scans so as to be within the scan width, whereby stitching of direct writing data between adjacent scans is obviated and operating the direct write machine to create the multiplicity of objects on the surface.Type: GrantFiled: November 2, 2016Date of Patent: October 1, 2019Assignees: Orbotech Ltd., Laser Imaging Systems GmbHInventors: Steffen Ruecker, Stefan Heinemann, Werner Eschke, Abraham Gross
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Patent number: 10416530Abstract: Optical apparatus includes an acousto-optic medium and an array of multiple piezoelectric transducers attached to the acousto-optic medium. A drive circuit is coupled to apply to the piezoelectric transducers respective drive signals including at least first and second frequency components at different, respective first and second frequencies and with different, respective phase offsets for the first and second frequency components at each of the multiple piezoelectric transducers.Type: GrantFiled: November 5, 2015Date of Patent: September 17, 2019Assignee: Orbotech Ltd.Inventors: Itay Peled, Zvi Kotler, Ronald Kaminsky
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Publication number: 20190266693Abstract: A range differentiator useful for auto-focusing, the range differentiator including an image generator providing an image of a scene at various physical depths, a depth differentiator distinguishing portions of the image at depths below a predetermined threshold, irrespective of a shape of the portions, and providing a depth differentiated image and a focus distance ascertainer ascertaining a focus distance based on the depth differentiated image.Type: ApplicationFiled: February 22, 2019Publication date: August 29, 2019Applicant: Orbotech Ltd.Inventors: Shai WISEMAN, Yigal Katzir, Ofir Shnit, Ilia Lutsker, Chay Goldenberg
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Patent number: 10193004Abstract: A method for metallization includes providing a transparent donor substrate (34) having deposited thereon a donor film (36) including a metal with a thickness less than 2 pm. The donor substrate is positioned in proximity to an acceptor substrate (22) including a semiconductor material with the donor film facing toward the acceptor substrate and with a gap of at least 0.1 mm between the donor film and the acceptor substrate. A train of laser pulses, having a pulse duration less than 2 ns, is directed to impinge on the donor substrate so as to cause droplets (44) of the metal to be ejected from the donor layer and land on the acceptor substrate, thereby forming a circuit trace (25) in ohmic contact with the semiconductor material.Type: GrantFiled: October 19, 2015Date of Patent: January 29, 2019Assignee: ORBOTECH LTD.Inventors: Michael Zenou, Zvi Kotler
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Publication number: 20180321595Abstract: A method of manufacture of objects including receiving a CAD file containing electrical circuit design data for direct writing on a surface, the CAD file including CAD data for a multiplicity of objects to be produced on the surface, automatically configuring a direct write machine to direct write direct writing data based on the CAD data on the surface in plural scans, each having a scan width less than a width of the surface, including arranging the direct writing data for the multiplicity of objects to be written in a side by side manner in each of the plural scans so as to be within the scan width, whereby stitching of direct writing data between adjacent scans is obviated and operating the direct write machine to create the multiplicity of objects on the surface.Type: ApplicationFiled: November 2, 2016Publication date: November 8, 2018Applicants: Orbotech Ltd., Laser Imaging Systems GmbHInventors: Steffen RUECKER, Stefan HEINEMANN, Werner ESCHKE, Abraham GROSS
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Patent number: 10015887Abstract: A method for manufacturing includes coating a substrate (22) with a matrix (28) containing a material to be patterned on the substrate. A pattern (42) is fixed in the matrix by directing an energy beam to impinge on the coated substrate so as to fix the pattern in the matrix without fully sintering the pattern. The matrix remaining on the substrate outside the fixed pattern is removed, and after removing the matrix, the material in the pattern is sintered.Type: GrantFiled: February 18, 2014Date of Patent: July 3, 2018Assignee: ORBOTECH LTD.Inventors: Michael Zenou, Marc Altman, Claudio Rottman, Zvi Kotler
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Patent number: 9925797Abstract: Printing apparatus (20) includes a donor supply assembly (30), which provides a transparent donor substrate (26) having opposing first and second surfaces and a donor film formed on the second surface so as to position the donor film in proximity to a target area (28) on an acceptor substrate (22). An optical assembly (24) directs multiple output beams of laser radiation simultaneously in a predefined spatial pattern to pass through the first surface of the donor substrate and impinge on the donor film so as to induce ejection of material from the donor film onto the acceptor substrate according, thereby writing the predefined pattern onto the target area of the acceptor substrate.Type: GrantFiled: August 2, 2015Date of Patent: March 27, 2018Assignee: ORBOTECH LTD.Inventors: Zvi Kotler, Michael Zenou, Itay Peled
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Publication number: 20170336697Abstract: Optical apparatus includes an acousto-optic medium and an array of multiple piezoelectric transducers attached to the acousto-optic medium. A drive circuit is coupled to apply to the piezoelectric transducers respective drive signals including at least first and second frequency components at different, respective first and second frequencies and with different, respective phase offsets for the first and second frequency components at each of the multiple piezoelectric transducers.Type: ApplicationFiled: November 5, 2015Publication date: November 23, 2017Applicant: Orbotech Ltd.Inventors: Itay PELED, Zvi KOTLER, Ronald KAMINSKY