Patents Assigned to Research Corporation
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Patent number: 11746435Abstract: An electroplating apparatus includes an electrode at the bottom of a chamber, an ionically resistive element with through holes arranged horizontally at the top of the chamber, with a membrane in the middle. One or more panels extend vertically and parallelly from the membrane to the element and extend linearly across the chamber, forming a plurality of regions between the membrane and the element. A substrate with a protuberance extending along a chord of the substrate and contacting a top surface of the element is arranged above a first region. An electrolyte flowed between the substrate and the element descends into the first region via the through holes on a first side of the protuberance and ascends from the first region via the through holes on a second side of the protuberance, forcing air bubbles out from a portion of the element associated with the first region.Type: GrantFiled: December 23, 2021Date of Patent: September 5, 2023Assignee: LAM RESEARCH CORPORATIONInventors: Stephen J. Banik, Bryan L. Buckalew, Gabriel Hay Graham, Alfred Bostick, Sean Wilbur, John Floyd Ostrowski
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Patent number: 11747251Abstract: Disclosed herein are systems and methods for characterizing poroelastic materials. Indentation of a poroelastic solid by a spherical-tip tool is analyzed within the framework of Biot's theory. The present disclosure provides the response of the indentation force as well as the field variables as functions of time when the rigid indenter is loaded instantaneously to a fixed depth. Some embodiments of the present disclosure consider the particular case when the surface of the semi-infinite domain is permeable and under a drained condition. Compressibility of both the fluid and solid phases is taken into account. The solution procedure based on the McNamee-Gibson displacement function method is adopted.Type: GrantFiled: April 17, 2019Date of Patent: September 5, 2023Assignee: Georgia Tech Research CorporationInventors: Haiying Huang, Ming Liu
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Patent number: 11742212Abstract: Methods for forming a vertical growth mask for use in etching applications are described herein. Disclosed embodiments include introducing a tungsten-containing deposition precursor and one or more carrier gases while igniting a plasma to deposit tungsten selectively on field regions of positive features of a patterned etch mask without substantial deposition on sidewalls of the positive features or on an exposed surface of a target layer underlying the patterned etch mask.Type: GrantFiled: October 29, 2019Date of Patent: August 29, 2023Assignee: Lam Research CorporationInventors: Zhongkui Tan, Lisi Xie, Yoko Yamaguchi, Yasushi Ishikawa, Patrick Ponath, Sung Jin Jung, Sangjun Park, Wonchul Lee, Jayoung Choi
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Patent number: 11742229Abstract: A method for calibration including determining a temperature induced offset in a pedestal of a process module under a temperature condition for a process. The method includes delivering a wafer to the pedestal of the process module by a robot, and detecting an entry offset. The method includes rotating the wafer over the pedestal by an angle. The method includes removing the wafer from the pedestal by the robot and measuring an exit offset. The method includes determining a magnitude and direction of the temperature induced offset using the entry offset and exit offset.Type: GrantFiled: December 16, 2021Date of Patent: August 29, 2023Assignee: Lam Research CorporationInventors: Jacob L. Hiester, Richard Blank, Peter Thaulad, Paul Konkola
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Publication number: 20230266239Abstract: A system and method for exploiting spectral absorption properties of water is disclosed. The system and method use spectral absorption properties of water to improve Short Wave InfraRed (SWIR) sensor (camera) performance in the presence of clouds. This is achieved partly by limiting the spectral passband of a sensor to a water absorption band, thereby improving Signal to Noise Ratio (SNR). Higher SNR permits improved CSO resolution. Further, higher SNR reduces the uncertainty in matching observations in one sensor to the epipolar lines of another sensor thus reducing the time needed to achieve unambiguous matches.Type: ApplicationFiled: February 18, 2022Publication date: August 24, 2023Applicant: Bevilacqua Research Corporation, IncInventor: Robert Pilgrim
