Abstract: In one embodiment, a method of treating a surface of a Micro-Electromechanical System (MEMS) device reduces or eliminates performance degradation due to charge migration and accumulation. Briefly, the method may include treating a dielectric surface of the MEMS device to replace hydroxyl groups with electrically neutral molecules, thereby converting the dielectric surface from a hydrophilic to a substantially hydrophobic nature. A MEMS device having a surface treated using the aforementioned method is also disclosed.

Abstract: An arrangement for dispersing light comprises a blazed diffraction grating and a mirror. The blazed diffraction grating comprises a grating plane and a multiplicity of blazed facets. Each blazed facet is oriented at a blaze angle to the grating plane. The mirror couples to the blazed diffraction grating and is oriented parallel to the blazed facets. The arrangement permits a highly dispersive optical function in a very compact structure with low polarization dependent loss.

Abstract: One embodiment relates to a spatial light modulator (SLM) for modulating light incident thereon. The SLM includes a plurality of pixels, each pixel including a plurality of phase shift elements. The SLM also includes a transform filter adapted to control the imaging system to resolve each pixel but not each phase shift element in each pixel. The plurality of pixels are controlled to independently modulate phase and magnitude of light reflected therefrom. Other embodiments are also disclosed.

Abstract: A method of providing drive signals to an illuminator module having a plurality of channels in a printing application. Binary image data including image bits is provided from a data source to the illuminator module. Each image bit is converted to a multi-bit amplitude value within the illuminator module, wherein the conversion of each image bit to the multi-bit amplitude value depends at least on a value of the image bit and which channel is associated with the image bit. Pulse width modulation (PWM) may be applied to the drive signals using programmable transition delays. Apparatus for performing the aforementioned method are also disclosed.

Abstract: In one embodiment, a light modulator includes a substrate and a number of modulator elements disposed above and spaced apart from the substrate. Each modulator element has an optically active portion adapted to receive light incident thereon, and a support portion on either side of the active portion to support the modulator element above the substrate. The modulator elements include at least one deflectable modulator element. To shorten damping time, the deflectable modulator element has a lower surface in the support portion that is closer to the substrate than a lower surface under the optically active portion.

Abstract: In one embodiment disclosed, a light modulator can be configured to have a substantially flat optically active modulator element portion while deflected. The modulator can include a plurality of modulator elements arranged substantially in parallel, with each modulator element including an optically active portion and a support portion on either side of the optically active portion. Further, the optically active portion can have a narrower width than the support portion. In another embodiment disclosed, a movable membrane for light modulation includes a substantially circular optically active portion and a released membrane portion surrounding the circular optically active portion. The substantially circular optically active portion can also include a plurality of gaps configured to expose a lower surface. Further, the substantially circular optically active portion can be essentially flat while in a deflected state.

Abstract: The current invention provides for encapsulated release structures, intermediates thereof and methods for their fabrication. The multi-layer structure has a capping layer, that preferably comprises silicon oxide and/or silicon nitride, and which is formed over an etch resistant substrate. A patterned device layer, preferably comprising silicon nitride, is embedded in a sacrificial material, preferably comprising polysilicon, and is disposed between the etch resistant substrate and the capping layer. Access trenches or holes are formed in to capping layer and the sacrificial material are selectively etched through the access trenches, such that portions of the device layer are release from sacrificial material. The etchant preferably comprises a noble gas fluoride NGF2x (wherein Ng=Xe, Kr or Ar: and where x=1, 2 or 3). After etching that sacrificial material, the access trenches are sealed to encapsulate released portions the device layer between the etch resistant substrate and the capping layer.

Abstract: A grating light valve has with a plurality of spaced reflective ribbons are spatially arranged over a substrate with reflective surfaces. The grating light valve is configured to optimized the conditions for constructive and destructive interference with an incident light source having a wavelength ?. The grating light valve preferably has a set of movable active ribbons alternating between the set of stationary bias ribbons. The active ribbons and the bias ribbons are spatially separated over the substrate surface such that reflective regions of the substrate surface correspond to the spaces between the ribbons. The ribbons and reflective regions of the substrate optically and geometrically optimized for to generate the conditions for constrictive and destructive interference with the incident light source.

Abstract: In one embodiment, a micro electromechanical system (MEMS) driver circuit receives a pulse-width modulated (PWM) signal and uses it to control a voltage at a MEMS cell. The driver circuit further includes a current source, a capacitor, and a reset circuit that can discharge the capacitor. The voltage at the MEMS cell can be controlled in proportion to the pulse width of the PWM signal. In another embodiment disclosed, a MEMS driver circuit receives a first PWM signal and a second PWM signal. Each PWM signal is coupled to a current source. One current source can provide a course current control and the other current source can provide fine current control. The driver circuit can further include a capacitor and a reset circuit for discharging the capacitor. The voltage at the MEMS cell can be controlled in proportion to a summation of the first and second current sources. According to another aspect of the embodiments, a method of controlling a voltage at a MEMS cell is disclosed.

Abstract: An optical sensor and method of using the same is provided for sensing relative movement between the sensor and a surface by detecting changes in optical features of light reflected from the surface. In one embodiment, the sensor includes a two dimensional array of photosensitive elements, the array including at least a first plurality of photosensitive elements arranged and coupled to sense a first combined movement along a first set of at least two non-parallel axes, and a second plurality of photosensitive elements arranged and coupled to sense a second combined movement along a second set of at least two non-parallel axes.

