Patents Examined by Changhyun Yi
  • Patent number: 11367846
    Abstract: The present disclosure discloses a film layer analysis method for an electroluminescent device. The electroluminescent device includes an anode layer, an electroluminescent material layer, and a silver-bearing cathode layer that are sequentially laminated. The film layer analysis method includes stripping the silver-bearing cathode layer from the electroluminescent device by using a first ion sputtering source to obtain an analysis sample with the electroluminescent material layer exposed, and analyzing the exposed electroluminescent material layer by using a second ion sputtering source; wherein sputtering energy of the first ion sputtering source is greater than sputtering energy of the second ion sputtering source.
    Type: Grant
    Filed: November 1, 2019
    Date of Patent: June 21, 2022
    Assignees: CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Ying Liu, Yuhang Peng, Congcong Du, Lei Fan, Chunfang Fan, Qi Wu, Xiaozhong Xue, Haoran Qin
  • Patent number: 11367722
    Abstract: A nanowire transistor structure has a first device region with a first body of semiconductor material having a first cross-sectional shape. A second device region has a second body with a second cross-sectional shape different from the first cross-sectional shape. The first device section is vertically above or below the second device section with the bodies extending horizontally between a source and drain. A first gate structure is wrapped around the first body and a second gate structure is wrapped around the second body. Differences in the geometries of the nanowires can be used to optimize performance in the first device section independently of the second device section.
    Type: Grant
    Filed: September 21, 2018
    Date of Patent: June 21, 2022
    Assignee: Intel Corporation
    Inventors: Aaron Lilak, Stephen Cea, Gilbert Dewey, Willy Rachmady, Roza Kotlyar, Rishabh Mehandru, Sean Ma, Ehren Mannebach, Anh Phan, Cheng-Ying Huang
  • Patent number: 11362033
    Abstract: Semiconductor structure and fabrication method are provided. The method includes providing a substrate including a first region and a second region; forming a plurality of fins on the first region of the substrate; forming an isolation structure on the first region and the second region of the substrate; forming a gate structure across the plurality of fins and on the isolation structure at the first region; etching the isolation structure and the substrate at the second region to form a first opening; filling the first opening with a conductive material layer; and etching the gate structure till exposing the isolation structure to form a second opening in the gate structure and removing a portion of the conductive material layer in the first opening to form a power rail.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: June 14, 2022
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: Haiyang Zhang, Panpan Liu
  • Patent number: 11362182
    Abstract: A semiconductor device includes; a substrate including a first region and a second region, a first active pattern extending upward from the first region, a first superlattice pattern on the first active pattern, a first active fin centrally disposed on the first active pattern, a first gate electrode disposed on the first active fin, and first source/drain patterns disposed on opposing sides of the first active fin and on the first active pattern. The first superlattice pattern includes at least one first semiconductor layer and at least one first blocker-containing layer, and the first blocker-containing layer includes at least one of oxygen, carbon, fluorine and nitrogen.
    Type: Grant
    Filed: November 3, 2020
    Date of Patent: June 14, 2022
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ilgyou Shin, Minyi Kim, Myung Gil Kang, Jinbum Kim, Seung Hun Lee, Keun Hwi Cho
  • Patent number: 11362137
    Abstract: The disclosure relates to an optoelectronic device comprising: a plurality of separate first electrodes that extend longitudinally in parallel to an axis A1, each first electrode being formed of a longitudinal conductive portion and a conductive nucleation strip, the longitudinal conductive portion having an electrical resistance lower than that of the conductive nucleation strip; a plurality of diodes; at least one intermediate insulating layer covering the first electrodes; and a plurality of separate second electrodes in the form of transparent conductive strips that extend longitudinally in contact with second doped portions, and are electrically insulated from the first electrodes by means of the intermediate insulating layer, parallel to an axis A2, the axis A2 not being parallel to axis A1.
