Patents Assigned to Orbotech, Ltd.
-
Patent number: 7986404Abstract: An illumination device and method for inspecting objects having microscopic features is provided. The device includes an illuminator which provides a solid angle of angularly specific illumination defining an illumination angle, selected by a user from among a continuous range of possible illumination angles. The device further includes an object inspector which inspects the object illuminated by the illuminator. The illuminator may include an illumination source, a light concentrator, an illumination angle selector, disposed along a light path between the illumination source and the object inspector. The illumination angle selector may have a first position in which directly-reflected light propagates toward the object plane and a second position in which no light both selected by the illumination angle selector and directly reflected from the object plane enters the collecting lens. Rather, in the second position, only scattered light from the object plane enters the collecting lens.Type: GrantFiled: March 20, 2007Date of Patent: July 26, 2011Assignee: Orbotech Ltd.Inventors: Tali Hurvitz, Yariv Dror Mizrahi, David Fisch
-
Publication number: 20110175271Abstract: A vacuum hold-down system for use with workpieces of various shapes and/or sizes is disclosed. The system comprising a vacuum hold-down table defining a mask support plane and an apertured vacuum table mask which is selectably positionable on said mask support plane, wherein said vacuum hold-down table and said vacuum table mask is configured to define a plurality of selectable different contiguous arrays of vacuum apertures, by suitable relative positioning of said vacuum table mask and said vacuum hold-down table in said mask support plane.Type: ApplicationFiled: January 14, 2011Publication date: July 21, 2011Applicant: ORBOTECH Ltd.Inventor: Asher KATZ
-
Publication number: 20110155424Abstract: A method for producing an electrical circuit includes providing a substrate having a first pattern of features and defining a second pattern comprising a net of interconnected circuit elements. Different respective transformation rules are specified for different ones of the circuit elements. The second pattern is modified by applying the respective transformation rules to the circuit elements so as to align the circuit elements with the features in the first pattern, and the modified second pattern is applied to the substrate.Type: ApplicationFiled: October 26, 2009Publication date: June 30, 2011Applicant: Orbotech Ltd.Inventor: Amir Noy
-
Publication number: 20110122404Abstract: A new architecture for machine vision system that uses area sensor (or line sensor), with telecentric imaging optics compound with telecentric illumination module is described. The illumination module may include a bright field illumination source and/or a dark field illumination source. The telecentric imaging optics includes an upper imaging module having an aperture stop and a lower imaging module positioned between the upper imaging module and object, such that the light source and the aperture stop are located in the back focal plane of the lower imaging module. The lower imaging module images the illumination source into a plane of an aperture stop of the upper imaging module. The optical axis of the upper imaging module is offset with respect to the lower imaging module. The optical axis of the telecentric illumination module is offset with respect to the axis of the lower imaging module in the opposite direction.Type: ApplicationFiled: July 21, 2009Publication date: May 26, 2011Applicant: ORBOTECH LTD.Inventors: David Fisch, Yigal Katzir
-
Patent number: 7947922Abstract: A system for delivering energy to a substrate includes a laser energy source providing a plurality of laser beams, wherein each of the beams is steered to an independently selectable location on a target, and is independently focused onto the target.Type: GrantFiled: January 8, 2009Date of Patent: May 24, 2011Assignee: Orbotech Ltd.Inventors: Abraham Gross, Zvi Kotler, Eliezer Lipman, Dan Alon
-
Publication number: 20110114823Abstract: An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.Type: ApplicationFiled: January 26, 2011Publication date: May 19, 2011Applicant: ORBOTECH LTD.Inventors: Yigal KATZIR, Itay GUR-ARIE, Yacov MALINOVICH
-
Patent number: 7945087Abstract: A method for micromachining a material, including configuring an optical system to provide illumination of an illumination wavelength to a site via a given element of the optical system, the illumination generating returning radiation from the site. The method further includes configuring the optical system to receive the returning radiation via the given element, and to form an image of the site therefrom, calculating an actual position of a location at the site from the image and outputting a signal indicative of the actual position of the location, generating a beam of micromachining radiation having a micromachining wavelength different from the illumination wavelength, positioning the beam to form an aligned beam with respect to the location in response to the signal, and conveying the aligned beam to the location via at least the given element of the optical system so as to perform a micromachining operation at the location.Type: GrantFiled: June 25, 2007Date of Patent: May 17, 2011Assignee: Orbotech Ltd.Inventors: Zvi Kotler, Eliezer Lipman, Golan Hanina, Boris Greenberg, Michael Zenou
-