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Publication number: 20230267719Abstract: A deep neural network (DNN) can be trained based on a first training dataset that includes first images including annotated first objects. The DNN can be tested based on the first training dataset to determine first object predictions including first uncertainties. The DNN can be tested by inputting a second training dataset and outputting first object predictions including second uncertainties, wherein the second training dataset includes second images including unannotated second objects. A subset of images included in the second training dataset can be selected based on the second uncertainties, The second objects in the selected subset of images included in the second training dataset can be annotated. The DNN can be trained based on the selected subset of images included in the second training dataset including the annotated second objects.Type: ApplicationFiled: February 21, 2022Publication date: August 24, 2023Applicants: Ford Global Technologies, LLC, GEORGIA TECH RESEARCH CORPORATIONInventors: Mostafa Parchami, Enrique Corona, Ghassan AlRegib, Mohit Prabhushankar, Ryan Benkert
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Patent number: 11730701Abstract: This disclosure relates to microcapsule particles for targeted delivery of drugs. In certain embodiments, the particles comprise polyelectrolyte polymers, e.g., layers of anionic polymers and cationic polymers. In certain embodiments, the particles have a fibrinogen coating. In certain embodiments, the particles contain a polysaccharide core and/or a polysaccharide coating encapsulating drugs, proteins, clotting agents, coagulation factors, or anticoagulants. In certain embodiments, this disclosure contemplates methods of using particles disclosed herein to prevent or reduce onset of or duration of bleeding. In certain embodiments, this disclosure contemplates methods of using particles disclosed herein to prevent or reduce onset of blood clotting.Type: GrantFiled: September 23, 2022Date of Patent: August 22, 2023Assignees: Emory University, Georgia Tech Research Corporation, Chapman University, Children's Healthcare of Atlanta, Inc.Inventors: Wilbur A. Lam, Caroline Hansen, Yumiko Sakurai, Andrew Lyon
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Patent number: 11730937Abstract: Separable microneedle arrays and microneedle patches are provided that may achieve sustained release of drug. The microneedle arrays may include one or more features that facilitate separation of the microneedles, such as a bubble structure. The microneedle arrays may include an effervescent material.Type: GrantFiled: October 11, 2018Date of Patent: August 22, 2023Assignee: Georgia Tech Research CorporationInventors: Mark R. Prausnitz, Richard N. Terry, Wei Li
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Publication number: 20230256242Abstract: Methods of applying microcurrent stimulation to a subject may include providing a mask supplying at a minimum moisture to a region to be treated, applying a first electrode connected to a first polarity of microcurrent stimulation circuitry to the mask, applying a second electrode connected to a second polarity of the microcurrent stimulation circuitry to the subject outside of the mask, and providing microcurrent to the first electrode and the second electrode from the microcurrent stimulation circuitry. The method may further include inserting feet of the subject into a liquid having a minimum conductivity of 5 mS/m and vibrating the liquid.Type: ApplicationFiled: March 16, 2023Publication date: August 17, 2023Applicant: Tama Research CorporationInventor: Tina ABNOOSI
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Publication number: 20230262077Abstract: The present invention includes systems and methods for providing cybersecurity to web-enabled applications for protection of critical software and host systems. The present invention is operable to build a Hidden Markov model of an application using automated analysis of code and documentation in order to characterize potential state and state transitions. The present invention is also operable to use additional data such as timing and proximity to assess incoming data. Incoming messages are then assigned a trust score based on Bayesian calculations.Type: ApplicationFiled: November 8, 2022Publication date: August 17, 2023Applicant: CFD Research CorporationInventor: Brian Gene Palmer
