Patents Assigned to Soitec
  • Patent number: 8358552
    Abstract: A sense amplifier for a series of cells of a memory, including a writing stage comprising a CMOS inverter, the input of which is directly or indirectly connected to an input terminal of the sense amplifier, and the output of which is connected to an output terminal of the sense amplifier intended to be connected to a local bitline addressing the cells of the series, and a reading stage that includes a sense transistor, the gate of which is connected to the output of the inverter and the drain of which is connected to the input of the inverter.
    Type: Grant
    Filed: May 27, 2010
    Date of Patent: January 22, 2013
    Assignee: Soitec
    Inventors: Carlos Mazure, Richard Ferrant, Bich-Yen Nguyen
  • Patent number: 8357589
    Abstract: A method for thinning a structure of at least two assembled wafers, where one of the wafers includes channels on its surface facing the other wafer. In order to cause thinning of the structure, a fluid is introduced into the channels in a supercritical state and the fluid is passed from the supercritical state into the gaseous state. The channels do not open to the outside of the structure, such that the method further includes forming at least one access opening to the channels from the outer surface of the structure and before introducing the fluid in the supercritical state.
    Type: Grant
    Filed: December 11, 2009
    Date of Patent: January 22, 2013
    Assignee: Soitec
    Inventor: Marcel Broekaart
  • Publication number: 20130015442
    Abstract: Methods of forming semiconductor structures include transferring a portion (116a) of a donor structure to a processed semiconductor structure (102) that includes at least one non-planar surface. An amorphous film (144) may be formed over at least one non-planar surface of the bonded semiconductor structure, and the amorphous film may be planarized to form one or more planarized surfaces. Semiconductor structures include a bonded semiconductor structure having at least one non-planar surface, and an amorphous film disposed over the at least one non-planar surface. The bonded semiconductor structure may include a processed semiconductor structure and a portion of a single crystal donor structure attached to a non-planar surface of the processed semiconductor structure.
    Type: Application
    Filed: February 22, 2011
    Publication date: January 17, 2013
    Applicant: SOITEC
    Inventors: Carlos Mazure, Bich-Yen Nguyen, Mariam Sadaka
  • Publication number: 20130012024
    Abstract: A process for making cavities in a multilayer structure by providing a multilayer structure that includes a surface layer, a planar support substrate and a buried layer between the layer and the support substrate, wherein the buried layer comprises areas of first and second materials with the first material having a higher etching rate than the second material; producing an opening in the surface layer that extends to the area(s) of the first material of the buried layer; and etching the first material to form at least one cavity in the buried layer.
    Type: Application
    Filed: September 14, 2012
    Publication date: January 10, 2013
    Applicant: SOITEC
    Inventor: Bernard Aspar
  • Patent number: 8349703
    Abstract: The invention relates to a method of forming a structure comprising a thin layer of semiconductor material transferred from a donor substrate onto a second substrate, wherein two different atomic species are co-implanted under certain conditions into the donor substrate so as to create a weakened zone delimiting the thin layer to be transferred. The two different atomic species are implanted so that their peaks have an offset of less than 200 ? in the donor substrate, and the substrates are bonded together after roughening at least one of the bonding surfaces.
    Type: Grant
    Filed: November 23, 2007
    Date of Patent: January 8, 2013
    Assignee: Soitec
    Inventors: Sébastien Kerdiles, Willy Michel, Walter Schwarzenbach, Daniel Delprat, Nadia Ben Mohamed
  • Publication number: 20130005122
    Abstract: The invention relates to finishing a substrate of the semiconductor-on-insulator (SeOI) type comprising an insulator layer buried between two semiconducting material layers. The method successively comprises: routing the annular periphery of the substrate so as to obtain a routed substrate, and encapsulating the routed substrate so as to cover the routed side edge of the buried insulator layer by means of a semiconducting material.
    Type: Application
    Filed: March 14, 2011
    Publication date: January 3, 2013
    Applicant: SOITEC
    Inventors: Walter Schwarzenbach, Aziz Alami-Idrissi, Alexandre Chibko, Sebastien Kerdiles
  • Patent number: 8343782
    Abstract: The present invention relates to a method that involves providing a stack of a first substrate and a InGaN seed layer formed on the first substrate, growing an InGaN layer on the InGaN seed layer to obtain an InGaN-on-substrate structure, forming a first mirror layer overlaying the exposed surface of the grown InGaN layer, attaching a second substrate to the exposed surface of the mirror layer, detaching the first substrate from the InGaN seed layer and grown InGaN layer to expose a surface of the InGaN seed layer opposite the first mirror layer, and forming a second mirror layer overlaying the opposing surface of the InGaN seed layer.
