Abstract: The production of spacers at flanks of a transistor gate, including a step of forming a dielectric layer covering the gate and a peripheral region of a layer of semiconductor material surrounding the gate, including forming a superficial layer covering the gate and the peripheral region; partially removing the superficial layer configured so as to completely remove the superficial layer at the peripheral region while preserving a residual part of the superficial layer at the flanks; and selective etching of the dielectric layer vis-à-vis the material of the residual part of the superficial layer and vis-à-vis the semiconductor material.
Type:
Application
Filed:
September 16, 2015
Publication date:
March 17, 2016
Applicants:
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, STMICROELECTRONICS SA, STMICROELECTRONICS (CROLLES 2) SAS
Inventors:
Christian ARVET, Sébastien BARNOLA, Sébastien LAGRASTA, Nicolas POSSEME
Abstract: A pulse signal generator has an input receiving an initial pulse signal having an initial period, an oscillator generating an oscillator signal, a first stage and a second stage. The first stage is synchronized with the oscillator signal and configured to deliver a secondary pulse signal having a separation between successive pulses that is representative of an integer part of a division of the initial period by an integer N. The first stage further delivers an auxiliary signal representative of a fractional part of the division and containing, for each pulse of the secondary pulse signal, an indication of a time shift to be applied to the pulse taking into account the separation. The second stage is configured to receive the successive pulses and the corresponding time shift indications and generate successive corresponding pulses of an output pulse signal.
Abstract: Elongated fins of a first semiconductor material are insulated from and formed over an underlying substrate layer (of either SOI or bulk type). Elongated gates of a second semiconductor material are then formed to cross over the elongated fins at channel regions, and the gate side walls are covered by sidewall spacers. A protective material is provided to cover the underlying substrate layer and define sidewall spacers on side walls of the elongated fins between the elongated gates. The first semiconductor material and insulating material of the elongated fins located between the protective material sidewall spacers (but not under the elongated gates) is removed to form trenches aligned with the channel regions. Additional semiconductor material is then epitaxially grown inside each trench between the elongated gates to form source-drain regions adjacent the channel regions formed by the elongated fins of the first semiconductor material located under the elongated gates.
Type:
Application
Filed:
November 13, 2015
Publication date:
March 10, 2016
Applicants:
STMICROELECTRONICS, INC., STMICROELECTRONICS (CROLLES 2) SAS
Inventors:
Stephane Monfray, Ronald K. Sampson, Nicolas Loubet
Abstract: An energy harvester including first and second sheets; and a plurality of walls, each wall being sandwiched between the first and second sheets and surrounding a cavity, wherein each cavity houses at least one curved plate adapted to change from a first shape to a second shape when its temperature reaches a first threshold and to return to the first shape when its temperature falls to a second threshold lower than said first threshold.
Type:
Grant
Filed:
March 28, 2013
Date of Patent:
March 1, 2016
Assignee:
STMicroelectronics (Crolles 2) SAS
Inventors:
Stéphane Monfray, Thomas Skotnicki, Christophe Maitre, Onoriu Puscasu
Abstract: A process for fabricating an integrated circuit includes, in a stack of layers including a silicon substrate overlaid with a buried insulating layer overlaid with a silicon layer, etching first trenches into the silicon substrate, depositing a silicon nitride layer on the silicon layer to fill the first trenches and form first trench isolations, forming a mask on the silicon nitride layer, etching second trenches into the silicon substrate, in a pattern defined by the mask, to a depth greater than a depth of the first trenches, filling the second trenches with an electrical insulator to form second trench isolations, carrying out a chemical etch until the silicon layer is exposed, and forming a FET by forming a channel, a source, and a drain of the field effect transistor in the silicon layer.
Type:
Grant
Filed:
May 29, 2013
Date of Patent:
March 1, 2016
Assignees:
Commissariat a l'energie atomique et aux energies alternatives, STMicroelectronics (Crolles 2) SAS
Abstract: Fabrication of a microelectronic device on a semiconductor on insulator type substrate, the device being provided with a transistor of a given type, the channel structure of which is formed from semiconducting bar(s), a dielectric area different from the insulating layer of the substrate being provided to replace the insulating layer, facing the transistor channel structure, specifically for this given type of transistor.
Type:
Grant
Filed:
May 1, 2014
Date of Patent:
March 1, 2016
Assignees:
Commissariat a l'énergie atomique et aux énergies alternatives, STMICROELECTRONICS (CROLLES 2) SAS
Abstract: The invention relates to a III-V heterostructure laser device (1) arranged in and/or on silicon, comprising: a III-V heterostructure gain medium (3); and an optical rib waveguide (11), arranged facing the gain medium (3) and comprising a slab waveguide (15) equipped with a longitudinal rib (17), the optical rib waveguide (11) being arranged in the silicon. The optical rib waveguide (11) is oriented so that at least one Bragg grating (19, 19a, 19b) is arranged on that side (21) of the slab waveguide (15) which is proximal relative to the gain medium (3) and in that the rib (17) is placed on that side (23) of the slab waveguide (15) that is distal relative to the gain medium (3).
