Abstract: One embodiment relates to a method of independently controlling amplitude and phase modulation by a spatial light modulator. Light is illuminated onto upper layer deflectable planar areas and lower layer deflectable planar areas over a substrate of the spatial light modulator. First active circuitry on the substrate is used to provide amplitude modulation by controlling a relative displacement between upper layer deflectable planar areas and adjacent lower layer deflectable planar areas. Second active circuitry on the substrate is used to provide phase modulation by controlling a displacement between the (upper and lower layer) deflectable planar areas and the substrate. Other embodiments and features are also disclosed.

Abstract: One embodiment disclosed relates to a method for sealing an active area of a non-silicon-based device on a wafer. The method includes providing a sacrificial material over at least the active area of the non-silicon-based device, depositing a seal coating over the wafer so that the seal coating covers the sacrificial material, and replacing the sacrificial material with a target atmosphere. Another embodiment disclosed relates to a non-silicon-based device sealed at the wafer level (i.e. prior to separation of the die from the wafer). The device includes an active area to be protected, a contact area, and a lithographically-formed structure sealing at least the active area and leaving at least a portion of the contact area exposed.

Abstract: A driver is provided for use with a MEMS device. Generally, the driver includes: (i) a high voltage circuit electrically coupled to a movable actuator of the MEMS to apply a HV pulse thereto; and (ii) a charge control circuit coupled to a base electrode formed in a substrate underlying the actuator to control a potential applied to the base electrode. The charge control circuit can include a capacitance divider having a plate capacitor defined by the actuator and the base electrode, and a charge storage capacitor electrically coupled to the base electrode and in series with the plate capacitor. The charge storage capacitor can include a variable, voltage controlled capacitor, the capacitance of which is controlled by an input signal or voltage to the driver. Other embodiments are also disclosed.

Abstract: The present disclosure describes an optical displacement sensor having a dense multi-axis array of photosensitive elements. Generally, the sensor includes a two dimensional array of multiple photosensitive elements. In one embodiment, the array includes multiple linear arrays of photosensitive elements arranged along three or more axes in a space-filling, close-packed multi-axis array. The photosensitive elements are connected to each other in such a way that motion is determinable along each of the axes by measuring differential photocurrents between photosensitive elements along each of the axes. The inventive architecture advantageously increases signal redundancy, and reduces signal drop-out or low signals due to random fluctuations in the incident or absorbed light or in the signals from the photosensitive elements.

Abstract: An apparatus for selectively adjusting power levels of component signals of a wavelength division multiplexed signal. The apparatus comprises a first filter and a second filter. The first filter modulates the component signals according to a static attenuation profile, thereby providing coarsely modulated component signals. The second filter is coupled to the first filter to receive the coarsely modulated component signals and to modulate the coarsely modulated component signals according to a dynamic attenuation profile, thereby providing finely modulated component signals.

Abstract: A light modulator and a method of manufacturing the same are provided having a continuously deformable optical surface. Generally, the modulator includes a substrate, a membrane disposed above and spaced apart from an upper surface of the substrate, the membrane having a continuously deformable light reflective surface formed on its upper side facing away from the upper surface of the substrate, and a means for deflecting the deformable surface relative to the substrate. Light reflected from different points of the deformable surface can interfere to modulate light reflected from the modulator in 0th order applications. In one embodiment, the membrane includes a static reflective surface surrounding the deformable surface. Light reflected from the static surface and the deformable surface can interfere to modulate light reflected from the modulator in non-0th order applications.

Abstract: In one embodiment, a probe card includes a substrate and a plurality of probes. Each of the probes may have a supported portion and an unsupported portion that meet at a base. The unsupported portion may have a non-uniform (e.g. triangular) cross-section along a length that begins at the base. The probes may be interleaved and fabricated using MEMS fabrication techniques.

Abstract: In one embodiment, a capacitive micro electro-mechanical systems (MEMS) device includes a dielectric spacer between a bottom electrode and a movable member. The movable member may serve as a top electrode. A gap separates the top electrode from the dielectric spacer. The movable member may be actuated to deflect towards the bottom electrode by electrostatic force. The dielectric spacer reduces the height of the gap that would otherwise be formed between a top surface of the bottom electrode and a bottom surface of the movable member, thereby improving squeeze-film damping. The movable member may be a ribbon of a ribbon-type diffractive spatial light modulator, for example.

Abstract: A circuit and method are provided for reducing power consumption in an optical navigation system for use in an input device to sense displacement of the device relative to a surface. Generally, the system includes: (i) an optical sensor having at least first and second arrays of photosensitive elements; (ii) imaging optics to map an illuminated portion of the surface to the optical sensor; (iii) a signal processor including a first and second sensor circuits coupled to the respective first and second arrays to generate from each array a set of signals in response to motion of light received thereon; and (iv) a control circuit capable of independently switching power to the sensor circuits. In one embodiment, the control circuit powers down one sensor circuit when the strength of the set of signals from the other is greater than a predetermined minimum thereby maintaining device performance. Other embodiments are also disclosed.

Abstract: A method is provided for determining motion of an optical sensor including a periodic photo-diode array relative to a surface. The method includes steps of (i) generating sets of quasi-sinusoidal signals responsive to motion along first and second directions; (ii) combining the sets of signals to generate a wrapped phase angle value for each direction at a first time; (iii) combining the sets of signals at a second time to generate a second wrapped phase angle value for each direction; (iv) computing wrapped phase angle changes for each direction between the first time and the second time; (v) computing velocity predictors for each direction using corrected average phase angle changes from a number of preceding successive frames; (vi) calculating the number of full 27? rotations needed to unwrap the phase angle changes for each direction using the velocity predictors; and (vii) computing the unwrapped or corrected phase angle changes.

