Patents Assigned to Research Corporation
  • Linear quadrupole ion trap mass analyzer
    Patent number: 11764051
    Abstract: An ion trap (100) includes a first electrode pair (110) and a second electrode pair (130), each including a first conductive member (112) and a second conductive member (120) and facing each other so that the first conductive member (112) of the first electrode pair (110) is on a common plane with the second conductive member (120) of the second electrode pair (130) and so that the second conductive member (120) of the first electrode pair (110) is on a common plane with the first conductive member (112) of the second electrode pair (130), a gap (132) therebetween. A signal generator (210) generates a periodic signal (212) applied to the first conductive members (112). A phase shifter (216) generates a second periodic signal (218) that is 180 out of phase therewith applied to the second conductive members (120). Ions are trapped by a resulting electric field.
    Type: Grant
    Filed: April 1, 2020
    Date of Patent: September 19, 2023
    Assignee: Georgia Tech Research Corporation
    Inventors: Wade Rellergert, Robert Clark, Harley Hayden, Brian Sawyer
  • Wafer transport assembly with integrated buffers
    Patent number: 11764086
    Abstract: A substrate processing system configured to process substrates includes a substrate transport assembly that encloses a controlled environment defined within a continuous transport volume and at least two process modules coupled to the substrate transport assembly. The substrate transport assembly is configured to transport substrates to and from the at least two process modules through the continuous transport volume. At least two gas boxes are configured to deliver gas mixtures to the at least two process modules. An exhaust duct configured to selectively evacuate the at least two process modules through the at least two gas boxes. Surfaces of the at least two gas boxes include perforations configured to allow gases to flow from the at least two gas boxes into the exhaust duct.
    Type: Grant
    Filed: July 8, 2022
    Date of Patent: September 19, 2023
    Assignee: LAM RESEARCH CORPORATION
    Inventors: David Trussell, John Daugherty, Christopher J. Pena, Michael C. Kellogg, Klay Kunkel, Richard H. Gould
  • Systems, methods and devices for gesture recognition
    Patent number: 11762474
    Abstract: A method including receiving sound data captured by a wearable device of the user, the sound data indicative of contact between a first portion of the user wearing the wearable device and a second portion of the user wearing the wearable device; receiving motion data captured by the wearable device of the user, the motion data indicative of at least a movement of the first portion of the user wearing the wearable device; and determining, by a processor, based at least in part on the sound data and the motion data, a user input associated with the contact between a first portion of the user wearing the wearable device and a second portion of the user wearing the wearable device and the movement of the first portion of the user wearing the wearable device.
    Type: Grant
    Filed: September 6, 2018
    Date of Patent: September 19, 2023
    Assignee: Georgia Tech Research Corporation
    Inventors: Cheng Zhang, Gregory D. Abowd, Omer Inan, Pranav Kundra, Thomas Ploetz, Yiming Pu, Thad Eugene Starner, Anandghan Waghmare, Xiaoxuan Wang, Kenneth A. Cunnefare, Qiuyue Xue
  • Oxidation resistant protective layer in chamber conditioning
    Patent number: 11761079
    Abstract: In some examples, a method for conditioning a wafer processing chamber comprises setting a pressure in the chamber to a predetermined pressure range, setting a temperature of the chamber to a predetermined temperature, and supplying a process gas mixture to a gas distribution device within the chamber. A plasma is struck within the chamber and a condition in the chamber is monitored. Based on a detection of the monitored condition meeting or transgressing a threshold value, a chamber conditioning operation is implemented. The chamber conditioning operation may include depositing a preconditioning film onto an internal surface of the chamber, depositing a silicon oxycarbide (SiCO) film onto the preconditioning film, and depositing a protective layer onto the SiCO film.
    Type: Grant
    Filed: December 6, 2018
    Date of Patent: September 19, 2023
    Assignee: Lam Research Corporation
    Inventors: Fengyuan Lai, Bo Gong, Guangbi Yuan, Chen-Hua Hsu, Bhadri Varadarajan
  • Mesofluidic device for culture of cell aggregates
    Patent number: 11760965
    Abstract: Mesofluidic devices for culturing cell aggregates and methods of using the same are disclosed. An exemplary mesofluidic device comprises at least one fluid inlet, at least one fluid outlet, a plurality of fluid channels, and a plurality of culture chambers. Each culture chamber can comprise at least one chamber inlet and at least one chamber outlet. The at least one chamber inlet can be in fluid communication with the at least one fluid inlet via at least one of the plurality of fluid channels. The at least one chamber outlet can be in fluid communication with the at least one fluid outlet via at least one of the plurality of fluid channels. The mesofluidic device can be configured to contain a cell aggregate in each of the plurality of culture chambers.
