Abstract: A method for recovering catalytic metals from compositions containing catalytic metal colloids. Compositions such as rinse solutions or dragout baths containing catalytic metal colloids are passed through a filter that entraps catalytic metal colloids from the solutions. The catalytic metal colloid has a high affinity for the filter in contrast to other components of the solutions. The other components of the solution pass through the filter concentrating the catalytic colloid on the filter. The filter containing the catalytic metal colloid is rinsed with an acid solution to remove the catalytic metal from the filter. The catalytic metal is collected in a suitable container or on an adsorbent such as a resin. The method is economically efficient and environmentally friendly.
Type:
Grant
Filed:
January 18, 2002
Date of Patent:
October 5, 2004
Assignee:
Shipley Company, L.L.C.
Inventors:
Jeffrey Doubrava, Eric C. Lundquist, James C. Bohling
Abstract: New methods and compositions are provided that enable application and processing of photoresist as thick coating layers, e.g. at dried layer (post soft-bake) thicknesses of in excess of 2 microns. Resists can be imaged at short wavelengths in accordance with the invention, including 248 nm.
Type:
Grant
Filed:
May 10, 2002
Date of Patent:
October 5, 2004
Assignee:
Shipley Company, L.L.C.
Inventors:
James W. Thackeray, James Michael Mori, Gary Ganghui Teng
Abstract: A system for aligning two optical connectors includes first and second connectors each having optical components housed therein. The first connector has V-shaped opposite side walls which define grooves therealong. The second connector has a pair of recesses defined in the front face which are dimensioned to receive a pair of alignment spheres. Upon assembly, the alignment spheres align and engage the V-shaped grooves to lock the two connectors in precise and secure alignment.
Abstract: A method for recovering catalytic metals from fluids containing catalytic metal colloids. Fluid compositions such as rinse solutions or dragout baths containing catalytic metal colloids are passed through a filter that entraps catalytic metal colloids on the filter. The catalytic metal colloids have a high affinity for the filter in contrast to other components of the fluids. The other components of the fluids pass through the filter while the catalytic colloids concentrate on the filter. The filter containing the catalytic metal colloids is burned, and the catalytic metal is retrieved. The method is economically efficient and environmentally friendly.
Type:
Grant
Filed:
November 21, 2002
Date of Patent:
September 28, 2004
Assignee:
Shipley Company, L.L.C.
Inventors:
Jeffrey Doubrava, Anthony Gallegos, Eric G. Lundquist, James C. Bohling, Richard F. Staniunas, Chad Serell
Abstract: A fiber array is provided for use in optical systems requiring a one-dimensional or two-dimensional array of fibers. The fiber array includes a support post disposed within a fiber-containing cavity of the fiber array to provide support within the internal cavity. The use of the support post permits the height of the fiber array to be reduced thereby enabling such fiber arrays to be stacked together more closely providing increased fiber packing density among arrays. In addition, the fiber array is configured to support and protect un-jacketed fibers, where the absence of the jacket permits increased packing density among fibers in an individual fiber array.
Abstract: An optical switch is provided for selectively coupling outputs of one or more fibers of a first array to one or more inputs of fibers of a second array. The first array includes a first groove disposed within a front face of the first array. The second array optionally includes a second groove disposed within a front face of the second array. The first and second fiber arrays are oriented so that their respective front faces are disposed in a facing relationship. A roller element is located within at least the first groove, permitting the first array to translate relative to the second array upon the roller element along the direction of the first groove. In addition, detents may be formed within the grooves of each array to create areas in which the roller element may at least temporarily seat. The location and number of detents are arranged to correspond to the location and number of rows of fibers in the respective arrays.
Abstract: Electrolyte compositions for the deposition of tin and tin-alloys on a substrate are disclosed, along with methods of electroplating tin and tin-alloys using such compositions. These electrolyte compositions are useful for high speed tin plating.
Abstract: Disclosed are methods for repairing seed layers prior to subsequent metallization during the manufacture of electronic devices. Also disclosed are electronic devices containing substantially continuous seed layers.
Type:
Grant
Filed:
November 2, 2001
Date of Patent:
September 28, 2004
Assignee:
Shipley Company, L.L.C.
Inventors:
Denis Morrissey, Jeffrey M. Calvert, Robert D. Mikkola
Abstract: A combined adhesion promotion method of a metal to a non-conductive substrate and directly metallizing the non-conductive substrate with the metal. The method involves texturing a non-conductive substrate with a cobalt etch followed by applying a sulfide to the textured non-conductive substrate to provide an electrically conductive surface on the non-conductive substrate. After the surface of the non-conductive substrate has been made electrically conductive, the surface of the non-conductive substrate can be directly metallized. The method reduces the number of process steps for direct metallization of a non-conductive substrate. Thus, the method is more efficient in contrast to conventional methods of metallizing a non-conductive substrate.
Type:
Grant
Filed:
August 2, 2002
Date of Patent:
September 14, 2004
Assignee:
Shipley Company, L.L.C.
