Patents Assigned to Silicon Light Machines
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Patent number: 6707591Abstract: A display apparatus projects a two dimensional image onto a display screen and includes illumination optics, a light modulator, separating optics and scanning optics. The light modulator is optically coupled to the illumination optics such that in operation the illumination optics illuminate the light modulator with an off-axis illumination and further such that the light modulator directs light onto an optic axis for a bright pixel, thereby forming on-axis light, and away from the optic axis for a dark pixel, thereby forming off-axis light. The separating optics are coupled to the light modulator and separate the off-axis and on-axis light where the on-axis light produces a real and virtual image that is displayed by the projection and scanning optics.Type: GrantFiled: August 15, 2001Date of Patent: March 16, 2004Assignee: Silicon Light MachinesInventor: David T. Amm
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Publication number: 20040036950Abstract: An optical MEM devices which utilizes individually addressable ribbon pairs configured to modulate light is disclosed. The ribbon pairs preferably comprise silicon nitride with a reflective aluminum layers, wherein at least one ribbon from each ribbon pair is in electrical communication with a driver circuit for controllably addressing the ribbon pairs individually. The ribbons are preferably configured to modulate light having wavelengths in a range of 0.4 to 2.0 microns suitable for display and optical communication technologies. The system preferably comprises optical fibers for transmitting light to individually addressable ribbon pairs and for transmitting reflected light from individually addressable ribbon pairs.Type: ApplicationFiled: August 20, 2002Publication date: February 26, 2004Applicant: Silicon Light MachinesInventors: Jim Hunter, David Amm, Christopher Gudeman
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Patent number: 6692129Abstract: The optical system includes a plurality of light modulators, one or more combining filters, and an optical relay system including a filter. Each light modulator modulates a corresponding incident light beam. The one or more combining filters superimpose the modulated light beams from each of the plurality of light modulators. The optical relay system filters the superimposed light and relays the filtered light to an image plane.Type: GrantFiled: September 5, 2002Date of Patent: February 17, 2004Assignee: Silicon Light MachinesInventors: Kenneth P. Gross, Paul Manhart, Richard A. Buchroeder
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Publication number: 20030235932Abstract: An integrated device including one or more device drivers and a diffractive light modulator monolithically coupled to the one or more driver circuits. The one or more driver circuits are configured to process received control signals and to transmit the processed control signals to the diffractive light modulator. A method of fabricating the integrated device preferably comprises fabricating a front-end portion for each of a plurality of transistors, isolating the front-end portions of the plurality of transistors, fabricating a front-end portion of a diffractive light modulator, isolating the front end portion of the diffractive light modulator, fabricating interconnects for the plurality of transistors, applying an open array mask and wet etch to access the diffractive light modulator, and fabricating a back-end portion of the diffractive light modulator, thereby monolithically coupling the diffractive light modulator and the plurality of transistors.Type: ApplicationFiled: May 28, 2002Publication date: December 25, 2003Applicant: Silicon Light MachinesInventor: James A. Hunter
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Patent number: 6661090Abstract: In one embodiment, an integrated circuit packaging structure includes a first metal adhesion layer formed under a lid and a second metal adhesion layer formed over a substrate. The lid includes a free surface that may move a small amount without cracking. The second metal adhesion layer is configured such that its outer end does not extend past the free surface of the lid to minimize crack formation.Type: GrantFiled: May 17, 2002Date of Patent: December 9, 2003Assignee: Silicon Light Machines, Inc.Inventors: Omar S. Leung, Josef Berger
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Patent number: 6660552Abstract: A grating light valve with reduced surface charging is disclosed. Surface charging is measured by the propensity an insulating surface to accept and transport a charge. The grating light valve of the instant invention has a plurality of spaced and movable ribbons formed from Si3N4 coupled to a substrate structure formed of SiO2. A portion of the ribbons are moved to alternate between conditions for constructive and destructive interference with an incident light source having a wavelength &lgr; by applying the appropriate switching voltages across the portion of ribbons and the substrate structure. When charging occurs on surfaces of the grating light valve, the switching voltages required to operate the grating light valve are shifted and diminishing the performance of the grating light valve.Type: GrantFiled: March 14, 2002Date of Patent: December 9, 2003Assignee: Silicon Light MachinesInventors: Alexander Payne, Christopher Gudeman, James Hunter, Michael Bruner, Clinton Carroll