    Type: Grant
    Filed: December 21, 2018
    Date of Patent: June 14, 2022
    Assignee: Aledia
    Inventors: Vincent Beix, Erwan Dornel
  • Patent number: 11355502
    Abstract: Semiconductor device and the manufacturing method thereof are disclosed. An exemplary semiconductor device includes a substrate including top portions isolated by an isolation structure, first semiconductor layers over a first top portion of the substrate in a first region, and a first gate structure wrapping each of the first semiconductor layers and covering a top surface and sidewalls of the first top portion of the substrate extending above the isolation structure. The first semiconductor layers are stacked up and separated from each other, and each first semiconductor layer has a first width. A bottom surface of the first gate structure is below the top surface of the substrate for a first depth which is at least half of the first width.
    Type: Grant
    Filed: September 21, 2020
    Date of Patent: June 7, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventor: Jhon Jhy Liaw
  • Patent number: 11355637
    Abstract: A semiconductor device and method of manufacture are provided which help to support contacts while material is removed to form air gaps. In embodiments a contact is formed with an enlarged base to help support overlying portions of the contact. In other embodiments a scaffold material may also be placed prior to the formation of the air gaps in order to provide additional support.
    Type: Grant
    Filed: June 30, 2020
    Date of Patent: June 7, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ching-Feng Fu, Guan-Ren Wang, Yun-Min Chang, Yu-Lien Huang
  • Patent number: 11355605
    Abstract: A method for forming a semiconductor device structure is provided. The method includes providing a substrate, a first nanostructure, and a second nanostructure. The method includes forming an isolation layer over the base. The method includes forming a gate dielectric layer over the first nanostructure, the second nanostructure, the fin, and the isolation layer. The method includes forming a gate electrode layer over the first part. The method includes forming a spacer layer. The method includes removing the second part of the gate dielectric layer and the first upper portion of the isolation layer to form a space between the fin and the spacer layer. The method includes forming a source/drain structure in the space and over the first nanostructure and the second nanostructure.
    Type: Grant
    Filed: September 22, 2020
    Date of Patent: June 7, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tung-Ying Lee, Kai-Tai Chang
  • Patent number: 11355494
    Abstract: A semiconductor device includes a substrate and a first transistor disposed on the substrate. The first transistor includes first semiconductor sheets and two first source/drain structures. The first semiconductor sheets are stacked in a vertical direction and separated from one another. Each of the first semiconductor sheets includes two first doped layers and a second doped layer disposed between the two first doped layers in the vertical direction. A conductivity type of the second doped layer is complementary to a conductivity type of each of the first doped layers. The two first source/drain structures are disposed at two opposite sides of each of the first semiconductor sheets in a horizontal direction respectively, and the two first source/drain structures are connected with the first semiconductor sheets.
    Type: Grant
    Filed: February 1, 2021
    Date of Patent: June 7, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Yu Yang, Yu-Wen Hung
  • Patent number: 11355398
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes a first and second gate electrode layers, and a dielectric feature disposed between the first and second gate electrode layers. The dielectric feature has a first surface. The structure further includes a first conductive layer disposed on the first gate electrode layer. The first conductive layer has a second surface. The structure further includes a second conductive layer disposed on the second electrode layer. The second conductive layer has a third surface, and the first, second, and third surfaces are coplanar. The structure further includes a third conductive layer disposed over the first conductive layer, a fourth conductive layer disposed over the second conductive layer, and a dielectric layer disposed on the first surface of the dielectric feature. The dielectric layer is disposed between the third conductive layer and the fourth conductive layer.
