Abstract: A method of forming ferroelectric hafnium oxide (HfO2) in a substrate processing system includes depositing an HfO2 layer on a substrate, depositing a capping layer on the HfO2 layer, annealing the HfO2 layer and the capping layer to form ferroelectric hafnium HfO2, and selectively etching the capping layer to remove the capping layer without removing the HfO2 layer.

Abstract: A metrology system may include an optical metrology tool configured to produce an optical metrology output for one or more features on a processed substrate, and a metrology machine learning model that has been trained using a training set of (i) profiles, critical dimensions, and/or contours for a plurality of features, and (ii) optical metrology outputs for the plurality of features. The metrology machine learning model may be configured to: receive the optical metrology output from the optical metrology tool; and output the profile, critical dimension, and/or contour of the one or more features on the processed substrate.

Abstract: A method of forming ferroelectric hafnium oxide (HfO2) in a substrate processing system includes depositing an HfO2 layer on a substrate, depositing a hafnium nitride (HfN) layer on the HfO2 layer; and annealing the HfO2 layer and the HfN layer to form ferroelectric hafnium HfO2.

Abstract: A low sulfur diesel blockage inhibitor as shown in formula (I), a preparation method therefor, and use thereof are provided. In formula (I), x and y are each an integer between 0 and 4; m and n are each selected from H, a C1-C6 linear or branched alkyl group, or a C3-C6 cycloalkyl group. By using a vegetable oil as a raw material, a modified vegetable oil fatty acid is first obtained, and then a polar group of an unsaturated dialdehyde with a certain chain length is introduced into a molecular chain of the modified vegetable oil fatty acid.

Abstract: This disclosure describes an example architecture for providing a delay line for optical techniques. The delay line architecture includes a focusing element that has a focal axis disposed parallel to its length. The line of symmetry provided by the focal axis obviates path-length-dependent aberrations caused by the off-axis beam translations. The systems described herein also provide varying geometries of movable mirrors, including a galvanometer mirror and a rotating polygonal mirror. The systems and methods described herein also provide techniques for generating and detecting coherent Raman spectra using a picosecond probe pulse.

Abstract: The present disclosure provides compositions including method of producing H2, variable volume reactors, methods of using variable volume reactors, and the like.

Abstract: As an IV infiltration occurs and fluid leaks into surrounding tissues, several physiological changes are expected locally. The systems and methods described herein provide a scalable automated IV infiltration detection device to provide medical staff an early warning of a possible infiltration such that they can respond accordingly. The systems and methods capture the physiological state of the user at or around a peripheral catheter insertion site by incorporating one or more modalities of wearable sensing, processing the data collected from these wearable sensors, detecting the presence of extravascular fluid, and providing an indication to a medical professional.

Abstract: A plasma processing system is provided. The system includes a hydrogen gas supply and a hydrocarbon gas supply and a processing chamber. The system includes a first mass flow controller (MFC) for controlling hydrogen gas flow into the processing chamber and a second MFC for controlling hydrocarbon gas flow into the processing chamber. The system includes a plasma source for generating plasma at the processing chamber. The plasma is for etching SnO2. The system includes a controller for regulating the first MFC and the second MFC such that a ratio of hydrocarbon gas flow to the hydrogen gas flow into the processing chamber is between 1% and 60% so that when SnH4 is produced during said etching SnO2. The SnH4 is configured to react with hydrocarbon gas to produce an organotin compound that is volatilizable in a reaction that is more kinetically favorable than SnH4 decomposition into Sn powder.

Abstract: Systems and methods for increasing peak ion energy with a low angular spread of ions are described. In one of the systems, multiple radio frequency (RF) generators that are coupled to an upper electrode associated with a plasma chamber are operated in two different states, such as two different frequency levels, for pulsing of the RF generators. The pulsing of the RF generators facilitates a transfer of ion energy during one of the states to another one of the states for increasing ion energy during the other state to further increase a rate of processing a substrate.

Abstract: A method for processing a substrate is provided, wherein the substrate is located below a showerhead in a processing chamber. A deposition layer is deposited on the substrate, wherein at least one deposition gas is provided through the showerhead. A secondary purge gas is flowed during the depositing the deposition layer from a location outside of the showerhead in the processing chamber forming a flow curtain around an outer edge of the showerhead, wherein the secondary purge gas comprises at least one component gas. A partial pressure of the at least one component gas is changed over time during the depositing the deposition layer, wherein the depositing the deposition layer has a non-uniformity, wherein the changing the partial pressure changes the non-uniformity over time during the depositing the deposition layer.

Abstract: Systems, methods, and devices are provided for estimating a state-of-charge in an energy storage system. The systems, methods, and devices may measure a current and a voltage related to the energy storage system, generate a model-based state-of-charge estimate based thereon, generate an aggregated state-of-charge estimate based on the model-based state-of-charge estimate, generate an adaptation current based on the measured current, aggregated state-of-charge estimate, and the adaptive state-of-charge estimate, and update the adaptive state-of-charge estimate based on the measured current and the adaptation current. The systems, methods, and devices may also provide a tracking indication whether the adaptive state-of-charge estimate is tracking between upper and lower confidence limits.