    Type: Grant
    Filed: September 29, 2010
    Date of Patent: January 1, 2013
    Assignee: Soitec
    Inventor: Fabrice M. Letertre
  • Patent number: 8343850
    Abstract: A process for fabricating a substrate that includes a buried oxide layer for the production of electronic components or the like. The process includes depositing an oxide layer or a nitride layer on either of a donor or receiver substrate, and bringing the donor and receiver substrates into contact; conducting at least a first heat treatment of the oxide or nitride layer before bonding the substrates, and conducting a second heat treatment of the fabricated substrate of the receiver substrate, the oxide layer and all or part of the donor substrate at a temperature equal to or higher than the temperature applied in the first heat treatment. Substrates that have an oxide or nitride layer deposited thereon wherein the oxide or nitride layer is degassed and has a refractive index smaller than the refractive index of an oxide or nitride layer of the same composition formed by thermal growth.
    Type: Grant
    Filed: February 12, 2008
    Date of Patent: January 1, 2013
    Assignee: Soitec
    Inventors: Eric Guiot, Fabrice Lallement
  • Publication number: 20120329243
    Abstract: The invention relates to a process for fabricating a semiconductor that comprises providing a handle substrate comprising a seed substrate and a weakened sacrificial layer covering the seed substrate; joining the handle substrate with a carrier substrate; optionally treating the carrier substrate; detaching the handle substrate at the sacrificial layer to form the semiconductor structure; and removing any residue of the sacrificial layer present on the seed substrate.
    Type: Application
    Filed: June 18, 2012
    Publication date: December 27, 2012
    Applicant: SOITEC
    Inventors: Fabrice Letertre, Didier Landru
  • Patent number: 8338266
    Abstract: The present invention relates to a method for molecular adhesion bonding between at least a first wafer and a second wafer involving aligning the first and second wafers, placing the first and second wafers in an environment having a first pressure (P1) greater than a predetermined threshold pressure; bringing the first wafer and the second wafer into alignment and contact; and initiating the propagation of a bonding wave between the first and second wafer after the wafers are aligned and in contact by reducing the pressure within the environment to a second pressure (P2) below the threshold pressure. The invention also relates to the three-dimensional composite structure that is obtained by the described method of adhesion bonding.
    Type: Grant
    Filed: July 27, 2011
    Date of Patent: December 25, 2012
    Assignee: Soitec
    Inventor: Marcel Broekaart
  • Patent number: 8338294
    Abstract: Methods of forming semiconductor devices include providing a substrate including a layer of semiconductor material on a layer of electrically insulating material. A first metallization layer is formed over a first side of the layer of semiconductor material. Through wafer interconnects are formed at least partially through the substrate. A second metallization layer is formed over a second side of the layer of semiconductor material opposite the first side thereof. An electrical pathway is provided that extends through the first metallization layer, the substrate, and the second metallization layer between a first processed semiconductor structure carried by the substrate on the first side of the layer of semiconductor material and a second processed semiconductor structure carried by the substrate on the first side of the layer of semiconductor material. Semiconductor structures are fabricated using such methods.
    Type: Grant
    Filed: March 31, 2011
    Date of Patent: December 25, 2012
    Assignee: Soitec
    Inventor: Mariam Sadaka
  • Publication number: 20120319128
    Abstract: Methods of fabricating semiconductor devices or structures include forming structures of a semiconductor material overlying a layer of a compliant material, subsequently changing the viscosity of the compliant material to relax the semiconductor material structures, and utilizing the relaxed semiconductor material structures as a seed layer in forming a continuous layer of relaxed semiconductor material. In some embodiments, the layer of semiconductor material may comprise a III-V type semiconductor material, such as, for example, indium gallium nitride. Novel intermediate structures are formed during such methods. Engineered substrates include a continuous layer of semiconductor material having a relaxed lattice structure.
    Type: Application
    Filed: August 22, 2012
    Publication date: December 20, 2012
    Applicant: SOITEC
    Inventor: Chantal Arena
  • Publication number: 20120318330
    Abstract: A voltage matched multijunction solar cell having first and second solar cell stacks which are electrically connected parallel to each other. The first solar cell stack is optimized for absorption of incoming solar light in a first wavelength range and the second solar cell stack is optimized for absorption of incoming solar light in a second wavelength range, wherein the first and the second wavelength range do not or at most only partially overlap each other.
    Type: Application
    Filed: March 17, 2011
    Publication date: December 20, 2012
    Applicant: SOITEC
    Inventors: Andreas Gombert, Sascha Van Riesen
  • Publication number: 20120319121
    Abstract: A manufacturing process for a semiconductor-on-insulator structure having reduced electrical losses and which includes a support substrate made of silicon, an oxide layer and a thin layer of semiconductor material, and a polycrystalline silicon layer interleaved between the support substrate and the oxide layer. The process includes a treatment capable of conferring high resistivity to the support substrate prior to formation of the polycrystalline silicon layer, and then conducting at least one long thermal stabilization on the structure at a temperature not exceeding 950° C. for at least 10 minutes.
