Patents Assigned to TSMC NANJING COMPANY, LIMITED
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Publication number: 20220189541Abstract: A circuit includes a tracking word line, a power switch, a tracking bit line, a sense circuit. The power switch is coupled between the tracking word line and a first node. The power switch is configured to discharge a voltage level on the first node in response to a clock pulse signal transmitted through the tracking word line to the power switch. The tracking bit line is coupled between the first node and a plurality of tracking cells in a memory array. The sense circuit is coupled between the first node and a second node. The sense circuit is configured to generate a negative bit line enable signal in response to that the voltage level on the first node is below a threshold voltage value of the sense circuit.Type: ApplicationFiled: February 23, 2021Publication date: June 16, 2022Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC Nanjing Company Limited, TSMC China Company LimitedInventors: Xiu-Li YANG, Lu-Ping KONG, Kuan CHENG, He-Zhou WAN
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Publication number: 20220173224Abstract: A method includes forming a fin structure including a plurality of first semiconductor layers and a plurality of second semiconductor layers alternately stacked over a substrate. A dummy gate structure is formed across the fin structure. The exposed second portions of the fin structure are removed. A selective etching process is performed, using a gas mixture including a hydrogen-containing gas and a fluorine-containing gas, to laterally recess the first semiconductor layers. Inner spacers are formed on opposite end surfaces of the laterally recessed first semiconductor layers. Source/drain epitaxial structures are formed on opposite end surfaces of the second semiconductor layers. The dummy gate structure is removed to expose the first portion of the fin structure. The laterally recessed first semiconductor layers are removed. A gate structure is formed to surround each of the second semiconductor layers.Type: ApplicationFiled: January 19, 2021Publication date: June 2, 2022Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC Nanjing Company LimitedInventors: Han-Yu LIN, Fang-Wei LEE, Kai-Tak LAM, Raghunath PUTIKAM, Tzer-Min SHEN, Li-Te LIN, Pinyen LIN, Cheng-Tzu YANG, Tzu-Li LEE, Tze-Chung LIN
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Publication number: 20220165315Abstract: A device includes a memory array, bit line pairs, word lines, a modulation circuit and a control signal generator. The memory array has bit cells arranged in rows and columns. Each bit line pair is connected to a respective column of bit cells. Each word line is connected to a respective row of bit cells. The modulation circuit is coupled with at least one bit line pair. The control signal generator is coupled with the modulation circuit. The control signal generator includes a tracking wiring with a tracking length positively correlated with a depth distance of the word lines. The control signal generator is configured to produce a control signal, switching to a first voltage level for a first time duration in reference with the tracking length, for controlling the modulation circuit. A method of controlling aforesaid device is also disclosed.Type: ApplicationFiled: January 25, 2021Publication date: May 26, 2022Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITEDInventors: Xiu-Li YANG, He-Zhou WAN, Mu-Yang YE, Lu-Ping KONG, Ming-Hung CHANG
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Publication number: 20220147691Abstract: A method includes the following operations: receiving design rule violations of a first layout; classifying, according to first chip features of the first layout, a first violation of the design rule violations into a first class of predefined classes; generating a first vector array for at least one of the first chip features of the first layout, that is associated with the first violation; selecting, according to the first vector array, first operations from pre-stored operations; generating a second layout based on the first layout and the first operations.Type: ApplicationFiled: December 8, 2020Publication date: May 12, 2022Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPNAY, LTD., TSMC NANJING COMPANY LIMITEDInventors: Yi-Lin CHUANG, Song LIU, Pei-Pei CHEN, Heng-Yi LIN, Shih-Yao LIN, Chin-Hsien WANG
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Publication number: 20220149616Abstract: An integrated circuit includes a control circuit, a first voltage generation circuit, and a second voltage generation circuit. The control circuit is coupled between a first voltage terminal and a first node, and generates an initiation voltage at the first node. The first voltage generation circuit and the second voltage generation circuit are coupled to a first capacitive unit at the first node and coupled to a second capacitive unit at a second node. The first voltage generation circuit generates, in response to the initiation voltage at the first node, a first control signal based on a first supply voltage to the second voltage generation circuit. The second voltage generation circuit generates, in response to the first control signal received from the first voltage generation circuit, a second control signal to the first node, based on a second supply voltage.Type: ApplicationFiled: January 6, 2021Publication date: May 12, 2022Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITEDInventors: Kai ZHOU, Lei PAN, Ya-Qi MA, Zhang-Ying YAN
