Patents Assigned to Research Corporation
  • Patent number: 11668638
    Abstract: A microchannel for processing cells by compression of the cells including an inlet, ridges and an outlet. Each ridge including a compressive surface and a cell adhesion entity. The outlet configured to remove at least one of a first portion of the cells and a second portion of the cells from the microchannel. Each ridge oriented at an angle of from 25 degrees to 70 degrees relative to a center axis of the microchannel. The cell adhesion entity configured such that the first portion of the cells has a first adhesion property relative to the cell adhesion entity to follow a first trajectory through the microchannel. The cell adhesion entity further configured such that the second portion of the cells has a second adhesion property relative to the cell adhesion entity to follow a second trajectory through the microchannel. The first trajectory is different from the second trajectory.
    Type: Grant
    Filed: February 4, 2022
    Date of Patent: June 6, 2023
    Assignee: Georgia Tech Research Corporation
    Inventors: Todd Sulchek, Alexander Alexeev, Bushra Tasadduq
  • Patent number: 11670516
    Abstract: Various embodiments herein relate to methods, apparatus, and systems for etching a feature in a substrate. Typically the feature is etched in a dielectric-containing stack. The etching process involves cyclically etching the feature and depositing a protective film on sidewalls of the partially etched feature. These stages are repeated until the feature reaches its final depth. The protective film may have a particular composition, for example including at least one of a tungsten carbonitride, a tungsten sulfide, tin, a tin-containing compound, molybdenum, a molybdenum-containing compound, a ruthenium carbonitride, a ruthenium sulfide, an aluminum carbonitride, an aluminum sulfide, zirconium, and a zirconium-containing compound. A number of optional steps may be taken including, for example, doping the mask layer, pre-treating the substrate prior to deposition, removing the protective film from the sidewalls, and oxidizing any remaining protective film.
    Type: Grant
    Filed: August 19, 2019
    Date of Patent: June 6, 2023
    Assignee: Lam Research Corporation
    Inventors: Karthik S. Colinjivadi, Samantha SiamHwa Tan, Shih-Ked Lee, George Matamis, Yongsik Yu, Yang Pan, Patrick Van Cleemput, Akhil Singhal, Juwen Gao, Raashina Humayun
  • Patent number: 11670750
    Abstract: A battery electrode composition is provided that comprises a composite material comprising one or more nanocomposites. The nanocomposites may each comprise a planar substrate backbone having a curved geometrical structure, and an active material forming a continuous or substantially continuous film at least partially encasing the substrate backbone. To form an electrode from the electrode composition, a plurality of electrically-interconnected nanocomposites of this type may be aggregated into one or more three-dimensional agglomerations, such as substantially spherical or ellipsoidal granules.
    Type: Grant
    Filed: February 22, 2022
    Date of Patent: June 6, 2023
    Assignee: GEORGIA TECH RESEARCH CORPORATION
    Inventors: Gleb Yushin, Kara Evanoff, Oleksandr Magazynskyy
  • Patent number: 11664744
    Abstract: An apparatus including a first member including a first electrode, a second member coupled to the first member about an axis, including a second electrode, and a surface layer between the first electrode and the second electrode, the second member is rotatable with respect to the axis by an energy flow to change triboelectric charges on the electrodes, and to affect a flow of electrons between the electrodes. A self-powered sensor for detecting a chemical including a generator having an electrode, and a superhydrophobic surface layer for receiving an energy flow carrying triboelectric charges, the surface layer includes a TiO2 layer with nanostructures, and a power indicator indicative of whether the chemical is present based on power output of the triboelectric generator, the energy flow is a solution flow, the solution comprising the chemical and water, and the chemical removes at least one triboelectric charge from the water.
    Type: Grant
    Filed: August 28, 2019
    Date of Patent: May 30, 2023
    Assignee: Georgia Tech Research Corporation
    Inventors: Zhong Lin Wang, Zong-Hong Lin, Gang Cheng
  • Patent number: 11660575
    Abstract: Disclosed herein are carbon molecular sieves and methods of making the same through the pyrolysis of a polymer precursor in the presence of a reactive gas stream including a hydrogen source.