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Publication number: 20030223675Abstract: An optical switch comprises a substrate, first and second optical waveguide, and first and second conducting elements. The first optical waveguide is coupled to the substrate. The first conducting element is coupled to the first optical waveguide. The second optical waveguide is coupled to the substrate. The second conducting element is coupled to the second optical waveguide. In operation, a first electrical bias applied between the first and second conducting elements causes the first optical waveguide to not optically couple to the second optical waveguide. Further in operation, a second electric bias applied between the first and second conducting elements causes the first optical waveguide to optically couple to the second optical waveguide.Type: ApplicationFiled: May 29, 2002Publication date: December 4, 2003Applicant: Silicon Light MachinesInventors: Josef Berger, Gregory Miller, Ronald Miles
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Patent number: 6652644Abstract: In one embodiment, lithium oxide concentration in wafers is adjusted by placing the wafers in a vessel. Vapor of a lithium oxide source is provided and absorbed by the wafers, thereby adjusting the lithium oxide concentration in the wafers. In another embodiment, a two-phase lithium-rich source is placed between wafers such that space in the process chamber is efficiently utilized. In another embodiment, the wafers to be processed are placed in a section of a process chamber (e.g., process tube). Lithium oxide is introduced on end of the process chamber. Carrier gas is also introduced on that end of the process chamber to carry the lithium oxide into the section of the process chamber where the wafers are located. By adjusting the partial pressure of lithium oxide in the process chamber, the rate at which lithium oxide is absorbed by the wafers is controlled.Type: GrantFiled: March 29, 2002Date of Patent: November 25, 2003Assignee: Silicon Light Machines, Inc.Inventors: Gregory D. Miller, Janos Lazar
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Patent number: 6646778Abstract: An optical MEM device is encapsulated with a dampening gas to reduce oscillatory vibrations of movable parts during the operation of the device. Preferably, the dampening gas comprises one or more noble gases, such as neon and/or krypton with a partial pressure in a range of 50 to 100% of the total dampening gas pressure. In further embodiments, the dampening gas comprises a mixture of one or more noble gases and an inert carrier gas, such as nitrogen. Preferably, the optical MEM device is sealed within a die with a dampening gas pressure between 0.5 to 3.0 atmospheres at 20 degree Celsius. The current invention is particularly useful for reducing oscillatory vibrations of optical MEM devices having a plurality of movable ribbon structures configured to modulate light with one or more wavelengths in the near infrared (800 to 4000 nanometers) and which operate at high switching rates (4-40 Volts/nano second) and at high switching frequencies (1 kHz and greater).Type: GrantFiled: August 1, 2001Date of Patent: November 11, 2003Assignee: Silicon Light MachinesInventors: Chris Gudeman, James Gill Shook
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Publication number: 20030208753Abstract: A method, system, and display apparatus, for securely transmitting and displaying visual data, are disclosed. The method of securely transmitting and displaying the visual data includes encrypting the visual data, transporting encrypted visual data to a display apparatus, decrypting the encrypted visual data within the display apparatus, and displaying the visual data as a visual image. The step of decrypting the visual data includes maintaining an electronic version of the visual data within circuit elements that are substantially inaccessible. The system for securely transmitting and displaying the visual data includes an encryption apparatus, means for transporting the encrypted visual data, and the display apparatus. The display apparatus includes circuit elements that are substantially inaccessible. The circuit elements include a decryption circuit for decrypting the encrypted visual data, which forms the visual data within the display apparatus.Type: ApplicationFiled: April 10, 2001Publication date: November 6, 2003Applicant: Silicon Light MachinesInventors: Robert W. Corrigan, Paul A. Alioshin
