Patents Examined by Christine Enad
  • Patent number: 11430698
    Abstract: A method includes forming a gate dielectric on a semiconductor region, depositing a work-function layer over the gate dielectric, depositing a silicon layer over the work-function layer, and depositing a glue layer over the silicon layer. The work-function layer, the silicon layer, and the glue layer are in-situ deposited. The method further includes depositing a filling-metal over the glue layer; and performing a planarization process, wherein remaining portions of the glue layer, the silicon layer, and the work-function layer form portions of a gate electrode.
    Type: Grant
    Filed: May 19, 2020
    Date of Patent: August 30, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsin-Han Tsai, Chung-Chiang Wu, Cheng-Lung Hung, Weng Chang, Chi On Chui
  • Patent number: 11430700
    Abstract: The present disclosure describes a semiconductor device having metal boundary trench isolation with electrically conductive intermediate structures acting as a metal diffusion barrier. The semiconductor structure includes a first fin structure and a second fin structure on a substrate, an insulating layer between the first and second fin structures, a gate dielectric layer on the insulating layer and the first and second fin structures, and a first work function stack and a second work function stack on the gate dielectric layer. The first work function stack is over the first fin structure and a first portion of the insulating layer, and the second work function stack is over the second fin structure and a second portion of the insulating layer adjacent to the first portion. The semiconductor structure further includes a conductive intermediate structure on the gate dielectric layer and between the first and second work function stacks.
    Type: Grant
    Filed: June 26, 2020
    Date of Patent: August 30, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chandrashekhar Prakash Savant, Chia-Ming Tsai, Yuh-Ta Fan, Tien-Wei Yu
  • Patent number: 11430761
    Abstract: Present disclosure provides a semiconductor package, including a first substrate having a first active surface and a first trench recessed from the first active surface, a second substrate having a second trench facing the first trench, and a pathway cavity defined by the first trench and the second trench. The first trench comprises a first metal protrusion and a first insulating protrusion. A method for manufacturing the semiconductor package described herein is also disclosed.
    Type: Grant
    Filed: February 18, 2020
    Date of Patent: August 30, 2022
    Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
    Inventors: Yun-Ching Hung, Yung-Sheng Lin, Chin-Li Kao
  • Patent number: 11424346
    Abstract: The present application discloses a semiconductor device with a programmable feature such as anti-fuse and a method for fabricating the semiconductor device. The semiconductor device includes a first insulating layer including a peak portion and an upper portion positioned on the peak portion, and first conductive blocks positioned on two sides of the peak portion. A width of the peak portion is gradually decreased toward a direction opposite to the upper portion, and the first conductive blocks are spaced apart by the peak portion.
    Type: Grant
    Filed: June 30, 2020
    Date of Patent: August 23, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Chin-Ling Huang
  • Patent number: 11424363
    Abstract: A programmable charge-storage transistor comprises channel material, insulative charge-passage material, charge-storage material, a control gate, and charge-blocking material between the charge-storage material and the control gate. The charge-blocking material comprises a non-ferroelectric insulator material and a ferroelectric insulator material. Arrays of elevationally-extending strings of memory cells of memory cells are disclosed, including methods of forming such. Other embodiments, including method, are disclosed.
    Type: Grant
    Filed: February 8, 2021
    Date of Patent: August 23, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Haitao Liu, Kamal M. Karda, Albert Fayrushin
  • Patent number: 11417745
    Abstract: A semiconductor device structure and the fabrication method are provided. The semiconductor device structure includes a first channel structure and a second channel structure over a substrate. The second channel structure is longer than the first channel structure. The semiconductor device structure also includes a first gate stack over the first channel structure, and the first gate stack has a first width. The semiconductor device structure further includes a first gate spacer extending along a sidewall of the first gate stack. In addition, the semiconductor device structure includes a second gate stack over the second channel structure and a second gate spacer extending along a sidewall of the second gate stack. The second gate stack has a portion extending along the second gate spacer, and the portion of the second gate stack has a second width. Half of the first width is greater than the second width.
    Type: Grant
    Filed: July 30, 2020
    Date of Patent: August 16, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jia-Chuan You, Huan-Chieh Su, Kuo-Cheng Chiang, Chih-Hao Wang
  • Patent number: 11417748
    Abstract: A semiconductor device including a gate structure disposed on a substrate is provided. The gate structure includes a work function setting layer and a work function tuning layer sequentially disposed on substrate. The work function tuning layer is in contact with an interface surface positioned between the work function setting layer and the work function tuning layer, and a material of the interface surface is different from the work function setting layer.
