Patents Examined by David E Smith
  • Patent number: 11756782
    Abstract: Improved ion mirrors 30 (FIG. 3) are proposed for multi-reflecting TOF MS and electrostatic traps. Minor and controlled variation by means of arranging a localized wedge field structure 35 at the ion retarding region was found to produce major tilt of ion packets time fronts 39. Combining wedge reflecting fields with compensated deflectors is proposed for electrically controlled compensation of local and global misalignments, for improved ion injection and for reversing ion motion in the drift direction. Fine ion optical properties of methods and embodiments are verified in ion optical simulations.
    Type: Grant
    Filed: January 27, 2022
    Date of Patent: September 12, 2023
    Assignee: Micromass UK Limited
    Inventors: Anatoly Verenchikov, Mikhail Yavor
  • Patent number: 11756772
    Abstract: An ion source assembly and method has a source gas supply to provide a molecular carbon source gas to an ion source chamber. A source gas flow controller controls flow of the molecular carbon source gas to the ion source chamber. An excitation source excites the molecular carbon source gas to form carbon ions and radicals. An extraction electrode extracts the carbon ions from the ion source chamber, forming an ion beam. An oxidizing co-gas supply provides oxidizing co-gas to chamber. An oxidizing co-gas flow controller controls flow of the oxidizing co-gas to the chamber. The oxidizing co-gas decomposes and reacts with carbonaceous residues and atomic carbon forming carbon monoxide and carbon dioxide within the ion source chamber. A vacuum pump system removes the carbon monoxide and carbon dioxide, where deposition of atomic carbon within the ion source chamber is reduced and a lifetime of the ion source is increased.
    Type: Grant
    Filed: May 29, 2020
    Date of Patent: September 12, 2023
    Assignee: Axcelis Technologies, Inc.
    Inventors: David Sporleder, Neil Bassom, Neil K. Colvin, Mike Ameen, Xiao Xu
  • Patent number: 11747494
    Abstract: The present invention provides a method for using ion filtering to adjust the number of ions delivered to a substrate. The method comprising a process chamber being provided that is operatively connected to a plasma source. The substrate is provided on a substrate support that is provided within the process chamber. An electrical bias source is provided that is operatively connected to an aperture plate that is provided in the process chamber. The substrate on the substrate support is processed using a plasma generated using the plasma source. A variable bias voltage from the electrical bias source is applied to the aperture plate during the plasma processing of the substrate. The plasma processing of the substrate can further comprise exposing the substrate to a plasma time division multiplex process which alternates between deposition and etching on the substrate.
    Type: Grant
    Filed: June 22, 2020
    Date of Patent: September 5, 2023
    Assignee: Plasma-Therm LLC
    Inventors: Leslie Michael Lea, Linnell Martinez, Michael Morgan, Russell Westerman
  • Patent number: 11749492
    Abstract: An electron source has an insulating base, a pair of conductive terminals, an insulating support member, a drift isolation member, an emitter-cathode, and one or more heating elements. The conductive terminals are exposed from a first surface of the insulating base. The insulating support member extends from the first surface of the insulating base. The drift isolation member is disposed at an end of the insulating support member remote from the insulating base. The emitter-cathode is coupled to the drift isolation member. The one or more heating elements are coupled to the conductive terminals and the drift isolation member. The combination of the drift isolation member with the insulating support member can prevent stress-induced drift from impacting position of the emitter-cathode, thereby improving the mechanical stability of the electron source.
    Type: Grant
    Filed: March 14, 2022
    Date of Patent: September 5, 2023
    Assignee: FEI Company
    Inventors: Kun Liu, Gregory A. Schwind, Alan S. Bahm
  • Patent number: 11749519
    Abstract: A space-time buffer includes a plurality of discrete trapping regions and a controller. The plurality of discrete trapping regions is configured to trap ions as individual trapping regions or as combinations of trapping regions. The controller is configured to combine at least a portion of the plurality of trapping regions into a larger trap region; fill the larger trap region with a plurality of ions; split the larger trap region into individual trapping regions each containing a portion of the plurality of ions; and eject ions from the trapping regions.