    Type: Grant
    Filed: December 17, 2019
    Date of Patent: May 30, 2023
    Assignees: ExxonMobil Technology and Engineering Company, Georgia Tech Research Corporation
    Inventors: Yao Ma, Melinda Jue, Ryan Lively, Dhaval Ajit Bhandari
  • Patent number: 11662237
    Abstract: A fluid delivery system includes N first valves. Inlets of the N first valves are fluidly connected to N gas sources, respectively, where N is an integer greater than zero. N mass flow controllers include a microelectromechanical (MEMS) Coriolis flow sensor having an inlet in fluid communication with an outlet of a corresponding one of the N first valves. A second valve has an inlet in fluid communication with an outlet of the MEMS Coriolis flow sensor and an outlet supplying fluid to treat a substrate arranged in a processing chamber. A controller in communication with the MEMS Coriolis flow sensor is configured to determine at least one of a mass flow rate and a density of fluid flowing through the MEMS Coriolis flow sensor.
    Type: Grant
    Filed: April 2, 2019
    Date of Patent: May 30, 2023
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Iqbal A. Shareef, Dennis Smith, John E. Daugherty
  • Patent number: 11664504
    Abstract: A method of producing electrical power includes: a cathode having a porphyrin precursor attached to a substrate, and having a first enzyme, wherein the first enzyme reduces oxygen; an anode having a first region of an anode substrate and having a gold nanoparticle composition located thereon, and having a second region of the anode substrate having an enzyme composition located thereon, wherein the enzyme composition includes a second enzyme, wherein the first region and second region are separate regions; and a neutral fuel liquid in contact with the anode and cathode, the neutral fuel liquid having a neutral pH and a fuel reagent; and operating the fuel cell to produce electrical power with the neutral fuel liquid having the neutral pH and the fuel reagent.
    Type: Grant
    Filed: August 19, 2021
    Date of Patent: May 30, 2023
    Assignee: CFD Research Corporation
    Inventors: Mary Arugula, Erica Wagner Pinchon, Sameer Singhal, Yevgenia Ulyanova
  • Patent number: 11663307
    Abstract: Example systems and methods for defending against powerful, automated attacks on facial authentication systems are disclosed. A first verification is performed based at least in part on determining a response time for a response to a CAPTCHA or other challenge. In response to determining that the response time is within a threshold, a second verification is performed based at least in part on extracting a face feature or a voice feature from a plurality of samples associated with the response.
    Type: Grant
    Filed: September 24, 2019
    Date of Patent: May 30, 2023
    Assignee: GEORGIA TECH RESEARCH CORPORATION
    Inventors: Erkam Uzun, Pak Ho Chung, Irfan A. Essa, Wenke Lee
  • Patent number: 11660073
    Abstract: Apparatus, including an insertion tube, configured to be inserted into a body cavity and having a first lumen having a first lumen diameter and a distal opening, and a tubular channel, having a second lumen and an outer channel diameter smaller than the first lumen diameter, inserted into the first lumen. The apparatus includes a support structure, configured to be passed through a space between an inner wall of the insertion tube and an outer wall of the tubular channel to the distal opening in a folded state and to unfold, upon exit of the support structure through the distal opening, in a direction transverse to the first lumen to reach a support dimension that is greater than the first lumen diameter. A plurality of planar two-dimensional arrays of ultrasonic transducers are supported by the support structure, the arrays having transverse dimensions less than the first lumen diameter.
    Type: Grant
    Filed: October 24, 2016
    Date of Patent: May 30, 2023
    Assignees: GEORGIA TECH RESEARCH CORPORATION, BIOSENSE WEBSTER (ISRAEL) LTD.
    Inventors: F. Levent Degertekin, Meir Bar-Tal
  • Patent number: 11664262
    Abstract: An electrostatic chuck for a substrate processing system is provided and includes a baseplate, an intermediate layer disposed on the baseplate, and a top plate. The top plate is bonded to the baseplate via the intermediate layer and is configured to electrostatically clamp to a substrate. The top plate includes a monopolar clamping electrode and seals. The monopolar clamping electrode includes a groove opening pattern with coolant gas groove opening sets. The seals separate coolant gas zones. The coolant gas zones include four or more coolant gas zones. Each of the coolant gas zones includes distinct coolant gas groove sets. The top plate includes the distinct coolant gas groove sets. Each of the distinct coolant gas groove sets has one or more coolant gas supply holes and corresponds to a respective one of the coolant gas groove opening sets.