Patent number: 7925073Abstract: A system and method of inspecting electrical circuits with multiple optical inputs, including: obtaining first and second image data that are generally spatially coincidental but which each include some image data that is different, modifying one of the images by employing the other image so as to produce an enhanced representation of the electrical circuit, and inspecting the enhanced representation for defects.Type: GrantFiled: May 15, 2007Date of Patent: April 12, 2011Assignee: Orbotech Ltd.Inventors: Saki Itzhak Hakim, Zeev Smilansky
-
Patent number: 7897902Abstract: An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.Type: GrantFiled: July 24, 2008Date of Patent: March 1, 2011Assignee: Orbotech Ltd.Inventors: Yigal Katzir, Itay Gur-Arie, Yacov Malinovich
-
Publication number: 20100328643Abstract: An optical system including a plurality of selectably directable mirrors (38) each arranged to direct a laser beam (41) to a selectable location within a field, a plurality of mirror orientation sensors (45) operative to sense the orientation of the plurality of selectably directable mirrors and to provide mirror orientation outputs and an automatic calibration subsystem (47) for automatically calibrating the plurality of selectably directable mirrors, the automatic calibration subsystem including a target (40) being operative to provide an optically visible indication of impingement of a laser beam thereon; the target being rewritable and having optically visible fiducial markings (54, 56), a target positioner (42) for selectably positioning the target, an optical sensor (44) operative to view the target following impingement of the laser beam thereon and to provide laser beam impingement outputs and a correlator (36) operative to provide a calibration output.Type: ApplicationFiled: January 11, 2009Publication date: December 30, 2010Applicant: ORBOTECH LTD.Inventors: Zvi Kotler, Boris Greenberg, Peter Grobgeld
-
Publication number: 20100309308Abstract: Apparatus for inspection includes an imaging assembly, including a plurality of cameras, which are mounted in different, respective locations in the imaging assembly and are configured to capture respective images of a sample. A motion assembly is configured to move at least one of the imaging assembly and the sample so as to cause the imaging assembly to scan the sample with a scan accuracy that is limited by a predetermined position tolerance. An image processor is coupled to receive and process the images captured by the cameras so as to locate a defect in the sample with a position accuracy that is finer than the position tolerance.Type: ApplicationFiled: January 11, 2009Publication date: December 9, 2010Applicant: Orbotech Ltd.Inventors: Ofer Saphier, Israel Shappira, Yaakov Davidi
-
Publication number: 20100282726Abstract: A method for laser drilling of holes in a substrate (44) with varying simultaneity including operating a laser (22) to produce a single output beam (24) whose pulses have a total energy, dividing the single output beam into plural beams (41) to an extent which varies over time and applying the plural beams to plural hole drilling locations (209, 210, 212, 214, 216, 218, 220, 222) on the substrate including simultaneously drilling first parts of multiple holes using corresponding ones of the plural beams having a pulse energy which is a first fraction of the total energy and thereafter drilling at least one second part of at least one of the multiple holes using at least one of the plural beams each having a pulse energy which is at least a second fraction of the total energy, the second fraction being different from the first fraction.Type: ApplicationFiled: January 11, 2009Publication date: November 11, 2010Applicant: ORBOTECH LTD.Inventors: Benny Naveh, Zvi Kotler, Hanina Golan
-
Publication number: 20100245813Abstract: A method for scanning a surface with a number of different illumination configurations, the method comprises capturing a plurality of images in a sequential manner during a single sweep, each image including one or more lines of pixels, sequentially altering an illumination configuration used to capture the plurality of images according to a predefined sequence of illumination configurations and shifts of the relative position of the imaging unit for capturing each of the plurality of images, and repeating the sequence of illumination configurations settings and associated image capture positions until a desired area of the surface is scanned, wherein said predefined shift is between 10 pixels and less then one pixel.Type: ApplicationFiled: March 24, 2009Publication date: September 30, 2010Applicant: ORBOTECH LTD.Inventors: Tamir MARGALIT, Ram Oron, Amir Noy
-
Publication number: 20100231901Abstract: An illumination device and method for inspecting objects having microscopic features is provided. The device includes an illuminator which provides a solid angle of angularly specific illumination defining an illumination angle, selected by a user from among a continuous range of possible illumination angles. The device further includes an object inspector which inspects the object illuminated by the illuminator. The illuminator may include an illumination source, a light concentrator, an illumination angle selector, disposed along a light path between the illumination source and the object inspector. The illumination angle selector may have a first position in which directly -reflected light propagates toward the object plane and a second position in which no light both selected by the illumination angle selector and directly reflected from the object plane enters the collecting lens. Rather, in the second position, only scattered light from the object plane enters the collecting lens.Type: ApplicationFiled: March 20, 2007Publication date: September 16, 2010Applicant: ORBOTECH LTD.Inventors: Tali Hurvitz, Yariv Dror Mizrahi, David Fisch