    Type: Grant
    Filed: August 19, 2021
    Date of Patent: September 5, 2023
    Assignee: Thermo Finnigan LLC
    Inventors: Philip M. Remes, Michael W. Senko
  • Patent number: 11747586
    Abstract: An ablation system for ablating a material can include a laser source, a set of homogenizing optics, and a homogenizing optics adjustment device. The laser source is for generating a laser beam. The set of homogenizing optics receives the laser beam and includes a first homogenizer and a second homogenizer. The homogenizing optics adjustment device carries the homogenizing optics, the homogenizing optics adjustment device configured to selectably adjust the position of at least one of the first homogenizer and the second homogenizer in order change a size of the laser beam, with a change in size of the beam changing the fluence thereof. The ablation system can be incorporated within a laser-ablation based analytical system, where the laser-ablation based analytical system includes a spectrometer.
    Type: Grant
    Filed: February 19, 2021
    Date of Patent: September 5, 2023
    Assignee: Elemental Scientific Lasers, LLC
    Inventor: Jay N. Wilkins
  • Patent number: 11742179
    Abstract: According to one embodiment, a proximity effect correcting method includes acquiring drawing information for drawing a pattern on a substrate with irradiation of an electron beam. The method further includes acquiring surface profile information related to a surface profile of the substrate. The method further includes calculating an energy distribution of a backscattered beam to be produced by backscattering of the electron beam in the substrate on a basis of the acquired drawing information and surface profile information. The method further includes calculating a required energy amount of the electron beam on a basis of the calculated energy distribution.
    Type: Grant
    Filed: September 14, 2021
    Date of Patent: August 29, 2023
    Assignee: Kioxia Corporation
    Inventors: Yoshinori Kagawa, Shunko Magoshi
  • Patent number: 11742192
    Abstract: A method of mass spectral analysis in an analytical electrostatic trap (14) is disclosed. The electrostatic trap (14) defines an electrostatic field volume and includes trap electrodes having static and non-ramped potentials. The method comprises injecting a continuous ion beam into the electrostatic field volume.
    Type: Grant
    Filed: September 17, 2019
    Date of Patent: August 29, 2023
    Assignee: LECO Corporation
    Inventor: Anatoly N. Verenchikov
  • Patent number: 11737671
    Abstract: Method and devices are provided for assessing tissue samples from a plurality of tissue sites in a subject using molecular analysis. In certain aspects, devices of the embodiments allow for minimally invasive collection of liquid tissue samples and delivery of the samples for mass spectrometry analysis.
    Type: Grant
    Filed: November 5, 2021
    Date of Patent: August 29, 2023
    Assignee: Board of Regents, The University of Texas System
    Inventors: Livia Schiavinato Eberlin, Thomas Milner, Jialing Zhang, Noah Giese, Nitesh Katta
  • Patent number: 11735406
    Abstract: A sample support body is a sample support body for ionizing a sample, including: a substrate having an irregular porous structure formed to communicate a first surface and a second surface opposite to each other; and a conductive layer provided at least on the first surface.
    Type: Grant
    Filed: December 13, 2021
    Date of Patent: August 22, 2023
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Masahiro Kotani, Takayuki Ohmura, Takamasa Ikeda
  • Patent number: 11728123
    Abstract: The invention relates to an exposure apparatus and a method for projecting a charged particle beam onto a target. The exposure apparatus comprises a charged particle optical arrangement comprising a charged particle source for generating a charged particle beam and a charged particle blocking element and/or a current limiting element for blocking at least a part of a charged particle beam from a charged particle source. The charged particle blocking element and the current limiting element comprise a substantially flat substrate provided with an absorbing layer comprising Boron, Carbon or Beryllium. The substrate further preferably comprises one or more apertures for transmitting charged particles. The absorbing layer is arranged spaced apart from the at least one aperture.