    Type: Grant
    Filed: September 21, 2020
    Date of Patent: June 7, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuan-Ting Pan, Kuo-Cheng Chiang, Shang-Wen Chang, Ching-Wei Tsai, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11355622
    Abstract: A semiconductor device and a method for forming the semiconductor device are provided. The method includes providing a substrate, sequentially forming at least two sacrificial layers on the substrate, and forming a liner layer between any adjacent sacrificial layers of the at least two sacrificial layers. The method also includes forming a hard mask layer on a top layer of the at least two sacrificial layers, and sequentially etching the hard mask layer, the at least two sacrificial layers, the liner layer, and a portion of the substrate, thereby forming a plurality of fins that are discretely arranged on a remaining portion of the substrate. The method also includes forming a dummy gate structure across the plurality of fins on the remaining portion of the substrate, and removing a portion of the at least two sacrificial layers under the dummy gate structure, thereby forming tunnels.
    Type: Grant
    Filed: September 23, 2020
    Date of Patent: June 7, 2022
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Nan Wang
  • Patent number: 11349002
    Abstract: A first source/drain structure is disposed over a substrate. A second source/drain structure is disposed over the substrate. An isolation structure is disposed between the first source/drain structure and the second source/drain structure. The first source/drain structure and a first sidewall of the isolation structure form a first interface that is substantially linear. The second source/drain structure and a second sidewall of the isolation structure form a second interface that is substantially linear. A first source/drain contact surrounds the first source/drain structure in multiple directions. A second source/drain contact surrounds the second source/drain structure in multiple directions. The isolation structure is disposed between the first source/drain contact and the second source/drain contact.
    Type: Grant
    Filed: September 25, 2020
    Date of Patent: May 31, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ta-Chun Lin, Kuan-Lin Yeh, Chun-Jun Lin, Kuo-Hua Pan, Mu-Chi Chiang, Jhon Jhy Liaw
  • Patent number: 11342326
    Abstract: Methods of performing backside etching processes on source/drain regions and gate structures of semiconductor devices and semiconductor devices formed by the same are disclosed. In an embodiment, a semiconductor device includes a first transistor structure; a first interconnect structure on a front-side of the first transistor structure; and a second interconnect structure on a backside of the first transistor structure, the second interconnect structure including a first dielectric layer on the backside of the first transistor structure; a contact extending through the first dielectric layer to a source/drain region of the first transistor structure; and first spacers along sidewalls of the contact between the contact and the first dielectric layer, sidewalls of the first spacers facing the first dielectric layer being aligned with sidewalls of the source/drain region of the first transistor structure.
    Type: Grant
    Filed: July 30, 2020
    Date of Patent: May 24, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Hsun Chiu, Ching-Wei Tsai, Yu-Xuan Huang, Cheng-Chi Chuang, Shang-Wen Chang
  • Patent number: 11342411
    Abstract: A transistor structure includes a base and a body over the base. The body comprises a semiconductor material and has a first end portion and a second end portion. A gate structure is wrapped around the body between the first end portion and the second end portion, where the gate structure includes a gate electrode and a dielectric between the gate electrode and the body. A source is in contact with the first end portion and a drain is in contact with the second end portion. A first spacer material is on opposite sides of the gate electrode and above the first end portion. A second spacer material is adjacent the gate structure and under the first end portion of the nanowire body. The second spacer material is below and in contact with a bottom surface of the source and the drain.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: May 24, 2022
    Assignee: Intel Corporation
    Inventors: William Hsu, Biswajeet Guha, Leonard Guler, Souvik Chakrabarty, Jun Sung Kang, Bruce Beattie, Tahir Ghani
  • Patent number: 11335807
    Abstract: Isolation schemes for gate-all-around (GAA) transistor devices are provided herein. In some cases, the isolation schemes include changing the semiconductor nanowires/nanoribbons in a targeted channel region between active or functional transistor devices to electrically isolate those active devices. The targeted channel region is referred to herein as a dummy channel region, as it is not used as an actual channel region for an active or functional transistor device. The semiconductor nanowires/nanoribbons in the dummy channel region can be changed by converting them to an electrical insulator and/or by adding dopant that is opposite in type relative to surrounding source/drain material (to create a p-n junction). The isolation schemes described herein enable neighboring active devices to retain strain in the nanowires/nanoribbons of their channel regions, thereby improving device performance.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: May 17, 2022
    Assignee: Intel Corporation
    Inventors: Rishabh Mehandru, Stephen M. Cea, Biswajeet Guha, Tahir Ghani, William Hsu
  • Patent number: 11329044
    Abstract: An integrated circuit device is provided. The integrated circuit device includes a fin-type active region that extends in a first direction on a substrate, a gate structure that intersects with the fin-type active region and extends in a second direction, perpendicular to the first direction, on the substrate, and a first contact structure that is disposed on the gate structure, and has a greater width at a top surface than a bottom surface thereof.