Abstract: Methods of treating obesity include administering to a subject in need thereof an effective amount of a therapeutic agent capable of reversing an inhibition of a Na/K-ATPase in a small intestine of a subject, such as a basolateral membrane Na/K-ATPase. Administering the therapeutic agent can further decrease an amount of glucose transport and/or decrease an amount of salt absorption in the small intestine of the subject to thereby treat the obesity. Methods for screening for a compound useful for treating obesity include contacting a small intestine cell with an effective amount of a test compound, and detecting whether an activity level of a Na/K-ATPase in the small intestine cell is increased in the presence of the test compound. The test compound is then identified as a compound useful for the treatment of obesity if the activity level of the Na/K-ATPase is increased in the presence of the test compound.

Abstract: A transfer robot assembly arranged within an ATV transfer module includes a transfer robot that includes an end effector and one or more arm segments connected between the end effector and a transfer robot platform. A first robot alignment arm is connected to the transfer robot platform. A second robot alignment arm is connected to the first robot alignment arm and to a mounting chassis of the ATV transfer module. The transfer robot assembly is configured to actuate the first robot alignment arm and the second robot alignment arm to raise and lower the transfer robot to adjust a position of the transfer robot in a vertical direction and in a horizontal direction. The transfer robot is configured to fold into a folded configuration having a narrow profile occupying less than 50% of an overall depth of the ATV transfer module.

Abstract: A method for optimizing delivery of power to a plasma chamber is described. The method includes dividing each cycle of a low frequency (LF) radio frequency generator (RFG) into multiple time intervals. During each of the time intervals, a frequency offset of a high frequency (HF) RFG is generated for which the delivery of power is maximized. The frequency offsets provide a substantially inverse relationship compared to a voltage signal of the LF RFG for each cycle of the voltage signal. The frequency offsets for the time intervals are multiples of the low frequency. The substantially inverse relationship facilitates an increase in the delivery of power to the electrode. A total range of the frequency offsets from a reference HF frequency over the LF RF cycle depends on a power ratio of power that is supplied by the LF RFG and power that is supplied by the HF RFG.

Abstract: Disclosed are air electrode materials suitable for use in solid oxide electrochemical cells (SOCs). The disclosed cells can operate in a dual function modes, i.e., as a fuel cell and as an electrolysis cell. In both cases, chemical energy and electrical energy can be directly convert from one mode to the other; thereby providing a highly efficient energy conversion process that can be used as a sustainable energy source.

Abstract: Methods and assays for diagnosis or prognosis of endometriosis include comparing an expression level or activity of miR-155 and JARID2 in a sample to detect a measurable difference. Therapeutic methods for treating endometriosis in a subject comprise identifying a subject as having a decreased expression level and/or activity of JARID2 in a sample obtained from the subject; and administering an agent that inhibits an activity of an miRNA that targets JARID2 or an agent that inhibits EZH2. Methods for screening for a compound useful for treating endometriosis are also provided and include contacting a cell with an effective amount of a test compound, and detecting whether the expression level or activity level of JARID2 or miR-155 in the cell is altered in the presence of the test compound.

Abstract: A temperature-controlled substrate support for a substrate processing system includes a substrate support located in the processing chamber. The substrate support includes N zones and N resistive heaters, respectively, where N is an integer greater than one. A temperature sensor is located in one of the N zones. A controller is configured to calculate N resistances of the N resistive heaters during operation and to adjust power to N?1 of the N resistive heaters during operation of the substrate processing system in response to the temperature measured in the one of the N zones by the temperature sensor, the N resistances of the N resistive heaters, and N?1 resistance ratios.

Abstract: A substrate support assembly comprises a first optical receiver, a power converter, a first circuit, and a first optical transmitter, all embedded in the substrate support assembly. The first optical receiver is configured to receive a first optical signal and a first optical data through a fiber optic cable. The power converter is configured to generate DC power based on the first optical signal and the first optical data received by the first optical receiver. The first circuit is configured to receive the DC power from the power converter and to receive a second data from a sensor disposed in the substrate support assembly in response to the first optical data. The first optical transmitter is configured to transmit the second data as a second optical data through the fiber optic cable.

Abstract: An antenna system includes an antenna waveguide having a waveguide surface. A set of printed electronics includes conductors deposited onto the waveguide surface of the antenna waveguide. The system further includes at least one transceiver integrated circuit (IC), the transceiver integrated circuit having a surface assembly, wherein the surface assembly is adhesively coupled to the antenna waveguide and directly connected to the waveguide surface of the antenna waveguide.

Abstract: Described herein are methods of filling features with tungsten, and related systems and apparatus, involving inhibition of tungsten nucleation. In some embodiments, the methods involve selective inhibition along a feature profile. Methods of selectively inhibiting tungsten nucleation can include exposing the feature to a direct or remote plasma. Pre-inhibition and post-inhibition treatments are used to modulate the inhibition effect, facilitating feature fill using inhibition across a wide process window. The methods described herein can be used to fill vertical features, such as in tungsten vias, and horizontal features, such as vertical NAND (VNAND) wordlines. The methods may be used for both conformal fill and bottom-up/inside-out fill. Examples of applications include logic and memory contact fill, DRAM buried wordline fill, vertically integrated memory gate and wordline fill, and 3-D integration using through-silicon vias.