    Type: Grant
    Filed: August 23, 2021
    Date of Patent: August 15, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Alexander Hendrik Vincent Van Veen, Derk Ferdinand Walvoort
  • Patent number: 11728140
    Abstract: An ion source has an arc chamber defining an arc chamber volume. A reservoir is coupled to the arc chamber, defining a reservoir volume. The reservoir receives a source species to define a liquid within the reservoir volume. A conduit fluidly couples the reservoir volume to the arc chamber volume. First and second openings of the conduit are open to the respective reservoir and arc chamber volume. A heat source selectively heats the reservoir to melt the source species at a predetermined temperature. A liquid control apparatus controls a first volume of the liquid within the reservoir volume to define a predetermined supply of the liquid to the arc chamber volume. The liquid control apparatus is a pressurized gas source fluidly coupled to the reservoir to supply a gas to the reservoir and provide a predetermined amount of liquid to the arc chamber.
    Type: Grant
    Filed: January 31, 2022
    Date of Patent: August 15, 2023
    Assignee: Axcelis Technologies, Inc.
    Inventors: Neil J. Bassom, Joshua Abeshaus, David Sporleder, Neil Colvin, Joseph Valinski, Michael Cristoforo, Vladimir Romanov, Pradeepa Kowrikan Subrahmnya
  • Patent number: 11728155
    Abstract: An ion optical arrangement (1) for use in a mass spectrometer comprises electrodes (11, 12, 14) comprising a multipole arrangement defining an ion optical axis, and a voltage source for providing voltages to the electrodes to produce electric fields. The ion optical arrangement is configured for producing a radio frequency electric focusing field for focusing ions on the ion optical axis. The radio frequency electric focusing field has a varying frequency so as to reduce any mass dependence of ion trajectories through the ion optical arrangement. The ion optical arrangement may further be configured for producing a static electric field in response to a DC bias voltage applied to the multipole arrangement. A superimposed varying electric field may be produced by superimposing an AC voltage upon the DC bias voltage.
    Type: Grant
    Filed: May 19, 2020
    Date of Patent: August 15, 2023
    Assignee: Thermo Fisher Scientific (Bremen) GmbH
    Inventors: Henning Wehrs, Johannes Schwieters, Gerhard Jung
  • Patent number: 11728147
    Abstract: The present invention centers upon a novel “molecular amplification spike,” which is an admixture of two components, namely, an aliquot of a quantity of a molecule, composition, compound or element of interest (an “analyte”) in its natural isotopic state and an aliquot of an isotopically enriched form of the same molecule, composition, compound or element. The molecular amplification spike contains 20% natural-abundance isotope, balance enriched isotope. The molecular amplification spike may optionally contain more than 20% natural-abundance isotope, with concomitantly reduced balance of enriched isotope. Such an admixed spike, when added to a sample prior to mass spectrometric analysis of that sample, creates new and significantly improved percentage of errors and quantification or confirmation of the absence of the molecule, composition, compound or element of interest in the sample.
    Type: Grant
    Filed: October 15, 2021
    Date of Patent: August 15, 2023
    Assignee: Definitek, Inc.
    Inventors: Mehmet Pamukcu, Howard M. Kingston
  • Patent number: 11721536
    Abstract: A single type quadrupole mass spectrometer equipped with an ion source by the ESI method, which is a small device including a vacuum pump having a relatively small evacuation speed. The internal diameter of a desolvation tube for introducing ions from an ionization chamber into a first intermediate vacuum chamber is set to 0.4 mm ?, which is large for a small mass spectrometer. The evacuation speed of a rotary pump is determined so that the product of the cross-sectional opening area of the desolvation tube and the pressure in the first intermediate vacuum chamber falls within a range of 15 to 40 mm2·Pa. This can ensure high detection sensitivity and reduce clogging of the desolvation tube due to droplets. Since the pressure in the first intermediate vacuum chamber does not need to be increased more than necessary, a small rotary pump having a small evacuation speed can be used.