    Type: Grant
    Filed: October 19, 2018
    Date of Patent: September 19, 2023
    Assignees: Georgia Tech Research Corporation, Emory University
    Inventors: Emily Jackson-Holmes, Hang Lu, Zhexing Wen
  • Tunable upper plasma-exclusion-zone ring for a bevel etcher
    Patent number: 11756771
    Abstract: A tunable upper plasma exclusion zone (PEZ) ring adjusts a distance of plasma during processing in a processing chamber and includes: a lower surface that includes: a horizontal portion; and an upwardly tapered outer portion that is conical and that extends outwardly and upwardly from the horizontal portion at an upward taper angle of about 5° to 50° with respect to the horizontal portion, where an outer diameter of the upwardly tapered outer portion is greater than 300 millimeters (mm), and where an inner diameter where the upwardly tapered outer portion begins to extend upwardly is less than 300 mm. A controller is to, during processing of a 300 mm circular substrate, adjust the distance of plasma for treatment of the 300 mm circular substrate at least one of radially inward and radially outward using the tunable upper PEZ ring.
    Type: Grant
    Filed: January 29, 2021
    Date of Patent: September 12, 2023
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Jack Chen, Adam Liron, Gregory Sexton
  • Methods for generating functional therapeutic B cells ex-vivo
    Patent number: 11753624
    Abstract: The various embodiments of the disclosure relate generally to processes, methods, and systems for generating functional B cells ex vivo. It is particularly useful for ex vivo generation of antigen-specific germinal-center (GC) like B cells that are capable of efficient B cell expansion, immunoglobulin (Ig) class switching/class switching recombination (CSR), expression of germinal B cell phenotypes, antibody secretion, and somatic hypermutation (SHM) and resulting affinity maturation center phenotypes.
    Type: Grant
    Filed: October 6, 2016
    Date of Patent: September 12, 2023
    Assignee: Georgia Tech Research Corporation
    Inventors: Krishnendu Roy, Kyung-Ho Roh
  • Substrate-compatible inductors with magnetic layers
    Patent number: 11756985
    Abstract: An exemplary embodiment of the present invention provides a planar inductor including a substrate, a first magnetic layer, a conductive coil, and a second magnetic layer. The first magnetic layer can be disposed on at least a portion of the substrate. The conductive coil can be disposed on a first portion of the first magnetic layer. The second magnetic layer can be disposed on a second portion of the first magnetic layer and on at least a portion of the conductive coil.
    Type: Grant
    Filed: November 16, 2017
    Date of Patent: September 12, 2023
    Assignees: Georgia Tech Research Corporation, NITTO DENKO CORPORATION
    Inventors: Markondeya Raj Pulugurtha, Yoshihiro Furukawa, Himani Sharma, Keiji Takemura, Rao R. Tummala, Teng Sun
  • Removing bubbles from plating cells
    Patent number: 11746435
    Abstract: An electroplating apparatus includes an electrode at the bottom of a chamber, an ionically resistive element with through holes arranged horizontally at the top of the chamber, with a membrane in the middle. One or more panels extend vertically and parallelly from the membrane to the element and extend linearly across the chamber, forming a plurality of regions between the membrane and the element. A substrate with a protuberance extending along a chord of the substrate and contacting a top surface of the element is arranged above a first region. An electrolyte flowed between the substrate and the element descends into the first region via the through holes on a first side of the protuberance and ascends from the first region via the through holes on a second side of the protuberance, forcing air bubbles out from a portion of the element associated with the first region.
