Abstract: An ink is circulated in a circulation path including a supply sub-tank, a discharge head and a collection sub-tank in a head unit. If the amount of the ink in the head unit decreases, the ink stored in the buffer tank is replenished to the head unit. On the other hand, in a first non-replenishment time during which the ink is not replenished, the ink is circulated through the buffer tank, the collection sub-tank and the supply sub-tank in this order. Thus, a temperature fluctuation of the replenishment ink stored in the buffer tank is suppressed. As a result, even if the ink is replenished to the head unit from the buffer tank, physical properties, particularly a viscosity, of the ink do not largely vary.

Abstract: There is provided an inspection device, an inkjet printing apparatus, and an inspection method capable of accurately inspecting a printed image printed on a surface of a transparent base material. A first light-emitting unit (61) emits light from one side of a transparent base material (9) toward the transparent base material (9). An imaging unit (63) images the transparent base material (9) from the other side of the transparent base material (9). As described, the first light-emitting unit (61) and the imaging unit (63) are disposed on the opposite sides of the transparent base material (9). As a result, it is possible to suppress generation of the shadow of a printed image itself in a captured image (D1). Therefore, the printed image can be accurately inspected based on the captured image (D1) obtained.

Abstract: A thickness evaluation method of the cell sheet according to the invention includes tomographically imaging a cell sheet by optical coherence tomography and obtaining a thickness distribution of the cell sheet based on a result of the tomography imaging. A tomographic image corresponding to one cross section of the cell sheet is obtained by tomography imaging while scanning the light in a main scanning direction. The tomography imaging is performed in every time while moving an incident position of the light at a predetermined feed pitch in a sub-scanning direction, thereby a plurality of the tomographic images corresponding to a plurality of cross-sections are obtained. One-dimensional thickness distributions of the cell sheet in the corresponding cross-sections are obtained based on each of the plurality of tomographic images, and a two-dimensional thickness distribution of the cell sheet is obtained by interpolating the one-dimensional thickness distributions.

Abstract: Heating treatment is performed on multiple dummy wafers to preheat in-chamber structures including a susceptor and the like prior to the treatment of a semiconductor wafer to be treated. The first few ones of the multiple dummy wafers are heated to a first heating temperature by light irradiation from halogen lamps, and are thereafter irradiated with a flash of light. The subsequent few ones of the multiple dummy wafers are heated to a second heating temperature lower than the first heating temperature by light irradiation from the halogen lamps, and are thereafter irradiated with a flash of light. This stabilizes the temperature of the in-chamber structures in a shorter time with fewer dummy wafers because the dummy wafers are heated to the high temperature and thereafter heated to the low temperature.

Abstract: A substrate processing apparatus that includes a substrate holder, a cup member, an elevating mechanism, a first nozzle, and a camera. The substrate holder holds a substrate and rotates the substrate. The cup member surrounds the outer circumference of the substrate holder. The elevating mechanism moves up the cup member so that the upper end portion of the cup member is located at the upper end position higher than the substrate held by the substrate holder. The first nozzle has a discharge port at a position lower than the upper end position, and discharges first processing liquid from the discharge port to an end portion of the substrate. The camera images an imaging region that includes the first processing liquid discharged from the discharge port of the first nozzle and is viewed from an imaging position above the substrate.

Abstract: A substrate processing liquid is used to etch a substrate in which at least either a bottom wall or a side wall forming a trench structure is an etched layer made of metal or a metal compound. The substrate processing liquid includes a chemical liquid containing H2O2 molecules or HO2? functioning as an etchant for etching the metal, and a complex forming agent containing NH4+ and forming a complex with ions of the metal and is adjusted to a pH of 5 or more.