    Type: Grant
    Filed: November 29, 2018
    Date of Patent: August 8, 2023
    Assignee: SHIMADZU CORPORATION
    Inventors: Manabu Ueda, Tomohito Nakano, Yuki Tanaka
  • Patent number: 11721516
    Abstract: The purpose of the present invention is to provide an emitter capable of easily and highly efficiently emitting electrons, an electron gun using same, and an electronic device. This emitter is provided with a cathode holder, and an acicular substance secured to the cathode holder. An end, to which the acicular substance is secured, of the cathode holder is bent at ? (?(°) satisfies 5<??70) that is an angle formed with respect to a cathode axis being the longitudinal direction of the cathode holder, the acicular substance is a single crystal nanowire or nanotube, and a relation L/T between the thickness T (?m) of the end of the cathode holder and a length L (?m) by which the acicular substance protrudes from the end satisfies 0.3?L/T?2.5.
    Type: Grant
    Filed: January 6, 2020
    Date of Patent: August 8, 2023
    Assignee: National Institute for Materials Science
    Inventors: Han Zhang, Jie Tang, Daisuke Fujita, Yasushi Yamauchi, Luchang Qin
  • Patent number: 11721538
    Abstract: A method includes obtaining a first mass spectrum; selecting a first peak of the first mass spectrum; isolating precursor ions in an isolation window including the first peak; fragmenting and analyzing the isolated ions to obtain a second mass spectrum; performing a real-time search of the second mass spectrum for both the target precursor and near isobaric precursors ions that are co-isolated with the target precursor in an isolation window; adding the precursor ions that produced an identification during the real-time search to the exclusion list; selecting a second peak present in the first mass spectrum and not on the exclusion list; and fragmenting and analyzing ions of the second peak to obtain a third mass spectrum.
    Type: Grant
    Filed: November 17, 2020
    Date of Patent: August 8, 2023
    Assignee: Thermo Finnigan LLC
    Inventor: Graeme C. McAlister
  • Patent number: 11717589
    Abstract: A tray disinfection devices for a security inspection system can include a frame, a disinfection channel on the frame, and a conveyor on the frame. An ultraviolet disinfection lamp is arranged in the disinfection channel. The conveyor on the frame is configured to convey a tray to pass through the disinfection channel so as to disinfect the tray through an irradiation of the ultraviolet disinfection lamp.
    Type: Grant
    Filed: December 29, 2020
    Date of Patent: August 8, 2023
    Assignees: Nuctech Company Limited, Tsinghua University
    Inventors: Li Zhang, Zhiqiang Chen, Qingping Huang, Mingzhi Hong, Yue Li, Bo Li, Minghua Qiu, Yanhua Lu
  • Patent number: 11715633
    Abstract: The invention generally relates to systems including nanoelectrospray ionization emitters in a movable array format in which the emitters can be loaded, singly or simultaneously, through their narrow ends using a novel dip and go method based on capillary action, taking up sample from an array. The sample solutions in each emitter can be electrophoretically cleaned, singly or simultaneously, by creating an inductive electric field that moves interfering ions away from the narrow end of the capillary. Subsequent to cleaning, the emitters are supplied with an inductive electric field that causes electrospray into a mass spectrometer allowing mass analysis of the contents of the emitter.
    Type: Grant
    Filed: September 1, 2021
    Date of Patent: August 1, 2023
    Assignee: Purdue Research Foundation
    Inventors: Robert Graham Cooks, Zhenwei Wei, David G. McLaren
  • Patent number: 11709149
    Abstract: Examples are directed toward systems and methods relating to collecting and analyzing samples. For example, a system includes a cold trap that directly collects a sample. The cold trap operates to serve as a collection filter while the system draws in a flow across the cold trap. A thermal heater, coupled to the cold trap, flash heats the cold trap to produce a released sample from the cold trap at a release concentration. An analyzer entrains the released sample at the release concentration into a sampling flow of the analyzer for analysis.
    Type: Grant
    Filed: September 7, 2022
    Date of Patent: July 25, 2023
    Assignee: The Government of the United States of America, as represented by the Secretary of Homeland Security
    Inventors: Barry T. Smith, John Brady, Jeffrey Barber