Type:
Application
Filed:
August 17, 2015
Publication date:
February 25, 2016
Applicants:
Commissariat A L'Energie Atomique et aux Energies Alternatives, STMICROELECTRONICS SA, STMICROELECTRONICS (CROLLES 2) SAS
Inventors:
Thomas Ferrotti, Badhise Ben Bakir, Alain Chantre, Sebastien Cremer, Helene Duprez
Abstract: An insulation wall separating transistors formed in a thin semiconductor layer resting on an insulating layer laid on a semiconductor substrate, this wall being formed of an insulating material and comprising a wall crossing the thin layer and the insulating layer and penetrating into the substrate, and lateral extensions extending in the substrate under the insulating layer.
Abstract: A method is provided for producing a microelectronic device with plural zones made of a metal and semiconductor compound, from semiconductor zones made of different semiconductor materials, and on which a thin semiconductor layer is formed prior to the deposition of a metal layer so as to lower the nucleation barrier of the semiconductor zones when reacting with the metal layer.
Type:
Grant
Filed:
April 11, 2013
Date of Patent:
February 23, 2016
Assignees:
Commissariat a l'énergie atomique et aux énergies alternatives, STMICROELECTRONICS (CROLLES 2) SAS
Inventors:
Yves Morand, Charles Baudot, Fabrice Nemouchi
Abstract: The invention relates to a method for manufacturing a transistor comprising the preparation of a stack of layers of the semiconductor on insulator type comprising at least one substrate on which an insulating layer and an initial semiconductor layer are successively disposed. The method includes the formation of at least one oxide pad extending from a top face of the insulating layer, the formation of an additional layer made from semiconductor material covering the oxide pad and intended to form a channel for the transistor, the formation of a gate stack above the oxide pad, and the formation of a source and drain on either side of the gate stack.
Type:
Application
Filed:
October 26, 2015
Publication date:
February 11, 2016
Applicants:
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT, STMICROELECTRONICS (Crolles 2) SAS
Abstract: A method for manufacturing a silicide layer in a hole formed across the entire thickness of a layer of a material deposited on a silicon layer, including: a first step of bombarding of the hole with particles to sputter the silicon at the bottom of the hole and deposit sputtered silicon on lateral walls of the hole; a second step of deposition in the hole of a layer of silicide precursor; a second step of bombarding of the hole with particles to sputter the silicon precursor at the bottom of the hole and deposit sputtered precursor on the internal walls of the hole; a second step of deposition in the hole of a layer of silicide precursor; and an anneal step to form a silicide layer in the hole.
Abstract: A method includes making a gate stack on the surface of an active zone, including depositing a first dielectric layer; depositing a gate conductive layer; depositing a first metal layer; depositing a second metal layer; depositing a second dielectric layer; partially etching the gate stack for the formation of a gate zone on the active zone; making insulating spacers on either side of the gate zone on the active zone; making source and drain electrodes zones; making silicidation zones on the surface of the source and drain zones; etching, in the gate zone on the active zone, the second dielectric layer and the second metal layer with stopping on the first metal layer, so as to form a cavity between the insulating spacers; making a protective plug at the surface of the first metal layer of the gate zone on the active zone, where the protective plug fills the cavity.
Type:
Grant
Filed:
September 26, 2014
Date of Patent:
January 19, 2016
Assignees:
STMICROELECTRONICS SA, STMICROELECTRONICS (CROLLES 2) SAS, COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
Abstract: A method for producing at least one pad assembly (32, 50) on a support (19, 43) for use in a method for self-assembling at least one element (10) on the support (19, 43), comprises fanning, on the support (19, 43), a layer (28, 48) of at least one fluorinated material around the location (30, 44) of the pad assembly (32, 50), the layer (28, 48) having a thickness greater than 10 nm. The layer (28, 48) and the location (30, 44) are exposed to an ultraviolet treatment in the presence of ozone to form the pad assembly (32, 50) at said location (30, 44), wherein a drop of liquid (16) having a static contact angle on the pad assembly (32, 50) less than or equal to 15°, after the exposure to the ultraviolet treatment, has a static contact angle on the layer (28, 48) greater than or equal to 100°.
Type:
Grant
Filed:
March 20, 2013
Date of Patent:
January 19, 2016
Assignees:
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, STMICROELECTRONICS (CROLLES2) SAS
Inventors:
Léa Di Cioccio, Sébastien Mermoz, Loïc Sanchez
Abstract: An integrated capacitive-type humidity sensor formed in a semiconductor chip integrating a sensing capacitor and a reference capacitor. Each of the sensing and reference capacitors have at least a first electrode and at least a second electrode, the first and second electrodes of each of the sensing and reference capacitors being arranged at distance and mutually insulated. A hygroscopic layer extends on the sensing and reference capacitors and a conductive shielding region extends on the reference capacitor but not on the sensing capacitor.