    Type: Grant
    Filed: December 23, 2021
    Date of Patent: September 5, 2023
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Stephen J. Banik, Bryan L. Buckalew, Gabriel Hay Graham, Alfred Bostick, Sean Wilbur, John Floyd Ostrowski
  • Systems and methods for characterizing poroelastic materials
    Patent number: 11747251
    Abstract: Disclosed herein are systems and methods for characterizing poroelastic materials. Indentation of a poroelastic solid by a spherical-tip tool is analyzed within the framework of Biot's theory. The present disclosure provides the response of the indentation force as well as the field variables as functions of time when the rigid indenter is loaded instantaneously to a fixed depth. Some embodiments of the present disclosure consider the particular case when the surface of the semi-infinite domain is permeable and under a drained condition. Compressibility of both the fluid and solid phases is taken into account. The solution procedure based on the McNamee-Gibson displacement function method is adopted.
    Type: Grant
    Filed: April 17, 2019
    Date of Patent: September 5, 2023
    Assignee: Georgia Tech Research Corporation
    Inventors: Haiying Huang, Ming Liu
  • Directional deposition in etch chamber
    Patent number: 11742212
    Abstract: Methods for forming a vertical growth mask for use in etching applications are described herein. Disclosed embodiments include introducing a tungsten-containing deposition precursor and one or more carrier gases while igniting a plasma to deposit tungsten selectively on field regions of positive features of a patterned etch mask without substantial deposition on sidewalls of the positive features or on an exposed surface of a target layer underlying the patterned etch mask.
    Type: Grant
    Filed: October 29, 2019
    Date of Patent: August 29, 2023
    Assignee: Lam Research Corporation
    Inventors: Zhongkui Tan, Lisi Xie, Yoko Yamaguchi, Yasushi Ishikawa, Patrick Ponath, Sung Jin Jung, Sangjun Park, Wonchul Lee, Jayoung Choi
  • Auto-calibration to a station of a process module that spins a wafer
    Patent number: 11742229
    Abstract: A method for calibration including determining a temperature induced offset in a pedestal of a process module under a temperature condition for a process. The method includes delivering a wafer to the pedestal of the process module by a robot, and detecting an entry offset. The method includes rotating the wafer over the pedestal by an angle. The method includes removing the wafer from the pedestal by the robot and measuring an exit offset. The method includes determining a magnitude and direction of the temperature induced offset using the entry offset and exit offset.
    Type: Grant
    Filed: December 16, 2021
    Date of Patent: August 29, 2023
    Assignee: Lam Research Corporation
    Inventors: Jacob L. Hiester, Richard Blank, Peter Thaulad, Paul Konkola
  • Image Processing in Foggy Environments
    Publication number: 20230266239
    Abstract: A system and method for exploiting spectral absorption properties of water is disclosed. The system and method use spectral absorption properties of water to improve Short Wave InfraRed (SWIR) sensor (camera) performance in the presence of clouds. This is achieved partly by limiting the spectral passband of a sensor to a water absorption band, thereby improving Signal to Noise Ratio (SNR). Higher SNR permits improved CSO resolution. Further, higher SNR reduces the uncertainty in matching observations in one sensor to the epipolar lines of another sensor thus reducing the time needed to achieve unambiguous matches.
    Type: Application
    Filed: February 18, 2022
    Publication date: August 24, 2023
    Applicant: Bevilacqua Research Corporation, Inc
    Inventor: Robert Pilgrim
  • NEURAL NETWORK TRAINING
    Publication number: 20230267719
    Abstract: A deep neural network (DNN) can be trained based on a first training dataset that includes first images including annotated first objects. The DNN can be tested based on the first training dataset to determine first object predictions including first uncertainties. The DNN can be tested by inputting a second training dataset and outputting first object predictions including second uncertainties, wherein the second training dataset includes second images including unannotated second objects. A subset of images included in the second training dataset can be selected based on the second uncertainties, The second objects in the selected subset of images included in the second training dataset can be annotated. The DNN can be trained based on the selected subset of images included in the second training dataset including the annotated second objects.
