Abstract: A light modulator includes elongated elements arranged parallel to each other. Each elongated element includes a light reflective planar surface with the light reflective planar surfaces configured in a first grating plane. A support structure is coupled to the elongated elements to maintain a position of the elongated elements relative to each other and to enable movement of each elongated element in a direction normal to the first grating plane. The support structure enables movement between a first modulator configuration and a second modulator configuration. In the first modulator configuration, the elongated elements act to reflect an incident light as a plane mirror. In the second modulator configuration, the elongated elements form a stepped blaze configuration along a second grating plane lying at a grating angle to the first grating plane and act to diffract the incident light into at least two diffraction orders.

Abstract: An apparatus for selective blocking WDM channels comprises a light modulator, a diffraction grating, and a transform lens. The light modulator comprises an array of pixels. Each pixel of the light modulator is selectively operable to direct light into a first mode and a second mode. The first mode directs the light to an output. The second mode directs the light away from the output. The diffraction grating is operable to receive the WDM channels from an input and to disperse the WDM channels into a range of angles. The transform lens couples the diffraction grating to the light modulator. The diffraction grating is operable to transform the range of angles of the WDM channels into a range of spatially distinct positions along the array of pixels of the light modulator without overlap of two of the WDM channels on an individual pixel. In operation, the light modulator directs at least one of the WDM channels into the second mode while directing a remainder of the WDM channels into the first mode.

Abstract: A modulator for modulating an incident beam of light. The modulator includes a plurality of elements, each element including a first end, a second end, a first non-linear side, a second non-linear side, and a light reflective planar surface. The light reflective planar surfaces of the plurality of elements lie in one or more parallel planes. The elements are preferably arranged parallel to each other. The modulator also includes a support structure to maintain a position of each element relative to each other and to enable movement of selective ones of the plurality of elements in a direction normal to the one or more parallel planes of the plurality of elements. The plurality of elements are preferably moved between a first modulator configuration wherein the plurality of elements act to reflect the incident beam of light as a plane mirror, and a second modulator configuration wherein the plurality of elements act to diffract the incident beam of light.

Abstract: One embodiment disclosed relates to an apparatus for controlled diffraction of light. The apparatus includes a plurality of vertically movable reflective members and an arrangement of the reflective members along a grating plane. The grating plane is configured to be controllably tiltable. Another embodiment disclosed relates to a method for controlled diffraction of light. The method includes illuminating incident light upon an element, and controllably deflecting reflective members within the element to control a fraction of the incident light reflected by the element. The reflective members may be controllably deflected so as to be positioned along a tiltable grating plane.

Abstract: A MEMS device such as a grating light valve™ light modulator is athermalized such that the force required to deflect the movable portion of the MEMS device remains constant over a range of temperatures. In MEMS embodiments directed to a grating light valve™ light modulator, a ribbon is suspended over a substrate, and the ribbon tension is kept constant over a temperature range by adjusting the aggregate thermal coefficient of expansion of the ribbon to match the aggregate thermal coefficient of expansion of the substrate. Various opposition materials have an opposite thermal coefficient of expansion as the aluminum layer of a grating light valve™ light modulator ribbon, using the thermal coefficient of expansion of the substrate as a zero coefficient reference.

Abstract: A MEM device in accordance with the invention comprises one or more movable micro-structures which are preferably ribbon structures or cantilever structures. The ribbon structures or cantilever structures are preferably coupled to a substrate structure through one or more support regions comprising a plurality of anchor support features and a plurality of post support features. The MEM device is preferably an optical MEM device with a plurality of movable ribbon structures each being supported by opposing ends through support regions each comprising a plurality of anchor support features and a plurality of post support features. In accordance with the method of the embodiments, the positions of the anchor and post support features, the number of anchor and support features and the spacings between the support features can selected during fabrication of the device to determine an operating condition of the MEM device.