Abstract: A silicon semiconductor wafer is transported into a chamber, and preheating of the semiconductor wafer is started in a nitrogen atmosphere by irradiation with light from halogen lamps. When the temperature of the semiconductor wafer reaches a predetermined switching temperature in the course of the preheating, oxygen gas is supplied into the chamber to change the atmosphere within the chamber from the nitrogen atmosphere to an oxygen atmosphere. Thereafter, a front surface of the semiconductor wafer is heated for an extremely short time period by flash irradiation. Oxidation is suppressed when the temperature of the semiconductor wafer is relatively low below the switching temperature, and is caused after the temperature of the semiconductor wafer becomes relatively high. As a result, a dense, thin oxide film having good properties with fewer defects at an interface with a silicon base layer is formed on the front surface of the semiconductor wafer.

Abstract: A technique capable of providing a user with information obtained by OCT imaging in a useful way, particularly for assisting in assessment of an embryo effectively. The image processing method includes acquiring original signal data indicating an intensity distribution of signal light from each position in three-dimensional space including a cultured embryo obtained by optical coherence tomography imaging, generating spherical coordinate data based on the original signal data, the spherical coordinate data indicating a relationship between each position in the three-dimensional space represented using spherical coordinates having an origin set inside the embryo and the intensity of the signal light from the position, and outputting the intensity distribution of the signal light as a two-dimensional map based on the spherical coordinate data using two deflection angles of the spherical coordinates as coordinate axes.

Abstract: In the invention, pipes and the like are guided in parallel to a second horizontal direction according to collective movements of printing bar units while being stored and protected by a protecting/guiding member arranged outside and adjacent to a body frame. In this way, breakage of the pipes and the like during the collective movements of printing bar units is reliably prevented. Moreover, the pipes and the like stored in the protecting/guiding member move outside the body frame and are not present inside the body frame. As a result, a work space can be secured without being limited by the collective movements of the printing bar units to the maintenance space.

Abstract: A printing device includes: a substrate feed-out section; a substrate transport section; a storage which stores the width size of the substrate; a skew correction section including a skew sensor which detects the skew of the substrate, and adapted to correct the skew of the substrate with reference to an output of the skew sensor and the substrate width size stored in the storage; an image recording section which performs an image recording operation on the substrate; a first sensor which detects a width size-changed portion of the substrate upstream of the skew correction section with respect to the transport direction; and a controller. Upon the detection of the width size-changed portion, the controller stops the substrate skew correction while continuously transporting the substrate. After the width size-changed portion of the substrate reaches a reference position downstream of the skew correction section, the controller restarts the skew correction.

Abstract: A ring support is attached to an inner wall surface of a chamber that houses a semiconductor wafer to support a susceptor. When the semiconductor wafer is placed on the susceptor, an inner space of the chamber is separated into an upper space and a lower space. Particles are likely to accumulate on a lower chamber window as a floor part of the chamber. However, since the upper space and the lower space are separated, the semiconductor wafer can be prevented from being contaminated by the particles flowing into the upper space and adhering to a surface of the semiconductor wafer even when the particles on the lower chamber window are blown up by irradiation with flash light.

Abstract: Film information about a thin film formed on the front surface of a semiconductor wafer, substrate information about the semiconductor wafer, and an installation angle of an upper radiation thermometer are set and input. Emissivity of the front surface of the semiconductor wafer formed with a multilayer film is calculated based on the various kinds of information. Further, a weighted average efficiency of the emissivity of the front surface of the semiconductor wafer is determined based on a sensitivity distribution of the upper radiation thermometer. Front surface temperature of the semiconductor wafer at the time of heat treatment is measured using the determined weighted average efficiency of the emissivity. The emissivity is determined based on the film information and the like, so that the front surface temperature of the semiconductor wafer can be accurately measured even when thin films are formed in multiple layers.

Abstract: A data processing method includes a step of obtaining evaluated values of the time-series data by comparing the time-series data with reference data, a step of classifying the evaluated values into a plurality of levels, a step of displaying an evaluation result screen including a display area including a first graph showing an occurrence rate of each level of the evaluated values, the evaluation result screen including the display area with respect to each of the two or more processing units. A history screen displaying a history in which the evaluated values have been obtained and a trend screen including graphs showing temporal change in the evaluated values in addition to the evaluation result screen is hierarchically displayed. A mark is attached at a position corresponding to a processing result selected in the history screen in a graph in the trend screen.