    Type: Grant
    Filed: November 18, 2020
    Date of Patent: May 10, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hong-sik Shin, Heung-sik Park, Do-haing Lee, In-keun Lee, Seung-ho Chae, Ha-young Choi
  • Patent number: 11315884
    Abstract: A method of forming alignment marks includes providing a III-V compound substrate having a device region and an alignment mark region, forming a hardmask layer having a first set of openings on the alignment mark region exposing a first surface portion of the III-V compound substrate and a second set of openings on the device region exposing a second surface portion of the III-V compound substrate, etching the exposed surface of the III-V compound substrate using the hardmask layer as a mask to form a plurality of trenches, and epitaxially regrowing a semiconductor layer in the trenches to form the alignment marks extending to a predetermined height over the processing surface of the III-V compound substrate.
    Type: Grant
    Filed: July 15, 2020
    Date of Patent: April 26, 2022
    Assignee: NEXGEN POWER SYSTEMS, INC.
    Inventors: Clifford Drowley, Ray Milano, Robert Routh, Subhash Srinivas Pidaparthi, Andrew P. Edwards
  • Patent number: 11316010
    Abstract: An integrated circuit device is provided as follows. A fin-type active region extends on a substrate in a first horizontal direction. A gate line extends on the fin-type active region in a second horizontal direction intersecting the first horizontal direction. A source/drain region is disposed in the fin-type active region at one side of the gale line. An insulating cover extends parallel to the substrate, with the gate line and the source/drain region arranged between the insulating cover and the substrate. A source/drain contact that vertically extends through the insulating cover has a first sidewall covered with the insulating cover and an end connected to the source/drain region. A fin isolation insulating unit vertically extends through the insulating cover into the fin-type active region. The source/drain region is arranged between the fin isolation insulating unit and the gate line.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: April 26, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hwi-Chan Jun, Heon-jong Shin, In-chan Hwang, Jae-ran Jang
  • Patent number: 11315979
    Abstract: According to an aspect, a display device includes: a substrate; a plurality of pixels; a first anisotropic diffusion layer and a second anisotropic diffusion layer that are layered; and a plurality of light emitting elements interposed between the first anisotropic diffusion layer and the substrate. The first anisotropic diffusion layer and the second anisotropic diffusion layer each include a high refractive index region and a low refractive index region in a mixed manner. An absolute value of a first angle formed by a boundary between the high refractive index region and the low refractive index region of the first anisotropic diffusion layer and a direction perpendicular to the substrate is different from an absolute value of a second angle formed by a boundary between the high refractive index region and the low refractive index region of the second anisotropic diffusion layer and the direction perpendicular to the substrate.
    Type: Grant
    Filed: September 11, 2020
    Date of Patent: April 26, 2022
    Assignee: Japan Display Inc.
    Inventor: Osamu Itou
  • Patent number: 11309388
    Abstract: A switchable array includes: a microstructure of interconnected units formed of graphene tubes with open spaces in the microstructure bounded by the graphene tubes; at least one JFET gate in at least one of the graphene tubes; and a control line having an end connected to the at least one JFET gate. The control line extends to a periphery of the microstructure.
    Type: Grant
    Filed: August 17, 2020
    Date of Patent: April 19, 2022
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Benjamin Stassen Cook, Luigi Colombo, Nazila Dadvand, Archana Venugopal