    Type: Grant
    Filed: January 6, 2020
    Date of Patent: August 16, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Ting Ko, Bi-Fen Wu, Chi-On Chui
  • Patent number: 11417656
    Abstract: A semiconductor device includes a first and second channel patterns on a substrate, each of the first and second channel patterns including vertically-stacked semiconductor patterns; a first source/drain pattern connected to the first channel pattern; a second source/drain pattern connected to the second channel pattern, the first and second source/drain patterns having different conductivity types from each other; a first contact plug inserted in the first source/drain pattern, and a second contact plug inserted in the second source/drain pattern; a first interface layer interposed between the first source/drain pattern and the first contact plug; and a second interface layer interposed between the second source/drain pattern and the second contact plug, the first and second interface layers including different metallic elements from each other, a bottom portion of the second interface layer being positioned at a level that is lower than a bottom surface of a topmost one of the semiconductor patterns.
    Type: Grant
    Filed: June 11, 2020
    Date of Patent: August 16, 2022
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Yoon Tae Hwang, Sunjung Lee, Heonbok Lee, Geunwoo Kim, Wandon Kim
  • Patent number: 11410886
    Abstract: A method includes forming a first protruding semiconductor fin and a dummy fin protruding higher than top surfaces of isolation regions. The first protruding semiconductor fin is parallel to the dummy fin, forming a gate stack on a first portion of the first protruding semiconductor fin and a second portion of the dummy fin. The method further includes recessing a third portion of the first protruding semiconductor fin to form a recess, recessing an fourth portion of the dummy fin to reduce a height of the fourth portion of the dummy fin, and forming an epitaxy semiconductor region in the recess. The epitaxy semiconductor region is grown toward the dummy fin.
    Type: Grant
    Filed: July 29, 2020
    Date of Patent: August 9, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Yao Lin, Te-Yung Liu, Chih-Han Lin
  • Patent number: 11410999
    Abstract: The present disclosure relates to an integrated circuit (IC) that includes a boundary region defined between a low voltage region and a high voltage region, and a method of formation. In some embodiments, the integrated circuit comprises an isolation structure disposed in the boundary region of the substrate. A first polysilicon component is disposed over the substrate alongside the isolation structure. A boundary dielectric layer is disposed on the isolation structure. A second polysilicon component is disposed on the sacrifice dielectric layer.
    Type: Grant
    Filed: February 21, 2020
    Date of Patent: August 9, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Huan Chen, Chien-Chih Chou, Alexander Kalnitsky, Kong-Beng Thei, Ming Chyi Liu, Shih-Chung Hsiao, Jhih-Bin Chen
  • Patent number: 11404416
    Abstract: An Integrated Circuit (IC) device includes a first plurality of semiconductor layers over a substrate, a first gate dielectric layer and a first gate electrode. The first gate electrode includes a first fill metal layer and a work function metal layer disposed between the first gate dielectric layer and the first fill metal layer. The IC device further includes a second plurality of semiconductor layers over the substrate, a second gate dielectric layer and a second gate electrode. The second gate electrode includes a second fill metal layer directly contacting the second gate dielectric layer. A top surface of the second fill metal layer extends above a topmost layer of the second plurality of semiconductor layers. The material of the semiconductor layers has a midgap. The work function metal layer has a work function lower than the midgap. The fill metal layer has a work function higher than the midgap.
    Type: Grant
    Filed: December 17, 2019
    Date of Patent: August 2, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Mrunal A Khaderbad, Ziwei Fang, Keng-Chu Lin, Hsueh Wen Tsau
  • Patent number: 11404418
    Abstract: A semiconductor device manufacturing method includes forming fins in first and second regions defined on a substrate. The fins include first fin, second fin, third fin, and fourth fin. A dielectric layer is formed over fins and a work function adjustment layer is formed over dielectric layer. A hard mask is formed covering third and fourth fins. A first conductive material layer is formed over first fin and not over second fin. A second conductive material layer is formed over first and second fins. A first metal gate electrode fill material is formed over first and second fins. The hard mask covering third and fourth fins is removed. A third conductive material layer is formed over third fin and not over fourth fin. A fourth conductive material layer is formed over third and fourth fins, and a second metal gate electrode fill material is formed over third and fourth fins.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: August 2, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Chun Liao, Chun-Sheng Liang, Shu-Hui Wang, Shih-Hsun Chang, Yi-Jen Chen
  • Patent number: 11404327
    Abstract: A semiconductor device and a method of forming the same are provided. A method includes forming a sacrificial gate over an active region of a substrate. The sacrificial gate is removed to form an opening. A gate dielectric layer is formed on sidewalls and a bottom of the opening. A first work function layer is formed over the gate dielectric layer in the opening. A first protective layer is formed over the first work function layer in the opening. A first etch process is performed to widen an upper portion of the opening. The opening is filled with a conductive material.
    Type: Grant
    Filed: September 9, 2019
    Date of Patent: August 2, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shahaji B. More, Chandrashekhar Prakash Savant, Chun Hsiung Tsai
  • Patent number: 11404576
    Abstract: A semiconductor device according to the present disclosure includes a dielectric fin having a helmet layer, a gate structure disposed over a first portion of the helmet layer and extending along a direction, and a dielectric layer adjacent the gate structure and disposed over a second portion of the helmet layer. A width of the first portion along the direction is greater than a width of the second portion along the direction.
