Abstract: Tin oxide films are used to create air gaps during semiconductor substrate processing. Tin oxide films, disposed between exposed layers of other materials, such as SiO2 and SiN can be selectively etched using a plasma formed in an H2-containing process gas. The etching creates a recessed feature in place of the tin oxide between the surrounding materials. A third material, such as SiO2 is deposited over the resulting recessed feature without fully filling the recessed feature, forming an air gap. A method for selectively etching tin oxide in a presence of SiO2, SiC, SiN, SiOC, SiNO, SiCNO, or SiCN, includes, in some embodiments, contacting the substrate with a plasma formed in a process gas comprising at least about 50% H2. Etching of tin oxide can be performed without using an external bias at the substrate and is preferably performed at a temperature of less than about 100° C.

Abstract: A system (100) and method for detecting a malicious programmable logic controller (PLC) code segment (110) in a PLC program corresponding to a specific type of PLC includes a binary parser (112) that parses the code segment (110) into a plurality of functional elements. A variable and function block mapper (114) maps the functional elements into a high-level data structure. A fuzzer (116) generates a behavioral model of the high-level data structure into an automaton (118). A classifier (120) predicts to which processes the automaton (118) corresponds. A detector (122) detects unsafe states in the automaton (118) and that generates an indication of a detected unsafe state.

Abstract: A machine and method are presented for continuously forming a woven composite with controllable internal fabric geometry. The machine may include one or more spools for dispensing one or more warp filaments, a roller assembly configured to receive a composite weave, a warp rack having warp heads for engaging the warp filaments and vertically adjusting position to dynamically create a weave pattern in response to the insertion of one or more weft filaments by a weft inserter stack.

Abstract: A system to deposit a film on a substrate using atomic layer deposition includes a pedestal arranged in a processing chamber to support the substrate on a top surface of the pedestal when depositing the film on the substrate. A first annular recess in the pedestal extends downwardly from the top surface of the pedestal and radially inwardly from an outer edge of the pedestal towards an outer edge of the substrate. The first annular recess has an inner diameter that is greater than a diameter of the substrate. An annular ring is made of a dielectric material and is arranged around the substrate in the first annular recess. A second annular recess in the pedestal is located under the annular ring. The second annular recess has a height and extends radially inwardly from the outer edge of the pedestal towards the outer edge of the substrate.

Abstract: A method and an apparatus are disclosed for video coding using adaptive multiple reference lines. The video coding method and the apparatus generate a predictor of the current block in intra-predicting the current block by separately using the top reference line and the left reference line of the current block. The video coding method and the apparatus use multiple reference lines for one pixel in the current block or use different reference lines for different pixels in the current block for intra-predicting the current block.

Abstract: A solid electrolyte comprising a compound of the formula Ay(MS4)z(PS4)4-zX3 having an ionic conductivity of from 10?7 to 10?4 S/cm at room temperature, and methods of making a solid electrolyte.

Abstract: This disclosure describes systems and methods for ultrasound imaging and targeting. In one example, the systems and methods improve targeting and imaging through a heterogenous medium by using the angular spectrum approach (ASA) alone or in combination with passive acoustic mapping (PAM). In another example, the systems and methods improve the ultrasound imaging of vessels using microbubbles. The imaging of the vessels is also aided by the ASA and PAM. A closed loop controller is described that adjusts the ultrasound pressure provided to a region of interest to a desired pressure based at least in part on the harmonic, ultra-harmonic, sub-harmonic, or broadband frequency ranges for the microbubbles.

Abstract: A conduit forming unit includes: a cylindrical tubular body having flanges, on both end portions of the cylindrical tubular body; a first connection tubular body and a second connection tubular body respectively connected to a first end portion and a second end portion of the cylindrical tubular body; and tube joints for connecting the cylindrical tubular body and the first connection tubular body and the second connection tubular body to each other. The tube joint includes: a pawl equipped nut where a plurality of pawl portions which are engageable with the flange of the cylindrical tubular body are formed in the pawl equipped nut, the pawl portions engage with the flange so as to connect the first connection tubular body and the cylindrical tubular body to each other; and a retaining ring being annularly mountable on the pawl equipped nut and retaining engagement of the pawl portions with the flange.

Abstract: A hydrodynamic barrier device including: a plurality of outlets disposed on a surface; a plurality of inlets dispersed among the plurality of outlets and disposed on the surface; and at least one pump in fluid communication with the plurality of outlets and the plurality of inlets, the at least one pump configured to simultaneously pump an operating fluid out of the plurality of outlets and pull the operating fluid back through the plurality of inlets to create a hydrodynamic barrier on the surface.

Abstract: In some examples, a Vacuum Pre-treatment Module (VPM) metrology system is provided for measuring a sheet resistance of a layer on a substrate. The system may comprise an eddy sensor including a sender sensor and a receiver sensor defining a gap between them for accepting an edge of a substrate to be tested. A sensor controller receives measurement signals from the eddy sensor. A data processor processes the measurement signals and generates sheet resistance values for the layer on the substrate.