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Patent number: 11725285Abstract: A heat shield structure for a substrate support in a substrate processing system includes an outer shield configured to surround a stem of the substrate support. The outer shield is further configured to define an inner volume between the outer shield and an upper portion of the stem and a lower surface of the substrate support and a vertical channel between the outer shield and a lower portion of the stem of the substrate support. The outer shield includes a cylindrical portion, a first lateral portion extending radially outward from the cylindrical portion, an angled portion extending radially outward and upward from the first lateral portion, and a second lateral portion extending radially outward from the angled portion.Type: GrantFiled: July 25, 2019Date of Patent: August 15, 2023Assignee: Lam Research CorporationInventors: Vinayakaraddy Gulabal, Ravi Vellanki, Gary B. Lind, Michael Rumer, Manjunath Satyadevan
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Patent number: 11728137Abstract: A drive circuit for providing RF power to a component of a substrate processing system includes a plasma source operating at a first frequency. A load includes the component of the substrate processing system. An impedance network connects the plasma source to the load. A current sensor senses current at an output of the plasma source. A voltage sensor senses voltage at the output of the plasma source. A controller includes a tuned frequency calculator configured to calculate a tuned frequency for the plasma source based on the voltage, the current, and a configuration of the impedance network and to adjust the first frequency based on the tuned frequency.Type: GrantFiled: August 8, 2019Date of Patent: August 15, 2023Assignee: Lam Research CorporationInventors: Yuhou Wang, Maolin Long, Ying Wu, Alexander Miller Paterson
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Patent number: 11728136Abstract: A system and method for generating a radio frequency (RF) waveform are described. The method includes defining a train of on-off pulses separated by an off state having no on-off pulses. The method further includes applying a multi-level pulse waveform that adjusts a magnitude of each of the on-off pulses to generate an RF waveform. The method includes sending the RF waveform to an electrode.Type: GrantFiled: April 26, 2022Date of Patent: August 15, 2023Assignee: Lam Research CorporationInventors: Maolin Long, Yuhou Wang, Ying Wu, Alex Paterson
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Patent number: 11725283Abstract: A plasma processing system is provided. The system includes a chamber, a controller and a showerhead disposed in the chamber. A first gas manifold is connected to the showerhead for providing a first gas from a first gas source responsive to control from the controller. A shower-pedestal is disposed in the chamber and oriented opposite the showerhead. A second gas manifold is connected to the shower-pedestal for providing a second gas from a second gas source responsive to control from the controller. A substrate support for holding a substrate at a spaced apart relationship from the shower-pedestal is provided. A radio frequency (RF) power supply for providing power to the showerhead to generate a plasma is provided. The plasma is used for depositing a film on a back-side of the substrate, when present in the chamber. The substrate is held by the substrate support in the spaced apart relationship from the shower-pedestal, during backside deposition.Type: GrantFiled: December 16, 2021Date of Patent: August 15, 2023Assignee: Lam Research CorporationInventors: Fayaz Shaikh, Nick Linebarger, Curtis Bailey
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Patent number: 11724079Abstract: A microneedle array is provided for administrating a drug or other substance into a biological tissue. The array includes a base substrate; a primary funnel portion extending from one side of the base substrate; and two or more solid microneedles extending from the primary funnel portion, wherein the two or more microneedles comprise the substance of interest. Methods for making an array of microneedles are also provided. The method may include providing a non-porous and gas-permeable mold having a two or more cavities each of which defines a microneedle; filling the cavities with a fluid material which includes a substance of interest and a liquid vehicle; drying the fluid material to remove at least a portion of the liquid vehicle and form a plurality of microneedles that include the substance of interest, wherein the filling is conducted with a pressure differential applied between opposed surfaces of the mold.Type: GrantFiled: October 1, 2020Date of Patent: August 15, 2023Assignee: Georgia Tech Research CorporationInventors: Devin McAllister, Mark R. Prausnitz, Sebastien Henry, Xin Dong Guo