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Publication number: 20220149077Abstract: An IC structure includes first and second gates, first and second source/drain regions, and an isolation region. The first and second gates each have a first portion extending along a first direction and a second portion extending along a second direction. The first source/drain regions are respectively on opposite sides of the first portion of the first gate. The second source/drain regions are respectively on opposite sides of the first portion of the second gate. The isolation region has a lower portion between a first one of the first source/drain regions and a first one of the second source/drain regions, and an upper portion partially overlapping with the second portion of first gate and the second portion of the second gate. A width of the lower portion is a less than a width of the upper portion.Type: ApplicationFiled: January 27, 2022Publication date: May 12, 2022Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITEDInventors: Tian-Yu XIE, Xin-Yong WANG, Lei PAN, Kuo-Ji CHEN
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Publication number: 20220139452Abstract: A device is disclosed. The device includes a first tracking control line, a first tracking circuit, a first sense circuit, and a precharge circuit. The first tracking control line is configured to transmit a first tracking control signal. The first tracking circuit is configured to generate, in response to the first tracking control signal, a first tracking signal associated with first tracking cells in a memory array. The first sense circuit is configured to receive the first tracking signal, and is configured to generate a first sense tracking signal in response to the first tracking signal. The precharge circuit is configured to generate, in response to a rising edge of the first sense tracking signal and a falling edge of a read enable delayed signal, a precharge signal for precharging data lines associated with memory cell in the memory array. A method is also disclosed herein.Type: ApplicationFiled: November 30, 2020Publication date: May 5, 2022Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC Nanjing Company Limited, TSMC China Company LimitedInventors: Xiu-Li YANG, He-Zhou WAN, Lu-Ping KONG, Wei-Yang JIANG
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Publication number: 20220092248Abstract: A method is provided in the present disclosure. The method includes several operations: generating a floor plan having multiple macros for an integrated circuit; adjusting the macros according to a channel area interposed between the pins; separating the macros by a channel width of the channel area; and adjusting, in accordance with correlations between the macros and multiple registers, the macros in the floor plan.Type: ApplicationFiled: October 15, 2020Publication date: March 24, 2022Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC NANJING COMPANY LIMITEDInventors: Yi-Lin CHUANG, Shi-Wen TAN, Song LIU, Shih-Yao LIN, Wen-Yuan FANG
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Patent number: 11276638Abstract: A semiconductor structure includes a first conductive line and a second conductive line in a first dielectric layer, and a third conductive line in a second dielectric layer overlying the first dielectric layer. The first conductive line and the second conductive line each extend along a first direction. The third conductive line extends along a second direction different from the first direction and above at least the second conductive line. The semiconductor structure further includes a via in the second dielectric layer and electrically connecting the second conductive line and the third conductive line. The via lands on a portion of the second conductive line. The semiconductor structure further includes a dielectric cap over the first conductive line. A bottom surface of the dielectric cap is below a top surface of the first dielectric layer.Type: GrantFiled: November 7, 2019Date of Patent: March 15, 2022Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY, LIMITEDInventors: Yi-Chun Huang, I-Chih Chen, Chun-Wei Kuo
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Patent number: 11263375Abstract: A method, for determining constraints related to a target circuit, includes following operations. First circuit speed results of the target circuit under different candidate constraint configurations are accumulated. Breakthrough probability distributions relative to each of the candidate constraint configurations are determined according to the first circuit speed results. First selected constraint configurations are determined from the candidate constraint configurations by sampling the breakthrough probability distributions. A first budget distribution is determined among the first selected constraint configurations. In response to that the first budget distribution is converged, the first selected constraint configurations in the first budget distribution is utilized for implementing the target circuit and generating an updated circuit speed result of the target circuit.Type: GrantFiled: June 30, 2020Date of Patent: March 1, 2022Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC NANJING COMPANY LIMITEDInventors: Yi-Lin Chuang, Shi-Wen Tan, Szu-Ju Huang, Shih-Feng Hong
