Abstract: A detection method includes: determining process data of a new process; according to the process data of the new process, detecting, by a first production system, whether a wafer carrier type of the new process matches an acceptable level of a corresponding process step or not and whether the new process matches a flag of the corresponding process step or not; if not, determining that the process data does not pass the detection and outputting first detection information; or if the wafer carrier type of the new process matches the acceptable level of the corresponding process step and the new process matches the flag of the corresponding process step, detecting, by a second production system, if the second production system detects a mismatch, determining that the process data does not pass the detection and outputting second detection information.
Type:
Grant
Filed:
June 16, 2021
Date of Patent:
January 9, 2024
Assignee:
CHANGXIN MEMORY TECHNOLOGIES, INC.
Inventors:
Dandan Chen, MingHung Hsieh, Sheng-Hua Su
Abstract: There is provided a method of additive manufacturing using at least one processor, the method includes: determining a first slicing layer of a three-dimensional (3D) model of a 3D object; determining a second slicing layer of the 3D model based on the first slicing layer, the second slicing layer being immediately subsequent to the first slicing layer; and determining a thickness of the second slicing layer and an orientation for a third slicing layer of the 3D model based on a difference between the second slicing layer and the first slicing layer, the third slicing layer being immediately subsequent to the second slicing layer. There is also provided a corresponding system and computer program product for additive manufacturing.
Type:
Grant
Filed:
February 14, 2019
Date of Patent:
January 9, 2024
Assignees:
Agency for Science, Technology and Research, Nanyang Technological University
Inventors:
Xiling Yao, Youxiang Chew, Guijun Bi, Seung Ki Moon
Abstract: A vehicle system includes a controller configured to acquire environment data, acquire GPS data including information regarding characteristics of a route between an initial location of a vehicle and a destination for the vehicle, receive an initial property of drum contents within a mixing drum of the vehicle, receive a target property for the drum contents, operate a drum drive system of the vehicle at a first drive speed determined based on the initial property, the target property, the environment data, and the GPS data, receive a signal from a mixture sensor indicative of a current property of the drum contents at a current location of the vehicle different than the initial location, and adjust the first drive speed of the drum drive system to a second drive speed where the second drive speed is determined based on the target property, the current property, updated environment data, and updated GPS data.
Abstract: A substrate processing control method in a substrate processing apparatus, includes: acquiring a data set for each substrate sequentially subjected to first and second processes at first and second levels, the data set including information specifying the first level at which the first process has been performed, information specifying the second level at which the second process has been performed and information about a characteristic amount relating to characteristics of the substrate; calculating information including an expected value of the characteristic amount, and level deviations of the first and second levels to the expected value based on the data set; and correcting the first parameter at the first level or the second parameter at the second level based on the calculated information.