Patents Assigned to TSMC NANJING COMPANY, LIMITED
  • Patent number: 11769669
    Abstract: The semiconductor device includes a semiconductor fin, and a gate stack over the semiconductor fin. The gate stack includes a gate dielectric layer over a channel region of the semiconductor fin, a work function material layer over the gate dielectric layer, wherein the work function material layer includes dopants, and a gate electrode layer over the work function material layer. The gate dielectric layer is free of the dopants.
    Type: Grant
    Filed: February 2, 2021
    Date of Patent: September 26, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY, LIMITED
    Inventors: Min Han Hsu, Jung-Chih Tsao
  • Patent number: 11735251
    Abstract: A circuit includes a tracking word line, a power switch, a tracking bit line, a sense circuit. The power switch is coupled between the tracking word line and a first node. The power switch is configured to discharge a voltage level on the first node in response to a clock pulse signal transmitted through the tracking word line to the power switch. The tracking bit line is coupled between the first node and a plurality of tracking cells in a memory array. The sense circuit is coupled between the first node and a second node. The sense circuit is configured to generate a negative bit line enable signal in response to that the voltage level on the first node is below a threshold voltage value of the sense circuit.
    Type: Grant
    Filed: February 23, 2021
    Date of Patent: August 22, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITED
    Inventors: Xiu-Li Yang, Lu-Ping Kong, Kuan Cheng, He-Zhou Wan
  • Patent number: 11724360
    Abstract: A method of conditioning a polishing pad includes receiving information on a roughness of the polishing pad from a first sensor. The method further includes conditioning the polishing pad using a conditioner. The method further includes detecting the roughness of the polishing pad following the conditioning. The method further includes repeating the conditioning in response to the detected roughness of the polishing pad being outside of a threshold roughness range.
    Type: Grant
    Filed: June 24, 2020
    Date of Patent: August 15, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY, LIMITED
    Inventor: Wen Yen Kung
  • Patent number: 11727177
    Abstract: A method executed at least partially by a processor includes creating a plurality of groups of paths from a plurality of paths in an integrated circuit (IC) layout diagram. Each group among the plurality of groups has a unique dominant feature among a plurality of features of the plurality of paths. The dominant feature of a group among the plurality of groups is slack. The method further includes testing at least one path in a group among the plurality of groups. The method also includes, in response to the testing indicating that the at least one path fails, modifying at least one of the IC layout diagram, at least a portion of at least one library having cells included in the IC layout diagram, or a manufacturing process for manufacturing an IC corresponding to the IC layout diagram.
    Type: Grant
    Filed: June 9, 2022
    Date of Patent: August 15, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY, LIMITED
    Inventors: Ankita Patidar, Sandeep Kumar Goel, Yun-Han Lee
  • Publication number: 20230253785
    Abstract: An integrated circuit includes a control circuit and first to second voltage generation circuits. The control circuit is coupled between a first voltage terminal providing a first supply voltage and a first node coupled to a first capacitive unit. The first voltage generation circuit includes at least one first transistor that has a source terminal receiving a second supply voltage, a drain terminal coupled to a second node in contact with a second capacitive unit, and a gate terminal coupled to the first node. The second voltage generation circuit is coupled to the first voltage terminal and the first and second nodes. Firstly the control circuit turns on the at least one first transistor to adjust a voltage level of the second node to have the second supply voltage. The second voltage generation circuit adjusts a voltage level of the first node to have the first supply voltage.
    Type: Application
    Filed: April 19, 2023
    Publication date: August 10, 2023
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITED
    Inventors: Kai ZHOU, Lei PAN, Ya-Qi MA, Zhang-Ying YAN
  • Patent number: 11721374
    Abstract: A memory device includes a local input/output circuit and a main input/output circuit. The local input/output circuit is configured to generate a first local write signal based on a first global write signal and a second global write signal, and configured to transmit the first local write signal to a plurality of first bit lines. The main input/output circuit include a first latch and logic elements. The first latch is configured to generate a first bit write mask signal based on a clock signal. The logic elements are configured to generate the first global write signal and the second global write signal based on the clock signal and the first bit write mask signal.