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Patent number: 11257825Abstract: A device includes a master latch, a slave latch and a retention latch coupled to each other. The retention latch includes first and second active areas, first and second gate structures. The first and second active areas extend in a first direction. The first gate structure extends in a second direction, the first gate structure including first and second portions that are separated from each other. The first portion is arranged over the first active area, and the second portion is arranged over the second active area. The second gate structure extends in the second direction, and is arranged over the first active area. The second gate structure is separated from the second active area and the first gate structure in a layout view. An end portion of the second active area is between the first gate structure and the second gate structure.Type: GrantFiled: October 28, 2020Date of Patent: February 22, 2022Assignees: Taiwan Semiconductor Manufacturing Co., Ltd., TSMC Nanjing Company LimitedInventors: Huai-Xin Xian, Yang Zhou, Qing-Chao Meng
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Patent number: 11239255Abstract: An IC structure includes first and second transistors, an isolation region and a first gate extension. The first transistor includes a first gate and first source/drain regions respectively on opposite sides of the first gate. The second transistor includes a second gate and second source/drain regions respectively on opposite sides of the second gate. The isolation region is laterally between the first and second transistors. A first one of the first source/drain regions has a first source/drain extension protruding from a first boundary of the isolation region, and a first one of the second source/drain regions has a second source/drain extension protruding from a second boundary of the isolation region. The first gate extension extends from the first gate to a position overlapping the isolation region.Type: GrantFiled: October 15, 2020Date of Patent: February 1, 2022Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITEDInventors: Tian-Yu Xie, Xin-Yong Wang, Lei Pan, Kuo-Ji Chen
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Publication number: 20220028781Abstract: A semiconductor device includes a substrate, an active region, an isolation structure, a first metal line, gate structure, source/drain region, a source/drain contact, and a second metal line. The active region protrudes from a top surface of the substrate. The isolation structure is over the substrate and laterally surrounds the active region. The first metal line is in the isolation structure. The gate structure is over the active region. The source/drain region is in the active region. The source/drain contact is over the active region and is electrically connected to the source/drain region. The second metal line is over the gate structure and the source/drain contact, in which the second metal line vertically overlaps the first metal line.Type: ApplicationFiled: September 11, 2020Publication date: January 27, 2022Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC Nanjing Company Limited, TSMC China Company LimitedInventors: Zhang-Ying YAN, Xin-Yong WANG
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Publication number: 20210384128Abstract: A device includes a transistor, an insulating structure, a buried conductive line, and a buried via. The transistor is above a substrate and includes a source/drain region and a source/drain contact above the source/drain region. The insulating structure is above the substrate and laterally surrounds the transistor. The buried conductive line is in the insulating structure and spaced apart from the transistor. The buried via is in the insulating structure and interconnects the transistor and the buried conductive line. A height of the buried conductive line is greater than a height of the source/drain contact.Type: ApplicationFiled: June 23, 2020Publication date: December 9, 2021Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITEDInventors: Xin-Yong WANG, Liu HAN, Li-Chun TIEN, Chih-Liang CHEN
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Publication number: 20210375852Abstract: A memory device includes a first plurality of program lines of a first group, a second plurality of program lines of a second group, and a plurality of address lines. The second plurality of program lines are disposed next to and are parallel to the first plurality of program lines. The plurality of address lines are coupled to the first plurality of program lines and the second plurality of program lines respectively. The plurality of address lines are twisted and are intersected with the first plurality of program lines and the second plurality of program lines in a layout view. At least two adjacent program lines of the first plurality of program lines or the second plurality of program lines have lengths different from each other. A method is also disclosed herein.Type: ApplicationFiled: July 14, 2020Publication date: December 2, 2021Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITEDInventors: Yuan MA, Ke-Liang SHANG, Xin-Yong WANG
