Patents Assigned to Silicon Light Machines
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Patent number: 7277110Abstract: One embodiment described pertains to a thermal printer is provided having a spatial light modulator (SLM) to modulate light from a laser source to record information on a thermal-sensitive surface of a recording medium, and a heater adjacent to the medium to preheat the thermal-sensitive surface prior to recording of information thereon. The printer may further include illumination optics for focusing the light beam onto the SLM, and imaging optics to image the light on the thermal-sensitive surface. The heater may comprise a resistive, a convective or a radiant heater. The printer may further include a feed mechanism with a roller having an outer surface in contact with the recording medium for feeding it past the imaging optics, and the heater may be disposed inside of the roller to heat the recording medium in contact with the roller. The heater may be arranged to heat the entire outer surface of the roller, or only a portion thereof. Other embodiments are also described.Type: GrantFiled: March 18, 2005Date of Patent: October 2, 2007Assignee: Silicon Light Machines CorporationInventors: Harold A. Zarem, Omar S. Leung
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Patent number: 7268341Abstract: One embodiment described relates to an optical displacement sensor for sensing movement of a data input device across a surface by detecting displacement of optical features in a succession of images of the surface. The sensor includes a detector having an array including a number (N) of sets of photosensitive elements, each set having a number (M) of photosensitive elements, where M is greater than two and not equal to four. Signals from each of the photosensitive elements in a set are electrically coupled or combined with corresponding photosensitive elements in other sets to produce a total of M independent group signals from M interlaced groups of photosensitive elements. Other embodiments are also described.Type: GrantFiled: May 4, 2005Date of Patent: September 11, 2007Assignee: Silicon Light Machines CorporationInventors: David A. Lehoty, Charles B. Roxlo, Jahja I. Trisnadi, Clinton B. Carlisle
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Patent number: 7250893Abstract: A signal processing circuit and processing method are provided for measuring an analog signal from a photo-detector. Generally, the method includes steps of: (i) sampling and storing a characteristic of the signal at a first predetermined time following a reset of the circuit; (ii) sampling the characteristic of the signal at a second predetermined time following a reset or initialization of the circuit; (iii) determining a difference between the stored characteristic of the signal sampled at the first predetermined time and the characteristic of the signal sampled at the second predetermined time; and (iv) converting the determined difference to a digital value and determining a slope of the signal from the digital value and the difference between the first and second predetermined times. Thus, the measurement of the slope is independent of and substantially unaffected by absolute values of the characteristics measured at the first and second predetermined times.Type: GrantFiled: November 12, 2005Date of Patent: July 31, 2007Assignee: Silicon Light Machines CorporationInventors: Brian D. Todoroff, Douglas A. Webb
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Patent number: 7247832Abstract: A signal processor and processing method are provided for measuring current received from a photo-detector. Generally, the processor includes a transimpedance amplifier (TIA) to integrate a current received from a photo-detector in the optical navigation system to generate a voltage signal having a slope that is proportional to the received current, and a comparator having a first input coupled to an output of the TIA to receive the voltage signal, and a second, inverting, input coupled to a threshold voltage. The comparator is configured to compare the voltage signal to the threshold voltage and to generate an output pulse having a predetermined voltage and a duration or width that is a function of the received current.Type: GrantFiled: September 9, 2005Date of Patent: July 24, 2007Assignee: Silicon Light Machines CorporationInventor: Douglas A. Webb
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Patent number: 7248278Abstract: The disclosure relates to a printing system having a linear diffractive spatial light modulator (LDSLM) assembly that diffracts light from a laser source according to or under the influence of an applied electric field applied to the LDSLM assembly. In one embodiment, the LDSLM assembly includes a linear array of diffractive MEMS elements. For example, each of the diffractive MEMS elements can include a number of deformable ribbons having a light reflective planar surface. Preferably, the linear array of diffractive MEMS elements including the ribbons and drive electronics are integrally formed on a single substrate. In other embodiments, the LDSM assembly can include two or more linear arrays of diffractive MEMS elements, and the laser source can include an array of multiple lasers or laser emitters.Type: GrantFiled: November 19, 2004Date of Patent: July 24, 2007Assignee: Silicon Light Machines CorporationInventors: Clinton B. Carlisle, Jahja I. Trisnadi, David T. Amm, Anthony A. Abdilla
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Patent number: 7248345Abstract: A signal processor and method are provided for detecting movement of a surface relative to an optical sensor having an array of photosensitive elements.Type: GrantFiled: November 8, 2005Date of Patent: July 24, 2007Assignee: Silicon Light Machines CorporationInventors: Brian D. Todoroff, Yansun Xu
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Patent number: 7244631Abstract: In one embodiment, a method of treating a surface of a Micro-Electromechanical System (MEMS) device reduces or eliminates performance degradation due to charge migration and accumulation. Briefly, the method may include treating a dielectric surface of the MEMS device to replace hydroxyl groups with electrically neutral molecules, thereby converting the dielectric surface from a hydrophilic to a substantially hydrophobic nature. A MEMS device having a surface treated using the aforementioned method is also disclosed.Type: GrantFiled: June 3, 2005Date of Patent: July 17, 2007Assignee: Silicon Light Machines CorporationInventors: Wilhelmus De Groot, James A. Hunter, Josef Berger
