Abstract: An X-ray thin film inspection device of the present invention includes an X-ray irradiation unit 40 installed on a first rotation arm 32, an X-ray detector 50 installed on a second rotation arm 33, and a fluorescence X-ray detector 60 for detecting fluorescence X-rays generated from an inspection target upon irradiation of X-rays. The X-ray irradiation unit 40 includes an X-ray optical element 43 comprising a confocal mirror for receiving X-rays radiated from an X-ray tube 42, reflects plural focused X-ray beams monochromatized at a specific wavelength and focuses the plural focused X-ray beams to a preset focal point, and a slit mechanism 46 for passing therethrough any number of focused X-ray beams out of the plural focused X-ray beams reflected from the X-ray optical element 43.

Abstract: Provided is an X-ray generator having: an anode that faces a cathode which generates electrons; a plurality of X-ray generation zones; a casing housing the cathode and the anode; an anode support body for supporting the anode; an air cylinder for producing advancing and retreating movement of the anode support body with respect to the casing; and a stopper device that halts the movement of the anode support body when the anode support body moves in a direction approaching the casing. The stopper device has a rotating plate equipped with a section that enters and exits from between the anode support body and the casing due to rotation, a motor for driving the same, and a plurality of stop members provided in a peripheral section of the rotating plate and having mutually different heights.

Abstract: Only X-rays having a specific wavelength out of focusing X-rays 2 diffracted from a sample S is reflected from a monochromator 60 based on a Bragg's condition, passed through a receiving slit 30 and detected by an X-ray detector 20. The monochromator 60 is configured to be freely removable, and arranged between the sample S and a focal point 2a at which the focusing X-rays 2 diffracted from the sample S are directly focused. At this time, the monochromator 60 is approached to the focal point 2a as closely as possible. The monochromator 60 comprises a multilayer mirror having an internal interplanar spacing which varies continuously from one end to the other end.

Abstract: The X-ray analyzing apparatus according to the present invention includes, in combination: a first correcting unit (13A, 13B) to output a first gain to cause a pulse height of a target peak which is estimated on the basis of a sum of counting rates obtained in preliminary measurement, to match a predetermined expected pulse height; and a second correcting unit (14A, 14B) to output, in real time through feedback control, a second gain to be added to the first gain in order to cause the pulse height of the target peak detected within a predetermined energy range, to match the expected pulse height, and further includes a feedback control stopping unit (16A, 16B) to appropriately determine presence/absence of an interfering line with respect to the target peak, and to set, when determining that the interfering line exists, the gain to a fixed value including only the first gain.

Abstract: A thermal analysis step, a molecule ionization step and a molecular structure analysis step are executed in parallel to a temperature increasing step. In the molecule ionization step, component molecules contained in gas evolved from a sample S due to temperature increase are ionized, and in the molecular structure analysis step, any selected ion out of molecular ions obtained in the molecule ionization step is dissociated to generate fragment ions corresponding to the structural factors of the molecule, and the structure of the molecule is analyzed on the basis of the fragment ions.

Abstract: An X-ray detection signal processing device (10) and the like according to the present invention includes: a comparator (17) configured to output a High signal when a level of a signal from a continuous reset type preamplifier (13) having an CR circuit (13a) does not exceed a predetermined upper limit value, and output a Low signal when the level of the signal from the preamplifier (13) exceeds the predetermined upper limit value; and a control section (18) configured to delay shift of the signal of the comparator (17) from Low to High by a predetermined time, to perform output to a clock oscillator (15), stop oscillation by outputting a Low signal to the clock oscillator (15), and thus stop high-speed AD conversion by a high-speed AD converter (14) and maintain an output value.

Abstract: Disclosed is an X-ray topography apparatus including an X-ray source, a multilayer film mirror, a slit, a two-dimensional X-ray detector, and a sample moving device that sequentially moves the sample to a plurality of step positions. The X-ray source is a minute focal spot. The multilayer film mirror forms monochromatic, collimated, high-intensity X-rays. The direction in which the multilayer film mirror collimates the X-rays coincides with the width direction of the slit. The step size by which the sample is moved is smaller than the width of the slit. The combination of the size of the minute focal spot, the width of the slit, and the intensity of the X-rays that exit out of the multilayer film mirror allows the contrast of an X-ray image produced when the detector receives X-rays for a predetermined period of 1 minute or shorter to be high enough for observation of the X-ray image.