    Type: Grant
    Filed: April 5, 2018
    Date of Patent: May 30, 2023
    Assignee: Lam Research Corporation
    Inventors: Alexander Matyushkin, Keith Laurence Comendant, John Patrick Holland
  • Patent number: 11661654
    Abstract: A gas delivery system includes a 2-port valve including a first valve located between a first port and a second port. A 4-port valve includes a first node connected to a first port and a second port. A bypass path is located between the third port and the fourth port. A second node is located along the bypass path. A second valve is located between the first node and the second node. A manifold block defines gas flow channels configured to connect the first port of the 4-port valve to a first inlet, configured to connect the second port of the 4-port valve to the first port of the 2-port valve, the third port of the 4-port valve to a second inlet, the second port of the 2-port valve to a first outlet, and the fourth port of the 4-port valve to a second outlet.
    Type: Grant
    Filed: April 18, 2018
    Date of Patent: May 30, 2023
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Ramesh Chandrasekharan, Antonio Xavier, Frank Loren Pasquale, Ryan Blaquiere, Jennifer Leigh Petraglia, Meenakshi Mamunuru
  • Patent number: 11655556
    Abstract: An apparatus for electroplating a semiconductor wafer includes an insert member configured to circumscribe a processing region. The insert member has a top surface. A portion of the top surface of the insert member has an upward slope that slopes upward from a peripheral area of the top surface of the insert member toward the processing region. The apparatus also includes a seal member having an annular-disk shape. The seal member is positioned on the top surface of the insert member. The seal member is flexible such that an outer radial portion of the seal member conforms to the upward slope of the top surface of the insert member and such that an inner radial portion of the seal member projects inward toward the processing region.
    Type: Grant
    Filed: April 6, 2020
    Date of Patent: May 23, 2023
    Assignee: Lam Research Corporation
    Inventors: Aaron Berke, Stephen J. Banik, Bryan Buckalew, Robert Rash
  • Patent number: 11654612
    Abstract: A method or apparatus for three-dimensionally printing. The method may comprise causing a phase change in a region of the first material by applying focused energy to the region using a focused energy source, and displacing the first material with a second material. The apparatus may comprise a container configured to hold a first material, a focused energy source configured to cause a phase change in a region of the first material by applying focused energy to the region, and an injector configured to displace the first material with a second material. The first material may comprise a yield stress material, which is a material exhibiting Herschel-Bulkley behavior. The yield stress material may comprise a soft granular gel. The second material may comprise one or more cells.
    Type: Grant
    Filed: November 5, 2021
    Date of Patent: May 23, 2023
    Assignees: University of Florida Research Foundation, Inc., Georgia Tech Research Corporation
    Inventors: Alberto Fernandez-Nieves, Thomas Ettor Angelini, Ya-Wen Chang, Samantha M. Marquez
  • Patent number: 11654137
    Abstract: Compositions and methods for inhibiting histone lysine demethylases are provided. Several new DFP-based KDM inhibitors which alter the velocity of HP1-mediated heterochromatin gene repression are provided.
    Type: Grant
    Filed: March 20, 2019
    Date of Patent: May 23, 2023
    Assignee: Georgia Tech Research Corporation
    Inventors: Adegboyega K. Oyelere, Verjine Khodaverdian, Subhasish Tapadar
  • Patent number: 11658331
    Abstract: Lithium-ion batteries are provided that variously comprise anode and cathode electrodes, an electrolyte, a separator, and, in some designs, a protective layer. In some designs, at least one of the electrodes may comprise a composite of (i) Li2S and (ii) conductive carbon that is embedded in the core of the composite. In some designs, the protective layer may be disposed on at least one of the electrodes via electrolyte decomposition. Various methods of fabrication for lithium-ion battery electrodes and particles are also provided.
