Abstract: Provided is a fine structure determination method capable of easily determining tilt angles of columnar scattering bodies that are long in a thickness direction, and provided are an analysis apparatus and an analysis program thereof. There is provided an analysis method for a fine structure of a plate-shaped sample formed to have columnar scattering bodies that are long in a thickness direction and periodically arranged, comprising the steps of preparing scattering intensity data from the plate-shaped sample, that is generated via transmission of X-rays; and determining tilt angles of the scattering bodies in the plate-shaped sample with respect to a reference rotation position at which a surface of the plate-shaped sample is perpendicular to an incident direction of the X-rays, based on the prepared scattering intensity data.

Abstract: There is provided an acquiring method of a projection image of a sample whose shape is uneven with respect to a rotation center, the method comprising the steps of setting the sample S0 at a position of the rotation center C0 provided between an X-ray source 116a and a detector 117, and acquiring the projection image of the sample S0 at each different rotation angle for each different magnification ratio over a rotation angle of 180° or more by rotating the sample S0 around the rotation center C0, and by relatively changing a separation distance between the X-ray source and the rotation center, or a separation distance between the rotation center and the detector in an optical axis direction according to the shape of the sample S0 and the rotation angle of the sample S0.

Abstract: A method for displaying measurement results from X-ray diffraction measurement, in which a sample is irradiated with X-rays and the X-rays diffracted by the sample are detected by an X-ray detector, comprises: (1) forming a one-dimensional diffraction profile by displaying, on the basis of output data from an X-ray detector, a profile in which one orthogonal coordinate axis shows 2? angle values and another orthogonal coordinate axis shows X-ray intensity values; (2) forming a two-dimensional diffraction pattern by linearly displaying X-ray intensity data, for each 2? angle value and on the basis of output data from the X-ray detector; the X-ray intensity data being present in the circumferential direction of a plurality of Debye rings formed at each 2? angle by diffracted X-rays; and (3) displaying the two-dimensional diffraction pattern and the one-dimensional diffraction profile so as to be aligned such that the 2? angle values of both coincide with each other.

Abstract: Provided is a sample holder for an X-ray fluorescence spectrometer, which enables measurement of a liquid sample that is in a small amount and cannot be dropped and dried, when the measurement is performed with a tube-above optics X-ray fluorescence spectrometer. The sample holder for an X-ray fluorescence spectrometer includes: a first substrate including: a support substrate having a hole in which a liquid sample is placed; a first polymer film, which is bonded to a surface of the support substrate on an X-ray incident side so as to cover the hole; and an adhesive layer, which is provided on a back surface of the surface of the support substrate to which the first polymer film is bonded; and a second substrate including: a fixed substrate having a hole at a position corresponding to the hole of the support substrate; and a second polymer film, which is bonded to a surface of the fixed substrate on the X-ray incident side, the second substrate being bonded to the first substrate with the adhesive layer.

Abstract: A wavelength dispersive X-ray fluorescence spectrometer of the present invention includes: a position sensitive detector (10) configured to detect intensities of secondary X-rays (41) at different spectral angles, by using detection elements (7) corresponding to the secondary X-rays (41) at different spectral angles; a measured spectrum display unit (14) configured to display a relationship between a position, in an arrangement direction, of each detection element (7), and a detected intensity by the detection element (7), as a measured spectrum, on a display (15); a detection area setting unit (16) configured to be set a peak area and a background area; and a quantification unit (17) configured to calculate, as a net intensity, an intensity of the fluorescent X-rays to be measured, based on a peak intensity in the peak area, a background intensity in the background area, and a background correction coefficient, and to perform quantitative analysis.

Abstract: A processing apparatus that enables margin correction of X-ray intensity data includes a calculation unit configured to calculate an expansion rate of X-ray intensity data detected in a unit region on a marginal side on a basis of an intensity distribution resulted from detection of uniform X-ray and a first function generation unit configured to generate an allocation function that allocates the X-ray intensity data detected in the unit region on the marginal side to an outside unit region, on the basis of the expansion rate. Enabling margin correction on the basis of the intensity distribution resulting from detection of uniform X-ray makes it possible to correct the distortion of intensity distribution on the marginal side. As a result, it is possible to expand the detection region of X-ray intensity data.