Abstract: An X-ray fluorescence spectrometer includes: an X-ray source (3) to irradiate, with primary X-rays (6), a sample (1) that is multiple nanoparticles placed on a substrate (10); an irradiation angle adjustment unit (5) to adjust an irradiation angle at which a surface (10a) of the substrate is irradiated; a detection unit (8) to measure an intensity of fluorescent X-rays (7) from the sample (1); a peak position calculation unit (11) to generate a sample profile representing change of the intensity of the fluorescent X-rays (7) against change of the irradiation angle, and to calculate a peak irradiation angle position; a particle diameter calibration curve generation unit (21) to generate a calibration curve; and a particle diameter calculation unit (22) to calculate a particle diameter of nanoparticles of an unknown sample (1) by applying the peak irradiation angle position of the unknown sample (1) to the calibration curve.

Abstract: An X-ray analysis apparatus for detecting, using an X-ray detector, X-rays given off by a sample when the sample is irradiated with X-rays, the X-ray analysis apparatus having replaceable components. The X-ray analysis apparatus comprises labels attached to the replaceable components and including symbols indicating the types of replaceable components, a camera for photographing the replaceable components and the labels, and CPU and image recognition software for specifying the types of replaceable components by calculation based on the symbols in the labels.

Abstract: To make a user easily obtain an objective and stable analysis result of bone mineral density. An analyzer 100 of bone mineral density using CT image data of a phantom having a known bone mineral density includes: a known data storage part 105 that stores known data of bone mineral density for a phantom; a histogram production part 102 that produces a histogram of region number relative to a CT value for three-dimensional CT image data of the phantom; a correspondence determination part 106 that determines correspondence between a CT value and a bone mineral density by correlating CT values showing respective peaks of the produced histogram with the known data of the phantom; and an analysis part 109 that decides a bone mineral density for three-dimensional CT image data of a subject using the determined correspondence.

Abstract: A stress analysis apparatus capable of improving the accuracy of a stress value, a method, and a program are provided. A stress analysis apparatus 100 that calculates a residual stress of a sample S includes an analysis unit configured to calculate an error as one of solutions by using an equation including an error term and prescribing a relationship between stress and strain with using measured values by diffracted X-rays with respect to a plurality of scattering vectors and a provisional value when the stress in the direction perpendicular to the surface of the sample S is constant, and a provisional value correction unit configured to correct the provisional value by the calculated error, and the analysis unit and the correction unit repeat the calculation of the error and the correction of the provisional value.

Abstract: To provide an X-ray detector facilitating the installing and replacement work of a module while reducing the possibility of breakage. An X-ray detector 50 detecting X-ray image data for each detection module includes: a detection module 7 provided with a protruding frame on a back side of a detection device detecting X-rays; and a guide frame 12 fitting into the protruding frame and removably supporting the detection device, wherein the guide frame 12 fixes the position of the detection device relative to the guide frame 12 by fitting. Therefore, fitting the protruding frame 8 into the guide frame 12 enables precise and easy installation/removal of the detection module. That is a detection module can be newly installed onto the guide frame without interfering each other with adjacent detection modules already installed while minimizing a space therebetween.

Abstract: First and second multi-pair thermocouples (21, 22) are formed on the upper surface of a heat-sensitive member (10), and a thermally uniformizing member (30) is adhesively attached to a base portion (11) of the heat-sensitive member (10). The thermally uniformizing member (30) is formed of a heat-resistant and electrically insulating material having a higher thermal conductivity than the heat-sensitive member (10) and a linear expansion coefficient approximate to the linear expansion coefficient of the heat-sensitive member (10). For example, the heat-sensitive member (10) is formed of mullite, and the thermally uniformizing member (30) is formed of aluminum nitride, whereby damage caused by thermal expansion can be prevented and at the same time the base portion (11) of the heat-sensitive member (10) can be thermally uniformalized.

Abstract: Provided is an optical axis adjustment device for an X-ray analyzer comprising an incident-side arm, a receiving-side arm, an X-ray source, an incident-side slit, and an X-ray detector, wherein the device comprises a shielding strip disposed at a position blocking X-rays received by the X-ray detector from the X-ray source, and a shielding strip-moving device that rotates the shielding strip around the sample axis relative to the optical axis of X-rays reaching the X-ray detector from the X-ray source to two angle positions, and the amount of deviation in parallelism of the surface of a sample with respect to the optical axis of the X-rays is found on the basis of X-ray intensity values found by the X-ray detector for the two angle positions.