Abstract: One embodiment disclosed relates to a method for calibrating an array of light-modulating elements. The method includes illuminating the array of elements, modulating an intensity of light diffracted by the elements over a modulation range, and measuring the modulated light intensity from each element of the array using a linear detector. Other embodiments disclosed relate to an apparatus and system for calibrating an array of light-modulating elements. The apparatus includes a light source for illuminating the array of elements and a linear detector for measuring light intensities at points along a line segment. The apparatus is configured so that modulated light from each of the elements impinges upon a different point of the line segment. The system includes means for modulating an intensity of light diffracted by the elements over a modulation range and a detector for measuring the modulated light intensity from each element of the array.

Abstract: A light modulator includes elongated elements arranged parallel to each other. In a first diffraction mode, the light modulator operates to diffract an incident light into at least two diffraction orders. In a second diffraction mode, the light modulator operates to diffract the incident light into a single diffraction order. Each of the elongated elements comprises a blaze profile, which preferably comprises a reflective stepped profile across a width of each of the elongated elements and which produces an effective blaze at a blaze angle. Alternatively, the blaze profile comprises a reflective surface angled at the blaze angle. Each of selected ones of the elongated elements comprise a first conductive element. The elongated elements produce the first diffraction when a first electrical bias is applied between the first conductive elements and a substrate.

Abstract: In one embodiment, lithium oxide concentration in wafers is adjusted by placing the wafers in a vessel. Vapor of a lithium oxide source is provided and absorbed by the wafers, thereby adjusting the lithium oxide concentration in the wafers. In another embodiment, a two-phase lithium-rich source is placed between wafers such that space in the process chamber is efficiently utilized. In another embodiment, the wafers to be processed are placed in a section of a process chamber (e.g., process tube). Lithium oxide is introduced on end of the process chamber. Carrier gas is also introduced on that end of the process chamber to carry the lithium oxide into the section of the process chamber where the wafers are located. By adjusting the partial pressure of lithium oxide in the process chamber, the rate at which lithium oxide is absorbed by the wafers is controlled.

Abstract: In one embodiment, a video display system employs an array of ribbon light modulators having a reflective surface configured to reflect or diffract a beam. The beam may have a wavelength suitable for displaying a video image. The reflective surface may comprise an aluminum alloy suitable for receiving the beam, which may have a relatively high power density. In one embodiment, a method of displaying a video image comprises impinging a beam on a portion of a reflective surface of a light modulator. The beam may have a wavelength suitable for displaying a video image, and the reflective surface may comprise an aluminum alloy.

Abstract: One embodiment disclosed relates to a method for sealing an active area of a surface acoustic wave (SAW) device on a wafer. The method includes providing a sacrificial material over at least the active area of the SAW device, depositing a seal coating over the wafer so that the seal coating covers the sacrificial material, and replacing the sacrificial material with a target atmosphere. Another embodiment disclosed relates to an SAW device sealed at the wafer level (i.e. prior to separation of the die from the wafer). The device includes an active area to be protected, an electrical contact area, and a lithographically-formed structure sealing at least the active area and leaving at least a portion of the electrical contact area exposed.

Abstract: One embodiment pertains to an apparatus for wavelength-selective switching and equalization of an incoming multiplexed signal having a plurality of wavelength components. The apparatus includes a first controllable light modulator, a second controllable light modulator, and a lens system. The first controllable light modulator controllably deflects a first set of the wavelength components and controllably reflects a second set of the wavelength components. The wavelength components in the second set are mapped onto separate sections of the second controllable light modulator by the lens system and are controllably reflected by the second controllable light modulator.

Abstract: The current invention provides a optical MEM device and system with an angled lid for hermetically sealing an active MEMS structure. The lid is sealed through an asymmetric seal formed with sealing rings having an asymmetric distribution of solder wetting surfaces which tilts the lid, when the lid and a substrate are soldered together. The asymmetric distribution wetting surfaces can be provided by forming one or more edge features, by patterning portions of the sealing rings or both. Preferably, the lid is transparent to one or more wavelengths of light in a range of 300 to 3000 Angstroms and hermetically seals a grating light valve structure having a plurality of movable ribbon for modulating light through the lid.

