Abstract: The interferometer comprises a beam splitter, a mirror and a phase modulator. The beam splitter splits a signal into a first portion and a second portion. The mirror reflects the first portion. The first portion includes an optical path length, which is fixed. The phase modulator includes a selectively actuated reflective element to reflect the second portion. The second portion includes an optical path length, which is variable. The reflective element is selectively actuated between a first position and a second position to vary the optical path length of the second portion. When the reflective element is in the first position, the first portion and the second portion constructively interfere thereby directing the component signal along a first output path. When the reflective element is in the second position, the first portion and the second portion destructively interfere thereby directing the component signal along a second optical path.

Abstract: A spatial light modulator is provided having a two-dimensional (2D), close-packed MEMS (Micro-Electromechanical System) array of diffractive pixels. Each pixel includes a number of diffractive elements or diffractors. Each diffractor includes a tent member disposed above and spaced apart from an upper surface of a substrate, a movable actuator disposed between the substrate and the tent member, and a driver moving the actuator. The tent member has a first planar light reflective surface facing away from the substrate, the first planar light reflective surface having an aperture formed therein. The actuator has a second planar light reflective surface parallel to and potentially coplanar with the first planar light reflective surface and positioned relative to the aperture to receive light passing therethrough.

Abstract: An optical MEM devices which utilizes individually addressable ribbon pairs configured to modulate light is disclosed. The ribbon pairs preferably comprise silicon nitride with a reflective aluminum layers, wherein at least one ribbon from each ribbon pair is in electrical communication with a driver circuit for controllably addressing the ribbon pairs individually. The ribbons are preferably configured to modulate light having wavelengths in a range of 0.4 to 2.0 microns suitable for display and optical communication technologies. The system preferably comprises optical fibers for transmitting light to individually addressable ribbon pairs and for transmitting reflected light from individually addressable ribbon pairs.

Abstract: The light modulator includes elongated elements and a support structure coupled to the elongated elements. Each element includes one or more lengthwise slits within an active optical area, and a light reflective planar surface with the light reflective planar surfaces lying in a grating plane. The support structure maintains a position of the elongated elements relative to each other and enables tilting of each element about a lengthwise axis. The elongated elements are tilted between a first modulator configuration wherein the elongated elements act to diffract an incident light into one or more diffraction orders, and a second modulator configuration wherein the elongated elements act to diffract the incident light into at least one diffraction order different than the one or more diffraction orders in the first modulator configuration.

Abstract: An integrated device of the present invention comprises free-space optics, a bi-directional multiplexor/de-multiplexor, a diffractive light modulator, a beam splitter, an optical performance monitor, and a controller. The free-space optics collimate, transform and image optical signals including a range of component wavelength signals. The bi-directional multiplexor/de-multiplexor de-multiplexes a wavelength division multiplexed signal into the component wavelength signals and multiplexes equalized component wavelength signals into an equalized wavelength division multiplexed signal. The diffractive light modulator selectively equalizes each component wavelength signal. The beam splitter is optically coupled in free-space to the diffractive light modulator for receiving the equalized component wavelength signals and re-directing a representative portion of each of the equalized component wavelength signals.

Abstract: One embodiment disclosed relates to a method for bi-directional progressive scanning in a display system. The method includes receiving image data for an image to be displayed, forward scanning the image data in a first direction using a linear array of controllable light elements, and reverse scanning the image data in a second direction opposite to the first direction using the linear array. Another embodiment disclosed relates to an apparatus for bi-directional progressive scanning. The apparatus includes a linear array of controllable light elements, and a scanner driver that drives a scanner apparatus using a drive signal that is applied to drive both forward and reverse optical scanning of an image by the linear array.