Abstract: An image processing method and an image processing apparatus which remove the effects of cosmic rays, noise and defective pixels without losing data in a specified time and which can correct image data efficiently and with high accuracy are provided. An image processing method of performing correction processing on an abnormal value of X-ray image data is provided which includes the steps of: (S3) determining whether or not there exists a target element with intensity significantly different from intensity of peripheral elements, in a three dimensional space formed with a space axis and a time axis defined by a series of captured image frames; and (S9) replacing the intensity of the target element with a replacement value calculated from the intensity of peripheral elements.

Abstract: A micro beam generation unit capable of simultaneously capturing anisotropic images in a high signal-to-background ratio with a compact configuration and an X-ray small-angle scattering apparatus are provided. A micro beam generation unit 110 generates X-rays having a micro spot size, with which a sample is irradiated, in order to detect diffracted X-rays by a one-dimensional detector or a two-dimensional detector. The micro beam generation unit 110 includes a slit 115 that is provided on an X-ray optical path and reshapes X-rays into parallel beams, and two channel-cut monochromator crystals 117 and 118 that are arranged in arrangement of (+, ?, ?, +) and remove parasitic scattering of parallel beams reshaped by the slit. Accordingly, it is possible to simultaneously obtain anisotropic images in a high signal-to-background ratio with a compact configuration.

Abstract: Provided are an X-ray data processing apparatus and a method and a program therefor which can eliminate the influence of the phenomenon that the statistical variation of a count value after distribution is estimated differently from that at another position and can prevent the influence of correction from remaining. An X-ray data processing apparatus 200 that corrects the count value of X-ray intensity detected by a pixel array type detector includes a storage unit 220 to store a correspondence relationship of the shape and the position of a virtual pixel with respect to the shape and the position of an actual pixel, and a distribution unit 260 to distribute the count value of the actual pixel to the virtual pixel using a correspondence relationship in which randomness is provided to the stored correspondence relationship, and outputs the count value distributed to the virtual pixel as a correction result.

Abstract: The X-ray data processing apparatus to estimate a true value from an X-ray count value detected by the pixel array X-ray detector of a photon counting system includes a management unit 210 to receive and manage a detection value for each detection part, an effective area ratio calculation unit 230 to calculate a ratio of a detection ability under the influence of the charge share to an original detection ability in the detection part as an effective area ratio of the detection part using data regarding the detection part and data regarding an X-ray source and a detection energy threshold value, and a correction unit 250 to correct the managed count value using the calculated effective area ratio to estimate a true value.

Abstract: A portable X-ray diffraction apparatus is provided which can be held by a person and on which an image of a spot to be measured can be viewed. The portable X-ray diffraction apparatus includes: X-ray irradiation means that irradiates a sample with collimated X-rays; diffracted X-ray detection means that detects a collimated portion of diffracted X-rays among X-rays diffracted from the sample by the irradiation of the X-rays with the X-ray irradiation means; and signal processing means that processes a signal outputted from the diffracted X-ray detection means. An X-ray diffraction method is used which includes: irradiating a sample with collimated continuous-wavelength X-rays; extracting a collimated portion of diffracted X-rays diffracted from the sample irradiated with the X-rays and condensing the extracted collimated portion of the diffracted X-rays; detecting, using an energy dispersive detection element, the condensed diffracted X-rays; and processing a signal detected by the detection element.

Abstract: An X-ray optical component device having an X-ray optical component unit, a motor controller, and a connector. The connector has motor pins and motor terminals electrically connected to a motor when engaged with each other, and a signal pin and signal terminal for sensing detachment of the connector, the signal pin and signal terminal being capable of engaging with each other. A pin-side connector and a terminal-side connector are detachable. When the pin-side connector is detached from the terminal-side connector, the time that the signal pin is removed from the signal terminal is earlier than the time that the motor pins are removed from the motor terminals. During replacement of an X-ray optical component unit equipped with a motor for adjusting the position of an X-ray optical component, unwanted movement of the position of the X-ray optical component provided in the unit is prevented.