Abstract: Development of resists are useful, for example, to form a patterning mask in the context of high-resolution patterning. Development can be accomplished using a halide-containing chemistry such as a hydrogen halide. A metal-containing resist film may be deposited on a semiconductor substrate using a dry or wet deposition technique. The resist film may be an EUV-sensitive organo-metal oxide or organo-metal-containing thin film resist. After exposure, the photopatterned metal-containing resist is developed using wet or dry development.

Abstract: Provided herein are materials and methods for efficiently delivering nucleic acids to cochlear and vestibular cells.

Abstract: A processing chamber and method of etching a semi-conductor substrate are presented. The processing chamber is symmetric, with the centerlines of a chuck and stem of a stage to retain a semi-conductor substrate aligned with a centerline of a passage in a core of a pump used to evacuate the processing chamber and with a center-line of a gas port through which gas is introduced to the processing chamber. The stem extends through the passage and a spiral groove is formed in the passage in only one of the stem or an inner surface of the core to provide pumping action to counter back streaming of the gas from an exhaust of the pump in an intermediate and viscous flow regime inside a gap between the stem and the core.

Abstract: A substrate processing system includes a drive circuit, an RF reference measuring circuit, and a make-break connector. The drive circuit generates an RF drive signal at a first RF frequency. The RF reference measuring circuit includes an LC circuit having an input impedance and an output impedance. An output of the LC circuit connects to an RF power meter and a dummy load. The make-break connector connects the drive circuit to one of the RF reference measuring circuit and a processing chamber load including a component of the substrate processing system. An output impedance of the drive circuit matches an impedance of an input impedance of the LC circuit. The output impedance of the drive circuit does not match impedances of the RF power meter and the dummy load. The LC circuit matches the impedance of the drive circuit to the RF power meter and the dummy load.

Abstract: The disclosed technology includes an infrared-emitting quantum dot comprising a core comprising a first semiconductor material, a shell comprising a second semiconductor material, and a gradient interface between the core and the shell. The disclosed technology also includes methods of manufacturing the same.

Abstract: A plasma processing device may include a plasma processing chamber, a plasma electrode assembly, a wafer stage, a plasma producing gas inlet, a plurality of vacuum ports, at least one vacuum pump, and a multi-port valve assembly. The multi-port valve assembly may comprise a movable seal plate positioned in the plasma processing chamber. The movable seal plate may comprise a transverse port sealing surface that is shaped and sized to completely overlap the plurality of vacuum ports in a closed state, to partially overlap the plurality of vacuum ports in a partially open state, and to avoid substantial overlap of the plurality of vacuum ports in an open state. The multi-port valve assembly may comprise a transverse actuator coupled to the movable seal plate and a sealing actuator coupled to the movable seal plate.

Abstract: The present invention relates to isolated strains of Epichloë endophytes that form stable symbiotic associations with cereal grasses, particularly wheat, wherein the symbiotic associations are combinations of endophytes and host plants that are not found in nature The invention also relates to methods of identifying and/or selecting fungal endophytes that form stable symbiotic associations with wheat plants including methods of screening for fungal endophytes that form stable symbiotic associations with wheat plants, and to methods of screening for wheat plants that form stable symbiotic associations with fungal endophytes.

Abstract: The present disclosure provides methods for administering formulations to the suprachoroidal space of the eye to achieve targeted drug delivery to a desired site of action within the eye. The methods include using a pushing formulation that includes a material such as a gel that expands due to physiochemical cues; or using an electric field to affect the movement of a formulation within the suprachoroidal space; or a combination of a pushing formulation with an electric field.

Abstract: Disclosed herein are specimen imaging systems, comprising: a sample stage in a vacuum environment, the sample stage configured to support a specimen; an electron beam generator configured to focus an electron beam on a first predetermined location on the specimen; a nanospray dispenser configured to dispense a nanospray onto a second predetermined location on the specimen; a mass spectrometer; and an extraction conduit configured to extract a plume of charged particles generated as a result of contact between the nanospray and the specimen and deliver the charged particles to the mass spectrometer. The system can create a topological and chemical map of the specimen by analyzing at least a portion of the specimen with a mass spectrometer to determine a chemical composition of the specimen at the second predetermined location and analyzing at least a portion of the specimen with the electron beam to determine a surface topology.

Abstract: A method for cleaning a load lock in a substrate processing system includes, in a first period, opening a first valve in fluid communication with a gas source to supply gas through a first vent into a gas volume of the load lock. The gas is supplied at a pressure and flow rate sufficient to disturb particles from surfaces of the load lock. The method includes, in a second period subsequent to the first period and with the first valve opened, opening a second valve in fluid communication with a pump and turning on the pump to flush the gas and particles from the gas volume of the load lock, and, in a third period subsequent to the second period, closing the first valve while continuing to pump the gas and the particles from the gas volume of the load lock via the second valve.