Abstract: A MEM device in accordance with the invention comprises one or more movable micro-structures which are preferably ribbon structures or cantilever structures. The ribbon structures or cantilever structures are preferably coupled to a substrate structure through one or more support regions comprising a plurality of anchor support features and a plurality of post support features. The MEM device is preferably an optical MEM device with a plurality of movable ribbon structures each being supported by opposing ends through support regions each comprising a plurality of anchor support features and a plurality of post support features. In accordance with the method of the embodiments, the positions of the anchor and post support features, the number of anchor and support features and the spacings between the support features can selected during fabrication of the device to determine an operating condition of the MEM device.

Abstract: In one embodiment, a pixel arrangement may be configured for a maskless lithography application using at least two array tiles, where each array tile includes a two-dimensional array with substantially equally-spaced pixels. A preferred embodiment includes two 500×1000 pixel array tiles separated by a displacement in a first direction and by another displacement in a second direction. In this embodiment, the scanning direction is between the first and second directions so as to form a continuous swath. Additionally, embodiments of this invention can be applied to applications where array tiles of optical modulators are used to modulate electron beams which can subsequently expose electron beam sensitive media.

Abstract: In one embodiment, an optical device includes a polarization diversity module configured to receive an optical input signal and output a first optical output signal and a second optical output signal having the same polarization state. This helps ensure light beams propagating in the optical device have the same polarization state, thereby mitigating the effects of polarization-dependent loss in the optical device. In one embodiment, the optical device comprises an optical dynamic gain equalizer with a light modulator.

Abstract: A light modulator and a method of manufacturing the same are provided having a substrate with reflectivity enhancing layers formed thereon. The layers include at least a top surface for receiving incident light, a first layer overlying the substrate, and a second layer between the top surface and the first layer, the second layer overlying and abutting the first layer. The second layer has a predetermined thickness selected in relation to an index of refraction of the second layer and to a wavelength of the incident light such that the light reflecting off an interface between the first and second layers constructively interferes with light reflected from the top surface. Preferably, the first layer also has a predetermined thickness selected such that the light reflecting off an interface between the first layer and the substrate constructively interferes with light reflected from the top surface.

Abstract: The interferometer comprises a beam splitter, a mirror and a phase modulator. The beam splitter splits a signal into a first portion and a second portion. The mirror reflects the first portion. The first portion includes an optical path length, which is fixed. The phase modulator includes a selectively actuated reflective element to reflect the second portion. The second portion includes an optical path length, which is variable. The reflective element is selectively actuated between a first position and a second position to vary the optical path length of the second portion. When the reflective element is in the first position, the first portion and the second portion constructively interfere thereby directing the component signal along a first output path. When the reflective element is in the second position, the first portion and the second portion destructively interfere thereby directing the component signal along a second optical path.

Abstract: A spatial light modulator is provided having a two-dimensional (2D), close-packed MEMS (Micro-Electromechanical System) array of diffractive pixels. Each pixel includes a number of diffractive elements or diffractors. Each diffractor includes a tent member disposed above and spaced apart from an upper surface of a substrate, a movable actuator disposed between the substrate and the tent member, and a driver moving the actuator. The tent member has a first planar light reflective surface facing away from the substrate, the first planar light reflective surface having an aperture formed therein. The actuator has a second planar light reflective surface parallel to and potentially coplanar with the first planar light reflective surface and positioned relative to the aperture to receive light passing therethrough.

Abstract: An optical MEM devices which utilizes individually addressable ribbon pairs configured to modulate light is disclosed. The ribbon pairs preferably comprise silicon nitride with a reflective aluminum layers, wherein at least one ribbon from each ribbon pair is in electrical communication with a driver circuit for controllably addressing the ribbon pairs individually. The ribbons are preferably configured to modulate light having wavelengths in a range of 0.4 to 2.0 microns suitable for display and optical communication technologies. The system preferably comprises optical fibers for transmitting light to individually addressable ribbon pairs and for transmitting reflected light from individually addressable ribbon pairs.

Abstract: The light modulator includes elongated elements and a support structure coupled to the elongated elements. Each element includes one or more lengthwise slits within an active optical area, and a light reflective planar surface with the light reflective planar surfaces lying in a grating plane. The support structure maintains a position of the elongated elements relative to each other and enables tilting of each element about a lengthwise axis. The elongated elements are tilted between a first modulator configuration wherein the elongated elements act to diffract an incident light into one or more diffraction orders, and a second modulator configuration wherein the elongated elements act to diffract the incident light into at least one diffraction order different than the one or more diffraction orders in the first modulator configuration.

Abstract: One embodiment disclosed relates to a method for bi-directional progressive scanning in a display system. The method includes receiving image data for an image to be displayed, forward scanning the image data in a first direction using a linear array of controllable light elements, and reverse scanning the image data in a second direction opposite to the first direction using the linear array. Another embodiment disclosed relates to an apparatus for bi-directional progressive scanning. The apparatus includes a linear array of controllable light elements, and a scanner driver that drives a scanner apparatus using a drive signal that is applied to drive both forward and reverse optical scanning of an image by the linear array.

Abstract: An integrated device of the present invention comprises free-space optics, a bi-directional multiplexor/de-multiplexor, a diffractive light modulator, a beam splitter, an optical performance monitor, and a controller. The free-space optics collimate, transform and image optical signals including a range of component wavelength signals. The bi-directional multiplexor/de-multiplexor de-multiplexes a wavelength division multiplexed signal into the component wavelength signals and multiplexes equalized component wavelength signals into an equalized wavelength division multiplexed signal. The diffractive light modulator selectively equalizes each component wavelength signal. The beam splitter is optically coupled in free-space to the diffractive light modulator for receiving the equalized component wavelength signals and re-directing a representative portion of each of the equalized component wavelength signals.