-
Patent number: 7795887Abstract: An apparatus is provided for testing microelectronic components on a substrate, including a scanner operative to scan a light beam over a plurality of thin film transistors disposed on a substrate, one transistor at a time, so as to induce a photoconductive response in the plurality of transistors, one transistor at a time; current sensing circuitry operative, synchronously with said scanner, to measure an output induced by the photoconductive response associated with a transistor and to generate photoconductive response output values, the photoconductive response output values representing a photoconductive response induced by the light beam, for one transistor at a time from among the plurality of transistors; and diagnostic apparatus operative to analyze the electronic response output values and to characterize each of the transistors in accordance therewith.Type: GrantFiled: October 15, 2006Date of Patent: September 14, 2010Assignee: Orbotech LtdInventors: Arie Glazer, Ilya Leizerson, Abraham Gross, Raanan Adin, Raphael Ben-Tolila
-
Patent number: 7663111Abstract: Apparatus for detecting radiation emitted from a number of volume elements of a body. The apparatus includes a first plurality of detector elements, each detector element being configured to output signals indicative of an intensity of radiation that is incident thereon. The apparatus also includes a first plurality of adjustable collimator channels, each adjustable collimator channel being associated with and being positioned between a respective detector element and the body, each adjustable collimator channel having a second plurality of dimensional configurations defining respective different sets of the volume elements from which emitted radiation impinges on the respective detector element. A processor computes a radiation intensity from at least a portion of the volume elements in response to the signals output by the detector elements in at least two of the dimensional configurations of the adjustable collimator channels.Type: GrantFiled: March 28, 2007Date of Patent: February 16, 2010Assignee: Orbotech Ltd.Inventors: Arie Shahar, Uri El-Hanany, Eliezer Traub, Zeev Gutman, Alexander Cherlin
-
Patent number: 7641365Abstract: An optical element including a unitary, non-circularly-symmetrical, piece of optically-transmissive material, which has at least first and second surfaces for concentrating light from a light source onto a linear target region, such that at least one of the first and second surfaces is curved, and such that a first portion of the light is concentrated onto the linear target region by reflection from the first surface, while a second portion of the light is concentrated onto the linear target region by refraction at the second surface.Type: GrantFiled: October 13, 2006Date of Patent: January 5, 2010Assignee: Orbotech LtdInventors: Yigal Katzir, Elie Meimoun
-
Patent number: 7642484Abstract: A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.Type: GrantFiled: June 13, 2002Date of Patent: January 5, 2010Assignee: Orbotech LtdInventors: Abraham Gross, Zvi Kotler, Eliezer Lipman
-
Patent number: 7636466Abstract: Apparatus for high resolution processing of a generally planar workpiece having microscopic features to be imaged, comprising a video camera acquiring at least two candidate images of a microscopic portion on generally planar workpiece; a motion controller operative to effect motion, relative to the workpiece, of at least an optical element of the video camera along an optical axis extending generally normally to a location on a surface of the workpiece, the video camera acquiring the at least two candidate images at selected time intervals, each of the at least two candidate images differing by at least one image parameter; an image selector operative to select an individual image from among the at least two candidate images according to predefined criteria of image quality; and a selected image analyzer operative to analyze at least a portion of the individual image selected by the image selector.Type: GrantFiled: January 11, 2006Date of Patent: December 22, 2009Assignee: Orbotech LtdInventors: Ofer Saphier, Raanan Adin, David Fisch
-
Publication number: 20090310239Abstract: A method of controlling the illumination angle onto a target, including, illuminating onto the target with light from at least two light sources of pre-selected wavelengths; wherein each point on the target is illuminated by light from the light sources with a respective maximal illumination angle relative to a main illumination axis extending from substantially the center of the at least two light sources to the target, selecting a dichroic filter that transmits light from the at least two light sources as a function of the angle of incidence upon the filter, positioning the dichroic filter between the at least two light sources and the target to limit the transfer of light to light of the pre-selected wavelengths; and wherein the dichroic filter is selected to limit the maximal illumination angle illuminating each point on the target.Type: ApplicationFiled: June 12, 2008Publication date: December 17, 2009Applicant: ORBOTECH LTD.Inventor: Avraham ADLER