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Patent number: 6639722Abstract: A light modulator includes elongated elements arranged parallel to each other and suspended above a substrate. The light modulator operates in a first diffraction mode and in a second diffraction mode. In the first diffraction mode, an incident light diffracts into a single diffraction order. Each of the elongated elements comprises a central blazed portion, a first outer blaze transition, and a second outer blaze transition. The central blaze portion, couples the first outer blaze transition to the second outer blaze transition. Each of the central blazed portions comprises a reflective surface. Selected ones of the central blazed portions comprise a first conductive element. The first outer blaze transition and the second outer blaze transition are coupled to the substrate.Type: GrantFiled: August 15, 2001Date of Patent: October 28, 2003Assignee: Silicon Light MachinesInventors: David T. Amm, Christopher Gudeman, James Hunter
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Patent number: 6614580Abstract: A display apparatus projects an image onto a display screen and includes a grating light valve, a focusing arrangement and a scanning device. The grating light valve is located near but not at a focal plane of a line illumination such that in operation the grating light valve produces real or virtual two dimensional images. The grating light valve is configured such that the modular members on the surface of the grating light valve are neither parallel nor perpendicular to the effective pixel are, thereby arranged diagonally across the pixel area in order to eliminate any imperfections or defects in the line illumination. A seal glass is coupled with the grating light valve and forms an air gap between itself and the grating light valve such that the line illumination must pass through the seal glass and the air gap before reaching the grating light valve.Type: GrantFiled: April 10, 2001Date of Patent: September 2, 2003Assignee: Silicon Light MachinesInventor: David T. Amm
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Patent number: 6587253Abstract: The current invention is directed to devices and systems with patterned reflective surfaces. The reflective surfaces are patterned with primary reflective regions and gap regions. The gap regions provide for separation between reflective material within adjacent primary reflective regions. The separation between reflective material reduces atomic flux which can lead to the depletion of the reflective material within regions of the reflective surface that are exposed to an intense light source. The primary reflective regions are preferably formed from a reflective material such as aluminum, silver, gold or platinum. The gap regions are left vacant or deposited with second material which is non-reflective, reflective or semi-reflective. The patterned reflective surface is preferably formed on a micro-structure, such an elongated ribbon. The patterned ribbon structure is preferably one of a plurality patterned ribbon structures in a grating light valve device.Type: GrantFiled: August 16, 2001Date of Patent: July 1, 2003Assignee: Silicon Light MachinesInventors: Ilan Blech, Omar Leung
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Patent number: 6567584Abstract: The present invention is directed to illuminating a one-dimensional spatial light modulator using an illumination system employing multiple light sources. The illumination system comprises a parallel array of light sources which provides a plurality of light outputs to an optical train. The optical train effectively combines the light sources into a single light source. The single light source provides a single light output for uniformly illuminating the spatial light modulator. The optical train includes a first optical train for receiving the light outputs from each light source, magnifying each light output, and overlaying each of the light outputs to form a single real magnified image. A mode conversion lens receives the single real magnified image, converts a mode profile of the single real magnified image into a top hat mode profile, and outputs a diverging light beam with a top hat mode profile.Type: GrantFiled: February 12, 2001Date of Patent: May 20, 2003Assignee: Silicon Light MachinesInventors: Clinton Carlisle, Jahja Trisnadi
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Publication number: 20030035215Abstract: A light modulator includes elongated elements arranged parallel to each other. In a first diffraction mode, the light modulator operates to diffract an incident light into at least two diffraction orders. In a second diffraction mode, the light modulator operates to diffract the incident light into a single diffraction order. Each of the elongated elements comprises a blaze profile, which preferably comprises a reflective stepped profile across a width of each of the elongated elements and which produces an effective blaze at a blaze angle. Alternatively, the blaze profile comprises a reflective surface angled at the blaze angle. Each of selected ones of the elongated elements comprise a first conductive element. The elongated elements produce the first diffraction when a first electrical bias is applied between the first conductive elements and a substrate.Type: ApplicationFiled: August 15, 2001Publication date: February 20, 2003Applicant: Silicon Light MachinesInventors: David T. Amm, Jahja Trisnadi, James Hunter, Christopher Gudeman, Dinesh Maheshwari