Abstract: An inkjet printing apparatus performs printing on a printing medium by feeding ink to an inkjet head having a plurality of nozzles and dispensing the ink from the inkjet head to the printing medium. The apparatus includes a tank, a supply pipe communicatively connecting the tank and the inkjet head, a pump for feeding the ink stored in the tank to the inkjet head, a filter disposed on a path of the supply pipe, and a controller for operates the pump and controlling feeding of the ink. The controller operates the pump to engage in forward drive in time of printing operation, and operates the pump to engage in backward drive in time of functional recovery operation.

Abstract: After the end of initial processing, such as a setting of a priority mode, a print schedule (a job execution schedule and a roll paper loading schedule) is created in consideration of the type, the remaining amount, and the like of roll paper loaded in each of a plurality of slots constituting an autochanger. Then, a possible loading time is obtained, which is a time at which roll paper can be loaded into a loading target slot that is a slot in which the roll paper is to be loaded during execution of continuous printing.

Abstract: An inkjet printing apparatus includes a head that ejects ink toward a recording medium transported by a transport unit, and an ejection controller that causes the head to eject ink. The ejection controller is configured to perform process including: process of calculating a transport speed of the recording medium; process of generating reference timing of ejection of ink by the head; process of determining a target delay amount by which timing of ejection of ink by the head is delayed from the reference timing on the basis of a transport speed coinciding with the reference timing; process of updating a target delay amount, on the occurrence of change in the transport speed before the recording medium is transported by a distance corresponding to the target delay amount, the target delay amount being updated in response to the transport speed as changed; and process of delaying timing of ejection of ink by the head on the basis of the target delay amount as updated.

Abstract: A holding mechanism holds a substrate horizontally. A rotation mechanism rotates the holding mechanism holding the substrate. A nozzle supplies a processing liquid to the substrate. A nozzle arm holds the nozzle. An arm actuation mechanism moves the nozzle arm between a processing position overlapping the substrate in plan view and a retracted position displaced from the substrate in plan view. A cup portion is disposed around the holding mechanism, and receives the processing liquid from the substrate. A cup actuation mechanism moves the cup portion up and down between an upper position and a lower position. A first container is fixed to the cup portion to be movable up and down integrally with the cup portion, and can accommodate the nozzle at the retracted position.

Abstract: A data processing method includes a step of obtaining scores of time-series data by comparing the time-series data with reference data in order to process time-series data acquired in a substrate processing apparatus having one or more processing units, a step of classifying the scores into a plurality of levels, and a step of displaying an evaluation result screen including a display area including a graph showing an occurrence rate of each level of the scores, the number of occurrences of each level, and a graph showing temporal change in the number of occurrences of a worst level of the scores when substrates have been processed through a predetermined method with respect to each of the two or more processing units. Accordingly, a data processing method through which a state of the substrate processing apparatus can be easily ascertained is provided.

Abstract: A technique is provided with which it is possible to effectively consume a plurality of continuous base materials with different remaining amounts. A job list and a continuous paper list are prepared. The job list registers job attribute information that includes print length information that indicates the length of continuous paper necessary for printing of each print job. The continuous paper list registers continuous-base-material attribute information that includes paper remaining information that indicates a remaining length of each roll of continuous paper. Then, a job batch is generated in accordance with the continuous-paper attribute information and the job attribute information. The job batch defines one roll of continuous paper and a print job, the continuous paper being selected from among the continuous paper list, the print job being extracted from among the job list and printable on the selected continuous paper.

Abstract: It is an object of the present invention to reduce the amount of data used in an apparatus, a system, and a method for performing a substrate processing. In order to achieve this object, a substrate processing apparatus includes one or more processing units each for performing a processing on a substrate and one or more arithmetic processing parts. One or more arithmetic processing parts generate a flow recipe defining a flow of a series of processings for a substrate by combining two or more processing recipes among a plurality of processing recipes each defining a processing condition relating to a processing to be performed on a substrate in the one or more processing units. The plurality of processing recipes include a plurality of liquid processing recipes each defining a condition of a processing to be performed on a substrate by using a processing liquid.