Type:
Grant
Filed:
March 26, 2014
Date of Patent:
January 12, 2016
Assignees:
STMicroelectronics S.r.l., STMicroelectronics (Crolles 2) SAS
Abstract: Method to strain a channel zone of a transistor of the semiconductor on insulator type transistor that makes use of an SMT stress memorisation technique in which regions located under the insulation layer of the substrate (FIG. 6) are amorphised, before the transistor gate is made.
Type:
Application
Filed:
July 6, 2015
Publication date:
January 7, 2016
Applicants:
Commissariat a L'Energie Atomique et aux Energies Alternatives, STMICROELECTRONICS (CROLLES 2) SAS
Abstract: An integrated circuit includes a back side illuminated image sensor formed by a substrate supporting at least one pixel, an interconnect part situated above a front side of the substrate and an anti-reflective layer situated above a back side of the substrate. The anti-reflective layer may be formed of a silicon nitride layer. An additional layer is situated above the anti-reflective layer. The additional layer is formed of one of amorphous silicon nitride or hydrogenated amorphous silicon nitride, in which the ratio of the number of silicon atoms per cubic centimeter to the number of nitrogen atoms per cubic centimeter is greater than 0.7.
Type:
Grant
Filed:
July 30, 2014
Date of Patent:
December 29, 2015
Assignees:
STMicroelectronics (Crolles 2) SAS, Commissariat A L'Energie Atomique et aux Energies Alternatives
Inventors:
Jean-Pierre Carrere, Patrick Gros D'Aillon, Stephane Allegret-Maret, Jean-Pierre Oddou
Abstract: A device includes a substrate and an integrated-circuit interconnect on a first side. A capacitor passes through the substrate possessing a first electrode having a first contact face electrically coupled to a first electrically conductive zone placed on a second side of the substrate and a second electrode electrically coupled to the interconnect. A through-silicon via passes through the substrate having at one end a first contact face electrically coupled to a second electrically conductive zone placed on said second side of the substrate and at the other end a part electrically coupled to the interconnect part. The two first contact faces are located in the same plane.
Type:
Grant
Filed:
June 17, 2014
Date of Patent:
December 29, 2015
Assignees:
STMicroelectronics (Crolles 2) SAS, Commissariat A L'Energie Atomique et aux Energies Alternatives
Abstract: A housing includes a body with a first silicon element and a second porous silicon element, at least one first cavity provided in the porous silicon element, a first electrically conducting contact area electrically coupled to at least a portion of at least one internal wall of the at least one first cavity, and a second electrically conducting contact area electrically coupled to a different portion of the at least one internal wall of the second porous silicon element of the at least one first cavity, wherein the two contact areas are electrically isolated from each other.
Type:
Grant
Filed:
December 12, 2011
Date of Patent:
December 22, 2015
Assignees:
STMicroelectronics SA, STMicroelectronics (Crolles 2) SAS
Abstract: An integrated circuit includes a substrate and an interconnect part above the substrate, and further includes a photosensitive region in the substrate. A filter is provided aligned with the photosensitive region. The filter is formed by at least one layer of filter material. In one implementation for front side illumination, the layer of filter material is positioned above the photosensitive region between the interconnect part and the substrate. In another implementation for back side illumination, the layer of filter material is positioned below the photosensitive region opposite the interconnect part. The layer of filter material is configured such that a product of the thickness of the layer of filter material and the imaginary part of the refractive index of the layer of filter material is above 1 nm.
Type:
Grant
Filed:
September 18, 2014
Date of Patent:
December 22, 2015
Assignees:
STMicroelectronics SA, STMicroelectronics (Crolles 2) SAS, Commissariat A L'Energie Atomique et aux Energies Alternatives
Inventors:
Michel Marty, Sebastien Jouan, Laurent Frey
Abstract: The present disclosure relates to a photodiode comprising: a P-conductivity type substrate region, an electric charge collecting region for collecting electric charges appearing when a rear face of the substrate region receives light, the collecting region comprising an N-conductivity type region formed deep in the substrate region, an N-conductivity type read region formed in the substrate region, and an isolated transfer gate, formed in the substrate region in a deep isolating trench extending opposite a lateral face of the N-conductivity type region, next to the read region, and arranged for receiving a gate voltage to transfer electric charges stored in the collecting region toward the read region.
Type:
Grant
Filed:
March 17, 2015
Date of Patent:
December 8, 2015
Assignees:
STMicroelectronics SA, STMicroelectronics (Crolles 2) SAS