    Type: Grant
    Filed: June 29, 2022
    Date of Patent: August 8, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITED
    Inventors: He-Zhou Wan, Xiu-Li Yang, Pei-Le Li, Ching-Wei Wu
  • Patent number: 11705175
    Abstract: A circuit includes a plurality of registers, each register including SRAM cells, a read port configured to receive a read address, a write port configured to receive a write address, a selection circuit, a latch circuit, and a decoder coupled in series between the read and write ports and the plurality of registers, and a control circuit. Responsive to a clock signal and read and write enable signals, the control circuit causes the selection circuit, the latch circuit, and the decoder to select a first register of the plurality of registers in a read operation based on the read address, and select a second register of the plurality of registers in a write operation based on the write address.
    Type: Grant
    Filed: August 8, 2022
    Date of Patent: July 18, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY, LIMITED, TSMC CHINA COMPANY, LIMITED
    Inventors: XiuLi Yang, Ching-Wei Wu, He-Zhou Wan, Kuan Cheng, Luping Kong
  • Patent number: 11699010
    Abstract: A method of manufacturing a semiconductor device includes reducing errors in a migration of a first netlist to a second netlist, the first netlist corresponding to a first semiconductor process technology (SPT), the second first netlist corresponding to a second SPT, the first and second netlists each representing a same circuit design, the reducing errors including: inspecting a timing constraint list corresponding to the second netlist for addition candidates; generating a first version of the second netlist having a first number of comparison points relative to a logic equivalence check (LEC) context, the first number of comparison points being based on the addition candidates; performing a LEC between the first netlist and the first version of the second netlist, thereby identifying migration errors; and revising the second netlist to reduce the migration errors, thereby resulting in a second version of the second netlist.
    Type: Grant
    Filed: July 1, 2021
    Date of Patent: July 11, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY, LIMITED
    Inventors: Sandeep Kumar Goel, Ankita Patidar, Yun-Han Lee
  • Patent number: 11699015
    Abstract: An integrated circuit includes a middle active-region structure between a group-one active-region structure and a group-two active-region structure. The integrated circuit also includes a main circuit, a group-one circuit, and a group-two circuit. The main circuit includes at least one boundary gate-conductor intersecting the middle active-region structure. The group-one circuit includes a group-one isolation structure separating the group-one active-region structure into a first part in the group-one circuit and a second part in a first adjacent circuit. The group-two circuit includes a group-two isolation structure separating the group-two active-region structure into a first part in the group-two circuit and a second part in a second adjacent circuit.
    Type: Grant
    Filed: August 3, 2021
    Date of Patent: July 11, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY, LIMITED, TSMC CHINA COMPANY, LIMITED
    Inventors: Huaixin Xian, J. B. Zhang, Yang Zhou, Kai Zhou, Qingchao Meng, Lei Pan
  • Patent number: 11695413
    Abstract: A Schmitt trigger circuit includes a first and second set of transistors, a first and second feedback transistor, and a first and second circuit. The first set of transistors is connected between a first voltage supply and an output node. The first voltage supply has a first voltage. The second set of transistors is connected between the output node and a second voltage supply. The second voltage supply has a second voltage. The first feedback transistor is connected to the output node, a first node and a second node. The second feedback transistor is connected to the output node, a third node and a fourth node. The first circuit is coupled to and configured to supply the second supply voltage to the second node. The second circuit is coupled to and configured to supply the first supply voltage to the fourth node.