Abstract: The current invention provides for encapsulated release structures, intermediates thereof and methods for their fabrication. The multi-layer structure has a capping layer, that preferably comprises silicon oxide and/or silicon nitride, and which is formed over an etch resistant substrate. A patterned device layer, preferably comprising silicon nitride, is embedded in a sacrificial material, preferably comprising polysilicon, and is disposed between the etch resistant substrate and the capping layer. Access trenches or holes are formed in to capping layer and the sacrificial material are selectively etched through the access trenches, such that portions of the device layer are release from sacrificial material. The etchant preferably comprises a noble gas fluoride NGF2x (wherein Ng=Xe, Kr or Ar: and where x=1, 2 or 3). After etching that sacrificial material, the access trenches are sealed to encapsulate released portions the device layer between the etch resistant substrate and the capping layer.

Abstract: In one embodiment, a method of forming a metallic electrode comprises depositing a metal layer over a surface (e.g., substrate) and thermally processing the metal layer to form a conductive metallized ceramic. The metal layer may be deposited by sputtering and thermally processed by rapid thermal processing, for example. Among other advantages, embodiments of the present invention allow for the formation of conductive metallized ceramics, such as titanium-nitride, without the use of relatively expensive deposition tools.

Abstract: A device comprising an array of free metal ribbons that are coupled to a substrate through ceramic support structures is disclosed. The device is preferably an optical MEM device, wherein a first set of free metal ribbons are configured to move relative to a second set of alternating free metal ribbons for modulating an incident light source. An optical MEM system in accordance with the invention includes a light source and suitable optics for transmitting light to and from the array of free metal ribbons. The optical MEM device exhibits reduced surface charging and has applications in optical communications.

Abstract: One embodiment relates to an optical displacement sensor for sensing transverse displacement of a data input device relative to a surface by determining displacement of optical features in a succession of frames. The sensor includes at least a coherent light source, illumination optics to illuminate a portion of the surface, imaging optics, and a first array of photosensitive elements having a periodic distance. The illuminator and the detector are configured to produce on the first array of photosensitive elements an intensity pattern of light reflected from the illuminated portion of the surface. The intensity pattern comprises a plurality of speckles having an average speckle diameter which is between one half and two times the periodic distance of the array.

Abstract: A modulator for and a method of modulating an incident beam of light including means for supporting a plurality of active elements and a plurality of bias elements, each active and bias element including a light reflective planar surface with the light reflective planar surfaces of the plurality of active elements lying in a first parallel plane and the plurality of bias elements lying in a second parallel plane wherein the plurality of active and bias elements are parallel to each other and further wherein the plurality of bias elements are mechanically or electrically deflected with respect to the plurality of active elements. Each of the plurality of bias elements is deflected an odd multiple of the wavelength of an incident light wave divided by four and the plurality of light reflective planar surfaces of the plurality of active elements move between the first parallel plane to the second parallel plane.

Abstract: One embodiment disclosed relates to a method for wavelength-selective switching and equalization. The method includes dispersing an incoming multiplexed signal into wavelength components, focusing the wavelength components onto different portions of a controllable light diffractor array, and controllably diffracting each wavelength component such that each said component is individually attenuated and arrives at the individually selected output without substantial crosstalk between the outputs. Another embodiment relates to a wavelength-selective switching device with integrated equalizer functionality. Another embodiment relates to an optical apparatus for wavelength-selective switching and equalization. The apparatus includes a means for controllably diffracting each wavelength component of a multiplexed input such that each said component is controllably attenuated and directed to arrive at an individually selected output.

Abstract: In one embodiment, a high-density spatial light modulator includes a substrate having a reflective surface and a reflective ribbon over the reflective surface. The ribbon may have one or more openings, such as rectangular slots. The openings allow light to pass through the ribbon and impinge on the reflective surface. Deflecting the ribbon towards the substrate thus allows for dynamically-controllable diffraction of incident light. The spatial light modulator pixel requires less space than a conventional light modulator, thus allowing for relatively large pixel count within a manufacturable device size. Other embodiments are also disclosed.