    Type: Grant
    Filed: October 13, 2020
    Date of Patent: August 2, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Shan Lu, Chung-I Yang, Kuo-Yi Chao, Wen-Hsing Hsieh, Jiun-Ming Kuo, Chih-Ching Wang, Yuan-Ching Peng
  • Patent number: 11393728
    Abstract: Methods of fabricating semiconductor devices comprise forming first active patterns vertically spaced apart on a first active fin of a substrate and second active patterns vertically spaced apart on a second active fin of the substrate that has a first region on which the first active fin is formed and a second region on which the second active fin is formed, forming a first electrode layer on the first and second active fins and the first and second active patterns, forming a first mask pattern overlapping the first electrode layer on the first region, forming a second mask pattern overlapping the first electrode layer on the second region, and using the second mask pattern as an etching mask to etch the first mask pattern and the first electrode layer on the first region to form a first electrode pattern on the second region.
    Type: Grant
    Filed: June 30, 2020
    Date of Patent: July 19, 2022
    Inventors: Yong-Ho Jeon, Hyunwoo Choi, Se-Koo Kang, Miri Joung
  • Patent number: 11393819
    Abstract: Certain aspects of the present disclosure generally relate to a semiconductor device with buried rails (e.g., buried power and ground rails). One example semiconductor device generally includes a substrate; a first rail, wherein a portion of the first rail is disposed in the substrate, the portion of the first rail having a first width greater than a second width of another portion of the first rail; a second rail, wherein a portion of the second rail is disposed in the substrate, the portion of the second rail having a third width greater than a fourth width of another portion of the second rail; and one or more transistors disposed above the substrate and between the first rail and the second rail.
    Type: Grant
    Filed: July 9, 2020
    Date of Patent: July 19, 2022
    Assignee: QUALCOMM Incorporated
    Inventors: Xia Li, Bin Yang, Haining Yang
  • Patent number: 11393817
    Abstract: The present disclosure provides an integrated circuit device comprising a semiconductor substrate having a top surface; a first source/drain feature and a second source/drain feature over the semiconductor substrate; semiconductor layers connecting the first source/drain feature and the second source/drain feature, the semiconductor layers stacked over each other along a first direction normal to the top surface; each of the semiconductor layers having a center portion of a first thickness and two end portions of a second thickness larger than the first thickness; each of the two end portions connecting the center portion and one of the first and the second source/drain features; a gate electrode engaging the center portion of each of the semiconductor layers; a first spacer over the two end portions of a topmost semiconductor layer of the semiconductor layers; and a second spacer between vertically adjacent end portions of the semiconductor layers.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: July 19, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Jhon Jhy Liaw
  • Patent number: 11393726
    Abstract: A semiconductor device includes a substrate with an isolation region surrounding a P-active region and an N-active region, a first gate electrode comprising a first metal composition over the N-active region, and a second gate electrode with a center portion over the P-active region and an endcap portion over the isolation region. The endcap portion includes a first metal composition, and the center portion includes a second metal composition different from the first metal composition, and the center portion and the endcap portion do not overlap. An inner sidewall of the endcap portion is substantially aligned with a sidewall of the isolation region.
    Type: Grant
    Filed: November 16, 2020
    Date of Patent: July 19, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming Zhu, Bao-Ru Young, Harry Hak-Lay Chuang
  • Patent number: 11387221
    Abstract: At least one array of LEDs (e.g., in a flip chip configuration) is supported by a substrate having a light extraction surface overlaid with at least one lumiphoric material. Light segregation elements registered with gaps between LEDs are configured to reduce interaction between emissions of different LEDs and/or lumiphoric material regions to reduce scattering and/or optical crosstalk, thereby preserving pixel-like resolution of the resulting emissions. Light segregation elements may be formed by mechanical sawing or etching to define grooves or recesses in a substrate, and filling the grooves or recesses with light-reflective or light-absorptive material. Light segregation elements external to a substrate may be defined by photolithographic patterning and etching of a sacrificial material, and/or by 3D printing.
    Type: Grant
    Filed: November 17, 2020
    Date of Patent: July 12, 2022
    Assignee: CREELED, INC.
    Inventors: John Edmond, Matthew Donofrio, Jesse Reiherzer, Peter Scott Andrews, Joseph G. Clark, Kevin Haberern
  • Patent number: 11386953
    Abstract: A phase-change material based resistive memory contains a resistive layer and two electrical contacts. After fabrication the memory is subjected to thermal treatment which initiates a transition toward a crystalline state favoring in this way the subsequent obtaining of a large number of resistive memory states.
    Type: Grant
    Filed: October 22, 2019
    Date of Patent: July 12, 2022
    Assignee: CYBERSWARM, INC.
    Inventors: Viorel-Georgel Dumitru, Cristina Besleaga Stan, Alin Velea, Aurelian-Catalin Galca