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Patent number: 7233443Abstract: An arrangement for dispersing light comprises a blazed diffraction grating and a mirror. The blazed diffraction grating comprises a grating plane and a multiplicity of blazed facets. Each blazed facet is oriented at a blaze angle to the grating plane. The mirror couples to the blazed diffraction grating and is oriented parallel to the blazed facets. The arrangement permits a highly dispersive optical function in a very compact structure with low polarization dependent loss.Type: GrantFiled: December 20, 2002Date of Patent: June 19, 2007Assignee: Silicon Light Machines CorporationInventors: Clinton B. Carlisle, Jahja I. Trisnadi
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Patent number: 7227687Abstract: One embodiment relates to a spatial light modulator (SLM) for modulating light incident thereon. The SLM includes a plurality of pixels, each pixel including a plurality of phase shift elements. The SLM also includes a transform filter adapted to control the imaging system to resolve each pixel but not each phase shift element in each pixel. The plurality of pixels are controlled to independently modulate phase and magnitude of light reflected therefrom. Other embodiments are also disclosed.Type: GrantFiled: June 22, 2005Date of Patent: June 5, 2007Assignee: Silicon Light Machines CorporationInventors: Jahja I. Trisnadi, Alexander P. Payne, Clinton B. Carlisle
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Patent number: 7218336Abstract: A method of providing drive signals to an illuminator module having a plurality of channels in a printing application. Binary image data including image bits is provided from a data source to the illuminator module. Each image bit is converted to a multi-bit amplitude value within the illuminator module, wherein the conversion of each image bit to the multi-bit amplitude value depends at least on a value of the image bit and which channel is associated with the image bit. Pulse width modulation (PWM) may be applied to the drive signals using programmable transition delays. Apparatus for performing the aforementioned method are also disclosed.Type: GrantFiled: September 17, 2004Date of Patent: May 15, 2007Assignee: Silicon Light Machines CorporationInventors: David T. Amm, Douglas A. Webb, Gregory A. Myatt
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Patent number: 7215461Abstract: In one embodiment, a light modulator includes a substrate and a number of modulator elements disposed above and spaced apart from the substrate. Each modulator element has an optically active portion adapted to receive light incident thereon, and a support portion on either side of the active portion to support the modulator element above the substrate. The modulator elements include at least one deflectable modulator element. To shorten damping time, the deflectable modulator element has a lower surface in the support portion that is closer to the substrate than a lower surface under the optically active portion.Type: GrantFiled: August 26, 2005Date of Patent: May 8, 2007Assignee: Silicon Light Machines CorporationInventors: Omar S. Leung, Alexander P. Payne
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Patent number: 7202988Abstract: In one embodiment disclosed, a light modulator can be configured to have a substantially flat optically active modulator element portion while deflected. The modulator can include a plurality of modulator elements arranged substantially in parallel, with each modulator element including an optically active portion and a support portion on either side of the optically active portion. Further, the optically active portion can have a narrower width than the support portion. In another embodiment disclosed, a movable membrane for light modulation includes a substantially circular optically active portion and a released membrane portion surrounding the circular optically active portion. The substantially circular optically active portion can also include a plurality of gaps configured to expose a lower surface. Further, the substantially circular optically active portion can be essentially flat while in a deflected state.Type: GrantFiled: March 25, 2004Date of Patent: April 10, 2007Assignee: Silicon Light Machines CorporationInventors: Alexander P. Payne, Michael J. Dueweke, Wilhelmus De Groot, David T. Amm, Omar S. Leung, James A. Hunter, Brent D. Lunceford, Gregory Beach
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Patent number: 7183637Abstract: The current invention provides for encapsulated release structures, intermediates thereof and methods for their fabrication. The multi-layer structure has a capping layer, that preferably comprises silicon oxide and/or silicon nitride, and which is formed over an etch resistant substrate. A patterned device layer, preferably comprising silicon nitride, is embedded in a sacrificial material, preferably comprising polysilicon, and is disposed between the etch resistant substrate and the capping layer. Access trenches or holes are formed in to capping layer and the sacrificial material are selectively etched through the access trenches, such that portions of the device layer are release from sacrificial material. The etchant preferably comprises a noble gas fluoride NGF2x (wherein Ng=Xe, Kr or Ar: and where x=1, 2 or 3). After etching that sacrificial material, the access trenches are sealed to encapsulate released portions the device layer between the etch resistant substrate and the capping layer.Type: GrantFiled: May 13, 2005Date of Patent: February 27, 2007Assignee: Silicon Light Machines CorporationInventor: Mike Bruner
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Patent number: 7177081Abstract: A grating light valve has with a plurality of spaced reflective ribbons are spatially arranged over a substrate with reflective surfaces. The grating light valve is configured to optimized the conditions for constructive and destructive interference with an incident light source having a wavelength ?. The grating light valve preferably has a set of movable active ribbons alternating between the set of stationary bias ribbons. The active ribbons and the bias ribbons are spatially separated over the substrate surface such that reflective regions of the substrate surface correspond to the spaces between the ribbons. The ribbons and reflective regions of the substrate optically and geometrically optimized for to generate the conditions for constrictive and destructive interference with the incident light source.Type: GrantFiled: March 8, 2001Date of Patent: February 13, 2007Assignee: Silicon Light Machines CorporationInventors: Akira Tomita, David Thomas Amm, Michael J. Daneman, James Hunter, Bryan Staker