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Publication number: 20020196492Abstract: An adjustable diffractive light modulator is used to equalize the power level of wavelength multiplexed signals in wavelength division multiplexing applications. An optical channel transmits a multi-wavelength input signal through a wavelength demultiplexer. The input signal comprises a plurality of component signals defined according to a plurality of wavelengths. The de-multiplexer spatially separates the multi-wavelength input signal into its respective plurality of component signals, which are transmitted through a plurality of optical channels onto a plurality of controllable diffractive light modulators. The diffractive light modulators are advantageously comprised of grating light valves. Component signals are reflected off their respective diffractive light modulators and collected in a plurality of optical channels for re-transmission into a wavelength multiplexer. The reflected signals are combined through a multiplexing process and transmitted as an output beam.Type: ApplicationFiled: January 15, 2002Publication date: December 26, 2002Applicant: Silicon Light MachinesInventors: Jahja I. Trisnadi, Clinton B. Carlisle
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Patent number: 6497490Abstract: A laser beam attenuator and a method of attenuating a laser beam are disclosed. The laser beam attenuator includes first and second prisms, a beam dump, and a light absorbing body. An input laser beam partially refracts and partially reflects at a first surface of the first prism to form first refracted and reflected laser beams. The first reflected laser beam partially refracts and partially reflects at a second surface of the second prism to form second refracted and reflected laser beams. The beam dump and the light absorbing body absorb the first and second refracted laser beams. Thus, the second reflected laser beam forms an attenuated laser beam.Type: GrantFiled: December 14, 1999Date of Patent: December 24, 2002Assignees: Silicon Light Machines, Nutech Optical Systems, Inc.Inventors: Gregory D. Miller, Ying-Moh Liu
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Publication number: 20020186448Abstract: A display apparatus projects a two dimensional image onto a display screen and includes illumination optics, a light modulator, separating optics and scanning optics. The light modulator is optically coupled to the illumination optics such that in operation the illumination optics illuminate the light modulator with an off-axis illumination and further such that the light modulator directs light onto an optic axis for a bright pixel, thereby forming on-axis light, and away from the optic axis for a dark pixel, thereby forming off-axis light. The separating optics are coupled to the light modulator and separate the off-axis and on-axis light where the on-axis light produces a real and virtual image that is displayed by the projection and scanning optics.Type: ApplicationFiled: August 15, 2001Publication date: December 12, 2002Applicant: Silicon Light MachinesInventor: David T. Amm
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Patent number: 6480634Abstract: An image projector projects an image onto a display screen and includes a laser source unit, an optical fiber, and a projector head. The projector head includes a light modulator and an optical projection arrangement. The optical fiber couples a laser illumination to the light modulator of the projector head from the laser source unit. The light modulator modulates the laser illumination to produce an array of pixels. The optical projection arrangement projects the array of pixels onto the display screen to produce the image on the display screen. Preferably, the image projector is a color image projector. In the color image projector, the laser source unit includes red, green, and blue lasers, which illuminate first, second, third light modulators. The first, second, and third light modulators produce red, green, and blue arrays of pixels, which the optical projection arrangement projects onto the display screen to produce a color image.Type: GrantFiled: May 18, 2000Date of Patent: November 12, 2002Assignee: Silicon Light MachinesInventor: Robert W. Corrigan
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Patent number: 6466354Abstract: An interferometric light modulator includes a base and a ribbon suspended above the base. The ribbon has a central region and first and second conducting regions located outside of the central region. The ribbon includes a first mirror between the first and second conducting regions. The base includes a second mirror located parallel and adjacent to the first mirror so that the first and second mirrors form an interferometric cavity. An electrical bias applied to the first and second conducting regions adjusts the interferometric cavity in order to modulate light which is incident upon the central region of the ribbon. In an alternative interferometric light modulator, the light is incident upon a second central region of the base.Type: GrantFiled: September 19, 2000Date of Patent: October 15, 2002Assignee: Silicon Light MachinesInventor: Christopher Gudeman