Abstract: An X-ray diffraction apparatus includes: an X-ray source (110); a first incident path letting the generated X-ray beam pass therethrough; a second incident path letting the generated X-ray beam be reflected by a multilayer film mirror and letting the reflected X-ray beam pass therethrough in parallel with the X-ray beam having passed through the first incident path. A movement mechanism is provided moving the X-ray source (110) between the first incident path and the second incident path while preserving respective relative positions thereof. An incident slit (160) allows an X-ray beam to be incident on a sample S pass therethrough; and a sample support stage (165) supports the sample S at a position fixed relative to the incident slit (160).

Abstract: An X-ray analysis assistance device with an input and operation device 24 for arbitrarily inputting and setting the value of one from among the distance L between a sample S and a two-dimensional detector 2 and the maximum detection range Xmax for X-rays scattered or diffracted by the sample S, and a central processing unit 20 for automatically setting the other setting item on the basis of the value of the one setting item set by the input and operation device 24. Further, the maximum measurement frame Hmax for the X-rays is displayed on a display screen 22 of a display device 21 on the basis of the distance L and maximum detection range Xmax. Additionally, an X-ray detection area A indicating the range within which it is possible for the detection surface of the two-dimensional detector 2 to detect X-rays is displayed on the display screen 22 of the display device 21.

Abstract: An X-ray detector includes at least two X-ray detector modules which are articulately connected to one another; a drive mechanism configured to position the at least two articulately connected X-ray modules around the sample; a control unit configured to control the drive mechanism to move the at least two detector modules relative to one another such that the at least two detector modules are arranged around the sample along a pre-calculated curved line having a curvature that depends on a selected distance between the detector and the sample. Also provided is an X-ray analysis system comprising the above X-ray detector and a method of controlling the X-ray detector.

Abstract: An X-ray diffraction system includes an X-ray detector that is configured to detect diffracted X-rays diffracted from a sample when a surface of the sample is irradiated with X-rays. The apparatus may include a counter arm which rotates around a rotation center axis set within the surface of the sample while the X-ray detector is installed on the counter arm and a plate-like X-ray shielding member that is installed on the counter arm and rotated together with the X-ray detector.

Abstract: A protection device (100) and a method for protecting an area detector (200) against collision with an object (10). The protection device (100) is designed to be mountable on the area detector (200) and includes a mounting frame (120) configured to be mounted on the area detector (200) to be protected, wherein the mounting frame (120) is designed to at least partially cover a perimeter rim surface of the area detector (200) to be protected; a first sensor unit arranged on the mounting frame (120) and a light curtain (147, 148) configured to detect and signal a potential collision of the object (10) is provided at an inner area of the area detector (200) surrounded by the mounting frame. A second sensor unit is arranged on the mounting frame (120) and included at least one sensor configured to detect and signal a potential collision of the object (10) at a perimeter rim area of the area detector (200). Further provided is an X-ray detector system and X-ray analysis system including the protection device (100).

Abstract: The X-ray reflectometer of the present invention includes: an irradiation angle variable unit (10) configured to vary an irradiation angle of a focused X-ray beam (6) with a sample surface (8a); a position sensitive detector (14) which is fixed; and a reflection intensity calculation unit (15) configured to, per reflection angle of reflected X-rays (13) constituting a reflected X-ray beam (12), integrate a detected intensity by a corresponding detection element (11), for only the detection elements (11) positioned within a divergence angle width of the reflected X-ray beam (12) in the position sensitive detector (14), in synchronization of variation in the irradiation angle (?) of the focused X-ray beam (6) by the irradiation angle variable unit (10).

