Patents Assigned to Orbotech, Ltd.
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Publication number: 20170178946Abstract: A method for manufacturing includes coating a substrate (22) with a matrix (28) containing a material to be patterned on the substrate. A pattern is fixed in the matrix by directing a pulsed energy beam to impinge on a locus of the pattern so as to cause adhesion of the material to the substrate along the pattern without fully sintering the material in the pattern. The matrix remaining on the substrate outside the fixed pattern is removed, and after removing the matrix, the material in the pattern is sintered.Type: ApplicationFiled: April 5, 2015Publication date: June 22, 2017Applicant: ORBOTECH LTD.Inventors: Michael Zenou, Zvi Kotler, Jonathan Ankri, Abraham Rotnemer, Oleg Ermak
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Patent number: 9599572Abstract: An optical inspection system including a first multiplicity of cameras operative to image a second multiplicity of regions on an object, a third multiplicity of illumination sources and at least one illumination manager operative to combine illumination from the third multiplicity of illumination sources and thereafter to direct illumination therefrom to the second multiplicity of regions, the at least one illumination manager including a beam distributor receiving a composite input beam of a multiplicity of non-mutually coherent, spatially concentrated laser pulses and directing a multiplicity of composite output beams of a plurality of the non-mutually coherent, spatially concentrated laser pulses to a corresponding plurality of spatially distinct locations corresponding to the second multiplicity of regions.Type: GrantFiled: April 7, 2014Date of Patent: March 21, 2017Assignee: Orbotech Ltd.Inventors: Ronen Levy, Ofer Saphier, Ariel Danan
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Patent number: 9523714Abstract: A non-mechanical contact signal measurement apparatus includes a first conductor on a structure under test and a gas in contact with the first conductor. At least one electron beam is directed into the gas so as to induce a plasma in the gas where the electron beam passes through the gas. A second conductor is in electrical contact with the plasma. A signal source is coupled to an electrical measurement device through the first conductor, the plasma, and the second conductor when the plasma is directed on the first conductor. The electrical measurement device is responsive to the signal source.Type: GrantFiled: January 15, 2014Date of Patent: December 20, 2016Assignees: PHOTON DYNAMICS, INC., ORBOTECH LTD.Inventors: Alexander Kadyshevitch, Ofer Kadar, Arie Glazer, Ronen Loewinger, Abraham Gross, Daniel Toet
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Patent number: 9523873Abstract: A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot.Type: GrantFiled: January 23, 2015Date of Patent: December 20, 2016Assignees: Orbotech Ltd., Laser Imaging Systems GmbH & Co. KGInventors: Stefan Heinemann, Wolfgang Retschke, Holger Wagner, Jonas Burghoff, Abraham Gross
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Publication number: 20160233089Abstract: A method for material deposition includes providing a transparent donor substrate (56, 60) having opposing first and second surfaces and multiple donor films (62, 64) including different, respective materials on the second surface. The donor substrate is positioned in proximity to an acceptor substrate (41), with the second surface facing toward the acceptor substrate. Pulses of laser radiation are directed to pass through the first surface of the donor substrate and impinge on the donor films so as to induce ejection of molten droplets containing a bulk mixture of the different materials from the donor films onto the acceptor substrate.Type: ApplicationFiled: October 7, 2014Publication date: August 11, 2016Applicant: Orbotech Ltd.Inventors: Michael ZENOU, Zvi KOTLER
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Publication number: 20160094760Abstract: An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.Type: ApplicationFiled: December 10, 2015Publication date: March 31, 2016Applicant: Orbotech Ltd.Inventors: Yigal KATZIR, Itay GUR-ARIE, Yacov MALINOVICH
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Patent number: 9269149Abstract: Optical apparatus includes a mount, which holds a workpiece. An array of optical heads project respective patterns of radiation onto the workpiece. A calibration assembly captures images of the respective patterns. A motion assembly, on which the calibration assembly is mounted, transports the calibration assembly among a plurality of different positions between the array of the optical heads and the mount so as to intercept and image, at each of the different positions, a respective pattern projected by a different one of the optical heads. A processor processes the images captured by the calibration assembly at the different positions so as to monitor operation of the apparatus.Type: GrantFiled: May 8, 2014Date of Patent: February 23, 2016Assignee: Orbotech Ltd.Inventors: Uri Gold, Ram Oron
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Publication number: 20160028936Abstract: A distance measuring system is provided for auto focusing a camera of an inspection system for inspecting a planar surface that is patterned. The system includes a pattern generator, an image sensor, an optical element(s) and a processor. The pattern generator projects a spatially random pattern toward the planar surface at an oblique angle. The optical element(s) forms the image of the reflected pattern on the image sensor and the image sensor captures an image of the spatially random pattern reflected off the planar surface. The processor processes the image of the spatially random pattern and provides auto-focus information.Type: ApplicationFiled: July 28, 2014Publication date: January 28, 2016Applicant: Orbotech Ltd.Inventors: Ofer SAPHIER, Doron MALKA, David FISCH
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Patent number: 9232114Abstract: An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.Type: GrantFiled: August 14, 2013Date of Patent: January 5, 2016Assignee: Orbotech Ltd.Inventors: Yigal Katzir, Itay Gur-Arie, Yacov Malinovich