    Type: Grant
    Filed: January 31, 2022
    Date of Patent: May 23, 2023
    Assignees: SILA NANOTECHNOLOGIES, INC., GEORGIA TECH RESEARCH CORPORATION
    Inventors: Gleb Yushin, Feixiang Wu, Hyea Kim
  • Patent number: 11655535
    Abstract: The invention relates to a device for pulsed laser deposition and a substrate with a substrate surface, which device includes: a substrate holder for holding the substrate; a target arranged facing the substrate surface of the substrate; a velocity filter arranged between the substrate and the target; a pulsed laser directed onto the target at a target spot for generating a plasma plume of target material; and a plasma hole plate arranged between the target and the substrate. The plasma hole plate has a plasma passage opening divided in an upstream section and a downstream section by a dividing plane. The target spot coincides with the dividing plane, and the surface area of the upstream section is larger than the surface area of the downstream section.
    Type: Grant
    Filed: June 25, 2019
    Date of Patent: May 23, 2023
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Jan Arnaud Janssens, Jan Matthijn Dekkers, Kristiaan Hendrikus Aloysius Böhm, Willem Cornelis Lambert Hopman, Jeroen Aaldert Heuver
  • Patent number: 11651963
    Abstract: A method for forming features over a wafer with a carbon based deposition is provided. The carbon based deposition is pretuned, wherein the pretuning causes a non-uniform removal of some of the carbon based deposition. An oxide deposition is deposited through an atomic layer deposition process, wherein the depositing the oxide deposition causes a non-uniform removal of some of the carbon based deposition. At least one additional process is provided, wherein the at least one additional process completes formation of features over the wafer, wherein the features are more uniform than features that would be formed without pretuning.
    Type: Grant
    Filed: March 17, 2021
    Date of Patent: May 16, 2023
    Assignee: Lam Research Corporation
    Inventors: Ishtak Karim, Pulkit Agarwal, Joseph R. Abel, Purushottam Kumar, Adrien Lavoie
  • Patent number: 11650149
    Abstract: Disclosed herein are systems and methods for imaging cells. Quantitative phase imaging uses variations in the index of refraction of a sample as a source of endogenous contrast, providing label-free information of sub-cellular structures and allowing for the reconstruction of valuable biophysical parameters, such as cell dry-mass at femtogram scales, mass transport, and sample thickness and fluctuations at nanometer scales. As a result, QPI has become a valuable tool in biology and medicine. However, QPI has suffered from the need for trans-illumination through relatively thin objects in order to gain access to the forward-scattered field, which carries crucial low spatial frequency information of a sample and avoid contributions from multiple scattered light or out-of-focus planes. The disclosed methods and systems can provide for reconstruction of QPI and corresponding analysis for imaging samples of cells in thick samples using an epi-illumination configuration.
    Type: Grant
    Filed: March 26, 2019
    Date of Patent: May 16, 2023
    Assignee: Georgia Tech Research Corporation
    Inventors: Francisco Robles, Patrick Ledwig
  • Patent number: 11651991
    Abstract: A wafer support structure in a chamber of a semiconductor manufacturing apparatus is provided. The wafer support structure includes a dielectric block having a bottom surface and a top surface supports a wafer when present. The wafer support structure includes a baseplate for supporting the dielectric block. The wafer support structure includes a first electrode embedded in an upper part of the dielectric block. The first electrode is proximate and below the top surface of the dielectric block. A top surface of the first electrode is substantially parallel to the top surface of the dielectric block. The first electrode is configured for connection to a direct current (DC) power source. The wafer support structure includes a second electrode embedded in the dielectric block. The wafer support structure includes a second electrode disposed below the first electrode and a separation distance is defined between the first electrode and the second electrode within the dielectric block.
    Type: Grant
    Filed: May 28, 2021
    Date of Patent: May 16, 2023
    Assignee: Lam Research Corporation
    Inventors: Alexander Matyushkin, Alexei Marakhtanov, John Patrick Holland, Keith Gaff, Felix Kozakevich
  • Patent number: D986825
    Type: Grant
    Filed: November 14, 2019
    Date of Patent: May 23, 2023
    Assignee: Lam Research Corporation
    Inventors: Jeremiah Baldwin, Sudarshan Manjunath, Samuel Jacob Monroe