Abstract: The current invention provides for encapsulated release structures, intermediates thereof and methods for their fabrication. A multi-layer structure has a capping layer, that preferably comprises silicon oxide and/or silicon nitride, and which is formed over an etch resistant substrate. A patterned device layer, preferably comprising silicon nitride, is embedded in a sacrificial material, preferably comprising poly-silicon, and is disposed between the etch resistant substrate and the capping layer. Access trenches or holes are formed in to capping layer and the sacrificial material is selectively etched through the access trenches, such that portions of the device layer are release from sacrificial material. The etchant preferably comprises a noble gas fluoride NGF2x, (wherein NG=Xe, Kr or Ar: and where x=1, 2 or 3). After etching that sacrificial material, the access trenches are sealed to encapsulate released portions the device layer between the etch resistant substrate and the capping layer.

Abstract: A device for selectively adjusting power levels of component signals of a wavelength division multiplexed signal including a first wavelength signal and a second wavelength signal. The device includes a light modulator comprising a plurality of elements. The plurality of elements are configured to form an arbitrary phase profile. The plurality of elements includes a first group of elements configured to receive the first wavelength signal and a second group of elements configured to receive the second wavelength signal. The first group of elements and the second group of elements include at least one common element. Each element is controllable such that each group of elements directs a selected portion of a corresponding received wavelength signal in a first mode. Each first mode is collected such that a power level of each wavelength signal is selectively adjusted.

Abstract: An integrated device including one or more device drivers and a diffractive light modulator monolithically coupled to the one or more driver circuits. The one or more driver circuits are configured to process received control signals and to transmit the processed control signals to the diffractive light modulator. A method of fabricating the integrated device preferably comprises fabricating a front-end portion for each of a plurality of transistors, isolating the front-end portions of the plurality of transistors, fabricating a front-end portion of a diffractive light modulator, isolating the front end portion of the diffractive light modulator, fabricating interconnects for the plurality of transistors, applying an open array mask and wet etch to access the diffractive light modulator, and fabricating a back-end portion of the diffractive light modulator, thereby monolithically coupling the diffractive light modulator and the plurality of transistors.

Abstract: An apparatus for measuring wavelength composition and power of a dispersed spectrum of light comprises a diffractive light modulator and a detector. The diffractive light modulator comprises an array of light modulating pixels operable in a first mode and a second mode. In operation, the dispersed spectrum of light illuminates the diffractive light modulator along the array of light modulating pixels, which selectively directs a subset of the dispersed spectrum of light into the first mode while directing a remainder of the dispersed spectrum of light into the second mode. The detector is optically coupled to the diffractive light modulator. In operation, the detector detects the subset of the dispersed spectrum of light while not detecting the remainder of the dispersed spectrum of light. Each of the light modulating pixels is controlled by signals sent from a controller. The signals comprise a time division multiplex modulation, a code division multiplex modulation, or a combination thereof.

Abstract: In one embodiment, a delay circuit is configured to delay pixel information from an image source, such as a frame buffer. The delay circuit may be configured to delay the pixel information by an amount of time that would move a pixel projected on a surface by a distance less than a dimension of the pixel. A light modulator may modulate a light beam onto a surface, such as a display screen, based on the delayed pixel information. This advantageously allows for sub-pixel electronic alignment.

Abstract: An interferometer comprises a membrane, a substrate, and a support structure. The membrane comprises a first reflector. The substrate comprises a second reflector. The support structure circumferentially couples the membrane to the substrate and orients the first reflector parallel to and facing the second reflector.

Abstract: An arrangement for optical communication comprises an optical coupler, an opto-electronic board, and an optical fiber. The optical fiber comprises a first refraction surface, a second refraction surface, and an internal reflector. The first refraction surface has a first finite focal length. The second refraction surface has a second finite focal length. In operation, an optical signal enters the first refraction surface, couples from the first refraction surface to the second refraction surface via the internal reflector, and exits the second refraction surface, where the optical signal defines a light path. The light path optically couples the opto-electronic board to the optical fiber.