    Type: Grant
    Filed: October 22, 2021
    Date of Patent: July 4, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TAIWAN CHINA COMPANY, LIMITED, TSMC NANJING COMPANY, LIMITED
    Inventors: Lei Pan, Yaqi Ma, Jing Ding, Zhang-Ying Yan
  • Patent number: 11652348
    Abstract: An integrated circuit includes a control circuit, a first voltage generation circuit, and a second voltage generation circuit. The control circuit is coupled between a first voltage terminal and a first node, and generates an initiation voltage at the first node. The first voltage generation circuit and the second voltage generation circuit are coupled to a first capacitive unit at the first node and coupled to a second capacitive unit at a second node. The first voltage generation circuit generates, in response to the initiation voltage at the first node, a first control signal based on a first supply voltage to the second voltage generation circuit. The second voltage generation circuit generates, in response to the first control signal received from the first voltage generation circuit, a second control signal to the first node, based on a second supply voltage.
    Type: Grant
    Filed: January 6, 2021
    Date of Patent: May 16, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITED
    Inventors: Kai Zhou, Lei Pan, Ya-Qi Ma, Zhang-Ying Yan
  • Publication number: 20230122135
    Abstract: A device is provided. The device includes multiple transistors, a first sense circuit, and a precharge circuit. The transistors are coupled to a tracking bit line and configured to generate a first tracking signal. The first sense circuit is configured to generate a first sense tracking signal in response to the first tracking signal. The precharge circuit is configured to generate, in response to a rising edge and a falling edge of the first sense tracking signal, a precharge signal for precharging data lines.
    Type: Application
    Filed: December 20, 2022
    Publication date: April 20, 2023
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC Nanjing Company Limited, TSMC China Company Limited
    Inventors: Xiu-Li YANG, He-Zhou WAN, Lu-Ping KONG, Wei-Yang JIANG
  • Patent number: 11632048
    Abstract: A voltage regulator includes an output node, a control circuit, and a power stage. The control circuit is configured to receive a power state signal from a load circuit coupled to the output node, and output a control signal based on the power state signal. The power stage includes a plurality of phase circuits coupled to the output node and is configured to enable a phase circuit of the plurality of phase circuits responsive to the control signal.
    Type: Grant
    Filed: February 24, 2020
    Date of Patent: April 18, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY, LIMITED
    Inventors: Haohua Zhou, Tze-Chiang Huang, Mei Hsu, Yun-Han Lee
  • Publication number: 20230049698
    Abstract: A memory device includes a first transistor, a second transistor and a third transistor. The first transistor is coupled to a first word line at a first node. The second transistor is coupled to a second word line different from the first word line at a second node. A control terminal of the first transistor is coupled to a control terminal of the second transistor. The third transistor is coupled between a ground and a third node which is coupled to each of the first node and the second node. In a layout view, each of the first transistor and the second transistor has a first length along a direction. The first transistor, the third transistor and second transistor are arranged in order along the direction. A method is also disclosed herein.
    Type: Application
    Filed: October 26, 2022
    Publication date: February 16, 2023
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC Nanjing Company Limited, TSMC China Company Limited
    Inventors: He-Zhou WAN, Xiu-Li YANG, Mu-Yang YE, Yan-Bo SONG
  • Patent number: 11562946
    Abstract: A memory macro structure includes a first memory array, a second memory array, a cell activation circuit coupled to the first and second memory arrays and positioned between the first and second memory arrays, a control circuit coupled to the cell activation circuit and positioned adjacent to the cell activation circuit, and a through-silicon via (TSV) extending through one of the cell activation circuit or the control circuit.