Abstract: An integrated device includes one or more device drivers and a micro-electro-mechanical system (MEMS) structure monolithically coupled to the one or more device drivers. The one or more device drivers are configured to process received control signals and to transmit the processed control signals to the MEMS structure. Methods of fabricating integrated devices are also disclosed.

Abstract: One embodiment relates to an optical displacement sensor for sensing relative movement between a data input device and a surface by determining displacement of optical features in a succession of frames. The sensor includes an illuminator and a detector. The illuminator has a light source and illumination optics to illuminate a portion of the surface with a planar phase-front. The detector has a plurality of photosensitive elements and imaging optics. The illuminator and the detector are configured such that the illuminated portion of the surface is less than fifty percent larger than a field of view of the photosensitive elements of the detector. Other embodiments are also described.

Abstract: An optical add and drop multiplexer system comprising a first module for providing a first signal; a second module for providing a second signal; and a modulator for receiving a channel of the first signal at a first location, the first location configured to actuate between a first configuration and a second configuration, wherein the modulator directs the channel of the first signal as an output signal when the first location is in the first configuration. The modulator may direct the channel of the first signal as a dropped signal when the first location is in the second configuration. The modulator may also receive a channel of the second signal from the second module at a second location configured to independently actuate between the first configuration and the second configuration.

Abstract: In one embodiment disclosed, an optical engine includes a light modulator coupled to illumination optics and imaging optics. The light modulator may be located at about an object plane. The imaging optics may include a scanner and a spatial filter located at about a transform (or pupil) plane. The scanner coupled with the light modulator may be configured to generate a continuous two-dimensional swath pattern for applications such as wafer processing, printed-circuit board (PCB) patterning/printing, and/or liquid crystal display (LCD) screen printing/patterning systems. Also, a method is disclosed that uses a high-speed one-dimensional light includes controlling a scanner in an optical engine system. The system may be used to provide a two-dimensional swath pattern. The system may use a continuous wave (CW) or other high repetition rate laser source and may provide a printing speed of greater than one Gpixel per second.

Abstract: One embodiment described pertains to a thermal printer is provided having a spatial light modulator (SLM) to modulate light from a laser source to record information on a thermal-sensitive surface of a recording medium, and a heater adjacent to the medium to preheat the thermal-sensitive surface prior to recording of information thereon. The printer may further include illumination optics for focusing the light beam onto the SLM, and imaging optics to image the light on the thermal-sensitive surface. The heater may comprise a resistive, a convective or a radiant heater. The printer may further include a feed mechanism with a roller having an outer surface in contact with the recording medium for feeding it past the imaging optics, and the heater may be disposed inside of the roller to heat the recording medium in contact with the roller. The heater may be arranged to heat the entire outer surface of the roller, or only a portion thereof. Other embodiments are also described.

Abstract: One embodiment described relates to an optical displacement sensor for sensing movement of a data input device across a surface by detecting displacement of optical features in a succession of images of the surface. The sensor includes a detector having an array including a number (N) of sets of photosensitive elements, each set having a number (M) of photosensitive elements, where M is greater than two and not equal to four. Signals from each of the photosensitive elements in a set are electrically coupled or combined with corresponding photosensitive elements in other sets to produce a total of M independent group signals from M interlaced groups of photosensitive elements. Other embodiments are also described.

Abstract: A signal processing circuit and processing method are provided for measuring an analog signal from a photo-detector. Generally, the method includes steps of: (i) sampling and storing a characteristic of the signal at a first predetermined time following a reset of the circuit; (ii) sampling the characteristic of the signal at a second predetermined time following a reset or initialization of the circuit; (iii) determining a difference between the stored characteristic of the signal sampled at the first predetermined time and the characteristic of the signal sampled at the second predetermined time; and (iv) converting the determined difference to a digital value and determining a slope of the signal from the digital value and the difference between the first and second predetermined times. Thus, the measurement of the slope is independent of and substantially unaffected by absolute values of the characteristics measured at the first and second predetermined times.

Abstract: A signal processor and processing method are provided for measuring current received from a photo-detector. Generally, the processor includes a transimpedance amplifier (TIA) to integrate a current received from a photo-detector in the optical navigation system to generate a voltage signal having a slope that is proportional to the received current, and a comparator having a first input coupled to an output of the TIA to receive the voltage signal, and a second, inverting, input coupled to a threshold voltage. The comparator is configured to compare the voltage signal to the threshold voltage and to generate an output pulse having a predetermined voltage and a duration or width that is a function of the received current.

Abstract: A signal processor and method are provided for detecting movement of a surface relative to an optical sensor having an array of photosensitive elements.

Abstract: The disclosure relates to a printing system having a linear diffractive spatial light modulator (LDSLM) assembly that diffracts light from a laser source according to or under the influence of an applied electric field applied to the LDSLM assembly. In one embodiment, the LDSLM assembly includes a linear array of diffractive MEMS elements. For example, each of the diffractive MEMS elements can include a number of deformable ribbons having a light reflective planar surface. Preferably, the linear array of diffractive MEMS elements including the ribbons and drive electronics are integrally formed on a single substrate. In other embodiments, the LDSM assembly can include two or more linear arrays of diffractive MEMS elements, and the laser source can include an array of multiple lasers or laser emitters.