Abstract: A fiber optic transceiver capable of bi-directional communication comprises an incoming optical (downlink) signal, a detector comprising a detecting surface configured to detect a detected portion of the incoming optical signal that strikes the detecting surface, and a light modulator for modulating a reflected (uplink) signal. The reflected signal comprises a reflected portion of the incoming signal. The light modulator comprises a controllable reflection member for modulating the reflected signal, and a controller configured to control the controllable reflection member. The controllable reflection member implements micro-electro-mechanical systems (MEMS) technology wherein micro-reflective surfaces are physically positioned or oriented by the control signal, thereby affecting reflection and diffraction in such a way as to modulate the intensity of light entering an uplink channel.

Abstract: One embodiment disclosed relates to a method for sealing an active area of a non-silicon-based device on a wafer. The method includes providing a sacrificial material over at least the active area of the non-silicon-based device, depositing a seal coating over the wafer so that the seal coating covers the sacrificial material, and replacing the sacrificial material with a target atmosphere. Another embodiment disclosed relates to a non-silicon-based device sealed at the wafer level (i.e. prior to separation of the die from the wafer). The device includes an active area to be protected, a contact area, and a lithographically-formed structure sealing at least the active area and leaving at least a portion of the contact area exposed.

Abstract: An optical switch comprises a substrate, first and second optical waveguide, and first and second conducting elements. The first optical waveguide is coupled to the substrate. The first conducting element is coupled to the first optical waveguide. The second optical waveguide is coupled to the substrate. The second conducting element is coupled to the second optical waveguide. In operation, a first electrical bias applied between the first and second conducting elements causes the first optical waveguide to not optically couple to the second optical waveguide. Further in operation, a second electric bias applied between the first and second conducting elements causes the first optical waveguide to optically couple to the second optical waveguide.

Abstract: An external cavity laser comprises a laser source, a collimation optical element, a blazed diffraction grating, a transform optical element, and a light modulator. The laser source produces a light output comprising a range of light wavelengths. The collimation optical element couples the laser source to the blazed diffraction grating. The collimation optical element collimates the light output. The blazed diffraction grating diffracts the light output into a first diffraction order. The transform optical element couples the blazed diffraction grating to the light modulator, which is located in a transform plane of the transform optical element. The transform optical element converts the first diffraction order to position in the transform plane by focusing the range of light wavelengths to the transform plane. The light modulator comprises an array of light modulating pixels selectively operable in first mode and second modes.

Abstract: A light modulator includes elongated elements arranged parallel to each other. In a first diffraction mode, the light modulator operates to diffract an incident light into at least two diffraction orders. In a second diffraction mode, the light modulator operates to diffract the incident light into a single diffraction order. Each of the elongated elements comprises a blaze profile, which preferably comprises a reflective stepped profile across a width of each of the elongated elements and which produces an effective blaze at a blaze angle. Alternatively, the blaze profile comprises a reflective surface angled at the blaze angle. Each of selected ones of the elongated elements comprise a first conductive element. The elongated elements produce the first diffraction when a first electrical bias is applied between the first conductive elements and a substrate.

Abstract: A light modulator includes elongated elements and a support structure. The elongated elements are arranged in parallel. Each element includes a light reflective planar surface with the light reflective planar surfaces lying in one or more parallel planes. The support structure is coupled to the elongated elements to maintain a position of the elongated elements relative to each other and to enable movement of each elongated element between a first modulator configuration and a second modulator configuration. In the first modulator configuration, the elongated elements act to reflect an incident light as a plane mirror. In the second modulator configuration, selected groups of elements are deflected and act to diffract the incident light along one or more of a plurality of diffraction planes. The groups of elements are configured according to one of a plurality of selectable group configurations. Each group configuration corresponds to one of the plurality of diffraction planes.

Abstract: An optical system provides high-contrast operation by collecting zero order light. The optical system comprises a light modulator and a collector. The light modulator is preferably a grating light valve™ light modulator including a plurality of elements selectively operable in a first mode and a second mode, wherein a gap between adjacent elements is equal to or less than a wavelength of an incident light beam. The plurality of elements in the first mode reflect light along a return path, where the plurality of elements in the second mode direct light away from the return path. The collector is coupled to the light modulator to collect zero order light along the return path while the plurality of elements are in the first mode and to collect zero order light along the return path while the plurality of elements are in the second mode.