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Patent number: 11719780Abstract: A practically implementable robust direction-of-arrival (DoA) estimation approach that is resistant to localization errors due to mobility, multipath reflections, impulsive noise, and multiple-access interference. As part of the disclosed invention the inventors consider infrastructure-less 3D localization of autonomous underwater vehicles (AUVs) with no GPS assistance and no availability of global clock synchronization. The proposed method can be extended to challenging communication environments and applied for the localization of assets/objects in space, underground, intrabody, underwater and other complex, challenging, congested and sometimes contested environments. Each AUV leverages known-location beacon signals to self-localize and can simultaneously report its sensor data and measurement location.Type: GrantFiled: August 28, 2020Date of Patent: August 8, 2023Assignee: FLORIDA ATLANTIC UNIVERSITY RESEARCH CORPORATIONInventors: Dimitris A. Pados, Konstantinos Tountas, Georgios Sklivanitis
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Patent number: 11717866Abstract: Various embodiments include methods and chemistries to etch metal-oxide films. In one embodiment, a method of etching tin oxide (SnO2) films includes using thionyl chloride (SOCl2) chemistry to produce an etch rate of the SnO2 films of up to 10-times higher as compared with Cl2 chemistry for similar flow-rates and process conditions, and gettering oxygen species from the SnO2 films by using the SOCl2, thereby forming volatile SO2 and volatile SnCl4 to provide human safety and machine safety and operations. Other methods, chemistries, and techniques are disclosed.Type: GrantFiled: May 6, 2022Date of Patent: August 8, 2023Assignee: Lam Research CorporationInventors: Akhil N. Singhal, Dustin Zachary Austin, Alon Ganany, Daniel Boatright
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Patent number: 11721558Abstract: Methods for evaluating synergy of modification and removal operations for a wide variety of materials to determine process conditions for self-limiting etching by atomic layer etching are provided herein. Methods include determining the surface binding energy of the material, selecting a modification gas for the material where process conditions for modifying a surface of the material generate energy less than the modification energy and greater than the desorption energy, selecting a removal gas where process conditions for removing the modified surface generate energy greater than the desorption energy to remove the modified surface but less than the surface binding energy of the material to prevent sputtering, and calculating synergy to maximize the process window for atomic layer etching.Type: GrantFiled: December 6, 2021Date of Patent: August 8, 2023Assignee: Lam Research CorporationInventor: Keren Jacobs Kanarik
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Publication number: 20230242623Abstract: Compositions that selectively bind to coronaviruses, including but not limited to SARS-COV-2 and methods of use thereof are provided. The disclosed antibodies and antigen-binding fragments were developed against SARS-CoV-2. The antibodies bind to the spike protein of coronaviruses. The disclosed antibodies are useful for diagnosing, detecting, preventing, and treating coronavirus infections.Type: ApplicationFiled: July 8, 2021Publication date: August 3, 2023Applicants: GEORGIA TECH RESEARCH CORPORATION, THE USA, AS REPRESENTED BY THE SECRETARY, DEPT. OF HEALTH AND HUMAN SERVICESInventors: M.G. FINN, Asheley CHAPMAN, Jason GOLDSTEIN, Liangjun ZHAO, Dennis Anthony BAGAROZZI, Jr., Asiya Seema CHIDA
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Patent number: 11715825Abstract: Described herein are improved composite anodes and lithium-ion batteries made therefrom. Further described are methods of making and using the improved anodes and batteries. In general, the anodes include a porous composite having a plurality of agglomerated nanocomposites. At least one of the plurality of agglomerated nanocomposites is formed from a dendritic particle, which is a three-dimensional, randomly-ordered assembly of nanoparticles of an electrically conducting material and a plurality of discrete non-porous nanoparticles of a non-carbon Group 4A element or mixture thereof disposed on a surface of the dendritic particle. At least one nanocomposite of the plurality of agglomerated nanocomposites has at least a portion of its dendritic particle in electrical communication with at least a portion of a dendritic particle of an adjacent nanocomposite in the plurality of agglomerated nanocomposites.Type: GrantFiled: February 8, 2022Date of Patent: August 1, 2023Assignee: GEORGIA TECH RESEARCH CORPORATIONInventors: Gleb Yushin, Oleksandr Magazynskyy, Patrick Dixon, Benjamin Hertzberg