Abstract: An X-ray diffractometer for obtaining X-ray diffraction angles of diffracted X-rays by detecting with an X-ray detector diffracted X-rays diffracted at a sample when X-rays are emitted at the sample at each angle of the angles about a center point of goniometer circles, the X-ray diffractometer having a pinhole member provided with a pinhole, the pinhole allowing X-rays diffracted from the sample to pass so that the diffracted X-rays pass through the center point of the goniometer circle, and other diffracted X-rays are shielded by the pinhole member.

Abstract: Provided are a data processing apparatus a method of obtaining the characteristic of each pixel and a method of data processing, and a program. A data processing apparatus 100 to correct X-ray intensity data measured by a pixel detector includes a characteristic storage unit 130 to store the characteristic of each pixel in a specific detector, a correction table generation unit 120 to apply a measurement condition input as that in measurement by a specific detector and a value expressing the characteristic of each pixel to an approximate formula expressing the count value of each pixel and to generate a correction table for the specific detector using the calculation result of the approximate formula, and a correction unit 160 to correct the X-ray intensity data measured by the specific detector using the generated correction table.

Abstract: First ROI pixel values of a first region of interest 101 of a radiographic intensity distribution image 10, and second ROI pixel values of a second region of interest 102 of the radiographic intensity distribution image 10, are acquired. One of the first and second regions of interest is set to be at a position, or vicinity thereof, where a phase difference in the intensity modulation period within the radiographic intensity distribution image, with respect to the other region of interest, becomes ?/2. Next, an elliptical locus obtained by plotting the first and second ROI pixel values for each radiographic intensity distribution image is determined. k angle region images are then acquired using the radiographic intensity distribution images corresponding to at least k angle regions that have been obtained by dividing the elliptical locus for each given angle. A radiographic image is then generated using the k angle region images. k is an integer of three or more.

Abstract: An X-ray fluorescence analysis method according to an FP method uses a predefined theoretical intensity formula in a standard sample theoretical intensity calculation step for obtaining a sensitivity constant and in an unknown sample theoretical intensity calculation step during iterative calculation. In the formula, only in an absorption term relating to absorption of X-rays, a mass fraction of each component is normalized so that a sum of the mass fractions of all components becomes 1.

Abstract: To provide an X-ray analysis device and a method for optical axis alignment thereof by which measurement time is shortened and measurement cost may be reduced without optical axis alignment at each measurement using an analyzer. The X-ray analysis device includes a sample stage for supporting a sample, an N-dimensional detector, and an analyzer including analyzer crystals. A detection surface of the N-dimensional detector has first and second detection areas, a plurality of optical paths includes a first optical path that directly reaches the first detection area and a second optical path that reaches via the analyzer crystals, and the N-dimensional detector performs a measurement of the first optical path by X-ray detection of the first detection area, and performs a measurement of the second optical path by X-ray detection of the second detection area.

Abstract: Provided is an X-ray fluorescence spectrometer, which has a simple structure, and is capable of promptly performing high-accuracy analysis.

Abstract: An X-ray thin film inspection device according to the present invention has an X-ray irradiation unit 40 mounted in a first rotation arm 32, an X-ray detector 50 mounted in a second rotation arm 33, a fluorescence X-ray detector 60 for detecting fluorescent X-ray occurring from an inspection target due to irradiation of X-ray, a temperature measuring unit 110 for measuring the temperature corresponding to the temperature of the X-ray thin film inspection device, and a temperature correcting system (central processing unit 100) for correcting an inspection position on the basis of the temperature measured by the temperature measuring unit 110.

Abstract: A device that uses a grating to carry out high sensitivity radiographic image shooting using the wave nature of x-rays or the like can shoot a sample that moves relative to a device. A pixel value computation section determines, using a plurality of intensity distribution images of a sample that moves in a direction that traverses the path of radiation, whether or not a point (p, q) on the sample belongs in a region (Ak) on each intensity distribution image. Further, the pixel value computation section obtains a sum pixel value (Jk) for each region (Ak) by summing pixel values on the each intensity distribution image for point (p, q) that belongs to each region (Ak). An image computation section creates a required radiographic image using the sum pixel values (Jk) of the region (Ak).