Inventors:
Zatoon Begum, Martin T. Goosey, John E. Graves, Mark A. Poole, Amrik Singh
Abstract: In an integrated optical waveguide device including a first top portion on the substrate, and a plurality of juxtaposed waveguide cores within cladding layers on a second top portion of the substrate, the waveguide cores having respective inner endfaces parallel to a longitudinal open slotway formed in the substrate between the first and second top portions, the substrate being undercut from the slotway to produce a cantilevered section of the waveguide cores and cladding layers, for permitting the plurality of waveguide cores and associated cladding layers to be simultaneously cleaved, thereby providing a smooth endface thereacross.
Type:
Grant
Filed:
June 11, 2001
Date of Patent:
September 7, 2004
Assignee:
Shipley Company, L.L.C.
Inventors:
Dan A. Steinberg, Mindaugas F. Dautartas
Abstract: A waveguide carrier is located within a carrier tube, and an optical waveguide extends lengthwise in a longitudinal direction within the waveguide carrier. The waveguide carrier is made up of a first carrier body having a first principal surface and a second carrier body having a second principal surface which confronts the first principal surface. The first principal surface has a first groove which extends lengthwise in the longitudinal direction, and the second principal surface has a second groove which extends lengthwise in the longitudinal direction. The first and second grooves are aligned with one another to define an elongate cavity which extends lengthwise in the longitudinal direction, and the optical waveguide is contained within the elongate cavity. The first and second carrier bodies may be fabricated by etching of one or more surfaces of a silicon wafer.
Abstract: New photoresists are provides that are suitable for short wavelength imaging, particularly sub-170 nm such as 157 nm. Resists of the invention comprise a fluorine-containing polymer, a photoactive component, and a solvent component. Preferred solvents for use on the resists of the invention can maintain the resist components in solution and include one or more preferably two or more (i.e. blends) of solvents. In particularly preferred solvent blends of the invention, each blend member evaporates at substantially equal rates, whereby the resist composition maintains a substantially constant concentration of each blend member.
Abstract: New photoacid generator compounds (“PAGs”) are provided and photoresist compositions that comprise such compounds. In particular, non-ionic substituted disulfone compounds PAGS are provided, including disulfone PAGs that contain a diazo, substituted methylene or hydrazine moiety interposed between substituted sulfone groups. Also provided are positive- and negative-acting chemically amplified resists that contain such PAGs and that are preferably imaged with sub-300 nm or sub-200 nm radiation such as 248 nm, 193 nm, or 157 nm radiation.
Abstract: The invention includes an optical fiber device, comprising at least one optical fiber over a substrate, at least one reentrant shape in the substrate adjacent to the optical fiber and a polymer that at least partially encapsulates the optical fiber and attaches the optical fiber to the at least one reentrant shape and methods for making the same.
Type:
Grant
Filed:
April 19, 2002
Date of Patent:
August 24, 2004
Assignee:
Shipley Company, L.L.C.
Inventors:
Mindaugas F. Dautartas, Martin G. Meder
Abstract: Disclosed is a resistor structure for embedding in a dielectric material including a thin film resistive material disposed on a surface of a conductive layer wherein the surface has an isotropic surface roughness having a Rz (din) value of 3 to 10 &mgr;m and a peak-to-peak wavelength of 2 to 20 &mgr;m.
Type:
Grant
Filed:
January 13, 2003
Date of Patent:
August 24, 2004
Assignee:
Shipley Company, L.L.C.
Inventors:
John Schemenaur, Rajan Hariharan, Marc Langlois, Craig S. Allen
Abstract: Disclosed are methods of manufacturing electronic devices, particularly integrated circuits. Such methods include the use of low dielectric constant material prepared by using a removable porogen material.
Abstract: The present invention provides radiation sensitive compositions and methods that comprise novel means for providing relief images of enhanced resolution. In one aspect the invention provides a method for controlling diffusion of photogenerated acid comprising adding a polar compound to a radiation sensitive composition and applying a layer of the composition to a substrate; exposing the composition layer to activating radiation whereby a latent image is generated comprising a distribution of acid moieties complexed with the polar compound; and treating the exposed composition layer to provide an activating amount of acid.
Abstract: Photoresist compositions that contain one or more components having sulfonamide and Si substitution. Preferred photoresist compositions of the invention contain an Si-polymer such as a silsesquioxane that has sulfonamide substitution and may be employed in multilayer resist systems. In preferred aspects, the Si-polymer has both sulfonamide substitution as well as moieties that can provide contrast upon exposure to photogenerated acid.
Type:
Application
Filed:
October 21, 2003
Publication date:
August 19, 2004
Applicant:
Shipley Company L.L.C.
Inventors:
Subbareddy Kanagasabapathy, George G. Barclay
Abstract: A primer composed of a polymer solution is applied to a roughened metal surface, and a polymer material such as a pre-preg is applied to the treated metal surface to form a bond between the metal and the polymer material.