    Type: Application
    Filed: February 21, 2022
    Publication date: August 24, 2023
    Applicants: Ford Global Technologies, LLC, GEORGIA TECH RESEARCH CORPORATION
    Inventors: Mostafa Parchami, Enrique Corona, Ghassan AlRegib, Mohit Prabhushankar, Ryan Benkert
  • Particles for targeted delivery and uses in managing bleeding or blood clotting
    Patent number: 11730701
    Abstract: This disclosure relates to microcapsule particles for targeted delivery of drugs. In certain embodiments, the particles comprise polyelectrolyte polymers, e.g., layers of anionic polymers and cationic polymers. In certain embodiments, the particles have a fibrinogen coating. In certain embodiments, the particles contain a polysaccharide core and/or a polysaccharide coating encapsulating drugs, proteins, clotting agents, coagulation factors, or anticoagulants. In certain embodiments, this disclosure contemplates methods of using particles disclosed herein to prevent or reduce onset of or duration of bleeding. In certain embodiments, this disclosure contemplates methods of using particles disclosed herein to prevent or reduce onset of blood clotting.
    Type: Grant
    Filed: September 23, 2022
    Date of Patent: August 22, 2023
    Assignees: Emory University, Georgia Tech Research Corporation, Chapman University, Children's Healthcare of Atlanta, Inc.
    Inventors: Wilbur A. Lam, Caroline Hansen, Yumiko Sakurai, Andrew Lyon
  • Separable microneedle arrays for sustained release of drug
    Patent number: 11730937
    Abstract: Separable microneedle arrays and microneedle patches are provided that may achieve sustained release of drug. The microneedle arrays may include one or more features that facilitate separation of the microneedles, such as a bubble structure. The microneedle arrays may include an effervescent material.
    Type: Grant
    Filed: October 11, 2018
    Date of Patent: August 22, 2023
    Assignee: Georgia Tech Research Corporation
    Inventors: Mark R. Prausnitz, Richard N. Terry, Wei Li
  • MULTI-MODE MICROCURRENT STIMULUS SYSTEM AND ASSOCIATED METHODS
    Publication number: 20230256242
    Abstract: Methods of applying microcurrent stimulation to a subject may include providing a mask supplying at a minimum moisture to a region to be treated, applying a first electrode connected to a first polarity of microcurrent stimulation circuitry to the mask, applying a second electrode connected to a second polarity of the microcurrent stimulation circuitry to the subject outside of the mask, and providing microcurrent to the first electrode and the second electrode from the microcurrent stimulation circuitry. The method may further include inserting feet of the subject into a liquid having a minimum conductivity of 5 mS/m and vibrating the liquid.
    Type: Application
    Filed: March 16, 2023
    Publication date: August 17, 2023
    Applicant: Tama Research Corporation
    Inventor: Tina ABNOOSI
  • CYBERSECURITY SYSTEMS AND METHODS FOR PROTECTING, DETECTING, AND REMEDIATING CRITICAL APPLICATION SECURITY ATTACKS
    Publication number: 20230262077
    Abstract: The present invention includes systems and methods for providing cybersecurity to web-enabled applications for protection of critical software and host systems. The present invention is operable to build a Hidden Markov model of an application using automated analysis of code and documentation in order to characterize potential state and state transitions. The present invention is also operable to use additional data such as timing and proximity to assess incoming data. Incoming messages are then assigned a trust score based on Bayesian calculations.
    Type: Application
    Filed: November 8, 2022
    Publication date: August 17, 2023
    Applicant: CFD Research Corporation
    Inventor: Brian Gene Palmer
  • Preventing deposition on pedestal in semiconductor substrate processing
    Patent number: 11725285
    Abstract: A heat shield structure for a substrate support in a substrate processing system includes an outer shield configured to surround a stem of the substrate support. The outer shield is further configured to define an inner volume between the outer shield and an upper portion of the stem and a lower surface of the substrate support and a vertical channel between the outer shield and a lower portion of the stem of the substrate support. The outer shield includes a cylindrical portion, a first lateral portion extending radially outward from the cylindrical portion, an angled portion extending radially outward and upward from the first lateral portion, and a second lateral portion extending radially outward from the angled portion.
    Type: Grant
    Filed: July 25, 2019
    Date of Patent: August 15, 2023
    Assignee: Lam Research Corporation
    Inventors: Vinayakaraddy Gulabal, Ravi Vellanki, Gary B. Lind, Michael Rumer, Manjunath Satyadevan
  • Specimen collection tube
    Patent number: D999400
    Type: Grant
    Filed: March 5, 2021
    Date of Patent: September 19, 2023
    Assignee: ZYMO RESEARCH CORPORATION
    Inventors: Marc E. Van Eden, Stanislav Forman, Ian Forsythe