    Type: Application
    Filed: June 1, 2012
    Publication date: December 20, 2012
    Applicant: SOITEC
    Inventors: Patrick Reynaud, Sébastien Kerdiles, Daniel Delprat
  • Publication number: 20120322229
    Abstract: The invention relates to a method for bonding two substrates by applying an activation treatment to at least one of the substrates, and performing the contacting step of the two substrates under partial vacuum. Due to the combination of the two steps, it is possible to carry out the bonding and obtain high bonding energy with a reduced number of bonding voids. The invention is in particular applicable to a substrate of processed or at least partially processed devices.
    Type: Application
    Filed: August 29, 2012
    Publication date: December 20, 2012
    Applicant: SOITEC
    Inventor: Arnaud Castex
  • Publication number: 20120313237
    Abstract: Embodiments of the invention include methods and structures for fabricating a semiconductor structure, and, particularly for improving the planarity of a bonded semiconductor structure comprising a processed semiconductor structure and a semiconductor structure.
    Type: Application
    Filed: January 26, 2011
    Publication date: December 13, 2012
    Applicant: Soitec
    Inventors: Mariam Sadaka, Radu Ionut
  • Patent number: 8329571
    Abstract: Methods of forming ternary III-nitride materials include epitaxially growing ternary III-nitride material on a substrate in a chamber. The epitaxial growth includes providing a precursor gas mixture within the chamber that includes a relatively high ratio of a partial pressure of a nitrogen precursor to a partial pressure of one or more Group III precursors in the chamber. Due at least in part to the relatively high ratio, a layer of ternary III-nitride material may be grown to a high final thickness with small V-pit defects therein. Semiconductor structures including such ternary III-nitride material layers are fabricated using such methods.
    Type: Grant
    Filed: February 13, 2012
    Date of Patent: December 11, 2012
    Assignee: Soitec
    Inventors: Christophe Figuet, Pierre Tomasini
  • Patent number: 8329565
    Abstract: Methods which can be applied during the epitaxial growth of semiconductor structures and layers of III-nitride materials so that the qualities of successive layers are successively improved. An intermediate epitaxial layer is grown on an initial surface so that growth pits form at surface dislocations present in the initial surface. A following layer is then grown on the intermediate layer according to the known phenomena of epitaxial lateral overgrowth so it extends laterally and encloses at least the agglomerations of intersecting growth pits. Preferably, prior to growing the following layer, a discontinuous film of a dielectric material is deposited so that the dielectric material deposits discontinuously so as to reduce the number of dislocations in the laterally growing material. The methods of the invention can be performed multiple times to the same structure. Also, semiconductor structures fabricated by these methods.
    Type: Grant
    Filed: May 12, 2011
    Date of Patent: December 11, 2012
    Assignees: Soitec, Arizona Board of Regents for and on Behalf of Arizona State University
    Inventors: Chantal Arena, Ilsu Han
  • Patent number: 8324078
    Abstract: A method of fracturing a composite structure along an embrittlement plane defined between two layers by producing a fracture in the structure along the embrittlement plane. During fracturing, the composite structure is disposed in a boat housing and held in contact against stiffeners disposed on both sides of the structure and aligned parallel to each other. Each stiffener has a diameter that is at least 40% to 300% of the diameter of the composite structure to be fractured.
    Type: Grant
    Filed: July 10, 2008
    Date of Patent: December 4, 2012
    Assignee: Soitec
    Inventor: David Legros
  • Patent number: 8324072
    Abstract: A process for treating a semiconductor-on-insulator type structure that includes, successively, a support substrate, an oxide layer and a thin semiconductor layer. The process includes formation of a silicon nitride or silicon oxynitride mask on the thin semiconductor layer to define exposed areas at the surface of the layer which are not covered by the mask, and which are arranged in a desired pattern; and application of a heat treatment in a neutral or controlled reducing atmosphere and under controlled conditions of temperature and time to induce at least a portion of the oxygen of the oxide layer to diffuse through the thin semiconductor layer, thereby resulting in the controlled reduction in the oxide thickness in the areas of the oxide layer corresponding to the desired pattern. The mask is formed so as to be at least partially buried in the thickness of the thin semiconductor layer.
    Type: Grant
    Filed: September 21, 2009
    Date of Patent: December 4, 2012
    Assignee: Soitec
    Inventors: Christelle Veytizou, Fabrice Gritti, Eric Guiot, Oleg Kononchuk, Didier Landru