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Publication number: 20210365620Abstract: A method, for determining constraints related to a target circuit, includes following operations. First circuit speed results of the target circuit under different candidate constraint configurations are accumulated. Breakthrough probability distributions relative to each of the candidate constraint configurations are determined according to the first circuit speed results. First selected constraint configurations are determined from the candidate constraint configurations by sampling the breakthrough probability distributions. A first budget distribution is determined among the first selected constraint configurations. In response to that the first budget distribution is converged, the first selected constraint configurations in the first budget distribution is utilized for implementing the target circuit and generating an updated circuit speed result of the target circuit.Type: ApplicationFiled: June 30, 2020Publication date: November 25, 2021Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC NANJING COMPANY LIMITEDInventors: Yi-Lin CHUANG, Shi-Wen TAN, Szu-Ju HUANG, Shih-Feng HONG
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Publication number: 20210320098Abstract: A semiconductor device includes a substrate, a first gate structure, a second gate structure, a third gate structure, and a first source/drain region. The first, second, and third gate structures are above the substrate and arranged in a first direction. The first, second, and third gate structures extend in a second direction different from the first direction, and the second gate structure is between the first and third gate structures. The first source/drain region is between the first and third gate structures, and the first source/drain region is at one end of the second gate structure.Type: ApplicationFiled: May 11, 2020Publication date: October 14, 2021Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC Nanjing Company Limited, TSMC China Company LimitedInventors: Xin-Yong WANG, Yang ZHOU, Liu HAN
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Publication number: 20210320181Abstract: A semiconductor device includes a source/drain region, a body region, a first gate structure, and a second gate structure. The source/drain region and the body region are in a substrate. The first and second gate structures are above the substrate. The source/drain region and the body region are on opposite sides of the first gate structure. The second gate structure is spaced apart from the first gate structure. The source/drain region, the body region, and the first gate structure are on a same side of the second gate structure.Type: ApplicationFiled: May 15, 2020Publication date: October 14, 2021Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITEDInventors: Xin-Yong WANG, Liu HAN
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Patent number: 11145760Abstract: A semiconductor structure includes an active semiconductor fin having a first height, a dummy semiconductor fin adjacent to the active semiconductor fin and having a second height less than the first height, an isolation structure between the active semiconductor fin and the dummy semiconductor fin, and a dielectric cap over the dummy semiconductor fin. The dielectric cap is separated from the active semiconductor fin.Type: GrantFiled: September 25, 2019Date of Patent: October 12, 2021Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY, LIMITEDInventors: Kuan Jung Chen, I-Chih Chen, Chih-Mu Huang, Ching-Pin Lin, Sheng-Lin Hsieh
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Patent number: 11055455Abstract: A method (of reducing errors in a migration a first netlist to a second netlist, the first and second netlists representing corresponding first and second implementations of a circuit design under corresponding first and second semiconductor process technology (SPT) nodes, at least the second netlist being stored on a non-transitory computer-readable medium), the method including: inspecting a timing constraint list for addition candidates, the timing constraint list corresponding to an initial netlist which represents the second implementation; relative to a logic equivalence check (LEC) context, increasing a number of comparison points based on the addition candidates, resulting in first version of the second netlist; performing a LEC between the first netlist and the first version of the second netlist, thereby identifying migration errors; and revising the first version of the second netlist to reduce the migration errors, thereby resulting in a second version of the second netlist.Type: GrantFiled: February 12, 2020Date of Patent: July 6, 2021Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., TSMC NANJING COMPANY, LIMITEDInventors: Sandeep Kumar Goel, Yun-Han Lee, Ankita Patidar