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Patent number: 7161518Abstract: In one embodiment, a micro electromechanical system (MEMS) driver circuit receives a pulse-width modulated (PWM) signal and uses it to control a voltage at a MEMS cell. The driver circuit further includes a current source, a capacitor, and a reset circuit that can discharge the capacitor. The voltage at the MEMS cell can be controlled in proportion to the pulse width of the PWM signal. In another embodiment disclosed, a MEMS driver circuit receives a first PWM signal and a second PWM signal. Each PWM signal is coupled to a current source. One current source can provide a course current control and the other current source can provide fine current control. The driver circuit can further include a capacitor and a reset circuit for discharging the capacitor. The voltage at the MEMS cell can be controlled in proportion to a summation of the first and second current sources. According to another aspect of the embodiments, a method of controlling a voltage at a MEMS cell is disclosed.Type: GrantFiled: March 26, 2004Date of Patent: January 9, 2007Assignee: Silicon Light Machines CorporationInventors: Douglas A. Webb, Stephen Gaalema
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Patent number: 7138620Abstract: An optical sensor and method of using the same is provided for sensing relative movement between the sensor and a surface by detecting changes in optical features of light reflected from the surface. In one embodiment, the sensor includes a two dimensional array of photosensitive elements, the array including at least a first plurality of photosensitive elements arranged and coupled to sense a first combined movement along a first set of at least two non-parallel axes, and a second plurality of photosensitive elements arranged and coupled to sense a second combined movement along a second set of at least two non-parallel axes.Type: GrantFiled: October 28, 2005Date of Patent: November 21, 2006Assignee: Silicon Light Machines CorporationInventors: Jahja I. Trisnadi, Clinton B. Carlisle, Robert J. Lang
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Patent number: 7123399Abstract: A MEM device in accordance with the invention comprises one or more movable micro-structures which are preferably ribbon structures or cantilever structures. The ribbon structures or cantilever structures are preferably coupled to a substrate structure through one or more support regions comprising a plurality of anchor support features and a plurality of post support features. The MEM device is preferably an optical MEM device with a plurality of movable ribbon structures each being supported by opposing ends through support regions each comprising a plurality of anchor support features and a plurality of post support features. In accordance with the method of the embodiments, the positions of the anchor and post support features, the number of anchor and support features and the spacings between the support features can selected during fabrication of the device to determine an operating condition of the MEM device.Type: GrantFiled: February 9, 2005Date of Patent: October 17, 2006Assignee: Silicon Light Machines CorporationInventors: Christopher Gudeman, James Hunter, Richard Yeh, David T. Amm
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Patent number: 7106417Abstract: In one embodiment, a pixel arrangement may be configured for a maskless lithography application using at least two array tiles, where each array tile includes a two-dimensional array with substantially equally-spaced pixels. A preferred embodiment includes two 500×1000 pixel array tiles separated by a displacement in a first direction and by another displacement in a second direction. In this embodiment, the scanning direction is between the first and second directions so as to form a continuous swath. Additionally, embodiments of this invention can be applied to applications where array tiles of optical modulators are used to modulate electron beams which can subsequently expose electron beam sensitive media.Type: GrantFiled: March 19, 2004Date of Patent: September 12, 2006Assignee: Silicon Light Machines CorporationInventor: David T. Amm
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Patent number: 7088497Abstract: In one embodiment, an optical device includes a polarization diversity module configured to receive an optical input signal and output a first optical output signal and a second optical output signal having the same polarization state. This helps ensure light beams propagating in the optical device have the same polarization state, thereby mitigating the effects of polarization-dependent loss in the optical device. In one embodiment, the optical device comprises an optical dynamic gain equalizer with a light modulator.Type: GrantFiled: December 10, 2003Date of Patent: August 8, 2006Assignee: Silicon Light Machines CorporationInventors: Clinton B. Carlisle, Jahja I. Trisnadi, Edward D. Huber
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Patent number: 7085059Abstract: A light modulator and a method of manufacturing the same are provided having a substrate with reflectivity enhancing layers formed thereon. The layers include at least a top surface for receiving incident light, a first layer overlying the substrate, and a second layer between the top surface and the first layer, the second layer overlying and abutting the first layer. The second layer has a predetermined thickness selected in relation to an index of refraction of the second layer and to a wavelength of the incident light such that the light reflecting off an interface between the first and second layers constructively interferes with light reflected from the top surface. Preferably, the first layer also has a predetermined thickness selected such that the light reflecting off an interface between the first layer and the substrate constructively interferes with light reflected from the top surface.Type: GrantFiled: March 23, 2005Date of Patent: August 1, 2006Assignee: Silicon Light Machines CorporationInventors: Alexander P. Payne, James A. Hunter, David T. Amm