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Publication number: 20150324968Abstract: Optical apparatus includes a mount, which holds a workpiece. An array of optical heads project respective patterns of radiation onto the workpiece. A calibration assembly captures images of the respective patterns. A motion assembly, on which the calibration assembly is mounted, transports the calibration assembly among a plurality of different positions between the array of the optical heads and the mount so as to intercept and image, at each of the different positions, a respective pattern projected by a different one of the optical heads. A processor processes the images captured by the calibration assembly at the different positions so as to monitor operation of the apparatus.Type: ApplicationFiled: May 8, 2014Publication date: November 12, 2015Applicant: ORBOTECH LTD.Inventors: Uri GOLD, Ram ORON
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Publication number: 20150285734Abstract: An optical inspection system including a first multiplicity of cameras operative to image a second multiplicity of regions on an object, a third multiplicity of illumination sources and at least one illumination manager operative to combine illumination from the third multiplicity of illumination sources and thereafter to direct illumination therefrom to the second multiplicity of regions, the at least one illumination manager including a beam distributor receiving a composite input beam of a multiplicity of non-mutually coherent, spatially concentrated laser pulses and directing a multiplicity of composite output beams of a plurality of the non-mutually coherent, spatially concentrated laser pulses to a corresponding plurality of spatially distinct locations corresponding to the second multiplicity of regions.Type: ApplicationFiled: April 7, 2014Publication date: October 8, 2015Applicant: ORBOTECH LTD.Inventors: Ronen LEVY, Ofer SAPHIER, Ariel DANAN
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Publication number: 20150168749Abstract: A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot.Type: ApplicationFiled: January 23, 2015Publication date: June 18, 2015Applicants: LASER IMAGING SYSTEMS GMBH & CO. KG, ORBOTECH LTD.Inventors: Stefan HEINEMANN, Wolfgang RETSCHKE, Holger WAGNER, Jonas BURGHOFF, Abraham GROSS
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Patent number: 8964274Abstract: A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot.Type: GrantFiled: August 1, 2013Date of Patent: February 24, 2015Assignees: Orbotech Ltd., Laser Imaging Systems GmbH & Co. KGInventors: Stefan Heinemann, Wolfgang Retschke, Holger Wagner, Jonas Burghoff, Abraham Gross
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Publication number: 20150033557Abstract: A method of producing a conductive path on a substrate including depositing on the substrate a layer of material having a thickness in the range of 0.1 to 5 microns, including metal particles having a diameter in the range of 10 to 100 nanometers, employing a patterning laser beam to selectably sinter regions of the layer of material, thereby causing the metal particles to together define a conductor at sintered regions and employing an ablating laser beam, below a threshold at which the sintered regions would be ablated, to ablate portions of the layer of material other than at the sintered regions.Type: ApplicationFiled: August 2, 2013Publication date: February 5, 2015Applicant: Orbotech Ltd.Inventors: Zvi KOTLER, Michael ZENOU
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Patent number: 8888328Abstract: An LED-based high power uniform light engine including an array of LEDs having a common anode and a fill factor which exceeds 0.85, the common anode having heat spreading functionality and an active heat sink which is thermally connected to the common anode.Type: GrantFiled: December 12, 2012Date of Patent: November 18, 2014Assignee: Orbotech Ltd.Inventors: Ben-Zion Lavi, Ram Oron, Uri Gold, Ilia Lutsker, Mordechay Silberberg
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Patent number: 8770563Abstract: A vacuum hold-down system for use with workpieces of various shapes and/or sizes is disclosed. The system comprising a vacuum hold-down table defining a mask support plane and an apertured vacuum table mask which is selectably positionable on said mask support plane, wherein said vacuum hold-down table and said vacuum table mask is configured to define a plurality of selectable different contiguous arrays of vacuum apertures, by suitable relative positioning of said vacuum table mask and said vacuum hold-down table in said mask support plane.Type: GrantFiled: January 14, 2011Date of Patent: July 8, 2014Assignee: Orbotech Ltd.Inventor: Asher Katz
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Patent number: 8769471Abstract: A method for producing an electrical circuit includes providing a substrate having a first pattern of features and defining a second pattern comprising a net of interconnected circuit elements. Different respective transformation rules are specified for different ones of the circuit elements. The second pattern is modified by applying the respective transformation rules to the circuit elements so as to align the circuit elements with the features in the first pattern, and the modified second pattern is applied to the substrate.Type: GrantFiled: October 26, 2009Date of Patent: July 1, 2014Assignee: Orbotech Ltd.Inventor: Amir Noy
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Publication number: 20140160757Abstract: An LED-based high power uniform light engine including an array of LEDs having a common anode and a fill factor which exceeds 0.85, the common anode having heat spreading functionality and an active heat sink which is thermally connected to the common anode.Type: ApplicationFiled: December 12, 2012Publication date: June 12, 2014Applicant: ORBOTECH LTD.Inventors: Ben-Zion LAVI, Ram ORON, Uri GOLD, Ilia LUTSKER, Mordechay SILBERBERG
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Publication number: 20130329103Abstract: An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.Type: ApplicationFiled: August 14, 2013Publication date: December 12, 2013Applicant: Orbotech Ltd.Inventors: Yigal KATZIR, Itay GUR-ARIE, Yacov MALINOVICH
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Publication number: 20130321898Abstract: A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot.Type: ApplicationFiled: August 1, 2013Publication date: December 5, 2013Applicants: Laser Imaging Systems GmbH & Co. KG, Orbotech Ltd.Inventors: Stefan HEINEMANN, Wolfgang RETSCHKE, Holger WAGNER, Jonas BURGHOFF, Abraham GROSS