    Type: Grant
    Filed: March 23, 2021
    Date of Patent: January 24, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY, LIMITED
    Inventors: Hidehiro Fujiwara, Tze-Chiang Huang, Hong-Chen Cheng, Yen-Huei Chen, Hung-Jen Liao, Jonathan Tsung-Yung Chang, Yun-Han Lee, Lee-Chung Lu
  • Patent number: 11557336
    Abstract: A device is disclosed. The device includes a first tracking control line, a first tracking circuit, a first sense circuit, and a precharge circuit. The first tracking control line is configured to transmit a first tracking control signal. The first tracking circuit is configured to generate, in response to the first tracking control signal, a first tracking signal associated with first tracking cells in a memory array. The first sense circuit is configured to receive the first tracking signal, and is configured to generate a first sense tracking signal in response to the first tracking signal. The precharge circuit is configured to generate, in response to a rising edge of the first sense tracking signal and a falling edge of a read enable delayed signal, a precharge signal for precharging data lines associated with memory cell in the memory array. A method is also disclosed herein.
    Type: Grant
    Filed: November 30, 2020
    Date of Patent: January 17, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITED
    Inventors: Xiu-Li Yang, He-Zhou Wan, Lu-Ping Kong, Wei-Yang Jiang
  • Patent number: 11527406
    Abstract: A method of forming a semiconductor device structure is provided. The method includes forming a resist structure over a substrate. The resist structure includes an anti-reflective coating (ARC) layer and a photoresist layer over the ARC layer. The method further includes patterning the photoresist layer to form a trench therein. The method further includes performing a hydrogen plasma treatment to the patterned photoresist layer. The hydrogen plasma treatment is configured to smooth sidewalls of the trench without etching the ARC layer. The method further includes patterning the ARC layer using the patterned photoresist layer as a etch mask.
    Type: Grant
    Filed: January 14, 2020
    Date of Patent: December 13, 2022
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY, LIMITED
    Inventors: Sheng-Lin Hsieh, I-Chih Chen, Ching-Pei Hsieh, Kuan Jung Chen
  • Publication number: 20220382950
    Abstract: A method is provided and includes several operations: arranging multiple channels extending in a first direction; arranging, in accordance with multiple weights of multiple macros, a first portion of the macro closer to a centroid of a core region of an integrated circuit than a second portion of the macros; and arranging the macros on opposite sides of the channels. The macros have multiple pins coupled to the channels interposed between the macros.
    Type: Application
    Filed: August 8, 2022
    Publication date: December 1, 2022
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC NANJING COMPANY LIMITED
    Inventors: Yi-Lin CHUANG, Shi-Wen TAN, Song LIU, Shih-Yao LIN, Wen-Yuan FANG
  • Patent number: 11514974
    Abstract: A memory device includes a word line driver. The word line driver is coupled through word lines to an array of bit cells. The word line driver includes a first driving circuit, a second driving circuit and a modulating circuit. The first driving circuit and the second driving circuit are configured to select a word line. The modulating circuit is coupled through the selected word line to the first driving circuit and the second driving circuit, and is configured to modulate at least one signal transmitted through the selected word line. The first driving circuit and the second driving circuit are further configured to charge the selected word line to generate a first voltage signal and a second voltage signal at two positions of the selected word line. The first voltage signal is substantially the same as the second voltage signal. A method is also disclosed herein.
    Type: Grant
    Filed: March 22, 2021
    Date of Patent: November 29, 2022
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITED
    Inventors: He-Zhou Wan, Xiu-Li Yang, Mu-Yang Ye, Yan-Bo Song
  • Publication number: 20220375854
    Abstract: A semiconductor device includes a substrate, an active region, an isolation structure, a first metal line, gate structure, source/drain region, a source/drain contact, and a second metal line. The active region protrudes from a top surface of the substrate. The isolation structure is over the substrate and laterally surrounds the active region. The first metal line is in the isolation structure. The gate structure is over the active region. The source/drain region is in the active region. The source/drain contact is over the active region and is electrically connected to the source/drain region. The second metal line is over the gate structure and the source/drain contact, in which the second metal line vertically overlaps the first metal line.
    Type: Application
    Filed: July 27, 2022
    Publication date: November 24, 2022
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC Nanjing Company Limited, TSMC China Company Limited
    Inventors: Zhang-Ying YAN, Xin-Yong WANG